Fujitsu CS90A User manual

Brand: Fujitsu

Model: CS90A

Category: Security device components

Type: User manual

130nm node CMOS Process (CS90A)

Technology Roadmap

Features

Technology Code CS90A

Transistor UHS HS ST LL

Physical Gate Length (nm) 110 110 110 110

Gate Oxide Thickness (nm) 2.9 2.9 2.9 2.9

Supply Voltage (V) 1.2 1.2 1.2 1.2

NMOS Ids (µA/µm) 780 678 570 390

PMOS Ids (µA/µm) -321 -276 -218 -150

NMOS Ioff (nA/µm) 36 4 0.18 0.005

PMOS Ioff (nA/µm) -18 -3.1 -0.22 -0.015

Gate Leak Current (nA/µm) 0.01 0.01 0.01 0.01

Basic Gate Delay (ps) 14 17 28 45

Number of Available Poly Layer 1

Number of Available Metal Layer 8Cu+1Al

Via Filling Cu Dual Damascene

ILD Structure Hybrid Low-k

SRAM Cell Size (µm2) 1.98

Dual Gate Oxide Options Available

Mixed Signal Options Available

RF Elements MIM cap., Poly Resistor, Inductor

Fuse RAM Redundancy

180-nm

130-nm

Cu+Low+k

90-nm

Cu+VLK

65-nm

45-nm

32-nm

CS80/80A

1000

500

200

100

1998 2000

G: Generic, LL: Low Leakage

2002 2004 2006 2008 2010 2012

CS90A

CS100A_LL

For ASIC & COT

Year (Production Start)

Physical Gate Length (nm)

For COT

CS200A_LL

CS200A_G

CS200

CS100

CS90

CS100A_G

Mie plant

130nm node CMOS Process (CS90A)

5-Cu

6-Cu

7-Cu

1-Cu

2-Cu

3-Cu

4-Cu

SiL

SiO2

Global Metal:

AL (Fuse & Pad)

Pitch: 1.8µm

Semi Global Metal:

Thick Cu + SiO2

Pitch: 0.6µm

Intermediate Metal:

Thin Cu + SiLK

Pitch: 0.4µm

SRAM

Transistor

Interconnect

All company and product names are trademarks or

registered trademarks of their respective owners.

Printed in the U.S.A. WFS-FS-20983-7/2003

FUJITSU MICROELECTRONICS AMERICA, INC.

Corporate Headquarters

1250 E. Arques Ave. Sunnyvale, CA 94088-3470

Tel: (800) 866-8608 Fax: (408) 737-5999

E-mail: [email protected] Web Site: http://www.fma.fujitsu.com

Cell Size = 1.98µm

(1.2µm x 1.65µm)

(2nd Generation SRAM)

1.65µm

Fujitsu CS90A User manual

Brand: Fujitsu

Model: CS90A

Category: Security device components

Type: User manual

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Fujitsu CS90A User manual

Fujitsu CS90A User manual

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