Busch COBRA DS 5161–9161 B/F User manual

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User manual
Get technical data,
instruction manuals,
service kits
Get technical data,
instruction manuals,
service kits
Instruction Manual
COMBI
Screw Vacuum Pumps and Boosters
COBRA DS 5161 B
13/06/2023
0870772511 | A0009_en-US | Original instructions
Tableofcontents
Preface ............................... . 2
COBRADS5161B ......................... . 3
DP0600C ............................. . 4
Productdescription ........................ 6
Use ................................ 6
Operatingprinciple ........................ 6
Oilcircuit ............................. 6
Cooling.............................. 6
Nitrogensystem ......................... 6
Optionalfunctions/Useofavailableaccessories ......... 6
On/Offswitch .......................... 7
Safety ................................ 7
Intendeduse ........................... 7
Safetyinformation ........................ 7
Noiseemission .......................... 8
Maintenanceclearance ...................... 8
Electricalsafety .......................... 8
TypesofElectricalWork .................... 8
Type1............................ 8
Type2............................ 8
Type3............................ 8
Type4............................ 8
LockOut/TagOutprocedure(Type1ofelectricalwork) ... 8
SafetyLockoutprocedure ................... 8
Emergencyoffcircuitdescription................ 8
Transport .............................. 8
Transportinpackedstate ..................... 8
Transportinunpackedstate ................... 8
LiftingfortheDP0600C .................. 9
Storage ............................... 9
Temporarystorage ........................ 9
Removalofthepump ...................... 9
Preservation ........................... 9
Start-upofthevacuumpumpafterstorage: .......... 9
Installationandstart-up ...................... 9
Necessaryinstallationinstructions ................ 9
Installationsiteandinstallation ................ 10
Inletconnection ....................... 10
Dimensionsdrawing ..................... 10
Dischargeconnection..................... 11
Coolingwaterconnection .................. 11
Nitrogenconnection ..................... 11
Electricalconnection/Checks ................. 11
Installation ........................... 11
Mounting........................... 11
Electricalconnection ..................... 11
Proceduretoconnecttheinlinepowercable ........ 12
Equipmentconnections(withoptions) ............ 12
Connectionofthelines/pipes ................ 13
Oilfilling ........................... 13
COBRANS(DP)vacuumpump .............. 13
Oillevel,pumpnotoperating ............... 13
WY(MB)rotarylobevacuumpump ............ 13
Oillevel,pumpnotoperating ............... 13
COBRADSvacuumpump ................. 14
Fillingincoolingliquid .................... 14
Checkingthedirectcooling.................. 14
Checkingthenitrogensupply................. 14
Savingtheoperatingparameters ............... 14
Recommendationsonoperation................. 14
Application .......................... 14
Switchingthevacuumpumpon/off ............. 15
Firststart-upofthesystem................. 15
Switchingthesystemoff .................. 15
Maintenance ........................... 16
Maintenanceprogram...................... 16
Weekly:............................ 16
Monthly: ........................... 16
Yearly: ............................ 16
Every16000hoursofoperation,atthelatestafter4years: . 17
LockOut/TagOutprocedure ................ 17
SafetyLockoutprocedure................... 17
Checkingtheoil......................... 17
Checkingtheoillevel ..................... 17
COBRANS(DP)vacuumpump .............. 17
WY(MB)rotarylobevacuumpump ............ 17
Refillingoil .......................... 17
COBRANS(DP)vacuumpump .............. 17
Oillevel,pumpnotoperating ............... 17
WY(MB)rotarylobevacuumpump ............ 17
Oillevel,pumpnotoperating ............... 17
Checkingthecolouroftheoil ................ 18
Oilchange .......................... 18
Drainingusedoil ...................... 18
Fillinginnewoil ....................... 18
COBRANS(DP)vacuumpump .............. 18
Oillevel,pumpnotoperating ............... 19
WY(MB)rotarylobevacuumpump ............ 19
Oillevel,pumpnotoperating ............... 19
Checkingthecoolingliquid ................... 19
Checkingthelevelofthecoolingliquid ............ 19
Refillingcoolingliquid .................... 19
Drainingthecoolingliquid .................. 19
Fillinginnewcoolingliquid .................. 19
Checkingthecoolingwater ................... 20
Checkingthecoolingwaterflow ............... 20
Checkingthenitrogen...................... 20
Checkingthenitrogenflow.................. 20
Checkingthecurrentconsumption ............... 20
Checkingthesoundabsorber(accessory) ............ 20
Checkingtheleak-protectionnon-returnvalve(accessory) ... 20
Overhaul ............................. 20
Removalfromservice ....................... 20
Temporaryremovalfromservice ................ 20
Recommissioning ........................ 20
Dismantlinganddisposal .................... 21
Oiltype/quantity ......................... 22
Oiltype............................ 22
Oilquantity ......................... 22
Coolingliquidtype/quantity ................... 23
Coolingliquidtype ....................... 23
Coolingliquidquantity ..................... 23
Technicaldata .......................... 24
EU-DeclarationofConformity ................... 25
Preface COBRADS5161B
Page 2 0870772511(EN)
Preface
CongratulationsonyourpurchaseoftheBuschvacuumpump.With
watchfulobservationofthefield’srequirements,innovationandsteady
developmentBuschdeliversmodernvacuumandpressuresolutions
worldwide.
Forthepurposeoftheseinstructions,“handling”thevacuumpump
meansthetransport,storage,installation,commissioning,influenceon
operatingconditions,maintenance,troubleshootingandoverhaulof
thevacuumpump.
Priortohandlingthevacuumpumptheseoperatinginstructionsshall
bereadandunderstood.Ifanythingremainstobeclarifiedplease
contactyourBuschrepresentative.
Keeptheseoperatinginstructionsand,ifapplicable,otherpertinent
operatinginstructionsavailableonsite.
UK-Declaration of Conformity. . . . . . . . . . . . . . . . . . . . . . . . . . . . .26
COBRADS5161BCOBRADS5161B
0870772511(EN) Page 3
COBRA DS 5161 B
DP Backing vacuum pump DP 600 C
ESS Emergency stop switch
IN Inlet
MSH Main switch
OUT Discharge (to silencer)
PTB Pump terminal box
RC Remote control
ECO Power connector
SC Sensor connection
CWO Cooling water outlet
CWI Cooling water inlet
IN
ESS
MSH
PTB
RC
DP
ECO
SC
ECO
OUT
CWO
CWI
DP0600C COBRADS5161B
Page 4 0870772511(EN)
SC ECO
CLP
TS 1
DGC CWO
OUT
OSG 1
CWI
TS 2
TS 4 HE FME
OSG 2
PRV
DGR 1
SV
CLV
EV CLF MV
TS 5
TS 3
FS 1
TR FS 2
DGR 2
CWV
COBRA DP 600 C
CLF Cooling liquid filter plug
CLP Glycol circulating pump
CLV Cooling liquid purge plug
CWI Cooling water inlet connection
CWO Cooling water outlet connection
DGC Nitrogen connection
CWV Regulating valve, cooling water
DGR 1 Regulating valve, dilution gas
(middle of cylinder)
DGR 2 Regulating valve, dilution gas
(end of cylinder)
ECO Power connection
EV Expansion vessel
FME Flow meter, nitrogen
FS 1 Flow switch, cooling liquid
FS 2Flow switch, cooling water
HE Heat exchanger
IN Inlet
MV Solenoid valve, nitrogen system
OSG 1 Oil sight glass
OSG 2 Oil sight glass
OUT Discharge
PRV Nitrogen regulating valve
SC Sensor connection
SV Safety valve
TR Temperature regulator, 55°C
TS 1 Temperature switch, oil
temperature 120°C
TS 2 Temperature switch, cooling liquid
temperature 100°C
TS 3 Temperature sensor PT100
TS 4 Temperature switch, oil temperature 140°C
TS 5 Overpressure sensor
COBRADS5161BProductdescription
0870772511(EN) Page 5
1 Inlet
2 Discharge
3 Oil
4 Coolingwater
5 Barriergas
6 Coolingliquid
7 Screwrotors
8 Dilutiongas(dil2)
9 Dilutiongas(dil1)
10 Temperaturesensor
11 Loberotors
Product description
Page 5
1 9 78
6
63 5 34
10 2 5 6
311 34
CLP Glycol circulating pump
CWI Cooling water inlet
CWO Cooling water outlet
CWV 1 Regulating valve, cooling water MB
CWV 2 Regulating valve, cooling water DP
DGR 1 Regulating valve, dilution gas
DGR 2 Regulating valve, dilution gas
FME Nitrogen, flow meter
FS 1 Flow switch, cooling liquid
FS 2 Flow switch, cooling water
HE Heat exchanger
MV Solenoid valve, nitrogen system
NC Nitrogen supply
OSG 1 Oil sight glass DP
OSG 2 Oil sight glass DP
OSG 3 Oil sight glass MB
OSG 4 Oil sight glass MB
PGI Process gas inlet
PGO Process gas outlet
PRV Nitrogen regulating valve
TR Temperature regulator, 55°C
TS 1 Temperature switch, oil temperature
120°C
TS 2 Temperature switch, cooling liquid
temperature 100°
TS 3 Temperature sensor PT100
TS 4 Temperature switch,
oil temperature 140°C
TS 5 Overpressure sensor
TS 6 Temperature switch 155 °C
PRV
FMEMV
TS 5
DGR 1DGR 2
FS 1
TR
PGI
PGO
CWO
CWI
NC
MB
DP
CWV 1
OSG 3 OSG 4
OSG 1
TS 1
CLP
TS 2
OSG 2
TS 4
TS 3
CWV 2 FS 2
TS 6
Productdescription
Use
TheCOBRADSvacuumpumpsaredesignedforuseinthefieldof
microelectronicsandsimilarindustries.
Theycanbeusedtodrawingasesandgasmixtures.
WARNING
Whenusingtoxic,inflammableand/orexplosivegases,makesure
thatthesystemcorrespondsindesigntoapplicablelocaland
nationalsafetyregulationsandthatallapplicablesafetymeasures
arefollowed.
Allproduct-specificsafetyregulationsmustbeobserved.
Solidparticlesmustnotgetintothevacuumpump.Proceduralerrors
canresultinthepumpsuckinginacertainquantityofliquid.Ifthe
pumphassuckedinliquid,ashortdryingtimeisnecessaryattheend
oftheprocedure.
Theallowedmaximuminletgastemperaturedependsontheinlet
pressureandthetypeofgas:thelowertheinletpressure(Pa),the
higherthedrawngastemperature(TGas)canbe.
Thefollowingindicativevaluesforaircanbeconsidered:
– Pa>50mbar,TGas<80°C
– Pa<50mbar,TGas<200°C
The vacuumpumpisintendedforuseinapotentiallynon-explosive
environment.
Max.permissiblenumberofstartingsperhour:6.
The vacuum pump is thermally suitable for continuous operation at any
pressure between atmospheric pressure and ultimate pressure.
Thevacuumpumpistightdowntoultimatepressure.
Operatingprinciple
TheCOBRADSvacuumpumpsareacombinationofaCOBRANS
(DP)vacuumpumpwithcoolingwaterandnitrogencircuitsandaWY
(MB)rotarylobevacuumpump.
TheCOBRANSvacuumpumpsworkbytheprincipleofscrewpumps.
Twoparallelscrews(7)rotateinoppositedirectionsinthepumpbody.
Enteringgasesaretrappedbetweentheflightsofthescrewsandthe
pumpbody.Thegasesareconveyedbytherotationofthescrewsto
theexhaust,wheretheyaredischarged.
TheCOBRANSvacuumpumpsaredrivenbywater-cooledmotors.
TheWYrotarylobevacuumpumpsoperateaccordingtotheapproved
principleoftheRootstypemachine.Operationisbothsimpleand
effective.Twolobesrotors(11)withidenticalprofilesrotateinopposite
directionswithinacasing.Astheyrotate,gasisdrawnintothespace
betweeneachrotorandthecasingwhereitistrappedandbythe
rotationpushedoutintothedischarge.Thisactionisrepeatedtwicefor
eachrevolutionofeachrotorandthereforefourtimesforeach
revolutionofthedriveshaft.Thereisnomechanicalcontactbetween
rotorsandcylinder.Sonooillubricationisrequired.
TheWYrotarylobevacuumpumpsaredrivenbywater-cooledmotors.
Oilcircuit
Sincethecompleteoperatingprincipleworkswithoutcontact,nooil
circuitisneededintheworkarea.
Cooling
TheCOBRADSvacuumpumpiscooledby
thefillingofcoolingliquid(mixofwaterandglycol)insidethe
waterchambers(6)ofcylinderandendplateofcylinderB-side.An
indirectcircuitismadewithawaterpumpmountedatthemotor
endplate.Theflowofthecoolingliquidiscontrolledbyaflow
switchFS1.Iftheflowisunder1l/minduringaminimumtimeof
30seconds,thenthepumpstops.
ThetemperatureswitchTS2willgiveanemergencysignalifthe
temperatureofthecoolingliquidisabove100°C.Thepumpwill
stopimmediatelyaftertheemergencyalarmring.
adirectcoolingwatercircuitinthecylindercoversB-sideof
COBRANSvacuumpumpandinthecoolingplatesofWYrotary
lobevacuumpump.
adirectcoolingwatercircuitinthemotorsofWYrotarylobe
vacuumpumpandCOBRANSvacuumpump.Thecoolingwater
flowispresetat12Nl/minatthefactoryandcanbeadjustedwith
valveCWV1.TheflowiscontrolledbyflowswitchFS2.When
flowistoolowawarningthenanalarmsignalisgeneratedbyflow
switchFS2tothePLC.Statusofthepumpdependsonthealarm
functionsetbyuser(factorysetting:EMO,pumpstopsafteralarm
condition)
NOTE:TheCOBRADSvacuumpumpsaregenerallydispatchedwith
oilandcoolingliquidalreadyinthevacuumpumpbut,withoutcooling
water.Beforevacuumpumpfirststartup,controltheoillevelandthe
coolingliquidlevel.Intheeventofabsenceofoneortheotherof
theselubricants,pleasecarryoutthefilling(pleaserefertothevarious
chaptersoffilling).Donotforgettoconnectthecoolingwatersupply
beforethefirststartup.Operationwithoutthesecoolantscanresultin
damagetothevacuumpump.
Nitrogensystem
Thenitrogensystemperformstwomainfunctions
nitrogenisusedasdilutiongas.Itisinjectedinsidethecylinderon
twoports.Nitrogenflowinjectedinthemiddlehole(9)ispresetat
20Nl/minandcanbeadjustedwithvalveDGR1,dependingon
theapplication.Nitrogenflowinjectedintheholeoncylinder
endplateside(8)ispresetat40Nl/minandcanbeadjustedwith
valveDGR2,dependingontheapplication.Whenflowistoolow
awarningthenanalarmsignalisgeneratedbyflowmeterFMEto
thePLC.Statusofthepumpdependsonthealarmfunctionsetby
user(factorysetting:None,pumpcontinuesrunningwithan
alarm).Dilutionimprovesthescrewsfunctioning,especiallywhen
suckingcorrosivegases.
thenitrogenisusedassealinggas.Thenitrogenisinjectedintothe
intermediatechamber(5)inthecoverofthecylinderoftheNS
pumptoachievegoodcloseness.
Optionalfunctions/Useofavailable
accessories
Thereliefvalve(SV)preventsexcessivelyhighpressureinthe
expansiontank(EV),reliefpressure:6bar.
Apressureswitch(optional)withnormallyclosedcontactmountedin
theexpansiontankmonitorsthepressureofthecoolingliquid.Itmust
beconnectedinsuchawaythatactuationcausesthevacuumpumpto
beswitchedoffwhenthepressureexceedsavalueof3bar.
Apressureswitchmountedattheexhaust,controlstheoverpressureat
theexhaust.Ifoverpressureisabove0,2bar,pressureswitchgivesa
warningthenanalarmsignal.Statusofthepumpdependsonthe
alarmfunctionsetbyuser(factorysetting:None,pumpcontinues
runningwithanalarm).
AtemperaturesensorPT100(10)mountedonthecylinder,measures
thetemperatureinsidethecylinder.
Asilencerorsoundabsorber(accessory)attheexhaustreducesthe
noiseofthepumpandcollectsanycondensate.
Aleak-protectionnon-returnvalve(optional)attheexhausttrapsthe
condensateinthepumpwhenthepumpisswitchedoff.
TheLCDcontrollerprocessesthedataofthesensors(seechapter
“Communicationwiththeequipment”)asfollows:
dischargepressure
temperatureinthecylinder
current
nitrogenflowrate
coolingwaterflowrate
oiltemperature
controlofthecoolingliquidflow
coolingliquidtemperature
Productdescription COBRADS5161B
Page 6 0870772511(EN)
See"InstallationandMaintenanceInstructions,BuschPLCandBusch
LCD(No.0870758077)".
On/Offswitch
Thevacuumpumpisdeliveredwithacircuitbreaker.Thefunction
start/stopcanbedoneinLocalbyusingtheLCDcontrollerorin
Remotebytheproductionmachine.
Safety
Intendeduse
DEFINITION:Toruleoutanymisunderstanding,theterm“handling”
ofthevacuumpumpcoverstransport,storage,installationand
operationofthepumpaswellaseffectsonoperatingstatesand
trouble-
shootingonthevacuumpump.
Thevacuumpumpisintendedforindustrialuse.Itmayonlybe
operatedbyqualifiedpersonnel.
Thedifferentapplicationpossibilitiesandlimitvaluesforoperation
describedin“Productdescription”and“Installationrequirements”
mustbeobservedbythemanufacturerofthesystemintowhichthe
vacuumpumpistobeintegratedandbyusers.
Theneedforpersonalsafetyregulationsdependsinprincipleonthe
typeofuse.Theoperatormustprovidetheuserswiththenecessary
meansandmustinformhispersonnelaboutthedangersemanating
fromtheprocessedproduct.
Theoperatorofthevacuumpumpmustobservethesafetyregulations
andmusttrainandinstructhispersonnelaccordingly.
Localregulationsregardingthemotorsandelectriccontrolelements
mustbeobservedwheninstallingthepumpinpotentiallyexplosive
environments.
Themaintenanceinstructionsmustbefollowedandobserved.
Theseinstallationandmaintenanceinstructionsmustbereadand
understoodbeforethevacuumpumpisused.Ifyouhaveanydoubts,
contactyourBuschrepresentative.
Safetyinformation
Thevacuumpumpisdesignedandmanufacturedincompliancewith
thelatesttechnicalstandardsandsafetyregulations.Neverthelessan
elementofresidualriskremains.
Varioussafetyinstructionsaretobefoundinthishandbookandonthe
pump.Theseinstructionsmustbefollowed.Youcanrecognizethese
instructionsbythesignalwordsDANGER,WARNINGandCAUTION,
whicharedefinedasfollows:
DANGER
Disregardofthissafetyinstructionwillalwaysresultindeath,
seriousinjuriesorseveredamage.
WARNING
Disregardofthissafetyinstructionmayresultindeath,serious
injuriesorseveredamage.
CAUTION
Disregardofthissafetyinstructionmayresultinminorormoderate
injuriesordamage.
COBRANSvacuumpump
WYrotarylobevacuumpump
COBRADS5161BSafety
0870772511(EN) Page 7
Filling in oil (OFP)
Oil sight glass
(OSG)
Hot surface
Do not touch
WARNING
Hot surface
Do not touch
Filling in
cooling liquid (OFP)
Draining in
cooling liquid (CLD)
Filling in oil (OFP)
Hot surface
Do not touch
Purge, cooling
liquid (CLV)
WARNING
WARNING
Oil sight glass
(OSG)
Oil filler plug (OFP)
Oil sight glass (OSG)
Oil filler plug (OFP)
Oil sight glass (OSG)
Oil drain plug (ODP)
COBRADSvacuumpump
Noiseemission
Refertothetable“Technicaldata”forthepermissiblenoiselevelin
freefieldconditionsaccordingtoENISO2151.
CAUTION
Theintensityofthenoiseofthevacuumpumpishigherwithina
certainareaofthepump.
Riskofhearingdamage.
Usersmustwearearprotectionwhenspendingalongerperiodof
timeinthevicinityofanon-insulatedvacuumpump.
Maintenanceclearance
Beforeanymaintenanceaction,ensureamaintenanceclearance
aroundthepumpofmin.610[mm].
Electricalsafety
TypesofElectricalWork
ThefollowingarethefourtypesofelectricalworkdefinedbytheSEMI
S2,latestversion,guideline:
Type1
Equipmentisfullydeenergized.
Type2
Equipmentisenergized.Energizedcircuitsarecoveredorinsulated.
NOTE :Type2workincludestaskswheretheenergizedcircuitsareor
canbemeasuredbyplacingprobesthroughsuitableopeningsinthe
coversorinsulators.
Type3
Equipmentisenergized.Energizedcircuitsareexposedandinadvertent
contactwithuninsulatedenergizedpartsispossible.Potential
exposuresarenogreaterthan30voltsrms,42.4voltspeak,60voltsdc
or240volt-ampindrylocations.
Type4
Equipmentisenergized.Energizedcircuitsareexposedandinadvertent
contactwithuninsulatedenergizedpartsispossible.Potential
exposuresaregreaterthan30voltsrms,42.4voltspeak,60voltsdc,
or240volt-ampindrylocations.Potentialexposuresto
radio-frequencycurrents,whetherinducedorviacontact,exceedthe
limitsinTableA5-1ofAppendix5(SEMIS2guideline).
LockOut/TagOutprocedure(Type1of
electricalwork)
lStopthepumpwiththeremotecontrol(pressonSTOPbutton
during10s)
lPressonemergencystopbutton
lSwitchoffthemaindisconnectswitch
lSwitchoffthecustomer’spowersupply
lSwitchoffthewater(inletfirst,thenoutlet)andnitrogenquick
connections
lPutthelabelorwarningboard“Maintenanceprocessing”onor
nexttothepump
SafetyLockoutprocedure
lTakeoffthelabelorwarningboard“Maintenanceprocessing”
lCheckthecoolingliquidandoillevelsaccordingtothechapters
“Checkingtheoillevel”and“Checkingthecoolingliquidlevel”
lClosethecover
lSwitchonthemaindisconnectswitch
lReleasetheemergencystopbutton
lSwitchonthewater(outletfirst,theninlet)andnitrogenquick
connections
lStartthepumpwiththeremotecontrol(pressonSTARTbutton)
Emergencyoffcircuitdescription
lTheEmergencyoffcircuitmaybeopenedbypressingon
emergencystopbutton.Ifthiselementshows,thenthepumpwill
immediatelystop.ThePLCwillremainenergizedtosavethepump
status.
Transport
TheCOBRADSvacuumpumpsaretestedandcheckedinourfactory
beforecarefulpacking.Checkthepackagingfortransportdamage
whenthegoodsarrive.Thepumpcanwithstandtemperatures
between-25°Cand+55°Cduringtransport.
Transportinpackedstate
Packedonapallet,thevacuumpumpcanbemovedwithahand
forklifttruck.
Transportinunpackedstate
Thevacuumpumpisfastenedtothepalletwithfixingpins:
uUnscrewthefasteningnutsunderneaththepallet.
CAUTION
Donotwork,walkorstandundersuspendedloads.
CAUTION
Pleasecheckouttheweightofthevacuumpumpbeforeliftingitup
(see"TechnicalData").
Useadequateliftinggearforthis.
CAUTION
Inthecaseofavacuumpumpfilledwithoil,youensurethatthe
angleofinclinationofthevacuumpumpatthetimeofrisedoesnot
exceed5°comparedtothehorizontal.Intheeventoftooimportant
slope(>5°),riskofoilleakageintheworkspace.
Transport COBRADS5161B
Page 8 0870772511(EN)
NOTE:Thesuspensioneyesarelocatedataboutthecenter-of-gravity
ofthevacuumpumps.Ifthevacuumpumpsareequippedwith
accessoriesthatcouldinfluencethecenter-of-gravity,thismustbe
takenintoaccountwhenliftingandabeltmustadditionallybe
attachedtoaspecificpoint.
LiftingfortheDP0600C
lFastenthehoisttothesuspensioneyesonthecylinder
lUseahoistthatisequippedwithahookandsafetylock
lLiftthevacuumsystem
Ifthevacuumsystemisfastenedtoseveralpalletswithfixingpins:
uUnscrewthefixingpinsinthebaseframe
Beforeeachtransportrequiringameansofadaptedlifting,controlthe
slopeofthevacuumsystem(<5°).
Thepackagingmaterialmustbedisposedofinaccordancewithlocal
andnationalregulations.
Thishandbookiscontainedinthedeliverypackage.
Forfuturetransportation:
lSealallopenconnectionswithprotectivecaps(toprevent
penetrationofdirtandwater)
lSecureloosecables
lProtectfromshock
lDrainallprocessandoperatingmedia
lSecurevacuumsystemfirmlybeforetransporting(e.g.boltto
severalpallets)
lUsealifttrucktomoveandsetthevacuumsystemdown
Storage
Temporarystorage
lMakesurethattheintakeandexhaustflangesareclosed(puton
theprotectivecapsincludedinthedeliverypackageofthevacuum
pump)
lStorethevacuumpump
ifpossible,thevacuumpumpshouldbestoredinitsoriginal
packaging,
indoors,
dry,
inadust-freeand
vibration-freeroom
Removalofthepump
Beforestartingavacuumpumpthathasbeenstoredoutsidethe
buildingforawhile,thevacuumpumpmustbemovedtoaroomwith
ambienttemperature,whereitshouldrestforaday.
Preservation
Ifthevacuumpumpwillbeexposedtounfavourableambient
conditions(forexample,aggressiveenvironment,frequenttemperature
changes),beginimmediatelywithpreservationworkonthevacuum
pump.
Inthecaseoffavourableambientconditions,performpreservation
workonthevacuumpumpifastorageperiodofmorethanthree
monthsisplanned.
lMakesurethatallopeningsarehermeticallysealed;useadhesive
tapetofastenlooseparts(sealrings,flatseals,etc.).
NOTE:VCIistheabbreviationfor“volatilecorrosioninhibitor”.The
VCImoleculeisanorganiccorrosioninhibitorinthevapourphase.
Integratedinvariouscarrierssuchasfilm,cardboard,paper,foam,
liquidandpowder,itprotectsthepartsagainstcorrosionasaresultof
itsactioninthevapourphase.However,VCIpackagingcanattack
syntheticsurfacesandsurfacesofotherelastomers.Ifindoubt,please
contactyournearestdistributor.VCIpackagingprovidesseveralyears
ofprotectionagainstcorrosion,evenundertheharshestofconditions:
overseasshipment,extendedstoragebeforeuse.
lWrapthevacuumpumpinaVCIfilm
lStorethevacuumpump
ifpossible,thevacuumpumpshouldbestoredinitsoriginal
packaging,
indoors,
dry,
inadust-freeand
vibration-freeroom
Start-upofthevacuumpumpafterstorage:
lMakesurethatallprotectiveelements,stoppersoradhesivetapes
attachedbeforepreservationhavebeenremoved
lSwitchonthevacuumpumpinthesequencedescribedinthe
chapter“Installationandstart-up”
Installationandstart-up
Necessaryinstallationinstructions
CAUTION
Ifthenecessaryinstallationinstructionsarenotfollowedand
particularlyinthecaseofinadequatecooling:
Riskofdamagetoandtotaldestructionofthevacuumpumpandits
components!
Riskofpersonalinjury!
Thenecessaryinstallationinstructionsmustbefollowed.
lMakesurethattheintegrationofthevacuumpumpinitsnew
environmentcomplieswiththesafetyregulationsaccordingtothe
MachineryDirective2006/42/EC(regardingtheresponsibilityof
themanufacturerofthesysteminwhichthevacuumpumpistobe
integrated,seeinformationintheDeclarationofConformity).
WARNING
Localregulationsregardingthemotorsandelectriccontrol
elementsmustbeobservedwheninstallingthepumpinpotentially
explosiveenvironments.Makesurebeforestart-upthatallsafety
measureshavebeenfollowed.
COBRADS5161BStorage
0870772511(EN) Page 9
Installationsiteandinstallation
lMakesurethattheenvironmentofthevacuumpumpisnot
potentiallyexplosive
lMakesurethatthefollowingambientconditionsarefulfilled:
Ambienttemperature:0...40°C(32...104°F)
Ambientpressure:atmosphere
Humidityrange:20to95%
Altitude:upto1000m
lMakesurethatthecoolingwaterfulfillsthefollowing
requirements:
Temperature:10-25°C
Waterpressure:2-5bar(relative)
Approximateflowrate:min.12l/minforthestandardversion
Waterhardness:<5°dGH
NOTE: 1°(germandegree=1°dGH)=1,78°(frenchdegree)=1,25e
(englishdegree)=17,9mg/kgCaCO3(americanhardness)
lMakesurethatthecoolingwaterisneutralandclean
lMakesurethatthecoolingwateroutletisunpressurised
lMakesurethatthenitrogenfulfillsthefollowingrequirements:
Overpressure:1,5bar
Standardflowratedil1:20l/min
Standardflowratedil2:40l/min
Max.flowrate:200Nl/min
lMakesurethattheambientconditionscorrespondtothe
protectionclassofthemotor(accordingtonameplate)
lMakesurethatthevacuumpumpisplacedonorfastenedtoa
horizontalsurface
lMakesurethatthevacuumpumpislevel
lMakesurethatthevacuumpumpisatleast1mawayfromany
walltoensuregoodcooling
lMakesurethatthevacuumpumpiseasilyaccessibleandthatthe
selectedinstallationsitefulfillstherequirementsforassembly/
dismantling
lMakesurethatnotemperature-sensitiveparts(forexample,of
plastic,wood,cardboard,paper,electronicparts)comeinto
contactwiththehotsurfacesofthevacuumpump
lMakesurethattheinstallationsiteorassemblyareaisventilatedin
suchawaythatadequatecoolingofthevacuumpumpisensured
CAUTION
Thesurfacetemperatureofthevacuumpumpcanexceed50°C
whenthevacuumpumpisinoperation.
Dangerofburns!
lMakesurethatno-onecantouchthevacuumpumpaccidentally.
Ifnecessary,attachsafeguard
lMakesurethattheoilsightglassesareeasilyaccessible
Ifoilchangesaretobemadeonsite:
uMakesurethattheoildrainandoilfillerareeasilyaccessible
Inletconnection
CAUTION
Donotputhandsintotheinletaperture.
Riskofbodydamage!
lMakesurethattheprotectionthatwasattachedtoprevent
penetrationofparticlesduringtransporthasbeenremovedbefore
thevacuumpumpisconnectedtothevacuumline
CAUTION
Theintakeofliquidsorsolidparticlescanleadtothedestructionof
thevacuumpump
Ifthesuckedgascontainsdustsorsolidforeignbodies:
uMakesurethatafilterorprotectivegratingisinstalledatthe
extractionpoint
lMakesurethatthenominaldiameteroftheintakelineisatleast
equaltothediameteroftheintakeflangeofthevacuumpumpto
preventadropintheperformanceofthevacuumpumpinthecase
ofasmallercross-section
lMakesurethatthevacuumpumpisconnectedwithleakprooflines
Installationandstart-up COBRADS5161B
Page 10 0870772511(EN)
Nitrogen
inlet(1/4")
Cooling water
outlet(3/8")
Cooling water
inlet(3/8")
DP Power connector
Cooling water
outlet(1/2")
Cooling water
inlet(1/2")
722.4
1504
1549.7
720
Exhaust
DN 63 ISO-K
Inlet
DN 200 ISO-K
533.6
1077.7
1611.3
665787
Control Box
Remote Control
(moveable)
Interrupter main
Emergency stop
Dimensionsdrawing
MB Power
connector
CAUTION
Whentheintakelineshavebeenconnected,makesurethatthe
systemdoesnotleak.Leakagesofdangeroussubstancesmustbe
prevented!
lMakesurethattheintakelinesareequippedwithashut-offdevice
upstreamoftheintakeflangesothattheflowofsuckedgascan
bestopped
lMakesurethattheintakelinesdonotexerciseanyforceonthe
intakeflange.Mountbellowsifnecessary
lTheinletflangehasthefollowingdimension:
DN200ISO-K
Inthecaseoflongintakelines,thelinecross-sectionshouldbelarger
thantheintakeflangetopreventadropintheperformanceofthe
vacuumpump.Ifyouhaveanydoubts,contactyourBusch
representative.
Dischargeconnection
CAUTION
Donotputhandsintotheoutletaperture.
Riskofbodydamage!
Thefollowinginstructionsforconnectiontothedischargeonlyapplyif
thesuckedgasisdischargedbythevacuumpumpintoasuitable
environment.
lMakesurethattheprotectionthatwasattachedtoprevent
penetrationofparticlesduringtransporthasbeenremovedbefore
thevacuumpumpisconnectedtothevacuumline
lMakesurethatthenominaldiameteroftheexhaustlineisatleast
equaltothediameteroftheexhaustflangeofthevacuumpump
topreventadropintheperformanceofthevacuumpumpinthe
caseofasmallercross-section
lMakesurethatthevacuumpumpisconnectedwithleakprooflines
CAUTION
Whenthedischargelineshavebeenconnected,makesurethatthe
systemdoesnotleak.Leakagesofdangeroussubstancesmustbe
prevented!
lMakesurethatthedischargelineismountedinsuchawaythat
condensatecannotpenetrateintothepump(siphontrap,gradient)
lMakesurethatnoshut-offdevicesaremountedinthedischarge
line
lMakesurethatthedischargelinesdonotexerciseanyforceonthe
dischargeflange.Mountbellowsifnecessary
lThedischargeflangehasthefollowingdimension:
DN63ISO-K
Inthecaseoflongdischargelines,thelinecross-sectionshouldbe
largerthanthedischargeflangetopreventadropintheperformance
ofthevacuumpump.Ifyouhaveanydoubts,contactyourBusch
representative.
Coolingwaterconnection
Thecoolingwaterisgenerallyconnectedwithahose.
Thecoolingwateroutletmustbeunpressurised.
Connectiondiameter:1/2NPTforBoostersWY(MB)
Connectiondiameter:3/8NPTforDS600E(DP)
Nitrogenconnection
Thenitrogenisconnectedwithapipe(leakproofagainstoxygen).
Connectiondiameter:1/4NPT
Electricalconnection/Checks
lMakesurethattheregulationsoftheElectromagnetic
CompatibilityDirective2014/30/EUaswellasstandardENnorms,
safetydirectivesandespeciallylocalandnationalregulationsare
observed(thisistheresponsibilityofthemanufacturerofthe
systemintowhichthevacuumpumpisintegratedaccordingtothe
DeclarationofConformity)
lMakesurethatthemainspowersupplycorrespondstothedataon
thenameplateofthemotor
lMakesurethatanoverloadcut-outaccordingtoEN60204-1is
providedforthemotor
lMakesurethatthedriveofthevacuumpumpisnotdisturbedby
anyelectricorelectromagneticinterferences.Ifyouhaveany
doubts,contactyourBuschrepresentative
Installation
Mounting
lMakesurethatthe“Necessaryinstallationinstructions”are
followed
lFastenorinstallthepumpatitsfinalinstallationsite
Electricalconnection
WARNING
Riskofelectrocution,riskofdamage.
Electricalinstallationmustbeperformedbyasuitablyqualified
electricianwhoknowsandfollowsthefollowingregulations:
- IEC364orCENELECHD384orDINVDE0100,
- IECReport664orDINVDE0110,
- VBG4orcorrespondingnationalregulationsonaccident
prevention
CAUTION
Thecircuitdiagramsdescribedbelowconformtothestandard.
Othercircuitdiagramsmightbeused.Thisdependsonthe
particularorderandthemarket.
Riskofdamagetothemotors!
Checktheconnectionofthemotorsinsidetheterminalbox
accordingtothecircuitdiagram.
MotorofscrewpumpDSisconnectedatfactory.
CAUTION
Whenconnectingupthewiresintotheterminalbox:pleasemake
surethetighteningtorqueof 3Nm isadheredtoandcheckwitha
calibratedtorquewrench(NutsM6).
Threephasemotorconnection
COBRADS5161BInstallationandstart-up
0870772511(EN) Page 11
T9
T8
T6
T7
T5
T3
T1
T2
T4
P1
P2
P3
P4
Installationandstart-up COBRADS5161B
Page 12 0870772511(EN)
The information concerning the use of the Busch PLC and the Busch
LCD can be found in the Operation and Maintenance manual (Art-No.
0870758077).
6
1
2
3
4
5
Star-star connection (Low voltage) Star connection (High voltage)
T7 T8 T9
TT2 T3
L1 L3 L2
T4 T5 T6
L1 L3 L2
T1 T2 T3
T7 T8 T9
T4 T5 T6
Thermo switch connection
P1 P2
Power wiring connection
Phase L2
Phase L1
Phase L3
Ground
Phase L2
Phase L1
Phase L3
Ground
Pump side Mating connectors
Power connector (400V)
Equipment connections (with options)
Electrical data
1
2
3
4
5
6
LCD serial wiring (RJ12)
Micro SD slot
PC serial wiring (Only for Busch engineers)
Customer Network, Communication Modbus RTU RS 232/RS 485
Ethernet network connection (Busch Monitoring System -Option)
Interface connection (50 poles) / PID Interface
Frequency I Rate I Max Icu
200-220 V 400-460 V 200-220 V 400-460 V 200-220 V 400-460 V
50Hz/60Hz 118A 68A 125A 80A 85kA 50kA
Supplier Part description Part number
HARTING Housing 16B, 2Lever 0680700059
HARTING Frame 16B, Marking a....f 0680700066
HARTING Insert 100A, 16~35SQ, Male 0676700029
HARTING PE Extension 16SQ 0680800098
Pump side
Supplier Part description Part number
HARTING Housing 16B, 2Lever 0680800050
HARTING Frame 16B, Marking A....F 0680700065
HARTING Insert 100A, 16~35SQ, Female 0676700028
HARTING PE shoe 16SQ 0680800098
Mating connectors
1Phase L1
2Phase L2
3Phase L3
4 Ground
Power wiring 4 poles
Phase L1
Phase L2
Phase L3
Ground
Power connector (208V)
Supplier Part description Part number
HARTING Housing 24B, 2Lever 0680800042
HARTING Frame 24B, Marking a....f 0680800043
HARTING Insert 200A, 25~40SQ, Male 0676800015
HARTING PE Extension 16SQ 0680800098
Supplier Part description Part number
HARTING Housing 24B, Top entry, M40, 2Lever 0680800049
HARTING Frame 24B, Marking A....F 0680800041
HARTING Insert 200A, 25~40SQ, Female 0676800016
HARTING PE Extension 16SQ 0680800098
Phase L1
Phase L2
Phase L3
Ground
Pump side Mating connectors
Pump side
Mating connectors
Connectionofthelines/pipes
lConnecttheintakelines
lConnectthedischargelines
lMakesurethatallcaps,safeguardsandsimilarcoversaremounted
lMakesurethattheinletandoutletforthecoolingairarenot
coveredorclosedandthattheflowofcoolingairisnotimpairedin
anyway
Oilfilling
TheCOBRADSvacuumpumpsaregenerallydispatchedwithoil
alreadyinthevacuumpump.Beforevacuumpumpfirststartup,
controltheoillevel.Intheeventofabsenceofthislubricant,please
carryoutthefilling(seethechapter“Oiltypes”forinformationon
therecommendedoils).
COBRANS(DP)vacuumpump
lPreparethequantityofoilspecifiedinthetable“Oilquantity”
NOTE:Thequantityofoilspecifiedintheinstallationhandbookisof
informativenatureonly.Checktheoillevelwiththehelpofthevarious
oilsightglasses(OSG1,OSG2)onthevacuumpump.
CAUTION
Beforeyouchangethetypeofoil,makesurethatthenewtypeis
compatiblewiththeoldtype.Ifnecessary,flushthevacuumpump.
lUnscrewtheoilfillercap(OFP)
lFillinoil
Oillevel,pumpnotoperating
lMakesurethattheoillevelisinthetargetcircleoftheoilsight
glasses
lMakesurethatthesealsoftheoilfillercaparenotdamaged.
Replacethemifnecessary
lScrewontheoilfillercaphermeticallytight
NOTE:Itiseasiertoswitchonthevacuumpumpwithcoldoilwhen
theintakelineisnotclosedorwhentheintakeflangeisnotcoveredby
arubberplate.
lStartthevacuumpump
Iftheintakelineisequippedwithashut-offdevice:
uClosetheshut-offdevice
Iftheintakelineisnotequippedwithashut-offdevice:
uPlacearubberplateontheintakeflange
lLetthevacuumpumprunforafewminutes
lStopthevacuumpumpandwaitafewminutes
lMakesurethattheoillevelstillliesinthetargetcircleoftheoil
sightglasses
Iftheoillevelisbelowthetargetcircle:
uFillinmoreoil
Iftheintakelineisequippedwithashut-offdevice:
uOpentheshut-offdevice
Iftheintakelineisnotequippedwithashut-offdevice:
Removetherubberplatefromtheintakeflangeandconnecttheintake
linetotheintakeflange
CAUTION
Incaseofavacuumpumpfilledwithoil,makesurethatbylifting
theinclinationangleofthevacuumpumpdonotexceed5°from
thehorizontal.Incaseoftoohighinclination(>5°),riskofoilleak
withintheworkarea
lMakesurebeforeeverytransportusingtheappropriatelifting
meanthattheinclinationofthevacuumpumpislessthan5°.
CAUTION
Thevacuumpumpmustremaininahorizontalpositionwhenithas
beenfilledwithoil.
WY(MB)rotarylobevacuumpump
lPreparethequantityofoilspecifiedinthetable“Oilquantity”
NOTE:Thequantityofoilspecifiedintheinstallationhandbookisof
informativenatureonly.Checktheoillevelwiththehelpofthevarious
oilsightglasses(OSG3,OSG4)onthevacuumpump.
CAUTION
Beforeyouchangethetypeofoil,makesurethatthenewtypeis
compatiblewiththeoldtype.Ifnecessary,flushthevacuumpump.
lUnscrewtheoilfillercap(OFP)
lFillinoil
Oillevel,pumpnotoperating
lMakesurethattheoillevelliesinthetargetcircleoftheoilsight
glasses
lMakesurethatthesealsoftheoilfillercaparenotdamaged.
Replacethemifnecessary
lScrewontheoilfillercaphermeticallytight
NOTE:Itiseasiertoswitchonthevacuumpumpwithcoldoilwhen
theintakelineisnotclosedorwhentheintakeflangeisnotcoveredby
arubberplate.
COBRADS5161BInstallationandstart-up
0870772511(EN) Page 13
MAX
MIN
MIN MAX
MAX MIN
MAX
MIN
MIN MAX
MAX MIN
COBRADSvacuumpump
lStartthevacuumpump
Iftheintakelineisequippedwithashut-offdevice:
uClosetheshut-offdevice
Iftheintakelineisnotequippedwithashut-offdevice:
uPlacearubberplateontheintakeflange
lLetthevacuumpumprunforafewminutes
lStopthevacuumpumpandwaitafewminutes
COBRANS(DP)vacuumpump
lMakesurethattheoillevelstillliesinthetargetcircleoftheoil
sightglasses
Iftheoillevelisbelowthetargetcircle:
uFillinmoreoil
Iftheintakelineisequippedwithashut-offdevice:
uOpentheshut-offdevice
Iftheintakelineisnotequippedwithashut-offdevice:
uRemovetherubberplatefromtheintakeflangeandconnect
theintakelinetotheintakeflange
WY(MB)rotarylobevacuumpump
lMakesurethattheoillevelstillliesinthetargetcircleoftheoil
sightglasses
Iftheoillevelisbelowthetargetcircle:
uFillinmoreoilintothetwovacuumpumps
Iftheintakelineisequippedwithashut-offdevice:
uOpentheshut-offdevice
Iftheintakelineisnotequippedwithashut-offdevice:
uRemovetherubberplatefromtheintakeflangeandconnect
theintakelinetotheintakeflange
CAUTION
Inthecaseofavacuumpumpfilledwithoil,youensurethatthe
angleofinclinationofthevacuumpumpatthetimeofrisedoesnot
exceed5°comparedtothehorizontal.Intheeventoftooimportant
slope(>5°),riskofoilleakageintheworkspace.
lBeforeeachtransportrequiringameansofadaptedlifting,control
theslopeofthevacuumpump(<5°).
CAUTION
Thevacuumpumpmustremaininahorizontalpositionwhenithas
beenfilledwithoil.
Fillingincoolingliquid
TheCOBRADSvacuumpumpsaregenerallydispatchedwithcooling
liquidalreadyinthevacuumpump.Beforevacuumpumpfirststartup,
controlthecoolingliquidlevel.Intheeventofabsenceofthis
lubricant,pleasecarryoutthefilling(seethechapter“Coolingliquid
types”forinformationontherecommendedcoolingliquids).
lPreparethequantityofcoolingliquidspecifiedinthetable
“Coolingliquidquantity”
NOTE:Thequantityofcoolingliquidspecifiedintheinstallation
handbookisofinformativenatureonly.Respecttheprocedureoffilling
thecoolingliquid.
lUnscrewfillercap(CLF)ofcoolingliquidoncylinderupperplate
lOpenpurgecap(CLV)oncylinderupperplateandpurgecap
(CLV) oncylinderendplateB-side
lFillinbyfillerholeuntilcoolingliquidflowsbypurgecapon
cylinderendplateB-side
lStopfillingincoolingliquid
lClosethepurgecaponcylinderendplateB-side
lFillinagainbyfillerholeuntilcoolingliquidflowsbypurgecapof
cylinderupperplate
lClosethepurgecapofcylinderupperplate
lScrewonthefillercapforthecoolingliquidagain
lIfliquidhasrunontotheoutsidesurfacesofthevacuumpump,
wipeitoff
lStartthevacuumpump
Iftheintakelineisequippedwithashut-offdevice:
uClosetheshut-offdevice
Iftheintakelineisnotequippedwithashut-offdevice:
uPlacearubberplateontheintakeflange
lLetthevacuumpumprunforafewminutes
lStopthevacuumpumpandwaitafewminutes
lUnscrewpurgecaponcylinderupperplate
lControlthatcoolingliquidlevelisjustundercylinderupperplate
Incasecoolingliquidlevelisbelowrequiredlevel:
uFillinmorecoolingliquid
Iftheintakelineisequippedwithashut-offdevice:
uOpentheshut-offdevice
Iftheintakelineisnotequippedwithashut-offdevice:
lRemovetherubberplatefromtheintakeflangeandconnectthe
intakelinetotheintakeflange
Checkingthedirectcooling
TheflowofthecoolingwaterischeckedbytheflowswitchFS2.The
flowmetermustbeconnectedinsuchawaythatswitching-onleadsto
analarmandstoppingofthevacuumpumpwhentheflowdrops
below11l/min.
Checkingthenitrogensupply
TheflowofthenitrogenischeckedbytheflowmeterFME.The
flowmetermustbeconnectedinsuchawaythatswitching-onleadsto
analarm.Thealarmlimitcanbeadjusteddependingthetypeof
process.
Savingtheoperatingparameters
Assoonasthevacuumpumpisworkingundernormalconditionsafter
beingswitchedon:
lMeasuretheworkingcurrentoftheDPandMBmotorsandsave
themasreferencevaluesforallfuturemaintenanceandrepair
work
Recommendationsonoperation
Application
WARNING
Thevacuumpumpisdesignedforuseundertheconditions
specifiedhere.
Iftheseconditionsarenotmet,thereisariskofdamagetoortotal
destructionofthevacuumpumpanditscomponents!
Thevacuumpumpmayonlybeswitchedonunderthespecified
conditions.
TheCOBRADSvacuumpumpsaredesignedforuseinthefieldof
microelectronicsandsimilarindustries.
Theycanbeusedtodrawingasesandgasmixtures.
Installationandstart-up COBRADS5161B
Page 14 0870772511(EN)
WARNING
Whenusingtoxic,inflammableand/orexplosivegases,makesure
thatthesystemcorrespondsindesigntoapplicablelocaland
nationalsafetyregulationsandthatallapplicablesafetymeasures
arefollowed.
Allproduct-specificsafetyregulationsmustbeobserved.
Solidparticlesmustnotgetintothevacuumpump.Proceduralerrors
canresultinthepumpsuckinginacertainquantityofliquid.Ifthe
pumphassuckedinliquid,ashortdryingtimeisnecessaryattheend
oftheprocedure.
Theallowedmaximuminletgastemperaturedependsontheinlet
pressureandthetypeofgas:thelowertheinletpressure(Pa),the
higherthedrawngastemperature(TGas)canbe.
Thefollowingindicativevaluesforaircanbeconsidered:
– Pa>50mbar,TGas<80°C
– Pa<50mbar,TGas<200°C
Thevacuumpumpisintendedforuseinapotentiallynon-explosive
environment.
Max.permissiblenumberofstartingsperhour:6.
Asfarastemperatureisconcerned,thepumpissuitableforcontinuous
dutyatanypressurebetweenatmosphereandultimatepressure.
Thevacuumpumpistightdowntoultimatepressure.
CAUTION
Thesurfacetemperatureofthevacuumpumpcanexceed50°C
whenthevacuumpumpisinoperation.
Dangerofburns!
Thevacuumpumpmaynotbetouchedwhenitisinoperation.If
touchingthepumpisunavoidable,waituntilthesurface
temperaturehascooleddownorwearprotectivegloves.
CAUTION
Theintensityofthenoiseofthevacuumpumpishigherwithina
certainareaofthepump.
Riskofhearingdamage.
Usersmustwearearprotectionwhenspendingalongerperiodof
timeinthevicinityofanon-insulatedvacuumpump.
CAUTION
TheCOBRADSvacuumpumpscanbedeliveredwithoutoil.
Operationwithoutoilwillresultindamagetothevacuumpump!
Thevacuumpumpmustremaininahorizontalpositionwhenithas
beenfilledwithoil.
CAUTION
TheCOBRADSvacuumpumpscanbedeliveredwithoutcooling
liquid.
Operationwithoutcoolingliquidwillresultindamagetothe
vacuumpump!
CAUTION
Thecoolingwaterflow,whichischeckedbytheflowswitchFS2,
mustbeatleast12l/min.
lMakesurethatallcaps,safeguardsandsimilarcoversaremounted
lMakesurethatthesafeguardsareswitchedon
lMakesurethattheinletandoutletforthecoolingairarenot
coveredorclosedandthattheflowofcoolingairisnotimpairedin
anyway
lMakesurethatthesystemdoesnotleak.Leakagesofdangerous
substancesmustbeprevented
lMakesurethatthe“Necessaryinstallationinstructions”are
followedandespeciallythatadequatecoolingisensured
Thefollowingmustbenotedwhenthepumpisshutdownforalonger
periodoftime:
CAUTION
Ifthereisariskoffrost,allthecoolingwatermustbedrainedoutof
thevacuumpumpifthepumpisshutdownforalongerperiodof
time!
Drainthecoolingliquid
uUnscrewthefillercapforthecoolingliquid
uDrainthecoolingliquidcompletely
uScrewonthefillercapforthecoolingliquidagain
uCollectthecoolingliquidandrecycleitordisposeofit
accordingtolocalornationalregulations
Drainthecoolingwater
uPullofftheconnectionsfortheinletandoutletofthecooling
water
uDrainthecoolingwatercompletely
uIfnecessary,drainthecoolingwaterwiththehelpof
compressedairtopreventanyriskoffrostorcorrosion
NOTE:Whenthepumphasnotbeeninoperationforafewdaysor
whenastickysubstancehasbeensucked,itispossiblethatthetwo
screwrotorsoftheNS(DP)vacuumpumpwillsticktoeachother.
Screwopentheaccesscovertothescrewrotors.Loosentherotors
fromeachotherwiththehelpofanAllankeybyturningthemin
clockwisedirectionbyhand.
Switchingthevacuumpumpon/off
Firststart-upofthesystem
lMakesurethatthe“Necessaryinstallationinstructions”are
followed
Ifthesystemisequippedwithasolenoidgatevalve(customeroption)
inthecoolingwatercircuit:
uOpenthesolenoidgatevalve
lMakesurethatthecoolingwaterflowissetcorrectly
Thecoolingwaterflowisfactoryseton12Nl/minandcanbe
adjustedattheregulatingcockCWV1.Thiswatercircuitis
usedtocoolthemotoroftheDPandMBvacuumpumps.
lMakesurethatthenitrogenflowissetcorrectly
Nitrogenflowinjectedinthemiddlehole(9)ispresetat20Nl/min
andcanbeadjustedwithvalveDGR1.Nitrogenflowinjectedin
theholeoncylinderendplateside(8)ispresetat40Nl/minand
canbeadjustedwithvalveDGR2.
lSwitchonthevacuumpump
lMakesurethatthesystemdoesnotleak
Ifthesystemisequippedwithasolenoidgatevalveattheintake:
uOpenthesolenoidgatevalve
Switchingthesystemoff
Ifthesystemisequippedwithasolenoidgatevalveattheintake:
uClosethesolenoidgatevalve
lSwitchoffthevacuumpump
lShutoffthenitrogensupply
COBRADS5161BInstallationandstart-up
0870772511(EN) Page 15
lShutoffthecoolingwatersupply
Ifthesystemisequippedwithasolenoidgatevalve(customeroption)
inthecoolingwatercircuit:
uClosethesolenoidgatevalve
lMakesurethatthesystemiselectricallyisolated
Maintenance
DANGER
Incasethevacuumpumphasconveyedgasesthathavebeen
contaminatedwithforeignmaterialsthataredangeroustohealth,
theoilandcondensateswillalsobecontaminated.
Theseforeignmaterialscaninfiltratethepores,recessesandother
internalspacesofthevacuumpump.
Dangertohealthwhenthevacuumpumpisdismantled.
Dangertotheenvironment.
Alwayswearprotectiveclothingwhencarryingoutmaintenance
work.
Beforeanymaintenancework,theinletandoutletpipingaswellas
thevacuumpumpitselfmustbeflushedwithnitrogen.
CAUTION
Onlyauthorizedpersonnelmaycarryoutdismantlingworkonthe
vacuumpump.Beforeworkbegins,theoperatorofthevacuum
pumpmustfillinaformora“DeclarationRegardingContamination
ofEquipmentandComponents”thatprovidesinformationon
possibledangersandappropriatemeasures.
Ifthisformhasnotbeenfilledincompletelyandsigned,the
vacuumpumpmaynotbedismantled.
CAUTION
Beforemaintenanceworkisstarted,asafetyareaofatleast610
[mm] aroundthemachinemustbesetup.
CAUTION
Thesurfacetemperatureofthevacuumpumpcanexceed50°C
whenthevacuumpumpisinoperation.
Dangerofburns!
Beforestartingmaintenancework,makesurethatthevacuumpump
hasbeenswitchedoffandthatitcannotbeswitchedonagain
accidentally.Followtheshutdownprocedureinthesection“LockOut/
TagOutprocedure”:
stopthepumpwiththeremotecontrol(pressonSTOPbutton
during10s)
pressonemergencystopbutton
switchoffthemaindisconnectswitch
switchoffthecustomer’spowersupply
switchoffthewater(inletfirst,thenoutlet)andnitrogenquick
connections
putthelabelorwarningboard“Maintenanceprocessing”onor
nexttothepump
CAUTION
Theoiltemperaturecanreachavalueof90°C!
Dangerofburns!
lMakesurethattheoilcircuitandthecoolantcircuithavebeen
emptiedbeforemovingthevacuumpump
lMakesurethattherearenocleaningtoolsinthepumpanymore
accordingtolocalandnationalregulations
Beforepullingoffthedifferentconnections,makesurethattheintake
andexhaustlinesofthevacuumpumpcorrespondtoatmospheric
pressure.
Whenthemaintenanceworkhasbeenfinished,followtheprocedure
“SafetyLockoutprocedure”:
takeoffthelabelorwarningboard“Maintenanceprocessing”
checkthecoolingliquidandoillevelsaccordingtothechapters
“Checkingtheoillevel”and“Checkingthecoolingliquidlevel”
openthepowerboxcoverandcheckthattheFDP1thermalrelay
isonmanualresetposition
closethecover
switchonthemaindisconnectswitch
releasetheemergencystopbutton
switchonthewater(outletfirst,theninlet)andnitrogenquick
connections
makesurethatthe“Necessaryinstallationinstructions”are
followed
startthepumpwiththeremotecontrol(pressonSTARTbutton)
Maintenanceprogram
NOTE:Themaintenanceintervalsdependontheoperatingconditions.
Thefollowingintervalsarebasicvalues,whichcanbeshortenedor
lengtheneddependingonoperatingconditions.Inespeciallydifficult
operatingconditionssuchas,forexample,averydustyenvironment
themaintenanceintervalsmustbeshortenedconsiderably.
Weekly:
lChecktheoillevelandthecolouroftheoil(see“Checkingthe
oil”)
lCheckthelevelofthecoolingliquid(see“Checkingthecooling
liquid”)
lCheckthecoolingwaterflow(see“Checkingthecoolingwater”)
lCheckthenitrogenflow(see“Checkingthenitrogen”)
lInspectthevacuumpumpforoilleaks-ifthereareleaks,repair
thevacuumpump(Busch)
lInspectthevacuumpumpforleaksofcoolingliquid-ifthereare
leaks,repairthevacuumpump(Busch)
lInspectthevacuumpumpforleaksofcoolingwater-ifthereare
leaks,repairthevacuumpump(Busch)
Monthly:
Inthecaseofoperationinadustyenvironment:
uMakesurethattheoperatingroomiscleanandfreeofdust;
cleanifnecessary
lMakesurethatthevacuumpumphasbeenswitchedoffandthat
itcannotbeswitchedonagainaccidentally
lChecktheelectricalconnections
lCarryoutavisualinspectionofthevacuumpump
Yearly:
lMakesurethatthevacuumpumphasbeenswitchedoffandthat
itcannotbeswitchedonagainaccidentally
Iftheintakeisequippedwithasieve:
uCheckthesieveattheintakeandcleanifnecessary
lCheckthemeasuringandsafetyequipmentforworkingorder
Ifthedischargeisequippedwithasoundabsorber:
uCleanthesoundabsorber
Ifthedischargeisequippedwithaleak-protectionnon-returnvalve:
uCleantheleak-protectionnon-returnvalve
Maintenance COBRADS5161B
Page 16 0870772511(EN)
lDrainthecoolingliquid(see“Drainingthecoolingliquid”)
Ifthecoolingwaterlineisequippedwithafilter:
uCheckthefilterandcleanorreplaceifnecessary
lCheckthesealsandreplaceifnecessary
lChecktheintakeanddischargelinesandcleanorreplaceif
necessary
Every16000hoursofoperation,atthelatest
after4years:
lDraintheoil(see“Drainingtheoil”)
lAmaininspectionofthevacuumpump(Busch)
LockOut/TagOutprocedure
lStopthepumpwiththeremotecontrol(pressonSTOPbutton
during10s)
lPressonemergencystopbutton
lSwitchoffthemaindisconnectswitch
lSwitchoffthecustomer’spowersupply
lSwitchoffthewater(inletfirst,thenoutlet)andnitrogenquick
connections
lPutthelabelorwarningboard“Maintenanceprocessing”onor
nexttothepump
SafetyLockoutprocedure
lTakeoffthelabelorwarningboard“Maintenanceprocessing”
lCheckthecoolingliquidandoillevelsaccordingtothechapters
“Checkingtheoillevel”and“Checkingthecoolingliquidlevel”
lOpenthepowerboxcoverandcheckthattheFDP1thermalrelay
isonmanualresetposition
lClosethecover
lSwitchonthemaindisconnectswitch
lReleasetheemergencystopbutton
lSwitchonthewater(outletfirst,theninlet)andnitrogenquick
connections
lMakesurethatthe“Necessaryinstallationinstructions”are
followed
lStartthepumpwiththeremotecontrol(pressonSTARTbutton)
Checkingtheoil
Checkingtheoillevel
lMakesurethatthevacuumpumphasbeenswitchedoffandthat
itcannotbeswitchedonagainaccidentally
lIndicationoftheoillevelonthevariousoilsightglasses
COBRANS(DP)vacuumpump
Iftheoillevelliesbelowthetargetcircle:
uTopupwithoil(see“Refillingoil”)
Iftheoillevelexceedsthetargetcircle:
uCheckthecondensatedrain
lDraintheoil(see“Drainingtheoil”)
WY(MB)rotarylobevacuumpump
Iftheoilleveldoesnotreachthetargetcircle:
uTopupwithoil(see“Refillingoil”)
Iftheoillevelexceedsthetargetcircle:
uCheckthecondensatedrain
lDraintheoil(see“Drainingtheoil”)
Refillingoil
NOTE:Oildoesnotnormallyhavetoberefilledoutsidethe
recommendedoilchangeintervals.Adropintheoillevelindicatesa
fault(see“Troubleshooting”).
CAUTION
Onlyfillinoilthroughtheoilfillerplugs.
CAUTION
Dangerofburnswhentheoilfillerplugsareopen.
Dangerofinjurieswhentheoilfillercapisnotscrewedonproperly.
Onlyunscrewtheoilfillercapwhenthevacuumpumphasbeen
switchedoff.
Thevacuumpumpmayonlybeswitchedonwhentheoilfillercap
isproperlyclosedandtight.
lMakesurethatthevacuumpumphasbeenswitchedoffandthat
itcannotbeswitchedonagainaccidentally
lUnscrewtheoilfillerplugsoftheDPandMBvacuumpumps(if
necessary)
COBRANS(DP)vacuumpump
lFillinoilintothetargetcircleoftheoilsightglasses
Oillevel,pumpnotoperating
lMakesurethattheoillevelisinthetargetcircleoftheoilsight
glasses
lMakesurethatthesealsofthefillercaparenotdamagedandthat
theysitproperly.Replacethemifnecessary
lScrewonthefillercapagain
WY(MB)rotarylobevacuumpump
lFillinoilintothetargetcircleoftheoilsightglasses
Oillevel,pumpnotoperating
lMakesurethattheoillevelliesinthetargetcircleoftheoilsight
glasses
COBRADS5161BMaintenance
0870772511(EN) Page 17
MAX
MIN
MIN MAX
MAX MIN
MAX
MIN
MIN MAX
MAX MIN
lMakesurethatthesealsofthefillercaparenotdamagedandthat
theysitproperly.Replacethemifnecessary
lScrewonthefillercapagain
Checkingthecolouroftheoil
NOTE:Theoilmustbeclearandtransparent.Apermanentmilky
colourisanindicationforcontaminationbyforeignbodies.Adark
colourisanindicationforoilthathasbeenchemicallyalteredor
contaminatedbyforeignbodies.
WARNING
Darkcoloredoilmayindicateahazardouspumpconditionwhich
couldcausepersonalinjury.
Ifdarkoilsimilartotheexampleshownisobserved,youhaveto
contacttheBuschCustomerServicewithoutdelay.
Oilchange
DANGER
Ifthevacuumpumphaspumpedgasesthatwerecontaminated
withforeignbodiesthatarehazardoustohealth,theoilisalso
contaminatedwiththeseforeignbodies.
Thereisahealthhazardwhenchangingcontaminatedoil.
Thereisalsoadangertotheenvironment.
Wearprotectiveclothingwhenreplacingcontaminatedoil.
Contaminatedoilmustbetreatedspeciallyandmustbedisposed
ofaccordingtoapplicableregulations.
Drainingusedoil
NOTE:Afterswitchingoffthevacuumpumpatnormaloperating
temperaturewaitnomorethan20minutesbeforetheoilisdrained.
lMakesurethatthevacuumpumpisswitchedoffandcannot
accidentallybeswitchedonagain
lMakesurethatthevacuumpumpisventedtoatmospheric
pressure
COBRANS(DP)vacuumpump
lPutadraintrayunderneaththeoildrainplugs(ODP)
lUnscrewtheoildrainplugs(ODP)
lCarefullyremovethedrainplugs
lDraintheoil
lBecauseofwearandtearontheseal,replacethecurrentdrain
plugswithnewones
Whentheoilflowhasstopped:
lClosetheoildrainplugs(ODP)
lSwitchonthevacuumpumpforafewseconds
lMakesurethatthevacuumpumpisswitchedoffandcannot
accidentallybeswitchedonagain
lCarefullyremovetheoildrainplugsagainanddrainanyremaining
oil
lCheckthatnometalswarfstickstothemagnetofthedrainplug,
cleanifnecessary
lRefittheoildrainplugsandtightenup
lDisposeoftheusedoilincompliancewithapplicableregulations
CAUTION
Becausetheendsofthedrainplugsaremagnetic,metalswarfcan
sticktothem.Alwayscleanawaythisswarfwhenremovingthe
drainplugs.
Becauseofwearandtearoftheseals,itisrecommendedtoreplace
thedrainplugswhenevertheoilischanged.
WY(MB)rotarylobevacuumpump
lPutadraintrayunderneaththeoildrainplugs(ODP)
lUnscrewtheoildrainplugs(ODP)
lDraintheoil
Whentheoilflowhasstopped:
lRefittheoildrainplugs(ODP)again
lSwitchonthevacuumpumpforabriefmomentandletitrunfora
fewseconds
lMakesurethatthevacuumpumpisswitchedoffandcannot
accidentallybeswitchedonagain
lCarefullyremovetheoildrainplugsagainanddrainanyremaining
oil
lMakesurethatthesealsofthedrainplugsarenotdamagedand
thattheysitproperly.Replacethemifnecessary
lRefittheoildrainplugsandtightenthemup
lDisposeoftheusedoilincompliancewithapplicableregulations
Fillinginnewoil
COBRANS(DP)vacuumpump
lPreparethequantityofoilneeded(see“Oiltype/quantity”)
WARNING
Theuseofchemicallycontaminatedorpollutedoilcanleadto
hazardouspumpconditionswhichcouldcausepersonalinjury.
NOTE:Thequantityofoilspecifiedintheinstallationhandbookisof
informativenatureonly.Checktheoillevelwiththehelpofthevarious
oilsightglassesonthevacuumpump.
lMakesurethatthedrainplugshavebeenfittedproperlyandthat
theydonotleak
CAUTION
Onlyfillinoilthroughtheoilfilleropening.
lUnscrewtheoilfillercap(OFP)
lFillinoilinthetargetcircleoftheoilsightglasses
Maintenance COBRADS5161B
Page 18 0870772511(EN)
Oillevel,pumpnotoperating
lMakesurethattheoillevelisinthetargetcircleoftheoilsight
glasses
lMakesurethatthesealsofthefillercaparenotdamagedandthat
theysitproperly.Replacethemifnecessary
lScrewonthefillercapagain
WY(MB)rotarylobevacuumpump
lPreparethequantityofoilneeded(see“Oiltype/quantity”)
NOTE:Thequantityofoilspecifiedintheinstallationhandbookisof
informativenatureonly.Checktheoillevelwiththehelpofthevarious
oilsightglassesonthevacuumpump.
lMakesurethatthedrainplugshavebeenfittedproperlyandthat
theydonotleak
CAUTION
Onlyfillinoilthroughtheoilfilleropening.
lUnscrewtheoilfillercap(OFP)
lFillinoilintothetargetcircleoftheoilsightglass
Oillevel,pumpnotoperating
lMakesurethattheoillevelliesinthetargetcircleoftheoilsight
glasses
lMakesurethatthesealsofthefillercaparenotdamagedandthat
theysitproperly.Replacethemifnecessary
lScrewonthefillercapagain
Checkingthecoolingliquid
Checkingthelevelofthecoolingliquid
lMakesurethatthevacuumpumphasbeenswitchedoffandthat
itcannotbeswitchedonagainaccidentally
lCheckthelevelofthecoolingliquid.
uUnscrewpurgecap(CLV)oncylinderupperplate.
Coolingliquidlevelshouldbejustundertheplate.
Ifthelevelisbelow:
uTopupwithcoolingliquid(see“Refillingcoolingliquid”)
Refillingcoolingliquid
NOTE:Coolingliquiddoesnotnormallyhavetoberefilledoutsidethe
recommendedchangeintervals.Adropintheleveloftheliquid
indicatesafault(see“Troubleshooting”).
lMakesurethatthevacuumpumphasbeenswitchedoffandthat
itcannotbeswitchedonagainaccidentally
lUnscrewthefillercap(CLF)forthecoolingliquid
lOpenpurgecap(CLV)oncylinderupperplateandpurgecapon
cylinderendplateB-side
lFillinbyfillerholeuntilcoolingliquidflowsbypurgecapon
cylinderendplateB-side
lStopfillin
lClosethepurgecaponcylinderendplateB-side
lFillinagainbyfillerholeuntilcoolingliquidflowsbypurgecapof
cylinderupperplate
lClosethepurgecapofcylinderupperplate
lScrewonthecoolingliquidfillercapagain
lIfliquidhasrunontotheoutsidesurfacesofthevacuumpump,
wipeitoff
Drainingthecoolingliquid
lMakesurethatthevacuumpumphasbeenswitchedoffandthat
itcannotbeswitchedonagainaccidentally
lMakesurethatthevacuumpumphasadjustedtoatmospheric
pressure
lPlaceacontainerunderthedrainplug(CLD)forthecoolingliquid
lUnscrewpurgecaponcylinderupperplate
lUnscrewpurgecaponcylinderendplateB-side
lUnscrewdrainplugofcoolingliquid
lDrainthecoolingliquid
Whencoolingliquidstopsrunningout:
lClosethedrainplugforthecoolingliquid
lScrewpurgecaps
lSwitchonthevacuumpumpandletitrunforafewseconds
lMakesurethatthevacuumpumphasbeenswitchedoffandthat
itcannotbeswitchedonagainaccidentally
lUnscrewagainpurgecap(CLV)oncylinderupperplate
lUnscrewagainpurgecap(CLV)oncylinderendplateB-side
lUnscrewthedrainplugforthecoolingliquidagainanddrainthe
remainingliquid
lMakesurethatthesealofthedrainplugisnotdamagedandthat
itsitsproperly.Replaceitifnecessary
lScrewonthedrainplugagain
lScrewpurgecaps
lDisposeoftheusedcoolingliquidaccordingtoapplicable
environmentalprotectionregulations
Fillinginnewcoolingliquid
lPreparethequantityofcoolingliquidneeded(see“Coolingliquid
type/quantity”)
NOTE:Thequantityofcoolingliquidspecifiedisofinformativenature
only.Respecttheprocedureoffillingthecoolingliquid.
lMakesurethatthedrainplugsitsproperlyanddoesnotleak
lUnscrewpurgecaponcylinderupperplate
lUnscrewpurgecaponcylinderendplateB-side
lUnscrewthefillercapforthecoolingliquid
COBRADS5161BMaintenance
0870772511(EN) Page 19
MAX
MIN
MIN MAX
MAX MIN
MAX
MIN
MIN MAX
MAX MIN
lFillinbyfillerholeuntilcoolingliquidflowsbypurgecapof
cylinderendplateB-side
lStopfillin
lClosethepurgecaponcylinderendplateB-side
lFillinagainbyfillerholeuntilcoolingliquidflowsbypurgecapof
cylinderupperplate
lClosethepurgecaponcylinderupperplate
lMakesurethatthesealofthefillercaparenotdamagedandthat
theysitproperly.Replacethemifnecessary
lScrewonthefillercapagain
lWipecoolingliquidthatmayhaverunonoutsidesurfacesof
vacuumpump
Checkingthecoolingwater
Checkingthecoolingwaterflow
lCheckthecoolingwaterflowregularly
Iftheflowdrops,checkforleaks
uMakesurethatthespecificationsofthecoolingwaterare
followed
Checkingthenitrogen
Checkingthenitrogenflow
lCheckthenitrogenflowregularly
Iftheflowdrops,checkforleaks
uMakesurethatthespecificationsofthenitrogenarefollowed
Checkingthecurrentconsumption
lCheckthecurrentintensityofthemotorsoftheDPandMB
vacuumpumps
Anincreasedintensityisanindicationforafault(see
“Troubleshooting”)
Checkingthesoundabsorber
(accessory)
lMakesurethatthecondensatedoesnotcollectattheexhaustof
thevacuumpump
lDrainthecondensateatthedrainopeningandcollectitina
container
lDisposeofthecondensateaccordingtoapplicableenvironmental
protectionregulations
lCheckthesoundabsorberregularlyandcleanitifnecessary
Checkingtheleak-protection
non-returnvalve(accessory)
lChecktheleak-protectionnon-returnvalveregularlyandcleanitif
necessary
CAUTION
Wearprotectiveclothingwhencarryingoutmaintenanceworkon
thesoundabsorberandleak-protectionnon-returnvalve.
Therecouldstillberesiduesofcontamination.
Overhaul
CAUTION
Inappropriatemaintenanceworkonthevacuumpumpcandamage
thepump.
Dangerofexplosion!
Ifrequirementsarenotmet,thevacuumpumpmaynotbeswitched
on!
Shouldworkexceedthedismantlingworkdescribedinthishand-
book,itmayonlybecarriedoutbyauthorizedpersons.
DANGER
Ifthevacuumpumphaspumpedgasesthatwerecontaminated
withforeignbodiesthatarehazardoustohealth,theoiland
condensatearealsocontaminatedwiththeseforeignbodies.
Theseforeignbodiescanpenetrateintopores,openingsandother
internalpartsofthevacuumpump.
Thereisahealthhazardwhendismantlingthevacuumpump.
Thereisalsoadangertotheenvironment.
Priortoshipping,thevacuumpumpmustimperativelybe
decontaminatedandthedegreeofcontaminationmustbe
documentedinadeclarationofdecontamination("Declarationof
Decontamination"),whichcanbedownloadedfrom
www.buschvacuum.com.
Buschservicewillonlyacceptvacuumpumpsthatcomewitha
completelyfilledinandlegallybindingsignedform.
Removalfromservice
Temporaryremovalfromservice
Beforedisconnectingtheintakeandexhaustlinesandswitchingoffthe
coolingwaterandnitrogenlines,makesurethatthelineshave
adjustedtoatmosphericpressure
Recommissioning
CAUTION
Ifthevacuumpumpwasswitchedoffforalongerperiodoftime,
therotorsoftheCOBRANSvacuumpumpcanbejammed.
Turnthescrewrotorsbyhand.
lMakesurethatthevariousprotectiveelements,stoppersor
adhesivetapeshavebeenremoved
lSwitchonthevacuumpumpbyfollowingtheproceduredescribed
inthechapter“Installationandstart-up”
Overhaul COBRADS5161B
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Busch COBRA DS 5161–9161 B/F User manual

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User manual

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