Installation and Operation Manual
X-DPT-DeviceNet-SLA5840-Series-RevB-RT-eng
Part Number: 541B202AAG
March, 2015
xii
Contents
Brooks DeviceNet MFC-RTs
Table 5-79 S-Single Stage Controller Instance 0 Services ......................................................................... 74
Table 5-80 S-Single Stage Controller Instance 1 Services ......................................................................... 74
Table 5-81 S-Gas Calibration Instance 0 Attributes .................................................................................... 75
Table 5-82 S-Gas Calibration Instance 1..n Attributes ................................................................................ 76
Table 5-82 S-Gas Calibration Instance 1..n Attributes (continued) ............................................................. 77
Table 5-83 Gas Correction Type ................................................................................................................. 78
Table 5-84 S-Gas Calibration Instance 0 Services ..................................................................................... 78
Table 5-85 S-Gas Calibration Instance 1..n Services ................................................................................. 78
Table 5-86 Get All Instances Arguments ..................................................................................................... 79
Table 5-87 Get All Instances Response ...................................................................................................... 79
Table 7-1 Summary Table of Input Assemblies .......................................................................................... 83
Table 7-2 Summary Table of Output Assemblies ........................................................................................ 84
Table 7-3 Input Assembly 1 ......................................................................................................................... 85
Table 7-4 Input Assembly 2 ......................................................................................................................... 85
Table 7-5 Input Assembly 3 ......................................................................................................................... 86
Table 7-6 Input Assembly 4 ......................................................................................................................... 86
Table 7-7 Input Assembly 5 ......................................................................................................................... 87
Table 7-8 Input Assembly 6 ......................................................................................................................... 87
Table 7-9 Output Assembly 7 ...................................................................................................................... 88
Table 7-10 Output Assembly 8 .................................................................................................................... 88
Table 7-11 Input Assembly 10 ..................................................................................................................... 88
Table 7-12 Input Assembly 11 ..................................................................................................................... 89
Table 7-13 Input Assembly 12 ..................................................................................................................... 89
Table 7-14 Input Assembly 13 ..................................................................................................................... 89
Table 7-15 Input Assembly 14 ..................................................................................................................... 91
Table 7-16 Input Assembly 15 ..................................................................................................................... 91
Table 7-17 Input Assembly 16 ..................................................................................................................... 92
Table 7-18 Input Assembly 17 ..................................................................................................................... 93
Table 7-19 Input Assembly 18 ..................................................................................................................... 94
Table 7-20 Output Assembly 19 .................................................................................................................. 94
Table 7-21 Output Assembly 20 .................................................................................................................. 95
Table 7-22 Input Assembly 100 ................................................................................................................... 95
Table 7-23 Input Assembly 101 ................................................................................................................... 96
Table 7-24 Output Assembly 102 ................................................................................................................ 96
Table 7-25 Output Assembly 103 ................................................................................................................ 97
Table 7-26 Data Types ................................................................................................................................ 98
Table 7-27 Volumetric Flow Volumetric Flow Units ..................................................................................... 99
Table 7-29 Mass Flow Units ...................................................................................................................... 101
Table 7-30 Pressure Units ......................................................................................................................... 102
Table 7-31 Pressure Units ......................................................................................................................... 102
Table 7-32 NET LED Flash Codes ............................................................................................................ 103
Table 7-33 MOD LED Flash Codes ........................................................................................................... 103
Table 7-34 Get Attribute Single Service Parameters ................................................................................ 104
Table 7-35 Success Response Data ......................................................................................................... 104
Table 7-36 Set Attribute Single Service Parameters ................................................................................. 104
Table 7-37 Success Response Data ......................................................................................................... 104
Table 7-38 S-Device Supervisor State Event Matrix ................................................................................. 106
Table 7-38 S-Device Supervisor State Event Matrix (continued) .............................................................. 107
Table 7-39 Parameter Groups ................................................................................................................... 107
Table 7-40 Supported Flow Sensor Parameters ....................................................................................... 108