Subject to change without notice
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Dangerous chemicals are safe when con-
tained properly. Small leaks may merely re-
quire maintenance, while major leaks require
an emergency purge, destroying valuable
work in progress. Multiple WLL180 fibre-optic
sensors with LL3-DW02 PTFE-coated leak
detection fibers quickly report the extent of
the leak to the Flexi Soft controller, which
incorporates end user programmable deci-
sion tree functions to trigger the appropriate
response. Hazardous spills are reliably identi-
fied.
The precise position of the wafer on the robot
arm can be determined by monitoring the
outputs of multiple sensors. High-speed, low-
jitter sensors and precise light spots are es-
sential for this operation. The WLL180 fiber-
optic sensor with 16 µs response time
together with small aperture LL3-TH fiber-
optic cables are highly accurate, cost-effec-
tive, and fit the machine constraints.
Non-contact SEK hollow-shaft motor feed-
back system from SICK offers simple, robust
structures with virtually no mechanism for
failure. Very low weight, inertia, and profiles
(< 10 mm) simplify integration with a large
variety of shaft diameters. Some models of-
fer 0.001° of resolution, while all offer abso-
lute output over 360° rotation.
Wafer processes depend on exact substrate
orientation. A fiber-based system based on
the WLL190T-2 analog fiber-optic sensor
uses LL3-TS fiber-optic cables in a light array
to quickly and precisely center the substrate
and report the notch position.
Here, a pair of WT12L laser proximity switch-
es map wafers.
Product see Page 57-59
Product see Page 58-59
Product see Page 57-59
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