TELEVAC MM200 User manual

TELEVAC

A DIVISION OF THE FREDERICKS COMPANY

2400 PHILMONT AVE.

HUNTINGDONVALLEY, PA 19006

MM200

INSTRUMENT MANUAL

VACUUM GAUGE MODEL MM200

160Phone:(215) 947-2500 fax:(215) 947-7464 e-mail:[email protected] web site:www.televac.com

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TELEVAC

PARTS

#

QTY

ITEM DESCRIPTION

1

MM200

2

1

Instruction Manual

3

1

AC Power Cable

4

1

Power supply module

5

1 SET

Rubber Feet

1

3

4

5

INSTRUMENT MANUAL

VACUUM GAUGE MODEL MM200

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TABLE OF CONTENTS

SECTION TITLE PAGE

TABLE OF CONTENTS 1

100 INTRODUCTION 10

101 DESCRIPTION 10

102 STANDARD FEATURES 11

Measurement Expansion 11

Sensor interface Modules 11

Computer Interface Modules 11

Non-volatile Memory 11

Display 11

Keyboard 11

CPU Configuration 11

103 SETPOINT RELAYS 11

104 VACUUM GAUGE TUBES 11

Diaphragm 12

Thermocouple 12

Convection 12

Cold Cathode 12

Hot Cathode 12

Capacitance Diaphragm Gauge 13

200 INITIAL CHECKOUT 14

201 UNPACKING AND INSPECTION PROCEDURES 14

202 INVENTORY 14

203 INTIAL CHECK PROCEDURES 14

Correct Operating Voltage 14

Initial Displays 15

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SECTION TITLE PAGE

300 INSTALLATION 18

301 MODULE CONFIGURATION 18

302 LINE VOLTAGE SELECTION 23

303 GAUGE CONTROLLER INSTALLATION 23

Freestanding 23

Rack Mounted 23

304 GAUGE SENSOR INSTALLATION WARNINGS 24

305 VACUUM CONNECTION FITTINGS 25

NPT Pipe Thread Connections 25

0-ring Compression Fittings 25

Conflat Flange Fittings 25

KF Flange Connections 26

Cajon Fittings 26

306 GAUGE SENSOR INSTALLATION 26

307 REMOVAL AND INSTALLATION OF MODULES 27

308 DESCRIPTION OF MODULES 28

Power Supply Module 28

Setpoint Relay Module 29

Communications Module 29

Thermocouple Module 30

Convection Module 31

Diaphragm Module 31

Cold Cathode Module 32

3D Hot Cathode Resident Module (I² R Degas) 32

3E Hot Cathode Resident Module (EB Degas) 34

3F Hot Cathode Mini BA Module (software ver. 2.31 or higher) 35

Capacitance Diaphragm Modules 38

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SECTION TITLE PAGE

400 OPERATION 40

401 DISPLAY DESCRIPTION DEFINITIONS 40

Station Number 40

Data Display 41

Units 41

Gas Type 41

Leak Rate Indicator 41

Setpoint Relay Status Indicator 41

402 ERROR INDICATIONS 41

403 KEYPAD DESCRIPTION 42

PUSHBUTTON Functions 43

TEST/OP Pushbutton 43

SETUP Pushbutton 43

N2/GAS Pushbutton 43

UP/DOWN Arrows 43

UNITS Pushbutton 43

LEAK RT Pushbutton 43

404 RELAY SETPOINTS 43

Range of Use 44

Changing Sensor Assignment 44

405 ANALOG 0-10V OUTPUTS 45

0-10V Outputs 46

0-10V Output Options 49

406 INITIAL OPERATION SETUP SEQUENCE 50

Pressure Readings 50

Relay Setup 50

Gas 51

Measurement Units 51

Leak rate 51

407 3F HOT CATHODE MODULE (Mini BA) (software ver. 2.31 or higher) 52

Sensitivity 52

Degas 52

Filament 52

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SECTION TITLE PAGE

500 SETUP 53

501 INTIALIZATION 53

Initial Displays 53

502 USE OF PUSHBUTTONS 54

TEST/OP Pushbutton 54

Return to Normal Operation 54

Self-Diagnostic Test 54

UP/DOWN Arrows 56

SETUP Pushbutton 56

Cold Cathode Setup 56

3D & 3E Hot Cathode Setup 59

Degass Timer 62

Relay Setpoints 62

SP#1 – Station Assignment 62

SP#1 – Setpoint Selection 62

UNITS Pushbutton 63

N2/GAS Pushbutton 64

LEAK RT Pushbutton 64

HANDLING UNITS 64

For versions 2.31 or higher. Refer to Section 6.2, page 602

503 3F HOT CATHODE MODULE (Mini-BA) 65

F (AUTO or SELF or BOTH) 65

FIL (ON or OFF or RDY) 65

DGAS (0FF or ON) 65

DGAS (# time) 65

FIL NBR (1 or 2) 65

SENS (# sensitivity) 65

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SECTION TITLE PAGE

600 COMMUNICATIONS 66

601 RS232 INTERFACING WITH COMPUTER USING MICROSOFT HYPER 66

TERMINAL

602 RS232 / RS485 PROTOCOL FOR SOFTWARE VERSIONS 2.31 OR HIGHER 67

RS232 or RS485 67

STD or ALT 67

UNIT #xx 67

PREF #xx 67

RS485 Prefix and Addresses Table – For Software Ver. 2.31 or Higher 68

New Commands For MM200 - For Software Ver. 2.31 or Higher 69

Commands That Have Been Updated For 3F Modules 69

Commands For The 3F Hot Cathode MINI-BA Module 70

603 COMMUNICATIONS – FOR SOFTWARE VER. 1.35 – 2.31 70

604 RS232/RS485 COMMANDS 70

RS232/RS485 70

Communications 75

Configuration 77 Data

Output 79

Display 81

Gas 82

Hot Cathode 83

Leak Rate 84

Outputs 85

Set Point Setting Values 88

Convection Gauge 4A atmosphere Adjustment 92

Zeroing Thermocouple, Convection, and Diaphragm Gauges 92

RS232/RS485 Command Summary 95

RS485 Host Command Set 99

RS232 Commands Used To Implement RS485 101

Alternate address Scheme for RS485 102

Special Commands 102

RS232 Hardware 103

RS485 Hardware 103

605 COMMUNICATIONS – FOR SOFTWARE VER. 1.21 – 1.34 104

RS232 Protocol 104

606 COMMAND SUMMARY – FOR SOFTWARE VER. 1.19 – 1.20 105

Hardware 108

Commands 109

“B” Mode Commands 109

Cold Cathode 110

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SECTION TITLE PAGE

606 COMMAND SUMMARY – FOR SOFTWARE VER. 1.19 – 1.20

Communications 111

127 Data Output 113

Hot Cathode 115

Leak Rate 116

Output Formats 117

Set Points 117

Set Point Setting Values 118

607 COMMUNICATIONS – FOR SOFTWARE VER. 1.0 – 1.19 119

RS232 Protocol 119

RS232 Hardware 127

Special Commands 127

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SECTION TITLE PAGE

700 CALIBRATION 128

701 ELECTRICAL "VERIFICATION" 128

Equipment Required 128

Procedure 129

702 VACUUM CALIBRATION 129

Equipment Required 130

Procedure 131

703 CALIBRATION FOR ALTERNATE GASSES 133

800 SPECIFICATIONS 134.

801 CONTROLLER SPECIFICATIONS 134

802 CONTROLLER DIMENSIONS 134

803 SENSORS 135

804 ORDERING INFORMATION 135

900 TROUBLESHOOTING 137

901 PRELIMINARY TROUBLESHOOTING 137

902 SETUP OF MODULE BOARDS 138

Setpoint relay module 138

Digital interface module 140

Thermocouple module 141

Convection module 143

Cold Cathode module 145

Diaphragm modules 149

Capacitance Diaphragm module 151

3D Hot Cathode module 153

3E Hot Cathode module 154

903 DRAWINGS AND SCHEMATICS 155

904 CLEANING COLD CATHODE GAUGE TUBES 156

905 SUPPRESSOR INSTALLATION FOR NOISY ENVIRONMENTS 157

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SECTION TITLE PAGE

1000 MISCELLANEOUS 158

CALIBRATION MODE 158

DIAPHRAGM GAUGES 158

INSTALLATION OF EPROMS 159

INSTRUMENT MANUAL

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TELEVAC

100 INTRODUCTION

This manual provides information pertaining to the installation, operation, and maintenance of the Televac MM 200

vacuum gauge. Various sensor modules, their options, and associated sensors are covered in this manual.

Fig. 1.1 - TELEVAC Modular Gauge

101 DESCRIPTION

The TELEVAC MM200 programmable vacuum gauge controller consists of a basic electronic unit and modular

sensor signal processing interface boards. These components utilize the latest in digital and analog technology

and provide a versatile, easy to use means for measuring pressure (vacuum). With the appropriate system and

sensors, pressures ranging from 10-11 Torr through 7.5 x 10+ 3 (10 Bar) are accurately monitored. Additionally,

vacuum chamber leak-up rate can be measured. A large selection of sensors and mounting configurations, as well

as hardware control interfaces, are available for user convenience.

There is one basic electronics unit, which accepts modules for all gauge types as well as relay modules and digital

interface modules. Several sensors are presently available. These are described in Section 104. Other sensor

modules will be available in the future. User-installed modules permit expansion. The controller provides a choice

of display data formats, display

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102 STANDARD FEATURES

MEASUREMENT EXPANSION - The electronics unit can support additional measurement modules. These

additional modules can be any mix of the above listed sensors.

SENSOR INTERFACE MODULES - Each gauge has several available sensor interface modules (See Section 300).

These modules contain the signal conditioning and measurement circuitry required to operate the sensor properly.

They also provide the user with a scalable analog output of pressure.

COMPUTER INTERFACE MODULES - The computer interface provides a means for electronic communication

with the gauge controller. An RS232 and an RS485 serial data link is provided. The data format is discussed in

Section 600.

NON-VOLATILE MEMORY - The instrument contains non-volatile memory (EEPROM) that saves all programmable

SETUP parameters when the instrument power is off.

DISPLAY - The display system for all gauges has two large multiplexed light emitting diode (LED) displays. Each

display can show a maximum of four (4) digits of data including an exponent. The display also has smaller displays

which indicate selected station number, selected measurement units, alternate gas type, and setpoint relay status.

KEYPAD - The keypad is a tactile feel, non-membrane unit that provides keys for programming and control

operations. The number of keys has been optimized for simple operation.

CPU CONFIGURATION - The central processing unit (CPU) provides the operator choices for the display format,

measurement units, communications format and baud rates as well as the ability to lock out keyboard parameter

changes.

103 SETPOINT RELAYS

The Process Control Relay or Setpoint Relay Module provides four (4) relays per module (eight maximum. These

relays are assignable to any installed station.

104 VACUUM GAUGE TUBES

This instrument supports several types of vacuum gauge tubes (sensors). Combinations of sensors can be used to

cover a wide range of absolute pressures. These

sensors can also be used to make measurements in several locations.

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104 VACUUM GAUGE TUBES (cont.)

DIAPHRAGM GAUGE - Measures absolute pressure by detecting very small deflections of a metal diaphragm via

a strain gauge. It is not sensitive to gas type. These sensors are temperature compensated, but do respond to

rapid changes of temperature. Temperature changes cause zero shifts. Users should note that occasional

adjustments of the zero point are normal for sustaining accuracy with this type of sensor, and provision for making

this adjustment should be included in the installation. Fine adjustment of the zero and atmospheric point is

accomplished at the rear panel on the diaphragm module. Sensor range: 1E: 1 to 800 Torr; 1F: 1000 to 9999

mbar.

THERMOCOUPLE GAUGE - Measures absolute pressures by determining the heat loss from a fine wire filament.

The response of the sensor depends on the gas type. These sensors are compensated for room temperature

variation and are calibrated for vertical operation but operate with little error in any orientation. "Zero" calibration

potentiometers are provided for occasional adjustment as required. Sensor range: 10-3 to 20 Torr.

CONVECTION GAUGE - Measures absolute pressures by determining the heat loss from a fine wire filament. The

response of the sensor depends on the gas type. These sensors are compensated for room temperature variation

and are calibrated for operation in the VERTICAL POSITION ONLY. ZERO and ATM (atmospheric pressure)

calibration potentiometers are provided for occasional adjustment as required. Sensor range: 10-3 to 10+3 Torr.

COLD CATHODE GAUGE - A high vacuum sensor that measures pressure by ionizing the residual gases in a

magnetron discharge. The body of the gauge serves as the cathode, and is at ground potential. The anode

operates at voltages up to 3000 volts. A permanent magnet traps electrons in the gauge to sustain the discharge at

very low pressure. This type of gauge may be less precise in its reading than hot cathode gauges and, like the hot

cathode gauge, is also sensitive to gas type. However, it is relatively rugged and has no filament to burn out, so

that it is often used in applications where hot cathode gauges are not reliable. Cold cathode tubes might experience

ignition time delay when trying to turn them on at high vacuum. The 7FCS quick start gauge has a thermo emission

igniter inside so every time when power applies to MM200 the filament goes on for 5 second to start ionization

chain reaction.There are various designs to cover different pressure (vacuum) ranges. Refer to Table 4.1. Sensor

range: 10-11 to 10-2 Torr.

HOT CATHODE GAUGE - Hot cathode gauges typically have the Bayard-Alpert geometry and are used for high

vacuum measurements. Both glass enclosed and nude sensors are available. These sensors measure absolute

pressures by sensing the ion current generated by the interaction of a beam of electrons from a hot filament with

gas molecules in the vacuum system. This kind of gauge is sensitive to gas types. Filaments can be tungsten or

Thoria-Coated Iridium. The Iridium filaments don't burn out as readily if accidentally exposed to air when hot, but

can be attacked by chlorides and fluorides, which decompose the coating. Tungsten filaments also run noticeably

hotter. It is normal for such gauges to have a residual current (the x-ray limit), which may introduce significant

errors below 10-10 Torr depending on construction. It is also normal for sensors to generate significant amounts of

outgassing when the hot filament is turned on. Degassing is often used to accelerate this process prior to making

measurements at very low pressures. Sensor range: 10-11 to 10-2 Torr.

The pressure range for various sensors is shown in Table 4.1.

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TELEVAC

NOTE:

Capacitance Diaphragm Gauge Tubes with a range of greater than 1 Torr will not control the Cold

Cathode automatic turn on!

104 VACUUM GAUGE TUBES (cont.)

CAPACITANCE DIAPHRAGM GAUGE - Measures absolute pressure by detecting very small deflections of a

metal diaphragm via a change in capacitance between the diaphragm and one or more electrodes. It is not

sensitive to gas type. These sensors are temperature compensated, but do respond to rapid changes of

temperature. Temperature changes cause zero shifts. In some cases the gauges are heated for stability and to

prevent condensation of process gasses. Users should note that occasional adjustments of the zero point are

normal for sustaining accuracy with this type of sensor, and provision for making this adjustment should be included

in the installation. Fine adjustment of the zero and atmospheric point is accomplished at the rear panel on the

diaphragm module. Sensor ranges (full scale):

5A = 1000 Torr; 5B = 100 Torr; 5C = 10 Torr

5D = 1 Torr; 5E = 0.1 Torr; 5F = special

INSTRUMENT MANUAL

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200 INITIAL CHECKOUT

201 UNPACKING AND INSPECTION PROCEDURES

1. Remove the Vacuum Gauge Controller from its shipping container

2. Carefully examine the unit for damage that may have occurred during shipping. This is especially important

if you notice signs of obvious rough handling on the outside of the cartons. REPORT ANY DAMAGE TO

THE CARRIER AND TO TELEVAC IMMEDIATELY.

3. DO NOT discard any packing materials until you have taken inventory and completed the check

procedures. You may wish retain the packing material for later use.

4. If the instrument must be returned to TELEVAC be sure to contact the service department (215-947-2500)

for a Return Material Authorization (RMA) number. Items will not be accepted without an assigned RMA.

They must be packaged, insured and shipped with transportation charges prepaid to:

TELEVAC - Division of

The Fredericks Company

2400 Philmont Avenue

Huntingdon Valley, PA 19006

202 INVENTORY

Compare the contents of the shipping containers with the invoice to be sure you received all necessary equipment.

203 INITIAL CHECK PROCEDURES

For the Initial Check Procedure you need only the control unit and the power cord. Do not connect any sensors,

cables or other devices to the unit for this check.

CORRECT OPERATING VOLTAGE - Before connecting the power cord, check the line voltage selector, which is

part of the power supply board at the rear of the unit. For 100-120V application the arrow should point to the

embossed "110" on the switch as shown in Fig. 2.1. To change to 220-240V, use a small screwdriver to turn the

switch from its position to align the arrow with the embossed "220" on the switch. (220V not permitted for

Capacitance Diaphragm Gauges. Make sure that the power switch is OFF and then plug the power cord into the

unit's socket and an appropriate outlet.

It is recommended that a surge protector circuit is used or make sure that your power line is safe from power surge.

The noise (power surge) through the power line may alter the contents of a non-volatile memory (known as data

memory) in EEPROM and cause the controller to operate erratically.

INSTRUMENT MANUAL

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WARNING: Voltages may exist on rear panel connectors.

DO NOT touch the exposed connectors when power is connected to the

instrument.

Note that the rear panel configuration shown in Fig. 2.1 is just one of the many possible combinations of gauges

and relay modules. This configuration has the following characteristics:

MM200 - Microprocessor with power supply,

4 relays, 5 stations and RS232

SLOT 0 - Power supply

SLOT 1 - S1- Setpoint relay module

SLOT 2 - S1- Setpoint relay module

SLOT 3 - T1- Dual thermocouple module (2 stations)

SLOT 4 - C1- Dual convection module (2 stations)

SLOT 5 - B1- Blank panel

SLOT 6 - C1- Cold cathode module (1 station)

SLOT 7 - R1- RS232 /RS485 module

INITIAL DISPLAYS - The front panel (shown in Fig. 2.2) is used to observe the displays and to execute the initial

self-test of the unit. Remove the protective plastic covering over the displays. Turn the power on by pressing the

rear panel power switch to ON. The initial display shows the word "SOFt" followed by a number indicating which

software version is present (See Fig. 2.3).

CC 7E

RS485

POSITION #0 #1 #2 #3 #4 #5 #6 #7

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TELEVAC

Fig. 2.2 – Front Panel

.

Fig. 2.3 – Software Version

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This message is followed by an error code, if any errors are present. (see Section 900). If no errors are present,

the initial display for the installed sensor modules appears.

In the initial right-hand display, the default mode is to display the lowest number station installed (except ionization

type gauge if there are other than ionization gauges installed). Since no sensor and/or cable is plugged in, the

right-hand display reads "CAbL" and the adjacent small number reads the corresponding station number (typically

#1). The left hand display shows the lowest number ionization (cold cathode or hot cathode) station installed

(station #7 in the example shown in Fig. 2.4). Since the high voltage power is off, the display reads "OFF". (See

Fig. 2.4). If no ionization gauge is installed, the left-hand display shows the second lowest station installed.

Fig. 2.4 shows the correct initial display for this configuration. If a display does not appear, check the power outlet

and the main fuse on the rear of the unit.

If further checkout is desired, refer to Section 502.

Assuming that the initial display check is successful, the instrument if ready for installation. Otherwise contact your

TELEVAC Service Department (See front cover).

.

Fig. 2.4 - Typical Initial Display

7

1

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300 INSTALLATION

301 MODULE CONFIGURATION

A controller is normally ordered with various optional sensor interface modules and they are factory installed before

shipment. Before installation, verify that the selection of modules will accomplish the desired results in your

application. If additional modules are required or you have any questions about using this gauge in your

application, please call Televac at 215-947-2500. If you wish to add modules, refer to Section 307 AND 308.

One possible configuration for this gauge was shown in Section 203. The allowable configurations are restricted by

the number of cold cathode and/or hot cathode ionization stations installed.

The MM200 has six slots, which can be populated with various Televac modules. There is also a half slot that can

be used to insert a communications module. This is the only slot into which the communications module can be

inserted. This board will currently accommodate an RS232/RS485 interface. The other slots can be fitted with

various combinations of the following currently available boards:

PCB #

TYPE 6200 STA SLOT DESCRIPTION

1E -220 2 1 A dual diaphragm module.

1F -224 2 1 A dual diaphragm module.

2A -186 2 1 A dual thermocouple module.

3D -226 1 4 A single hot cathode module with Joule de-gassing.

3E -232 1 4 A single hot cathode module with EB de-gassing.

4A -215 2 1 A dual convection module.

7B -227 1 2 A single cold cathode module.

7E -223 1 2 A single cold cathode module.

7F -245 1 1 A single cold cathode module (7F UHV or 7E as req'd)

7F -253 1 1 An interface to the 7ER & 7FR remote modules.

SP -211 4 1 A four relay Process Control relay board.

3F -290 2 2 A dual Mini BA module

The 3D and 3E modules occupy four slots each.

The 7B and 7E modules occupy one and a half slots. One of these can be combined with the RS232/RS485 digital

interface module so that no space is wasted. In other locations, they will take up two slots.

The 7F module takes up only one slot. It is used with the 7F UHV tube down to 10-11 Torr or with multiple 7E gauge

tubes where space available in the MM200 is limited.

The 7FCS module has a phone jack labeled “starter” at the back panel to plug the igniter cable in.

The 7F 6200-253 module can interface with 7ER & 7FR gauge tubes which have the remote electronics

modules.

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The maximum number of stations that can be configured is ten. This can be done

only if all stations are any mixture of dual modules (e.g., 1E, 1F, 2A, 4A, 5A/B).

WARNING: If any cold cathode gauge modules are installed, no sensors should be

assigned to station number ten (10).

If there is one relay module installed, then five other slots are available, and still up

to ten stations can be installed. With two relay modules, four slots are available,

and up to eight stations can be accommodated.

Setpoints must be consecutively numbered starting with number 1 (1 through 4) or

number 5 (5 through 8).

WARNING: All relays must be assigned to a station when first installed, even if they will

not be used (any station will suffice).

Allowable configurations for the MM200 are shown in

Table 3.1.

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TELEVAC MM200 User manual

TELEVAC MM200 User manual

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