Brooks GF40, GF80 User manual

Brooks

®

GF40/GF80 DeviceNet

TM

Installation and Operation Manual

X-DPT-DeviceNet-GF40-GF80-MFC-eng

Part Number: 541B168AAG

December, 2011

DeviceNet

TM

Supplemental Manual for

GF40/GF80 Series Mass Flow Controllers

and Meters

Brooks

®

GF40/GF80 Series with DeviceNet

Brooks

®

GF40/GF80 DeviceNet

TM

Installation and Operation Manual

X-DPT-DeviceNet-GF40-GF80-MFC-eng

Part Number: 541B168AAG

December, 2011

Dear Customer,

We recommend that you read this manual in its entirety as this will enable efficient and proper use of the

DeviceNet Mass flow controllers and meters. Should you require any additional information concerning the

DeviceNet Mass flow controllers and meters, please feel free to contact your local Brooks Sales and Service

Office; see back cover for contact information, or visit us on the web at www.BrooksInstrument.com. We

appreciate this opportunity to service your fluid measurement and control requirements, and trust that we will be

able to provide you with further assistance in future.

Yours sincerely,

Brooks Instrument

i

Contents

Brooks

®

GF40/GF80 DeviceNet

TM

Installation and Operation Manual

X-DPT-DeviceNet-GF40-GF80-MFC-eng

Part Number: 541B168AAG

December, 2011

Section Page

Number Number

1 Introduction

1.1 Device Profile –Enhanced Mass Flow Controller Device (Type 0x27) ............................................1-3

1.2 Object Model for Mass Flow Controller...........................................................................................1-3

1.3 How Objects Affect Behavior ..........................................................................................................1-4

2 Identity Object (Class 0x01)

2.1 Instance Attributes ..........................................................................................................................2-1

2.2 Common Services ..........................................................................................................................2-1

3 DeviceNet Object (Class 0x03)

3.1 Instance Attributes ..........................................................................................................................3-1

3.2 Common Services ..........................................................................................................................3-2

3.3 Semantics .......................................................................................................................................3-2

3.4 Module Status LED .........................................................................................................................3-2

3.5 NET Status LED .............................................................................................................................. 3-3

4 Assembly Object (Class 0x04)

4.1 Instance Attributes........................................................................................................................... 4-1

4.2 Common Services ........................................................................................................................... 4-2

4.3 Object Instances ............................................................................................................................. 4-2

4.4 I/O Assembly Object Instance Data Attribute Format ...................................................................... 4-3

5 Connection Object (Class 0x05)

5.1 Instance Attributes (Explicit Connection, Instance 1)....................................................................... 5-1

5.2 Instance Attributes (Polled Connection, Instance 2)......................................................................... 5-2

5.3 Common Services ........................................................................................................................... 5-3

6 S-Device Supervisor Object (Class 0x30)

6.1 S-Device Supervisor Class Attributes ..................................................................................................... 6-2

6.2 S-Device Supervisor Instance Attributes................................................................................................. 6-3

6.3 Semantics .............................................................................................................................................6-7

6.4 S-Device Supervisor Common Services ................................................................................................ 6-13

6.5 S-Device Supervisor Object-Specific Services ...................................................................................... 6-13

7 S-Analog Sensor Object (Class 0x31)

7.1 S-Analog Sensor Class Attributes ...................................................................................................7-1

7.2 S-Analog Sensor Instance Attributes ............................................................................................... 7-2

7.3 Semantics ...................................................................................................................

.................... 7-7

7.4 S-Analog Sensor Common Services .............................................................................................. 7-11

7.5 S-Analog Sensor Object-Specific Services ..................................................................................... 7-11

7.5.1 Zero_Adjust Request Service Data Field Parameters ............................................................. 7-12

7.5.2 Gain_Adjust Request Service Data Field Parameters............................................................. 7-12

7.6 Behavior ......................................................................................................................................... 7-13

7.7 S-Analog Sensor Object Instance Subclass 01 ............................................................................. 7-14

7.7.1 Subclass 01 Instance Attributes........................................................................................... 7-14

7.7.2 Subclass 01 Services........................................................................................................... 7-14

7.7.3 Subclass 01 Behavior........................................................................................................... 7-14

ii

Contents

Brooks

®

GF40/GF80 DeviceNet

TM

Installation and Operation Manual

X-DPT-DeviceNet-GF40-GF80-MFC-eng

Part Number: 541B168AAG

December, 2011

8 S-Analog Actuator Object (Class 0x32)

8.1 S-Analog Actuator Class Attributes .................................................................................................8-1

8.2 S-Analog Actuator Instance Attributes.............................................................................................8-2

8.3 Semantics .......................................................................................................................................8-5

8.4 S-Analog Actuator Common Services.............................................................................................8-7

8.5 S-Analog Actuator Object–Specific Services ..................................................................................8-8

8.6 S-Analog Actuator Behavior ............................................................................................................8-8

9 S-Single Stage Controller Object (Class 0x33)

9.1 S-Single Stage Controller Class Attributes......................................................................................9-1

9.2 S-Single Stage Controller Instance Attributes .................................................................................9-2

9.3 Semantics .......................................................................................................................................9-5

9.4 S-Single Stage Controller Common Services .................................................................................9-7

9.5 S-Single Stage Controller Object–Specific Services .......................................................................9-7

9.6 Behavior..........................................................................................................................................9-7

10 S-Gas Calibration Object (Class 0x34)

10.1 S-Gas Calibration Class Attributes................................................................................................10-2

10.2 S-Gas Calibration Instance Attributes ...........................................................................................10-3

10.3 Semantics .....................................................................................................................................10-5

10.4 S-Gas Calibration Common Services ...........................................................................................10-6

10.5 S-Gas Calibration Object–Specific Services .................................................................................10-7

10.6 S-Gas Calibration Object Behavior ...............................................................................................10-7

10.7 S-Gas Calibration Object Instance Subclass 01 ...........................................................................10-8

10.7.1 Subclass 01 Instance Attributes...........................................................................................10-8

10.7.2 Subclass 01 Instance Services ............................................................................................10-8

10.7.3 Subclass 01 Behavior ..........................................................................................................10-8

11 References

......................................................................................................................................................11-1

Contact Information

Warranty, Local Sales/Service Contact Information ......................................................................... Back Cover

1-1

Section 1 - Introduction

Brooks

®

GF40/GF80 DeviceNet

TM

Installation and Operation Manual

X-DPT-DeviceNet-GF40-GF80-MFC-eng

Part Number: 541B168AAG

December, 2011

1 Introduction

This document and the DeviceNet Statement of Compliance (SOC) from

the Open DeviceNet Vendors Association (ODVA) provide a complete

interoperability specification for the GF40/GF80 Series Digital Mass Flow

Controller device from Brooks. This device is defined by the ODVA

specification in the Device Profiles chapter, section entitled "Enhance

Mass Flow Controller, Type: 27

hex

". The primary difference in this profile

from the original Mass Flow Controller profile, type = 1A

hex

, is that this

device profile supports a flow and temperature instance of the

S-Analog Sensor Object. Information contained in this document was

derived from the following sources:

DeviceNet Specification Enhancements for the S-Device Supervisor Objects:

S-Device Supervisor Object (DSE-93-01)

1

S-Analog Sensor Object (DSE-93-02)

2

S-Analog Actuator Object (DSE-93-03)

3

S-Single Stage Controller Object (DSE-93-04)

4

S-Gas Calibrator Object (DSE-93-05)

5

ODVA Mass Flow Controller Device Profile (DSE 93-06)

6

ODVA DeviceNet Specifications Version 2.0

7

ODVA Enhanced Mass Flow Controller Device Profile (Edition 3.4, CIP Spec.)

AMAT (various docs)

1-2

Section 1 - Introduction

Brooks

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GF40/GF80 DeviceNet

TM

Installation and Operation Manual

X-DPT-DeviceNet-GF40-GF80-MFC-eng

Part Number: 541B168AAG

December, 2011

Subclass Object Class

Class Inst

Optional/Required # of Instances

Identity - - Required 1

Message Router - - Required 1

DeviceNet - - Required 1

Connection - - Required

(note 1)

at least

1 I/O Polled and

1 Explicit

Acknowledge Handler

Object

- - Conditional (note 2) 1

Assembly - - Required

at least

1 Input and

1 Output

S-Device Supervisor - - Required 1

S-Gas Calibration - 01 Optional

(Supported)

0 or More

S-Analog Sensor - 01 Required (note 3) 3

S-Analog Actuator - - Conditional (note 4)

(Supported)

1

S-Single Stage Controller - - Conditional (note 4)

(Supported)

1

This device also complies with the ODVA Semiconductor SIG Interface

Guidelines for DeviceNet Devices on Semiconductor Manufacturing Tools.

The GF40/GF80 Series Digital Mass Flow Controller (hereafter referred to

as GF40/GF80 Series) supports the following DeviceNet objects: Identity,

DeviceNet, Connection, and Assembly. In addition, support is also

provided for the S-Device Supervisor, S-Analog Sensor, S-Analog

Actuator, S-Single Stage Controller, and S-Gas Calibration objects.

Supported objects are summarized in the following table.

Notes:

1. GF40/GF80 Series supports one I/O Polled and one Explicit

Connection

2. Required for Change-of-State/Cyclic I/O connection support.

(Not supported).

3. The GF40/GF80 Series supports three instances of the S-Analog

Sensor object; instance 1 for flow, instance 2 for pressure and instance

3 for temperature. This conforms to the Enhanced MFC profile, device

type = 27

hex

.

4. Required for a Mass Flow Controller, a device that contains a Valve

and a Controller. Not supported in a Mass Flow Meter Device (an MFC

without a Valve or a Controller).

1-3

Section 1 - Introduction

Brooks

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GF40/GF80 DeviceNet

TM

Installation and Operation Manual

X-DPT-DeviceNet-GF40-GF80-MFC-eng

Part Number: 541B168AAG

December, 2011

1.1 Device Profile –Enhanced Mass Flow Controller Device (Type 0x27)

A Mass Flow Controller is a device that measures and controls the mass

flow rate of gas or liquid. The MFC contains three principle components: a

mass flow rate sensor, a metering valve, and a closed-loop controller.

The sensor can consist of a variety of types, including thermal or

pressure-based. Flow can be regulated by a variety of actuator types,

including solenoid, voice coil, or piezoelectric transducer. The closed-loop

controller accepts a setpoint from the host and controls the flow to that

setpoint. Control is accomplished by monitoring the flow and adjusting the

valve position to reduce the error between the setpoint flow value and

actual flow value.

1.2 Object Model for Mass Flow Controller

Object Model for the MFC Device

1-4

Section 1 - Introduction

Brooks

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GF40/GF80 DeviceNet

TM

Installation and Operation Manual

X-DPT-DeviceNet-GF40-GF80-MFC-eng

Part Number: 541B168AAG

December, 2011

Object Effect on behavior

Identity

Supports the Reset service. Upon receipt of a Reset

Service Request of any Type, the Identity Object sends a

Reset Service Request to the S-Device Supervisor.

Message Router No effect

DeviceNet Configures port attributes (node address, data rate, and

BOI)

Connection Class Contains the number of logical ports into or out of the

device

Acknowledge Handler

Used to manage the reception of I/O message

acknowledgements. (Not used or required in the

GF40/GF80 Series).

Assembly Defines input/output and configuration data format

S-Device Supervisor Supports the Stop, Start, Reset, Abort, Recover and

Perform_Diagnostic services for ALL Application Objects

in the device and consolidates the Exception Conditions

and Application Objects’ Status.

This object behaves differently from the Identity Object in

that the S-Device Supervisor object provides a single point

of access to the Application Objects only; it does not effect

the DeviceNet specific objects (i.e., Identity, DeviceNet,

Connection, etc.).

S-Gas Calibration Modifies the correction algorithm of the S-Analog Sensor

object which includes the selection mechanism to enable

an S-Gas Calibration object instance.

S-Analog Sensor Feeds the process variable to the Single Stage Controller

object

S-Single Stage Controller Feeds the control variable to the Analog Actuator object

S-Analog Actuator Operates the Flow Control Valve of the device

1.3 How Objects Affect Behavior

2-1

Section 2 - Identity Object

(Class 0x01)

Brooks

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TM

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December, 2011

Parameter Required Data Type Description Semantics of Values

Type Required USINT Type of Reset 0 = Power Cycle type [default if

parameter omitted]

1 = Out-of-Box type

2 Identity Object (Class 0x01)

The Identity Object provides general information about the identity of a

device. This object is summarized in the following tables.

2.1 Instance Attributes

2.2 Common Services

Service

Code

Need in Implementation Service Name Description of Service

Class Instance

0E

hex

14

dec

Conditional Required Get_Attributes_Single Returns the contents of the

specified attribute.

05

hex

05

dec

n/a Required Reset

Resets the device to the Self-

Testing state.

RESET Request Service Data Field Parameters

Attribute

ID

Need in

implementation

Access

Rule

Name DeviceNet

Data Type

Description of Attribute

1 Required Get Vendor ID UINT ODVA Assigned Vendor Number

= 41 (0x29)

2 Required Get Device Type UINT ODVA Assigned Device Number

= 26 (0x1A)

3 Required Get Product Code UINT Brooks Assigned Product Number = 726

4 Required Get Revision STRUCT of: Product Revision

Major Rev USINT (byte)

Minor Rev USINT (byte)

5 Required Get Status WORD DeviceNet Status

6 Required Get Serial Number UDINT DeviceNet Device Serial Number

7 Required Get Product Name SHORT

STRING

“GF40” or “GF80”

(1-32 characters)

2-2

Section 2 - Identity Object

(Class 0x01)

Brooks

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December, 2011

THIS PAGE WAS

INTENTIONALLY

LEFT BLANK

3-1

Section 3 - DeviceNet Object

(Class 0x03)

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Part Number: 541B168AAG

December, 2011

3 DeviceNet Object (Class 0x03)

The DeviceNet Object maintains configuration and status of physical

attachments to DeviceNet. It also allocates and releases connection

instances associated with the Predefined Master/Slave Connection Set.

3.1 Instance Attributes

Attribute

ID

Need in

implementation

Access

Rule

Name DeviceNet

Data Type

Description of Attribute

1 Required Set MAC ID USINT (byte) Values 0-63 or “P”

(Programmable Mac Id)

See Semantics

2 Required Set Baud Rate USINT (byte) Values 0,1,2 or “P”

See Semantics

3 Required Set BOI USINT (byte) Bus Off Interrupt

4 Required Set Bus-off Counter USINT (byte) Number of times CAN chip went to

bus off state

5 Required Get Allocation

Information

USINT (byte) Indicates whether or not the

Predefined Master/Slave

Connection Set has been

allocated

6 Conditional

(supported)

Get MAC ID switch

changed (note 1)

BOOL Indicates the Node ID switches

have changed since last power-up

or reset. 0=no change, 1=change

7 Conditional

(supported)

Get Baud Rate switch

changed (note 1)

BOOL Indicates the baud rate switch has

changed since last power-up or

reset. 0=no change, 1=change

8 Conditional

(supported)

Get MAC ID switch

value

USINT (byte) Actual value of the Node address

switches, (0-99)

9 Conditional

(supported)

Get Baud rate switch

value

USINT (byte) Actual value of the baud rate

switch, (0-9)

Note

1. When either one of these two attributes are true (=1), then the

module LED will flash red to indicate the status. See section 3.4,

Module LED, for more information.

3-2

Section 3 - DeviceNet Object

(Class 0x03)

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3.2 Common Services

Service

Code

Need in Implementation Service Name Description of Service

Class Instance

0E

hex

14

dec

Conditional Required Get_Attributes_Single Returns the contents of the specified

attribute.

10

hex

16

dec

n/a Required Set_Attributes_Single Sets the attribute to the specified value

4B

hex

75

dec

n/a Required Allocate_Master/Slave

_Connection_Set

This is the Service utilized to perform

the allocation of the Predefined

Master/Slave Connection Set.

4C

hex

76

dec

n/a Required Release_Master/Slave

_Connection_Set

This service is used to deallocate the

Predefined Master/Slave Connection

Set within a Slave

3.3 Semantics

The MAC ID and Baud Rate are switch selectable. Baud Rate will be 125K,

250K, or 500K baud if the switch is set to 1,2,5 respectively. The MAC ID

switch sets the unit’s DeviceNet address to 0-63, according to the switch

settings. Both switches may be placed in the “P” position, which selects

“programmable” MAC ID or Baud Rate. If the switch is placed in the “P”

position, the MAC ID or Baud Rate will assume the last valid value.

MAC ID and Baud Rate attributes are software settable ONLY when the

switches are in the “P” position. Behavior related to the MAC ID and the

Baud Rate attributes conforms to the requirements defined in the

Open DeviceNet Vendor Association Semiconductor Special Interest

Group (SIG) Interface Guidelines Conformance Test Procedure

(Section 5.6).

3.4 Module Status LED

The module status LED indicates the status of the MFC Module.

Module Status LED State Description

Power Off Off No Power applied to device

Device Self-test Flashing

Green-

Red

Device is in Self-test. The Module LED will flash

Green for 250mSec, followed by RED for 250mSec.

If the device passes the self-test, LED will stay Green

Device

Operational

Green Device is operating normally.

Recoverable

Fault

Flashing

Red

The Node (MAC ID) address or baud rate switches have

changed since the last power-up/reset.

Unrecoverable

Fault

Red Device has detected an unrecoverable fault.

3-3

Section 3 - DeviceNet Object

(Class 0x03)

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3.5 Net Status LED

The Network status LED indicates the status of the MFC

DeviceNet Connection.

Network

Status

LED State Description

Power Off Off No Power applied or device is the only node on the

network.

On-line Not

Connected

Flashing

Green

Device is Operating normally. It is on-line, but no

connections have been established to the Device.

Device

Operational

Green Device is operating normally.

Connection

Timeout

Flashing

Red

One or more connections have timed out.

Unrecoverable

Fault

Red Device cannot communicate on the network. Duplicate

MacId or Bus-off condition

3-4

Section 3 - DeviceNet Object

(Class 0x03)

Brooks

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GF40/GF80 DeviceNet

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Installation and Operation Manual

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December, 2011

THIS PAGE WAS

INTENTIONALLY

LEFT BLANK

4-1

Section 4 - Assembly Object

(Class 0x04)

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Part Number: 541B168AAG

December, 2011

4 Assembly Object (Class 0x04)

The Assembly Object groups attributes of multiple objects into a single

block of data, which can be produced and consumed over an I/O

connection. Various combinations of S-Device Supervisor Attributes are

grouped together to form the assemblies supported by GF40/GF80. Both

the MFC and EMFC device profiles do NOT allow “mixed” integer and real

assemblies to be allowed at the same time. That is, it is not allowed to

produce an integer assemble and consume a floating-point assembly over

a polled connection. See the EMFC Device Profile in the ODVA DeviceNet

specification for more detail.

4.1 Instance Attributes

Number Required Supported Type # bytes Name

1 N Y Input 2 Flow

2 Y (default) Y Input 3 Status and Flow

3 N Y Input 5 Status, Flow and Valve

4 N Y Input 5 Status, Flow, and Setpoint

5 N Y Input 7 Status, Flow, Setpoint and Valve

6 Y Y Input 8 Status, Flow, Setpoint, Override and Valve

7 Y (default) Y Output 2 Setpoint

8 Y Y Output 3 Override and Setpoint

9 N Y Input 1 Status

10 N Y Input 8 Exception Detail Alarm

11 N Y Input 8 Exception Detail Warning

12 N Y Input 15 Exception Detail Alarm and Exception Detail Warning

13 N Y Input 4 FP Flow

14 Y Y Input 5 Status, FP Flow

15 N Y Input 9 Status, FP Flow and FP Valve

16 N Y Input 9 Status, FP Flow, and FP Setpoint

17 N Y Input 13 Status, FP Flow, FP Setpoint and FP Valve

18 Y Y Input 14 Status, FP Flow, FP Setpoint, Override and FP Valve

19 Y Y Output 4 FP Setpoint

20 Y Y Output 5 Override and FP Setpoint

4-2

Section 4 - Assembly Object

(Class 0x04)

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4.2 Common Services

The number of bytes indicates how many data bytes are produced or

consumed for each assembly. The “FP” abbreviation is for Floating Point,

or real data. Each real data value will consist of 4 bytes of IEEE 754 single

precision data.

Service

Code

Need in Implementation Service Name Description of Service

Class Instance

0E

hex

14

dec

Conditional Required Get_Attributes_Single Returns the contents of the specified

attribute.

4.3 Object Instances

Producing Object Instances must be one of the following: 1, 2, 3, 4, 5, 6,

9, 10, 11, 12, 13, 14, 15, 16, 17, or 18. These instances send data to the

master. Consuming Object Instances must be one of the following: 7, 8,

19, or 20. These instances receive data from the master. As mentioned

before, both the Produced and Consumed Paths must reference either

integer OR real assemblies. The following section details each assembly

and its data type. The “FP” designation will indicate a real, floating point

value. Otherwise, the data will be an integer or, in the case of the “status”

byte, a bit-mapped value.

4-3

Section 4 - Assembly Object

(Class 0x04)

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4.4 I/O Assembly Object Instance Data Attribute Format

The manufacturer of a Mass Flow Controller Device must specify which

Assembly instances are supported by the device. GF40/GF80 supports

the following assemblies.

The I/O Assembly DATA attribute has the format shown below.

Instance Byte Bit 7 Bit 6 Bit 5 Bit 4 Bit 3 Bit 2 Bit 1 Bit 0

1 0 Flow (low byte)

1 Flow (high byte)

2 0 Status

1 Flow (low byte)

2 Flow (high byte)

3 0 Status

1 Flow (low byte)

2 Flow (high byte)

3 Valve (low byte)

4 Valve (high byte)

4 0 Status

1 Flow (low byte)

2 Flow (high byte)

3 Setpoint (low byte)

4 Setpoint (high byte)

5 0 Status

1 Flow (low byte)

2 Flow (high byte)

3 Setpoint (low byte)

4 Setpoint (high byte)

5 Valve (low byte)

6 Valve (high byte)

4-4

Section 4 - Assembly Object

(Class 0x04)

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Instance Byte Bit 7 Bit 6 Bit 5 Bit 4 Bit 3 Bit 2 Bit 1 Bit 0

6 0 Status

1 Flow (low byte)

2 Flow (high byte)

3 Setpoint (low byte)

4 Setpoint (high byte)

5 Override

6 Valve (low byte)

7 Valve (high byte)

7 0 Setpoint (low byte)

1 Setpoint (high byte)

8 0 Override

1 Setpoint (low byte)

2 Setpoint (high byte)

9 0 Status

10 0 Status

1 Exception Detail Alarm 0 (size, common)

2 Exception Detail Alarm 1 (common 0)

3 Exception Detail Alarm 2 (common 1)

4 Exception Detail Alarm 3 (size, device)

5 Exception Detail Alarm 4 (device 0)

6 Exception Detail Alarm 5 (size, manufacturer)

7 Exception Detail Alarm 6 (manufacturer, 0)

11 0 Status

1 Exception Detail Warning 0 (size, common)

2 Exception Detail Warning 1 (common 0)

3 Exception Detail Warning 2 (common 1)

4 Exception Detail Warning 3 (size, device)

5 Exception Detail Warning 4 (device 0)

6 Exception Detail Warning 5 (size, manufacturer)

7 Exception Detail Warning 6 (manufacturer, 0)

4-5

Section 4 - Assembly Object

(Class 0x04)

Brooks

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Instance Byte Bit 7 Bit 6 Bit 5 Bit 4 Bit 3 Bit 2 Bit 1 Bit 0

12 0 Status

1 Exception Detail Alarm 0 (size, common)

2 Exception Detail Alarm 1 (common 0)

3 Exception Detail Alarm 2 (common 1)

4 Exception Detail Alarm 3 (size, device)

5 Exception Detail Alarm 4 (device 0)

6 Exception Detail Alarm 5 (size, manufacturer)

7 Exception Detail Alarm 6 (manufacturer, 0)

8 Exception Detail Warning 0 (size, common)

9 Exception Detail Warning 1 (common 0)

10 Exception Detail Warning 2 (common 1)

11 Exception Detail Warning 3 (size, device)

12 Exception Detail Warning 4 (device 0)

13 Exception Detail Warning 5 (size, manufacturer)

14 Exception Detail Warning 6 (manufacturer, 0)

13 0 FP Flow (low byte)

1 FP Flow

2 FP Flow

3 FP Flow (high byte)

14 0 Status

1 FP Flow (low byte)

2 FP Flow

3 FP Flow

4 FP Flow (high byte)

4-6

Section 4 - Assembly Object

(Class 0x04)

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Instance Byte Bit 7 Bit 6 Bit 5 Bit 4 Bit 3 Bit 2 Bit 1 Bit 0

15 0 Status

1 FP Flow (low byte)

2 FP Flow

3 FP Flow

4 FP Flow (high byte)

5 FP Valve (low byte)

6 FP Valve

7 FP Valve

8 FP Valve (high byte)

16 0 Status

1 FP Flow (low byte)

2 FP Flow

3 FP Flow

4 Flow (high byte)

5 FP Setpoint (low byte)

6 FP Setpoint

7 FP Setpoint

8 FP Setpoint (high byte)

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