MICRO-EPSILON CSE2-M16 Operating Instructions Manual

CS005

CS02

CSH02

CSH02FL

CS05

CSE05

CSH05

CSH05FL

CS08

CS1

CSE1

CSH1

CSH1FL

CS1HP

CSH1.2

CSH1.2FL

CSH2FL

CSH3FL

CS2

CSH2

CSE2

CS3

CS5

CS10

CSG0.50

CSG1.00

Instruction Manual

capaNCDT 6200

Non-contact Capacitive Displacement Measuring

MICRO-EPSILON

MESSTECHNIK

GmbH & Co. KG

Königbacher Straße 15

94496 Ortenburg / Germany

Tel. +49 (0) 8542 / 168-0

Fax +49 (0) 8542 / 168-90

e-mail [email protected]

www.micro-epsilon.com

Certified acc. to DIN EN ISO 9001: 2008

capaNCDT 6200

Contents

1. Safety ........................................................................................................................................ 7

1.1 Symbols Used ................................................................................................................................................. 7

1.2 Warnings .......................................................................................................................................................... 7

1.3 Notes on CE Identification ............................................................................................................................... 8

1.4 Proper Use ....................................................................................................................................................... 9

1.5 Proper Environment ......................................................................................................................................... 9

2. Functional Principle, Technical Data .................................................................................... 10

2.1 Measuring Principle ....................................................................................................................................... 10

2.2 Structure ........................................................................................................................................................ 11

2.2.1 Sensors ......................................................................................................................................... 12

2.2.2 Sensor Cable ................................................................................................................................ 14

2.2.3 Controller ...................................................................................................................................... 15

2.3 Technical Data ............................................................................................................................................... 17

2.4 Options .......................................................................................................................................................... 18

3. Delivery .................................................................................................................................. 20

3.1 Unpacking ...................................................................................................................................................... 20

3.2 Storage .......................................................................................................................................................... 20

4. Installation and Assembly ...................................................................................................... 21

4.1 Precautionary Measures ................................................................................................................................ 21

4.2 Sensor ............................................................................................................................................................ 21

4.2.1 Radial Point Clamping with Grub Screw, Cylindric Sensors ....................................................... 21

4.2.2 Circumferential Clamping, Cylindric Sensors .............................................................................. 22

4.2.3 Flat Sensors .................................................................................................................................. 22

4.2.4 Dimensional Drawings Sensors ................................................................................................... 23

4.3 Sensor Cable ................................................................................................................................................. 29

4.4 Controller ....................................................................................................................................................... 32

4.4.1 Basic Unit, Demodulator Module ................................................................................................. 32

4.4.2 Housing Cover .............................................................................................................................. 33

4.5 Insert Demodulator Module ........................................................................................................................... 34

4.6 Ground Connection, Earthing ....................................................................................................................... 37

capaNCDT 6200

4.7 Electrical Connections ................................................................................................................................... 38

4.7.1 Connectivity Options ................................................................................................................... 38

4.7.2 Pin Assignment Supply, Trigger ................................................................................................... 39

4.7.3 Pin Assignment Analog Output .................................................................................................... 39

4.7.4 Pin Assignment Synchronization ................................................................................................. 40

5. Operation ................................................................................................................................ 42

5.1 Starting Up ..................................................................................................................................................... 42

5.2 Operating or Display Elements ..................................................................................................................... 42

5.2.1 LED‘s ............................................................................................................................................ 42

5.2.2 Poti ................................................................................................................................................ 43

5.2.3 Change Ethernet / EtherCAT ........................................................................................................ 44

5.3 Changing Limit Frequency ............................................................................................................................ 44

5.4 Triggering ....................................................................................................................................................... 45

5.5 Measurement Averaging ............................................................................................................................... 47

5.5.1 Introduction .................................................................................................................................. 47

5.5.2 Moving Average ............................................................................................................................ 47

5.5.3 Arithmetic Average Value ............................................................................................................. 48

5.5.4 Median .......................................................................................................................................... 48

5.5.5 Dynamic Noise Rejection ............................................................................................................. 48

6. Ethernet Interface ................................................................................................................... 49

6.1 Hardware, Interface ....................................................................................................................................... 49

6.2 Data Format of Measuring Values ................................................................................................................. 53

6.3 Settings .......................................................................................................................................................... 54

6.4 Commands .................................................................................................................................................... 57

6.4.1 Data Rate (STI) ............................................................................................................................. 57

6.4.2 Trigger Mode (TRG) ...................................................................................................................... 59

6.4.3 Get Measured Data (GMD)........................................................................................................... 59

6.4.4 Filter, Averaging Type (AVT) ......................................................................................................... 60

6.4.5 Filter, Averaging Number (AVN) ................................................................................................... 60

6.4.6 Channel Status (CHS) .................................................................................................................. 61

6.4.7 Mode of Linearization (LIN) .......................................................................................................... 61

6.4.8 Set Linearization Point (SLP) ........................................................................................................ 62

6.4.9 Get Linearization Point (GLP) ....................................................................................................... 63

6.4.10 Status (STS).................................................................................................................................. 63

6.4.11 Version (VER) ............................................................................................................................... 64

6.4.12 Set Mathematic Function (SMF) ................................................................................................... 64

6.4.13 Get Mathematic Function (GMF) .................................................................................................. 66

capaNCDT 6200

6.4.14 Clear Mathematic Function (CMF) ............................................................................................... 66

6.4.15 Ethernet Settings (IPS) ................................................................................................................. 67

6.4.16 Change between Ethernet and EtherCAT (IFC = Interface) ....................................................... 67

6.4.17 Query Data Port (GDP) ................................................................................................................. 68

6.4.18 Set Data Port (SDP) ...................................................................................................................... 68

6.4.19 Access Channel Information (CHI)............................................................................................... 68

6.4.20 Access Controller Information (COI) ............................................................................................ 69

6.4.21 Login for Web Interface (LGI) ....................................................................................................... 69

6.4.22 Logout for Web Interface (LGO) ................................................................................................... 69

6.4.23 Change Password (PWD)............................................................................................................. 70

6.4.24 Change Language for the Web Interface (LNG) .......................................................................... 70

6.4.25 Write Measuring Range Information in Channel (MRA) ............................................................... 70

6.4.26 Set Analog Filter (ALP) ................................................................................................................. 71

6.4.27 Default Messages ........................................................................................................................ 71

6.5 Operation Using Ethernet .............................................................................................................................. 72

6.5.1 Requirements ............................................................................................................................... 72

6.5.2 Access via Web Interface ............................................................................................................. 74

6.5.3 Measuring Ranges ....................................................................................................................... 76

6.5.4 Linearization ................................................................................................................................. 77

6.5.5 Math Functions ............................................................................................................................. 79

6.5.6 Trigger Mode ................................................................................................................................ 79

6.5.7 Data Rate ...................................................................................................................................... 79

6.5.8 Filter, Averaging ............................................................................................................................ 80

6.5.9 Analog Low Pass Filter ................................................................................................................. 80

6.5.10 Digital Interfaces ........................................................................................................................... 80

6.6 Firmware Update ........................................................................................................................................... 81

7. EtherCAT Interface ................................................................................................................. 82

7.1 Introduction .................................................................................................................................................... 82

7.2 Change Interface ........................................................................................................................................... 82

8. Measurement .......................................................................................................................... 83

9. Operation and Maintenance .................................................................................................. 84

10. Warranty .................................................................................................................................. 85

11. Decommissioning, Disposal .................................................................................................. 85

capaNCDT 6200

Appendix ................................................................................................................................................ 86

A 1 Accessories, Service .............................................................................................................. 86

A 1.1 Conversion Kit ................................................................................................................................................ 86

A 1.3 PC6200-3/4 .................................................................................................................................................... 88

A 1.4 Optional Accessories ..................................................................................................................................... 88

A 1.5 Service ........................................................................................................................................................... 91

A 2 Factory Setting ....................................................................................................................... 92

A 3 Tilt Angle Influence on the Capacitive Sensor ..................................................................... 93

A 4 Measurement on Narrow Targets .......................................................................................... 94

A 5 Measurements on Balls and Shafts ...................................................................................... 95

A 6 EtherCAT Documentation ...................................................................................................... 96

A 6.1 Preamble ........................................................................................................................................................ 96

A 6.1.1 Structure of EtherCAT®-Frames .................................................................................................. 96

A 6.1.2 EtherCAT® Services ..................................................................................................................... 97

A 6.1.3 Addressing and FMMUs ............................................................................................................... 98

A 6.1.4 Sync Manager .............................................................................................................................. 98

A 6.1.5 EtherCAT State Machine .............................................................................................................. 99

A 6.1.6 CANopen over EtherCAT............................................................................................................ 100

A 6.1.7 Process Data PDO Mapping ...................................................................................................... 100

A 6.1.8 Service Data SDO Service .......................................................................................................... 101

A 6.2 CoE – Object Directory ................................................................................................................................ 101

A 6.2.1 Communication Specific Standard Objects (CiA DS-301) ........................................................ 101

A 6.2.2 Manufacturer Specific Objects ................................................................................................... 104

A 6.3 Measurement Data Format .......................................................................................................................... 107

A 6.4 EtherCAT Configuration with the Beckhoff TwinCAT©-Manager ................................................................ 108

Page 7

Safety

capaNCDT 6200

1. Safety

Knowledge of the operating instructions is a prerequisite for equipment operation.

1.1 Symbols Used

The following symbols are used in this instruction manual:

Indicates a hazardous situation which, if not avoided, may result in minor or moder-

ate injury.

Indicates a situation which, if not avoided, may lead to property damage.

Indicates a user action.

iIndicates a user tip.

1.2 Warnings

Disconnect the power supply before touching the sensor surface.

> Danger of injury

> Static discharge

Connect the power supply and the display/output device in accordance with the safety regulations for electri-

cal equipment.

> Danger of injury

> Damage to or destruction of the sensor and/or controller

Avoid shock and vibration to the sensor and controller.

> Damage to or destruction of the sensor and/or controller

The power supply may not exceed the specified limits.

> Damage to or destruction of the sensor and/or controller

Page 8

Safety

capaNCDT 6200

Protect the sensor cable against damage

> Destruction of the sensor

> Failure of the measuring device

1.3 Notes on CE Identification

The following applies to the capaNCDT 6200:

- EU directive 2014/30/EU

- EU directive 2011/65/EU, “RoHS“ Category 9

Products which carry the CE mark satisfy the requirements of the quoted EU directives and the European

standards (EN) listed therein. The EC declaration of conformity is kept available according to EC regulation,

article 10 by the authorities responsible at

MICRO-EPSILON Messtechnik GmbH & Co. KG

Königbacher Straße 15

94496 Ortenburg / Germany

The system is designed for use in industry and satisfies the requirements.

Page 9

Safety

capaNCDT 6200

1.4 Proper Use

- The capaNCDT 6200 measuring system is designed for use in industrial areas. It is used for

displacement, distance, thickness and movement measurement

position measuring of parts or machine components

- The system may only be operated within the limits specified in the technical data, see Chap. 2.3.

The system should only be used in such a way that in case of malfunction or failure personnel or ma-

chinery are not endangered.

Additional precautions for safety and damage prevention must be taken for safety-related applications.

1.5 Proper Environment

- Protection class: IP 40

- Operating temperature:

Sensor: -50 ... +200 °C (-58 to +392 °F) 1

Sensor cable: -100 ... +200 C (-58 to +392 °F) (CCmx and CCmx/90)

-20 ... +80 °C (-58 to +392 °F) (CCgx and CCgx/90 - permanently)

-20 ... +100 °C (-58 to +392 °F) (CCgx and CCgx/90 - 10,000 h)

Controller: +10 ... +60 °C (+50 to +140 °F)

- Humidity: 5 - 95 % (non-condensing)

- Ambient pressure: Atmospheric pressure

- Storage temperature:

Sensor: -50 ... +200 °C (-58 to +392 °F) 2

Sensor cable: -50 ... +200 °C (-58 to +392 °F) (CCmx and CCmx/90)

-50 ... +80 °C (-58 to +176 °F) (CCgx and CCgx/90)

Controller: -10 ... +75 °C (+14 to +167 °F)

- The space between the sensor surface and the target must have an unvarying dielectric constant.

- The space between the sensor surface and the target may not be contaminated (for example water,

rubbed-off parts, dust, etc.)

1) An operating temperature of -50 ... +100 °C (-58 to +212 °F) applies for the sensors CSG0.50-CA and

CSG1.00-CA -50

2) A storage temperature of -50 ... +100 °C (-58 to +212 °F) applies for the sensors CSG0.50-CA and

CSG1.00-CA -50

Page 10

Functional Principle, Technical Data

capaNCDT 6200

2. Functional Principle, Technical Data

2.1 Measuring Principle

The principle of capacitive distance measurement with the capaNCDT system is based on the principle of the

parallel plate capacitor. For conductive targets, the sensor and the target opposite form the two plate elec-

trodes.

If a constant AC current flows through the sensor capacitor, the amplitude of the AC voltage at the sensor is

proportional to the distance between the capacitor electrodes. The AC voltage is demodulated, amplified and

output as an analog signal.

The capaNCDT system evaluates the reactance XC of the plate capacitor which changes strictly in proportion

to the distance.

X = ; capacitance C =  *  *

c

1

jC

area

distance

r o

i A small target and bent (uneven) surfaces cause a non-linear characteristic.

This theoretical relationship is realized almost ideally in

practice by designing the sensors as guard ring capaci-

tors.

The linear characteristic of the measuring signal is

achieved for electrically conductive target materials

(metals) without any additional electronic linearization.

Slight changes in the conductivity or magnetic proper-

ties do not affect the sensitivity or linearity.

Electrical conductor

Ground

Screening electrode

Measuring electrode

Fig. 1 Functional principle of the guard ring

capacitor

Page 11

Functional Principle, Technical Data

capaNCDT 6200

2.2 Structure

The non-contact, multi-channel measuring system, installed in an aluminum housing, consists of:

- A basic module DT 6220 or DT 6230

- A demodulator module DL 6220 or DL 6230, each with integrated preamplifier per sensor

- Sensor

- Sensor cable

- Power supply cable

- Ethernet cable

- Signal output cable

The modular assembly allows to join up to 4 channels (module system).

Micro controller

Demodulator

Preamplifier

A/D

converter

Voltage

0..10 V

Current

4..20mA

Sensor

Output circuit

Analog filter

digital

switchable

Zero point

adjustable

poti

Demodulator

Preamplifier

A/D

converter

Voltage

0..10 V

Current

4..20mA

Sensor

Output circuit

Analog filter

digital

switchable

Zero point

adjustable

poti

DT 6220 / 6230 DL 6220 DL 6220

Oscillator

Voltage

conditioning

Trigger

Supply

12 ... 36 V

Ethernet

EtherCAT

Fig. 2 Block diagram capaNCDT 6200

Page 12

Functional Principle, Technical Data

capaNCDT 6200

2.2.1 Sensors

For this measurement system, several sensors can be used.

In order to obtain accurate measuring results, keep the surface of the sensor clean and free from dam-

age.

The capacitive measuring process is area-related. A minimum area (see table) is required depending on the

sensor model and measuring range. In the case of insulators the dielectric constant and the target thickness

also play an important role.

Sensors for electrical conducting targets (metals)

Sensor model Measuring range Min. target diameter

CS005 0.05 mm 3 mm

CS02 0.2 mm 5 mm

CSH02 0.2 mm 7 mm

CSH02FL 0.2 mm 7 mm

CS05 0.5 mm 7 mm

CSE05 0.5 mm 6 mm

CSH05 0.5 mm 7 mm

CSH05FL 0.5 mm 7 mm

CS08 0.8 mm 9 mm

CS1 1 mm 9 mm

CSE1 1 mm 8 mm

CSH1 1 mm 11 mm

CSH1FL 1 mm 11 mm

CS1HP 1 mm 9 mm

CSH1,2 1.2 mm 11 mm

CSH1.FL 1.2 mm 11 mm

Page 13

Functional Principle, Technical Data

capaNCDT 6200

Sensor model Measuring range Min. target diameter

CSH2FL 2 mm 17 mm

CS2 2 mm 17 mm

CSH2 2 mm 17 mm

CSE2 2 mm 14 mm

CS3 3 mm 27 mm

CSH3FL 3 mm 24 mm

CS5 5 mm 37 mm

CS10 10 mm 57 mm

CSG0.50 0.5 mm approx. 7 x 8 mm

CSG1.00 1.00 mm approx. 8 x 9 mm

Page 14

Functional Principle, Technical Data

capaNCDT 6200

2.2.2 Sensor Cable

Sensor and controller are connected by a special, double screened sensor cable.

Do not shorten or lengthen these special cables.

Usually, a damaged cable can not be repaired.

Switch off the device when plugging and removing connectors.

Do not crush the sensor cable.

Do not modify to the sensor cable.

> Lost of functionality

Model Cable length Cable ø 2 axial

connector

1x axial

+ 1x 90 0

For sensors Min. bending radius

once permanently

CCgxC 2/4 or 6 m 3.1 mm •0.05 - 0.8 mm

10 mm 22 mm

CCgxC/90 2/4 or 6 m 3.1 mm •0.05 - 0.8 mm

CCgxB 2/4 or 6 m 3.1 mm •1 ... 10 mm

CCgxB/90 2/4 or 6 m 3.1 mm •1 ... 10 mm

CCmxC 1.4/2.8 or 4.2 m 2.1 mm •0.05 - 0.8 mm

7 mm 15 mm

CCmxC/90 1.4/2.8 or 4.2 m 2.1 mm •0.05 - 0.8 mm

CCmxB 1.4/2.8 or 4.2 m 2.1 mm •1 ... 10 mm

CCmxB/90 1.4/2.8 or 4.2 m 2.1 mm •1 ... 10 mm

The sensors of type CSH have integrated a 1.4 long sensor cable. Cable lengths of 2.8 m are available too if

required.

Other cable lengths are also available on request.

The sensor model CSE1 (measuring range 1 mm) has the connector type C.

Page 15

Functional Principle, Technical Data

capaNCDT 6200

2.2.3 Controller

The capaNCDT 6200 Multi-channel measuring system consists of a basic module DT62xx and one up to four

demodulator modules DL62xx, according to requirements. The components are stored in aluminum hous-

ings.

Demodulator module(s)

Basic module Demodulator module(s)

Basic module

Fig. 3 Front view basic module DT6220 with

2 demodulator modules DL6220

Fig. 4 Front view basic module DT6230 with

demodulator module DL6230 and DL6220

Basic module DT62xx

The basic module consists of the units voltage conditioning, oscillator and digital unit.

The voltage conditioning generates all required internal voltages from the supply voltage, both for the basic

module as well as the connected demodulator modules. The oscillator supplies the demodulator modules

with constant frequency and amplitude-stable alternating current. The frequency is 31 kHz. The digital unit

controls the A/D converter of the demodulator modules and measures the actual measuring values. The

measuring values can be read out via the Ethernet interface in digital form, see Chap. 6.

Page 16

Functional Principle, Technical Data

capaNCDT 6200

Demodulator module DL62xx

The demodulator module DL62xx consists of an internal preamplifier, demodulator, output stage and A/D

converter. The internal preamplifier generates the distance dependent measuring signal and amplifies it.

Demodulator and output stage convert the measuring signal in a standardized voltage and current signal.

The measuring values can be processed digitally with the help of the A/D converter.

The trim potentiometer zero allows a special zero adjustment of the analog output signals, see Fig. 3.

i Output voltage can achieve up to 15 VDC, if the sensor is disconnected respectively exceedance of

measuring range.

Page 17

Functional Principle, Technical Data

capaNCDT 6200

2.3 Technical Data

Controller type DT62x0 with DL6220 DT62x0 with DL6230

Resolution static 0.004 % FSO 0.0005 % FSO

Resolution dynamic 0.02 % FSO (5 kHz) 0.005 % FSO (5 kHz)

Bandwidth 5 kHz (-3dB) 5 kHz (-3dB)

Bandwidth adjustable to 20 Hz to 20 Hz

Data rate output digital max. 3.906 kSa/s max. 3.906 kSa/s

Linearity (typical) ≤ ±0,05 % d.M. ≤ ±0,025 % d.M.

Max. sensitivity deviation ≤ ±0.1 % FSO ≤ ±0.1 % FSO

Long term stability ≤ 0.02 % FSO / month ≤ 0.02 % FSO / month

Synchronous operation supported

(multiple control units) no no

Isolator measurement no no

Temperature stability 200 ppm 200 ppm

Operating temperature, sensor -50 ... +200 °C (-58 ... +392 °F) -50 ... +200 °C (-58 ... +392 °F)

Operating temperature, controller +10 … +60 °C (+50 ... +140 °F) +10 … +60 °C (+50 ... +140 °F)

Storage temperature -10 … +75 °C (+14 ... +167 °F) -10 … +75 °C (+14 ... +167 °F)

Supply DT6220: 24 VDC (12 … 36 VDC) 24 VDC (15 … 36 VDC)

DT6230: 24 VDC (15 ... 36 V)

Power consumption at

24 VDC

DT6220 3.1 W (typical)

DT6230 3.8 W (typical)

per DL6220 1.8 W (typical); 2.0 W (max.)

per DL6230 1.9 W (typical); 2.2 W (max.)

Output

0 … 10 V (short-circuit proof) 0 … 10 V (short-circuit proof)

4 … 20 mA (load max. 500 Ohm) 4 … 20 mA (load max. 500 Ohm)

Ethernet Ethernet

Page 18

Functional Principle, Technical Data

capaNCDT 6200

Controller type DT62x0 with DL6220 DT62x0 with DL6230

Sensors all sensors suitable all sensors suitable

Sensor cable standard CCm1.4x; CCg2.0x CCm1.4x; CCg2.0x

Sensor cable (matched) ≤ 6 m (with CCgxx) ≤ 4.2 m (with CCmxx) ≤ 6 m (with CCgxx) ≤ 4.2 m (with CCmxx)

Trigger TTL, 5 V

FSO = Full Scale Output

2.4 Options

Article number Designation Description Suitable for articles

2303018

DL6220

2303022

DL6220/ECL2

2303023

DL6220/ECL3

2303029

DL6220/LC

2982044 LC DL62x0

digital

Special calibration of linearity on digital

output ○ ○ ○ •

2982045 LC DL62x0

analog

Special calibration on linearity on analog

output ○ ○ ○ •

2982046 ECL2 DL6220 Special tuning for 2 times sensor cable

length -•-•

2982047 ECL3 DL6220 Special tuning for 3 times sensor cable

length - - • •

2982048 EMR2 DL6220 Extended measuring range (factor: 2) ○ ○ ○ •

2982049 RMR1/2 DL6220 Shortened measuring range (factor: 1/2) ○ ○ ○ •

Page 19

Functional Principle, Technical Data

capaNCDT 6200

Article number Designation Description Suitable for articles

2303019

DL6230

2303024

DL6230/ECL2

2303025

DL6230/ECL3

2303030

DL6230/LC

2982044 LC DL62x0

digital

Special calibration of linearity on digital

output ○ ○ ○ •

2982045 LC DL62x0

analog

Special calibration of linearity on analog

output ○ ○ ○ •

2982054 ECL2 DL6230 Special tuning for 2 times sensor cable

length -•-•

2982055 ECL3 DL6230 Special tuning for 3 times sensor cable

length - - • •

2982051 EMR2 DL6230 Extended measuring range (factor: 2) ○ ○ ○ •

2982052 EMR3 DL6230 Extended measuring range (factor: 3) ○ ○ ○ •

2982053 RMR1/2 DL6230 Shortened measuring range (factor: 1/2) ○ ○ ○ •

• Articles already contain the option

○ Option available

- No option available

Page 20

Delivery

capaNCDT 6200

3. Delivery

3.1 Unpacking

1 Basic module DT62x0 with 1 - 4 demodulator modules DL62x0

1 Power supply and trigger cable PC6200-3/4, 3 m long, see Chap. A 1.3

1 Ethernet cable, 3 m long

1 CD (contains instruction manual and software)

1 Conversion kit (Springs for mounting on DIN-rail, mounting plates for wall fastening, threaded rods in differ-

ent lengths), see Chap. A 1.1.

Optional accessories:

1 Sensor

1 Sensor cable with connector

Signal output cable, synchronization cable, see Chap. A 1.4

Remove the parts of the system carefully from the packaging and transport them in such a way that they

are not damaged.

Check for completeness and shipping damages immediately after unpacking. In case of damage or

missing parts, please contact the manufacturer or supplier.

3.2 Storage

- Storage temperature:

Sensor: -50 ... +200 °C (-58 to +392 °F) 1

Sensor cable: -50 ... +200 °C (-58 to +392 °F) (CCmx and CCmx/90)

-50 ... +80 °C (-57 to +176 °F) (CCgx and CCgx/90)

Controller: -10 ... +75 °C (+14 to +167 °F)

- Humidity: 5 - 95 % RH (non-condensing)

1) A storage temperature of -50 ... +100 °C (-58 to +212 °F) applies for the sensors CSG0.50-CA and

CSG1.00-CA -50

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MICRO-EPSILON CSE2-M16 Operating Instructions Manual

MICRO-EPSILON CSE2-M16 Operating Instructions Manual

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