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CADEN CE MIX E D-SIG N AL / M EMS C O -DESI G N MET H ODOLO G Y
SIMPLI INTERFACE DEDICATED TO MEMS DOMAIN
One challenge in the co-design of MEMS and mixed-signal
portions of a chip is that they might not necessarily be sharing
the same flow. Moreover, the information required by the mixed-
signal design team might not be readily available from the MEMS
tools.
An extra layer is necessary to automate the generation of all the
necessary information from the MEMS tools while still allowing IP
protection.
The Cadence Mixed-Signal / MEMS Co-Design Methodology uses
a SIMPLI interface dedicated to the MEMS domain. SIMPLI is a
type of VCAD productivity IP that operates on standard inputs
and generates views required for mixed-signal design within the
Cadence Design Framework. Moreover, SIMPLI automates the
extraction of parasitic coupling capacitances at the interface with
thereleasedMEMSstructure.UsingtheSIMPLIinterface,
designers have the flexibility to export their layout as an abstract
view, and their behavioral or reduced-order models in a 128-bit
RSA encrypted format, while ensuring that the information is
useful for simulation by the mixed-signal design group.
FULL-CHIP SIMULATION EARLY IN THE DESIGN CYCLE
To figure out conceptual problems in the design, an early
co-simulation of the whole system needs to be available. The
Mixed-Signal / MEMS Co-Design Methodology enables testbench
reuse and provides different configurations, which allows full-
chip verification while the design is being developed, thus
lowering design costs.
PCELL-DRIVEN MIXED-SIGNAL / MEMS PHYSICAL
CO-DESIGN
The Mixed-Signal / MEMS Co-Design Methodology demonstrates
a Pcell approach for laying out complicated MEMS structures,
such as accelerometers. Early design-rule checks (DRC) are
implemented directly in the Pcell. A motion-aware Pcell is
demonstrated for the purpose of electrical parasitic extraction of
the MEMS structure.
An FEM-aware Pcell allows for easy communication with a
portion of the Pcell for simulation with FEM tools. All the Pcells
are linked to the behavioral models through Cadence Virtuoso
®
technologies.
Foundry PDK library name
Tabs configuring information
of views to be generated
SIMPLI run mode:
• Release - for MEMS designer to
release a MEMS component
• Integration - for SoC designer to
integrate a MEMS
Output
directory
containing all
generated files
and views
Switches
specifying
which views
to be
created
Table containing
cells found in
various input files
Figure 5: SIMPLI interface
System output
Paramerterizable accelerometer
suitable for both simulation
optimization and schematic-
driven layout
Accelerometer
mechanical inputs
stimuli through
inherited connections
Switched-cap
sampling clock
Figure 6: Early co-simulation of the full chip, including the MEMS
Figure 7: Pcell approach to laying out complex MEMS structures
Mechanical ports expressed in
VHDL-AMS displacement type
Parameters governing
accelerometer geometrical
dependancies
MEMS electical ports
corresponding to silicon ports
Substrate connection
port name