Table of Contents
Instruction Manual COBRA DS 3010 G_EN_en 3 | 68
6.1.7 Electrical Connection/ Checks............................................................................................................. 25
6.2 Installation ........................................................................................................................................................... 25
6.2.1 Mounting ............................................................................................................................................... 25
6.2.2 Electrical Connection............................................................................................................................ 26
6.2.3 Equipment Connections (with Options)............................................................................................. 31
6.2.4 Connection of Lines/ Pipes.................................................................................................................. 31
6.2.5 Oil Filling ................................................................................................................................................ 32
6.2.6 Cooling Liquid Filling............................................................................................................................ 37
6.2.7 Direct Cooling Checking ...................................................................................................................... 39
6.2.8 Nitrogen Supply Checking................................................................................................................... 39
6.2.9 Operating Parameters Saving ............................................................................................................ 39
6.3 Recommendations on Operation...................................................................................................................... 39
6.3.1 Application............................................................................................................................................. 39
6.3.2 Switching the Vacuum Pump On/ Off ................................................................................................ 41
6.4 Load Lock Operation Mode................................................................................................................................ 42
7 Standard Operational Time Chart ...................................................................................................................... 44
7.1 Signal Control Mode (Select LL Mode = EXTERN) ............................................................................................ 44
7.2 Current Control Mode (Select LL Mode = AUTO)............................................................................................. 45
8 Maintenance ......................................................................................................................................................... 46
8.1 Maintenance Schedule ....................................................................................................................................... 48
8.1.1 Lock Out/ Tag Out Procedure ............................................................................................................. 49
8.1.2 Safety Lockout Procedure ................................................................................................................... 49
8.2 Oil Checking......................................................................................................................................................... 49
8.2.1 Oil Level Checking ................................................................................................................................ 49
8.2.2 Oil Refilling ............................................................................................................................................ 50
8.2.3 Oil Color Inspection.............................................................................................................................. 51
8.2.4 Oil Change............................................................................................................................................. 51
8.3 Cooling Liquid Checking..................................................................................................................................... 54
8.3.1 Cooling Liquid Level Checking ............................................................................................................ 54
8.3.2 Cooling Liquid Refilling........................................................................................................................ 54
8.3.3 Cooling Liquid Draining....................................................................................................................... 55
8.3.4 New Cooling Liquid Filling................................................................................................................... 55
8.4 Additional Checking............................................................................................................................................ 56
9 Overhaul ................................................................................................................................................................ 57
10 Removal from Service .......................................................................................................................................... 58
10.1 Temporary Removal from Service..................................................................................................................... 58
10.2 Recommissioning................................................................................................................................................ 58
10.3 Dismantling and Disposal .................................................................................................................................. 59
11 Spare Parts ............................................................................................................................................................ 60
12 Troubleshooting ................................................................................................................................................... 61
13 Oil Type/ Quantity ................................................................................................................................................ 63
13.1 Oil Type................................................................................................................................................................. 63
13.2 Oil Quantity.......................................................................................................................................................... 63
14 Cooling Liquid Type/ Quantity ............................................................................................................................ 64
14.1 Cooling Liquid Type ............................................................................................................................................ 64
14.2 Cooling Liquid Quantity...................................................................................................................................... 64
15 Technical Data ...................................................................................................................................................... 65
16 EU Declaration of Conformity ............................................................................................................................. 66
17 UK Declaration of Conformity............................................................................................................................. 67