Brooks SLA MFCs / SLA MFCs User manual

Brand
Brooks
Model
SLA MFCs / SLA MFCs
Type
User manual

This manual is also suitable for

X-DPT-PROFINET-SLA-Series-RevB-MFC-eng
December 2019
SLA5800/Mf IP-66 Series Elastomer
Sealed, Thermal Mass Flow
Controllers & Meters
PROFINET
TM
Supplemental Manual
2
ESSENTIAL INSTRUCTIONS
Read this page before proceeding
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Instrument.
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Comments:
II
Contents
3
Section 1 General Information
General Information ......................................................................................................................................... 6
Section 2 Definition of Terms
Definition of Terms .................................................................................................................................................. 7
Section 3 Before Starting
Before Starting ................................................................................................................................................. 8
Background & Assumptions ............................................................................................................................. 8
Compliance ...................................................................................................................................................... 8
Notations .......................................................................................................................................................... 9
Numbers ........................................................................................................................................................... 9
EPATHS ........................................................................................................................................................... 9
Section 4 Quick Start
Physical Interfaces ......................................................................................................................................... 10
Power Supply ............................................................................................................................................ 11-12
Network .......................................................................................................................................................... 12
MOD LED ....................................................................................................................................................... 13
NET LED ........................................................................................................................................................ 14
TC/IP Network Configuration ......................................................................................................................... 14
Module/Slot Configuration .............................................................................................................................. 15
Section 5 Configuration
Commonly Configured Parameters ................................................................................................................ 17
Data Units ....................................................................................................................................................... 17
Safe Modes .................................................................................................................................................... 18
Valve Safe Mode ............................................................................................................................................ 18
Process Gas Page Configuration ................................................................................................................... 19
Module: I/O Data ............................................................................................................................................ 20
Module: Device Management ........................................................................................................................ 21
Module: Flow Meter ........................................................................................................................................ 21
Module: Flow Controller ................................................................................................................................. 22
Module: Valve Drive ....................................................................................................................................... 22
Module: Process Gas ..................................................................................................................................... 23
Module: Status ................................................................................................................................................ 23
Section 6 Detailed Configuration
Overview ........................................................................................................................................................ 24
Device Management Module [0x01] ............................................................................................................... 24
Parameters ................................................................................................................................................ 24-26
Flow Meter Module [0x02] .............................................................................................................................. 27
Parameters ................................................................................................................................................ 27-32
Section 6 Detailed Configuration
Assembly Module [0x4] .................................................................................................................................33
Parameters ...................................................................................................................................................33-35
Flow Controller Module [0x03] ......................................................................................................................36
Parameters ...................................................................................................................................................36-37
Contents
4
Process Gas Module [0x6] ............................................................................................................................38
Parameters ...................................................................................................................................................38
Temperature Meter Module [0x05] ...............................................................................................................39
Parameters ...................................................................................................................................................39
Status Module [0x07] ....................................................................................................................................40
Parameters ...................................................................................................................................................40-42
Section 7 Status
Device Status .................................................................................................................................................43
Bit 0: Device is Executing ..............................................................................................................................43
Bit 1: Flow Reading Valid ...............................................................................................................................44
Bit 2: Temperature Reading Valid ..................................................................................................................44
Bit 3: Device is Zeroing ..................................................................................................................................44
Bit 4: Zero Recommended .............................................................................................................................45
Condition 1: Zero Warn Time Expired ............................................................................................................45
Condition 2: Zero Out of Tolerance ................................................................................................................45
Bit 5: Zero Operation Inhibit .................................................................................................................................. 46
Bit 6: Valve Override ......................................................................................................................................46
Bit 7: Control Override ....................................................................................................................................47
Bit 8: Service Error .........................................................................................................................................47
Bit 9: Device Alarm ........................................................................................................................................47
Bit 10: Device Warning ..................................................................................................................................47
Bit 11: Zero Button Disabled ..........................................................................................................................48
Bit 12: Control Ramping .................................................................................................................................48
Warnings ........................................................................................................................................................49
Bit 0: Low Flow Warning ................................................................................................................................49
Bit 1: High Flow Warning ...............................................................................................................................49
Bit 3: Choked Flow Warning ..........................................................................................................................50
Bit 4: Excessive Zero Drift Warning ...............................................................................................................51
Bit 5: Bad Zero Warning .................................................................................................................................52
Bit 8: Valve High Warning ..............................................................................................................................53
Bit 9: Valve Low Warning ...............................................................................................................................53
Bit 10: Valve Control Warning ........................................................................................................................53
Bit 11: Setpoint Deviation ...............................................................................................................................54
Bit 13: Setpoint Over range ............................................................................................................................55
Bit 14: Setpoint Limited ..................................................................................................................................56
Bit 17: Calibration Due ...................................................................................................................................57
Bit 18: Totalizer Overflow ...............................................................................................................................57
Bit 19: Overhaul Due ......................................................................................................................................57
Section 7 Status
Bit 24: High Temperature Warning ...............................................................................................................58
Bit 25: Low Temperature ...............................................................................................................................58
Bit 26: Supply Volts High ..............................................................................................................................58
Bit 27: Supply Volts Low ...............................................................................................................................59
Alarms .......................................................................................................................................................... 60
Bit 0: Low Flow Alarm ...................................................................................................................................60
Bit 1: High Flow Alarm ..................................................................................................................................60
Bit 2: No Flow Alarm .....................................................................................................................................61
Bit 3: Choked Flow Alarm .............................................................................................................................62
Bit 15: Invalid Process Gas Page Selected ..................................................................................................63
Bit 23: Using Backup NV Memory ................................................................................................................63
Bit 24: Temperature Sensor Fail ...................................................................................................................63
Contents
5
Errors ............................................................................................................................................................64
Bit 2: Back Streaming Error ..........................................................................................................................64
Bit 18: Internal Communication Error ............................................................................................................64
Bit 23: NV Memory Fail .................................................................................................................................64
Typical Status High/Low Processing.............................................................................................................65
Section 8 Troubleshooting
Troubleshooting .......................................................................................................................................................... 66
Section 9 Appendix
Appendix A – ...............................................................................................................................................67
Appendix B- Data Type Definitions .............................................................................................................68
Appendix C- Data Units ..............................................................................................................................69-70
Section 10 Glossary
Glossary .................................................................................................................................................................... 71
Section 1 General Information
6
Section 1: General Information
Many applications of Flow Controllers/Meters are moving to increase the
use of automation. Automation comes in many forms: PLC’s
(Programmable Logic Controllers, like those from Allen/Bradley, DCS’s
(Distributed Control Systems, such as Emerson’s DeltaV), PC-based
solutions (National Instruments LabVIEW™), and Ethernet based field
buses. Digital communications from these varied systems and the devices
they measure and control, are a very effective means of not only
accomplishing more effective and rapid system integration, but also
providing greatly improved system diagnostics and maintainability.
PROFINET™ is an Ethernet-based communications system for industrial
automation applications built upon the IEEE 802 standards for Ethernet
and is standardized in IEC 61158 and IEC 61784. PROFINET
incorporates elements of TCP/IP communications standards and has
defined its own messaging protocols to minimize latencies TCP/IP
protocols introduce. This solution leverages the power of the internet
and enterprise connectivity, combined with the functionality and
comprehensive suite of messages and services for manufacturing
automation applications. The PROFINET™ interface is now available on
SLA Series.
Section 2 Definition of Terms
7
Section 2: Definition of Terms
Table 2-1 Definitions
Abbreviation
Description
Byte
CRC
PNET
GSDML
LSB
MAC
Master
MFC/MFM
MSB
MTU
NIC
NV
OSI Model
RO
RT
RW
Slave
Stack
TCP/IP
Topology
WO
Section 3 Before Starting
8
Section 3: Before Starting
Background & Assumptions
This manual is a supplement to the SLA Series 5800 and MF/IP-66
Mass Flow Controller Installation and Operation Manuals. It is
recommended that the owner read the Operations Manual first before
continuing with this supplement.
This manual assumes the user has a basic knowledge and understanding
of the PROFINET™ protocol, its topology and its method of logically
accessing the data or parameters contained within a device. This manual
also assumes basic knowledge and understanding regarding the operation
of Mass Flow Controllers or Mass Flow Meters. This manual is not
intended to be a replacement to the IEC specifications, which is still the
authoritative definition and description of PROFINET™ communications. It
is recommended, but not required for the purposes of this manual, that the
user obtain relevant specification and application information for
PROFINET from Profi-International (PI) at http://www.profibus.com.
This manual does not make any assumptions about any manufacturer
of equipment or custom software used by the user to communicate with
the Brooks Instrument device but assumes the user has thorough
understanding of such equipment and any configuration software.
Compliance
The SLA Series Mass Flow Controller (MFC) or Mass Flow Meter
(MFM) is a conformance class B PROFINET IO device and conforms
to PI specifications.
Section 3 Before Starting
9
Notations
This section details notations and conventions used throughout the
manual. It is recommended that the reader become very familiar with
these conventions.
Hypertext links are used in the manual to assist in navigating.
A glossary is provided for reference in Section: 10 Glossary to aid in
reviewing and/or to define any unfamiliar terms.
Numbers
EPATHS
Numeric values used throughout this manual will be clearly denoted as
to the base numeric system it represents. All hexadecimal numbers
(base 16) will be prefixed with a 0x, like 0xA4. All binary numbers (base
2) will be suffixed with a b, like 1001b. All other numbers not annotated
this way will be assumed decimal (base 10).
EPATH’s will be denoted within brackets [] or braces {}, like [0x31, 1, 3],
{0x31-1-3} which represents, left to right, the Slot (hexadecimal or
decimal), Subslot (decimal), and Index (decimal)
Section 4 Quick Start
10
Section 4: Quick Start
This section assumes that the owner of the Digital Series device has a
fully operational and trouble-free communications network with
appropriate power supplies. This section also assumes that a master
device or application is connected to the network, capable of cyclic I/O
and acyclic message communications. Both types of data
communication modes are supported by the SLA
Series PROFINET
TM
device.
Physical Interfaces
The available physical interfaces on the PROFINET
TM
SLA5800 Device are listed
below:
• 5 pin M8 threaded male connector for power and Analog I/O,
indicated by pwr.
• In and Out ports with RJ-45 connectors.
• 2.5mm female jack for RS485 diagnostic port indicated by
‘DIAG’, refer to the SLA Series Installation and Operation
Manual for more details.
The available physical interfaces on the PROFINET
TM
SLAMF/IP-66 Device are
listed below:
• 5 pin M8 threaded Male (Nano Change) Connector for
power and Analog I/O, indicated by pwr.
• In and Out ports with M12 connectors labeled “1” and “2”.
• 2.5 mm female jack for RS485 diagnostic port, which is
located under the top cover
Section 4 Quick Start
11
Table 4.1 Pin Labeling of M12 Female “D”
Connectors (2 per device)
Figure 4.2 Layout Under Top Cover
Figure 4.1 2 X M12, 4 POLE, FEMALE “D”
CODED CONNECTOR
Communications I/O SLAMF/IP-66
Digital I/O needs to be supplied via the M12 Connector, see Table 4-1.
Section 4 Quick Start
12
Power Supply SLA5800 & SLAMF/IP-66
Power needs to be supplied via the M8 connector. This connector also
provides access to analog I/O signals, see Table 4-1.
Figure 4-2: PROFINET Top Cover SLA5800
Figure 4-3: M8 Male Device Connector Pin Layout,
Pin Side View SLA5800 & SLAMF/IP-66
Table 4-2: Pin Labeling of M8 Male Device and Female Mating Cable Connector SLA5800 & SLAMF/IP-66
Pin Label
Function at Remote Connector
V+
Positive Power Supply Voltage
V-
Power Supply Ground
N/C
Not Connected
SLA58xx Top Cover
SLA58xx
Section 4 Quick Start
13
M8 mating cables can be purchased as a second line item, details given below.
Figure 4-4: M8 Female Mating Cable
Figure 4-5: M8 Female Mating Cable Connector Pin Layout
Network
Table 4-3: Wire Labeling of M8 Female Mating Cable Connector
Wire Color
Wire Label
Function at Remote Connector
Blue
V
Power Supply Ground
Brown
V+
Positive Power Supply Voltage
Black
N/C
Not Connected
White
N/C
Not Connected
Grey
N/C
Not Connected
Table 4-4: M8 Female Mating Cable Part Numbers
Supplier
Part Number
Description
Brooks
Instrument
124X049AAA
M8 Mating Cable 2m
124X050AAA
M8 Mating Cable 5m
124Z170AAA
ECAT to DB15 Male
Section 4 Quick Start
14
Each SLA5800 Series PROFINET
TM
device has (2) RJ-45 Ethernet
Connection ports (Figure 4.2), and each SLAMF/IP-66 device has (2) M12 4
Pole, Female “D” Coded Connectors (Figure .1) labeled 1 and 2. Network
connections can be made to either or both ports, depending on the network
topology. The SLA5800/IP-66 Series PROFINET
TM
device will support star
and linear.
The SLA5800/IP-66 Series PROFINET
TM
device supports auto-negotiation
of the communications link. Both ports support data rates of 10/100 Mbps
and Half/Full duplex communications. The device may be directly connected
to the Ethernet NIC on a desktop or laptop PC for configuration and
commissioning activities.
MOD LED
Table 4-5: MOD LED Indicator Definitions
Indicator State
Summary
Requirement
Off
No power
No power is supplied to the device.
Solid Green
Device Operational
Device is operating correctly.
Flashing Green
Standby
Device has not been configured.
Fast Flashing Green
LED Blink
The LED Blink command has been received by the device
Flashing Red
Major
Recoverable Fault
The device has detected a Major Recoverable Fault (Alarm)
Red
Major
Unrecoverable Fault
The device has detected a Major Unrecoverable fault (Error)
Flashing Green / Red
Self-test
The device is performing its power-up testing.
Section 4 Quick Start
15
NET LED
Table 4-6: NET LED Indicator Definitions
Indicator State
Summary
Requirement
Off
Not Powered
Or
No Name
The device is powered off or is powered on but the device Name has
not been set
Flashing Green
Name Set
But
No Cyclic Connection
The Name has been set but no cyclic communications has been
established with the device by the master/controller
Steady Green
Connected
An IP address is configured, at least one CIP connection (any
transport class) is established with the device.
Flashing Red
Connection timeout
An IP address is configured, and an Exclusive Owner connection has
timed out. The NET indicator will return to steady green when the
Exclusive Owner connection is reestablished.
Steady Red
Duplicate IP
The device has detected that its IP address is already in use.
Flashing Green / Red
Self-test
The device is performing its power-up testing.
TCP/IP Network Configuration
The TCP/IP network settings can be configured using a web browser
interface or through the PROFINET networking tools. By default, SLA
Series PROFINET
MFC/MFM is shipped with the following factory
configuration:
IP Address: 192.168.1.100
NET Mask: 255.255.255.0
Name: brooks-sla
To configure using a web browser, connect the device to the network that is
configured with the same subnet as the device (192.168.1.xxx). Open the web
browser and enter the IP address of the device as the URL
The Web Interface opens in read-only mode. To change the configuration, click the
Login Tab. From the pulldown, select Configure or Control. The default password for
Configure is ‘configure’. The default password for Control is ‘control’.
Section 4 Quick Start
15
Module/Slot Configuration
Load the latest GSDML file for SLA Series mass flow devices into the
PROFINET configuration tool. This file can be downloaded from the
Brooks Instrument website. Add the appropriate MFC/MFM device into
the network configuration.
For basic operation of the MFC/MFM, the following modules will need to
be configured into slots for the device:
MFC
Table 4-7: MFC Module/Slot Configuration
Module Name
Slot
Variable
I/Q
Data Type
Default Eng
Units
Flow Meter
2
Flow
Input(I)
REAL
Percent
Flow Controller
3
Setpoint
Output(Q)
REAL
Percent
MFM
Table 4-8: MFM Module/Slot Configuration
Module Name
Slot
Variable
I/Q
Data Type
Default Eng
Units
Flow Meter
2
Flow
Input(I)
REAL
Percent
MFC devices at a minimum require Setpoint (CV) to command the device
to flow and Flow (PV) as input for indicated flow.
MFM devices only require Flow (PV) as an input for indicated flow
Modules with suffixes ‘..w/o Config’ will not send configuration data to the
device during the phase when the master/control established cyclic
connection with the device. See Section 5: Configuration on methods of
configuring SLA Series MFC/MFM’s.
Section 5 Configuration
16
Section 5: Configuration
Commonly Configured Parameters
PROFINET™ provides several ways to configure a device. As noted in
the previous sections, modules can be selected that have module
configuration data associated with them such that the device is
configured when the master/controller establishes a cyclic connection
with the device. Alternatively, modules with no configuration data can be
used, and separate Read/Write record messages can be used for
configuring module parameters.
The SLA Series PROFINET
TM
devices also contains an embedded web
interface for configuration and troubleshooting. To access the web
interface, see section ‘TCP/IP Network Configuration’ in this manual.
The Brooks Expert Support Tool (BEST) downloadable software is the
most comprehensive commissioning, configuration and troubleshooting
tool for SLA Series PROFINET devices. Servicing tasks include setup,
attribute configuration, diagnostics, troubleshooting and valve tuning.
Calibration is available with a license key.
The SLA Series MFC/MFM supports many different configurable
parameters. The out-of-box defaults meet the needs of a great majority of
applications, but some applications may require the device to report more
information or behave differently than is configured with default settings,
such as valve position, safe mode, flow and/or setpoint engineering units,
etc.
This section covers the more common parameters that are configured to
meet the unique needs of applications. The terms “parameter” and
“parameters” can be used interchangeably and ultimately refer to the
same data item within the MFC device.
The following tables will reference both the Parameter name and the
EPATH descriptor (slot-subslot-index) for those who want to use
Read/Write record messages to configure the device.
Section 5 Configuration
17
Table 5-1: Commonly Configured Parameters/Parameters
Parameter
EPATH
Default
Semantics
Flow Meter Data
Units
[0x02-1-4]
4103 (0x1007)
See Section Data
Units
Flow Controller Data
Units
[0x03-1-4]
4103 (0x1007)
See Section Data
Units
Temperature Meter
Data Units
[0x05-1-4]
4608 (0x1200)
See Section Data
Units
Selected Gas
Calibration
[0x02-1-35]
1
The subslot
representing the
Process Gas
Calibration used to
linearize the Flow
Sensor
Valve Driver Safe
State
[0x04-1-21]
0 (Close)
The valve will close
when the device is in
its Safe State
Status Alarm Mask
[0x07-1-8]
0x00000000
All Alarm Bits are
masked
Status Warning Mask
[0x07-1-9]
0x00000000
All Warning Bits are
masked
Data Units
The SLA Series MFC can report flow and accept setpoints in values
associated to engineering units. This can simplify user interpretation of
information from the device by letting the device perform the calculations
necessary to interpret the flow signal from its internal sensor based upon
information in the selected calibration.
Table 5-2: Configurable Data Units Parameters
Parameter
EPATH
Applicable Units Table
Default
Flow Sensor Data Units
[0x02-1-4]
Appendix C: Volumetric Flow Units Table
Percent
Flow Totalizer Data Units
[0x02-1-125]
Appendix C: Volume Units Table
Liters
Flow Control Data Units
[0x03-1-4]
Appendix C: Volumetric Flow Units Table
Percent
Temperature Data Units
[0x05-1-4]
Appendix C: Temperature Units
deg C
Section 5 Configuration
18
Safe Mode
All products in the SLA Series product line employ an internal State
Machine to govern the operational mode of the device. One operational
mode is the Safe Mode (a.k.a. the Safe State). For MFC(s), Safe Mode
stops the controller and forces the valve actuator to a defined state (see
section Valve Safe Mode). By default, the valve actuator will be closed.
The state of the actuator in Safe Mode can be configured in the Valve
Actuator module, parameters [0x04-1-21] and [0x04-1-22].
The device will be in Safe Mode when any of the following conditions
exist:
• If any Error Status bit is set [0x07-1-4]
• If no cyclic connection is active
• If the cyclic connection is closed or times out
Valve Safe Mode
The valve safe mode is the state the valve actuator will be in when the
device is in Safe Mode. To configure the safe mode of the valve, use
parameter ‘Actuator Safe State’ in the Valve Driver Module [0x04-1-21].
These states apply to both Normally Closed and Normally Open Valves.
Table 5-3: Safe State
Value
State
0
Closed (default)
1
Open
2
Hold
3
Use Safe Value
Section 5 Configuration
19
Process Gas Page Configuration
If the MFC/MFM contains multiple calibrations. The selection of a particular
calibration can be configured in parameter ‘Calibration Instance’ of the
Flow Meter Module [0x02-1- 35].
The value of this parameter is limited to the number of Flow Calibration
Modules configured in the device. The minimum value is 1, which is
also the default value.
Additionally, the calibration can be selected using through cyclic data
by setting Cal_Instance field in Flow Meter module. A value of 0 in this
field is ignored by the device. If the field is set to an invalid value, the
process gas selection will not change and the ‘Invalid Process Gas
Page Selected’ alarm status will be set.
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Brooks SLA MFCs / SLA MFCs User manual

Brand
Brooks
Model
SLA MFCs / SLA MFCs
Type
User manual
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