Varian sentorr User manual

Brand: Varian

Model: sentorr

Category: Measuring, testing & control

Type: User manual

senTorr

™

Gauge

Controller

Instruction Manual

Varian Vacuum Technologies

121 Hartwell Avenue

Lexington, Massachusetts 02421

(781)861-7200

Manual No. 6999-08-165

Revision G

February 1999

Telephone Numbers

U.S. only 1-800-8-VARIAN (1-800-882-7426)

From Alaska and Hawaii, dial (781) 861-7200

Order Entry (Sales)............Press 1........

FAX (781)860-5405

Technical Support............Press 2........

FAX (781)860-5437

Field Service............Press 3........

FAX (781)860-9210

Training (Information

and Registration)............Press 4........

FAX (781)860-5479

Service

Canada

Telephone ..................1-800-663-2727 (Canada Only)

(905) 819-8188

FAX ..................(905) 819-8348

France

Telephone ..................(33) 16-986-3838

FAX ..................(33) 16-928-2308

Germany (Darmstadt)

Telephone ..................(49) 61-51-70-32-05

FAX ..................(49) 61-51-70-32-79

Italy

Telephone ..................(39) 11-997-9111

FAX ..................(39) 11-997-9350

Japan

Telephone ..................(81) 3-3588-9732

FAX ..................(81) 3-3449-4597

Korea

Telephone ..................(82) 3-333-665-5171

FAX ..................(82) 3-333-665-0115

Telephone ..................(44) 932-234-741

FAX ..................(44) 932-228-769

Reserved, including the right of reproduction in whole or in part in any form, without

permission in writing from Varian Vacuum Products, Lexington, MA 02421

November, 1995

WARRANTY

Products manufactured by Seller are warranted against defects in materials and workmanship for

twelve (12) months from date of shipment thereof to Customer, and Seller’s liability under valid war-

ranty claims is limited, at the option of Seller, to repair, replacement, or refund of an equitable portion

of the purchase price of the Product. Items expendable in normal use are not covered by this warranty.

All warranty replacement or repair of parts shall be limited to equipment malfunctions which, in the

sole opinion of Seller, are due or traceable to defects in original materials or workmanship. All obliga-

tions of Seller under this warranty shall cease in the event of abuse, accident, alteration, misuse, or

neglect of the equipment.In-warranty repaired or replacement parts are warranted only for the remain-

ing unexpired portion of the original warranty period applicable to the repaired or replaced parts.After

expiration of the applicable warranty period, Customer shall be charged at the then current prices for

parts, labor, and transportation.

Reasonable care must be used to avoid hazards.Seller expressly disclaims responsibility for loss or

damage caused by use of its Products other than in accordance with proper operating procedures.

When products are used with toxic chemicals, or in an atmosphere that is dangerous to the health of

humans, or is environmentally unsafe, it will be the responsibility of the Customer to have the product

cleaned by an independent agency skilled and approved in handling and cleaning contaminated mate-

rials before the product will be accepted by Varian Associates for repair and/or replacement.

Except as stated herein, Seller makes no warranty, express or implied (either in fact or by operation of

law), statutory or otherwise; and, except as stated herein, Seller shall have no liability under any war-

ranty, express or implied (either in fact or by operation of law), statutory or otherwise.Statements made

by any person, including representatives of Seller, which are inconsistent or in conflict with the terms

of this warranty shall not be binding upon Seller unless reduced to writing and approved by an officer

of Seller.

Warranty Replacement and Adjustment

All claims under warranty must be made promptly after occurrence of circumstances giving rise

thereto, and must be received within the applicable warranty period by Seller or its authorized repre-

sentative. Such claims should include the Product serial number, the date of shipment, and a full

description of the circumstances giving rise to the claim. Before any Products are returned for repair

and/or adjustment, written authorization from Seller or its authorized representative for the return and

instructions as to how and where these Products should be returned must be obtained. Any Product

returned to Seller for examination shall be prepaid via the means of transportation indicated as accept-

able by Seller.Seller reserves the right to reject any warranty claim not promptly reported and any war-

ranty claim on any item that has been altered or has been returned by non-acceptable means of

transportation.When any Product is returned for examination and inspection, or for any other reason,

Customer shall be responsible for all damage resulting from improper packing or handling, and for loss

in transit, notwithstanding any defect or non-conformity in the Product, in all cases, Seller has the sole

responsibility for determining the cause and nature of failure, and Seller's determination with regard

thereto shall be final.

If it is found that Seller’s Product has been returned without cause and is still serviceable, Customer

will be notified and the Product returned at its expense; in addition, a charge for testing and examina-

tion may be made on Products so returned.

8/15/95

Hazards

Operators and service personnel must be aware of all hazards associated with this equipment.They

must know how to recognize hazardous and potentially hazardous conditions, and know how to avoid

them.The consequences of unskilled, improper, or careless operation of the equipment can be seri-

ous. this product must only be operated and maintained by trained personnel. Every operator or ser-

vice person must read and thoroughly understand operation/maintenance manuals and any additional

information provided by Varian Associates. All warnings and cautions should be read carefully and

strictly observed.Consult local, state, and national agencies regarding specific requirements and reg-

ulations. Address any safety, operation, and/or maintenance questions to your nearest Varian office.

The following format is used in this manual to call attention to hazards.

WARNING

_____________

Warnings are used when failure to observe instructions or precautions

could result in injury or death to humans.

CAUTION

________

Cautions are used when failure to observe instructions could result in

significant damage to equipment and/or facilities.

NOTE

________

Notes contain information to aid the operator in obtaining the best per-

formance from the equipment.

An independent agency has determined that all vacuum chambers regardless of manufacture, can

possibly become charged to lethal voltage levels, under certain conditions, if they are not grounded

with a quality, common ground with the controller of their ionization tube.

After each maintenance/service procedure and before operating the controller and vacuum system,

verify the integrity of the ground of both units; failure to do so could cost you your life!

WARNING

_____________

Check that your Ion Gauge Controller and vacuum system are sepa-

rately grounded to a common ground.

Placement of a ground wire between the vacuum chamber and the con-

troller chassis is not safe;large continuous currents could flow through it.

Personnel could be killed by high voltages (160 to 900 volts may be pre-

sent in an improperly grounded system).

Make absolutely sure that your vacuum system is grounded as shown in

the following schematic diagram;test the system ground be sure that it is

complete and capable of supporting at least 10 amperes.

iii

WARNING

_____________

This equipment contains high voltages (up to 3000 volts), high enough to

produce electric shock and cause death or serious injury.

Equipment utilizing these controls should be designed to prevent per-

sonal contact with high voltages.

Always break the primary circuit when direct access to the control unit is

required.

EMC Warnings

This is a Class A product. In a domestic environment this product may cause radio interference in

which case the user may be required to take adequate measures.

FCC

This device complies with Part 15 of the FCC rules. Operation is subject to the following two condi-

tions: (1) This device may not cause harmful interference, and (2) this device must accept any interfer-

ence received, including interference that may cause undesired operation.

NOTE

________

The equipment has been tested and found to comply with the limits for a

Class A digital device, pursuant to Part 15 of the FCC rules.These limits

are designed to provide reasonable protection against harmful interfer-

ence when the equipment is operated in a commercial environment.This

equipment generated, uses, and can radiate radio frequency energy

and, if not installed and used in accordance with the instruction manual,

may cause harmful interference to radio communications. Operation of

this equipment ina residential area is also likely to cause harmful radio

communications interference in which case the user will be required to

correct the interference at his own expense.

Installation Requirements

To maintain compliance with both the FCC Part 15 rules and the European Union’s EMI directives the

user must use a shielded cable constructed of a braided shield for the analog outputs and setpoint

wiring. Metal or metallized plastic backshells directly connected to the cable shield at the 9 pos D-Sub

connector if using serial communications.The shields of all I/O cables must be connected to ground at

the users equipment. Failure to install the equipment. Failure to install the equipment in this way may

result in the unit no longer meeting the requirements for radiated emissions and susceptibility.

Table Of Contents

Page

SAFETY CONSIDERATIONS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . i

I INTRODUCTION AND DESCRIPTION . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1

1-1 General . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1

1-2 Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1

1-3 Front Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-3

1-4 Part Numbers and Descriptions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-4

1-5 Serial Communication . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-4

II PREPARATION FOR USE . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-1

2-1 Unpacking . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-1

2-2 Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-1

III OPERATION . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1

3-1 Keypad Functions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1

Option Select Key (All models) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1

Enter Key (All models) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1

UP and DOWN Arrows (All models) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1

Stdby Key (All models) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1

Units Key (All models) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1

Cal Key (All models w/TCs or ConvecTorrs) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1

Stpt Hyst Key (All models, with set point option) . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1

Emis Key (All models) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1

Baud Rate Key (All models) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-2

Degas Key (BA2, BA2c, BA, UHV, UHV2c models, with degas option) . . . . . . . . . 3-2

3-2 Parameter Programming . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-2

3-3 Set Point Hysteresis . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-5

3-4 Set Point Relays . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-5

3-5 Recorder Output . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-6

3-6 TC and ConvecTorr Calibration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-9

3-7 Access Codes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-9

3-8 Software Revision . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-9

3-9 Display Test . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-10

3-10 Battery Backup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-10

3-11 Accessing Second Filament . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-10

IV TROUBLESHOOTING . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1

4-1 General . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1

4-2 Error Codes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1

4-3 Changing Line Fuses . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1

4-4 Application Footnotes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-2

Gas Correction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-2

Programming Emission mA . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-2

Emission mA . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-3

Sensitivity . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-3

Programming Sensitivity . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-4

Appendix A Gas Correction Factor Table . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . A-1

Section 1

INTRODUCTION AND DESCRIPTION

1-1 GENERAL

Varian’s senTorr Gauge Controller is a complete, half-rack vacuum gauge controller that offers contin-

uous, reliable pressure measurement from rough to high vacuum.The controller comes completely

configured from the factory to operate one of six gauge tube configurations.

UHV2c Two convectorrs and one UHV type HFIG

BA2 Two Thermocouples and one Bayard-Alpert gauge tube

BA2c Two ConvecTorrs and one Bayard-Alpert gauge tube

CC2 Two Thermocouples and one Cold Cathode gauge tube

CC2c Two ConvecTorrs and one cold cathode gauge tube

BA One Bayard-Alpert gauge tube

CC One Cold Cathode gauge tube

The senTorr Gauge Controller features one digital display per gauge tube.The displays are LED-driven

providing clear and sharp pressure readings.The front panel keypad has practical lockout features that

protect against unauthorized parameter inputs. Analog outputs and remote capabilities are located on

the back panel.The external remote input controls turnon or turnoff of high-vacuum gauge emission.

Options include set points and RS232 or RS485/422 communication ability. Resistive (I

R) degas is an

option on Bayard-Alpert models, E-beam degas on the UHV models.The set point option includes four

set points, one for each gauge tube plus an additional set point that can be assigned to any one of the

three gauge tubes.

The senTorr offers an extraordinary amount of gauging and programming capability while still remain-

ing easy to use.The operator can access all of the instrument's functions and parameters through the

front panel keypad or the optional serial link.

1-2 SPECIFICATIONS

Power Requirements 90 to 127 VAC, 50/60 HZ

208 to 250 VAC, 50/60 HZ

The senTorr is fitted with an internal switch to accommodate the desired power input.

Operating Temperature 0 to 50°C

The senTorr meets all performance specifications (unless otherwise noted) at 25°C (+5°C) at 90 per-

cent relative humidity, non-condensing.

Data Retention The senTorr will retain its parameter values, upon power down or a power

failure, for a period of four years accumulated off-time.

Size Half-rack mount, 3.5" high by 8.0" wide by 15" deep

Optional rack-mounting kits are available for mounting one or two units in a standard 19-inch rack.

Cabling The senTorr basic unit includes a 6-foot power cord and fuse set.Gauge

cabling is available separately. Standard gauge cable lengths are 10, 25,

50, 75, and 100 feet.Longer cables (up to 500 feet) are available by special

order. All cable connections are made at the rear of the unit.

1-1

Introduction and Description

Varian cannot guarantee compliance with FCC regulations for radiated emissions unless all external

wiring is shielded. (See page iii)

HFIG Gauge (BA2, BA2c, BA, UHV, UHV2c models)

Minimum pressure 1.3 x 10

-7

Pa/1 x 10

-9

Torr (BA)

capability 5.3 x 10

-9

Pa/4 x 10

-11

Torr (UHV)

Maximum pressure 1.3 x 10

-1

Pa/1 x 10

-3

Torr (standard BA and UHV)

capability 1.3 x 10

Pa/1 x 10

-1

Torr (broad-range BA)

Degas (optional) Resistive, 1 hour timeout

E-beam (UHV), 15 minute timeout

Sensitivity – Adjustable from 1330/Pa (10/Torr) standard BA default value

1.33/Pa to 1.31 x 10

Pa 1064/Pa (8/Torr) broad range BA default value

(1/Torr to 99/Torr) 3325/Pa (25/Torr) UHV default value

Emission current 4 mA (standard BA and UHV)

(Adjustable from 0.1 mA (broad range BA)

0.1 mA to 9.9 mA)

Analog output 1 V/decade

0 V for “OFF”, “- -”, and “xxE” conditions

Optional Linear Recorder Out available

Auto-on (standard) available on BA2, BA2c, and UHV2c configurations only,

set to TC1 only

Cold Cathode Gauge (CC2 CC2c, IMG, IMG2c models)

Minimum pressure 1.3 x 10

-6

Pa/1 x 10

-8

Torr (CC models)

capability 5.3 x 10

-9

Pa/4 x 10

-11

Torr (IMG models)

Maximum pressure 1.3 Pa/1 x 10

-2

Torr

capability

Operating voltage –2 kV (CC models)

+3 kV (IMG models)

Sensitivity – Adjustable from (5 A/Torr) CC default value

133A/Pa to 1.31 x 10

A/Pa (2 A/Torr) IMG default value

(1 A/Torr to 99 A/Torr)

Analog output 1 V/decade

Optional Linear Recorder Out available

Auto-on (standard) available on CC2, CC2c, IMG2c configurations only, set to TC1 only

Thermocouple and Convectorr Gauge (BA2, CC2, BA2c, CC2c, UHV2c, IMG2c models)

Minimum pressure 1.3 x 10

-1

Pa/1 x 10

-3

Torr

capability

Maximum rated 266 Pa/2 Torr (TC models)

pressure capability 1.3 x 10

Pa/1000 Torr (ConvecTorr models)

1-2

Introduction and Description

Heater current 165 mA ± 10% (TC models)

Calibration 1.3 x 10

-1

Pa/1 x 10

-3

Torr (vacuum)

(two points) 1.0 x 10

Pa/7.6 x 10

Torr (atmosphere)

Auto-on threshold 1.3 x 10

-1

Pa to 6.6 Pa (1 x 10

-3

Torr to 5 x 10

-2

Torr)

(available on TC1 only)

Analog output 1 V/decade

1 V at 1.3 x 10

-1

Pa/1 x 10

-3

Torr

7 V at 1.3 x 10

Pa/1000 Torr

10 V for “03E” condition

Optional Linear Recorder Out available

Set Points (all models with Set Point option)

Set Points floating SPDT relays with NO, NC, and C terminals

Contact rating 3 A at 24 VDC/250 VAC, gold-flashed

Remote Input (all models)

Input 3 to 32 VDC, 500 ohms minimum to activate high-vacuum gauge

(optically-isolated and floating level-sensitive)

Options Available

Bayard-Alpert Configurations

Up to three optional plug-in printed circuit boards can be user-installed in the UHV, UHV2c, BA2,

BA2c, and BA configurations, with the following restrictions: one set point board, one degas board, and

one communications board, either RS232 or RS485/422.

Cold Cathode Configurations

Up to two optional plug-in printed circuit boards can be user-installed in the CC2, CC2c, and CC con-

figurations, with the following restrictions: one set point board and one communications board, either

RS232 or RS485/422

1-3 FRONT PANEL

The front panel display of the senTorr 7-segment, LED digits and LED annunciators.These provide con-

tinuous, crisp readings, with no directional bias.The display uses three LED colors to group information.

Green pressure data and parameter values

Yellow set point and parameter annunciators

Red operational status legends

1-3

To determine the ordering number, select the desired configuration as follows:

Basic Configurations

One Ion Gauge

BA – Bayard-Alpert (563, 564, 571, 572, 580) . . . . . L 9 1 2 0 3 0 1 X X 0 X

CC – Standard Cold Cathode (524, 525) . . . . . . . . . L 9 1 2 1 3 0 1 X X 0 X

UHV – Ultra-High-Vacuum Nude Gauge (UHV-24) . . L 9 1 1 0 3 0 1 X X 0 X

IMG – Ultra-High-Vacuum Inverted Magnetron . . . . . L 9 1 1 1 3 0 1 X X 0 X

One Ion Gauge, Two Thermocouple Gauges

BA2 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . L 9 1 2 0 3 0 2 X X 0 X

CC2 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . L 9 1 2 1 3 0 2 X X 0 X

One Ion Gauge, Two ConvecTorr Gauges

BA2c . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . L 9 1 2 0 3 0 3 X X 0 X

CC2c . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . L 9 1 2 1 3 0 3 X X 0 X

UHV2c . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . L 9 1 1 0 3 0 3 X X 0 X

IMG2c . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . L 9 1 1 1 3 0 3 X X 0 X

Setpoint Options

No Setpoints. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 0

Setpoints . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1

Degas Options

No Degas . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 0

Degas (BA resistive, UHV E-Beam) . . . . . . . . . . . . . 1

Communications Options

No Communications . . . . . . . . . . . . . . . . . . . . . . . . . 0

RS-232 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1

RS-232 Fiber Optic. . . . . . . . . . . . . . . . . . . . . . . . . . . 2

RS-422 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3

RS-485 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4

Introduction and Description

A single pressure display features four digits, two for the mantissa and two for the exponent.There is a

pressure readout for each gauge, with the Bayard-Alpert or Cold Cathode display labeled “IG” and the

two thermocouple or ConvecTorr displays labeled “TC1” and “TC2”, as applicable to the senTorr model.

Label pressure displayed

IG Bayard-Alpert or Cold Cathode

(depending on the model)

TC1 Thermocouple one or ConvecTorr one

TC2 Thermocouple two or ConvecTorr two

The column of red LED legends indicates the following operational states.

Degas hot filament ion gauge is degassing

Emis On ion gauge is on

Auto-On auto-on feature is programmed

mBar pressure measurements units are mBar

Torr pressure measurement units are Torr

Cal calibrating thermocouples or ConvecTorrs

Hyst programming set point hysteresis

The keypad is a sealed membrane-type, with tactile feedback.There are eleven keys, some of which

are dual function.

1-4

Introduction and Description

1-4 PART NUMBERS AND DESCRIPTIONS

1-5 SERIAL COMMUNICATION

The senTorr offers computer interface options allowing complete operation of the unit remotely via ser-

ial link.The RS232 option consists of a plug-in printed circuit board (Varian part no. L9141301) avail-

able with either a 9-pin, D-subminiature connector or fiber optic connectors (fiber-optic board, Varian

part no. L9141302). It allows complete operation of the Multi-Gauge via a computer using serial com-

munication. All of the keypad functions (except for the baud rate settings and the display output) are

accessible through the RS232 bi-directional computer link.

The RS485/422 computer interface option is available as a plug-in printed circuit board (Varian part no.

L9143301). This senTorr option provides serial communications capability as specified in EIA

(Electronic Industry Association) standard 422 and 485. Both employ differential line drivers and

receivers, and are capable of communicating to distances of 4000 feet at 19,200 baud in a multidrop

scheme, with up to 32 senTorr units.

Refer to Varian manual 6999-08-170 provided with the serial communication option for further information.

1-5

Introduction and Description

1-6

Section II

PREPARATION FOR USE

2-1 UNPACKING

Each senTorr unit is inspected and carefully packed prior to shipment. If the unit arrives damaged,

save the packing material and immediately notify the carrier. Because the packing materials are

designed specifically for this instrument, they should always be used when transporting the unit.The

shipping container is packed with the following contents.

1 senTorr Basic Unit

1 A-C line cord

1 Instruction Manual

4 rubber adhesive feet for bench top use of the senTorr

2-2 INSTALLATION

Before operating the unit, it is necessary to set it for the proper line voltage level.

1. Open the unit by removing the two screws at the top rear of the unit then pivot the cover up

and back to disengage the front lip. Lift off the cover.

2. Set the line voltage by moving line voltage selector switch S1 (Figure 2-1) to either the 115 VAC

(for 110 VAC or 115 VAC, 50/60 Hz) or 230 VAC position (for 220 VAC or 240 VAC, 50/60 Hz).

3. Before replacing the top cover, check that switch S1 is correctly positioned, that all cables are

properly plugged in, and there is no loose hardware or metal parts inside the senTorr unit.

Replace the cover and secure it with the two screws.

4. Mount the unit using the desired rack-mounting kit, then attach the appropriate external

gauge and system cables.Refer to Figure 2-2 for rear panel connections and Figure 2-3 for

mounting dimensions.

2-1

NOTE

________

The unit is shipped with switch S1 (internal) set to 230 VAC.

WARNING

_____________

Before servicing the unit, check that the line cord is not plugged into a

power source. Observe all warnings and cautions printed on the cover.

2-2

Preparation for Use

Figure 2-2. Rear Panel Connections

Figure 2-1. Setting Line Voltage

2-3

Preparation for Use

Figure 2-3. Panel Cutout Dimensions

Note: Bezel Trim Kit R0130301 can be used to hide gaps between senTorr case and panel)

2-4

Preparation for Use

Section III

OPERATION

3-1 KEYPAD FUNCTIONS

Refer to Figure 3-1 for the locations of the keys and display features described in following paragraphs.

Following each key name are the senTorr models and the option (if any) to which the function applies.

Note that some of the keys may not work unless a particular option has been installed.

1. Option Select Key (All Models)

Pressing the “Option Select” key puts the senTorr into the Program mode, as indicated by the flashing

yellow annunciator. Repeated “Option Select” key presses single-steps the annunciator through the

column of set points and parameters, returning the senTorr to the Run mode after the last key press.

“Option Select” also acts as an “escape” key when pressed before the “Enter” key has been used to

store a new digit setting.

Read Section 3-2, Parameter Programming, for further information.

2. Enter Key (All Models)

Pressing the “Enter” key advances the flashing cursor through a selected Program mode, and saves

the setting when pressing “Enter” after the last digit.

3. UP and DOWN Arrows (All Models)

These keys are used to increment and decrement, respectively, digit values when entering data.

4. Stdby Key ( All Models)

Pressing the “Stdby” key will power off all of the display, the fan, and the ion gauge tube.This is a low

power shutdown;the unit will continue to provide power to the processor.

5. Units Key (All Models)

Pressing the “Units” key toggles the pressure measurement units between Torr, mBar and Pascal for

all pressure readings.The front panel legends will reflect the pressure units, with both the Torr and

mbar lamps extinguished for Pascal.

6. Cal Key (BA2, BA2c, UHV2c, CC2, CC2c, IMG2c Models)

This key is used to calibrate the vacuum and atmosphere readings for the thermocouple gauges.The

red “Cal” legend will light when calibrating the TC's or ConvecTorrs.

7. Stpt Hyst Key (All Models, with set point option)

Used in conjunction with the “Option Select” program mode to display or program the set point hys-

teresis values.The red “Hyst” legend will light to indicate that the set point pressure being displayed is

the hysteresis level (see para. 3-3).

3-1

Operation

9. Baud Rate Key (All Models)

This key is used to display and set the serial communications baud rate, parity, and the controller

address (for use in a multi-drop communication link.

After pressing “Baud Rate”, the baud rate will flash in the IG display mantissa. Use the arrow keys to

select a baud rate of 1.2 (1200), 2.4 (2400), 4.8 (4800), 9.6 (9600), or 19 (19,200).

Press “Enter” to save the current flashing value as the baud rate and to advance to the parity setting,

displayed in the IG display exponent. Use the arrow keys to select parity of O (Odd), E (Even), or “n”

(none).

Press “Enter” to save the parity setting and to advance to the controller address setting, displayed in

the IG mantissa. Use the arrow keys to select an address from 00 to 99. Once again, press “Enter” to

save the address and exit the baud rate settings.This paragraph applicable to the RS 485/422 ONLY.

The default settings are 9600 baud with no parity and an address of 00.

10. Degas Key (BA, UHV Models, with degas option)

Can only activate if the pressure at the Bayard-Alpert ion gauge is less than 10

-3

Pa/10

-5

Torr.Pressing

the “Degas” key will illuminate the hidden degas legend to reflect the state of the degas. Pressing the

Degas key again will turn the degas function off.After engagement, the degas will automatically turn

off after approximately 1 hour, for I

R degas, 15 min for E-beam.The degas option must be installed to

operate this function; if the user does not purchase the degas option, then this key has no effect.

3-2

Figure 3-1. Front Panel, senTorr Gauge Controller

8. Emis Key (All Models)

Pressing “Emis” turns the high vacuum gauge on or off.The hidden “Emis On” legend will light to reflect

the on state of the ion emissions.The high vacuum gauge emissions will come on only if the appropri-

ate vacuum has been achieved.

8. Emis Key (BA/UHV dual filament models)

Pressing the “Enter” key before pressing “Emis” uses the second filament.

Operation

3-2 PARAMETER PROGRAMMING

The set point and ion gauge parameters listed in a column on the front panel display (see Figure 3-1)

can be viewed or programmed by putting the senTorr into the Program mode.To the left of each para-

meter is a single yellow LED.

If the yellow LED is flashing, that parameter is selected to the Program mode and its value is displayed

in the corresponding gauge readout.

If the yellow LED is lit solidly, that menu item is active, meaning that the set point is energized or the

ion gauge parameter has been changed from its default setting.

Enter the Program mode by pressing the “Option Select” key.The first available parameter, beginning

from the top of the column and depending on the senTorr models and options installed, will flash in the

appropriate gauge display. Repeated “Option Select” key presses will advance through the parameters,

returning the unit to the Run mode after the last key press.

When the desired parameter has been selected, the up and down arrow keys can be used to set a

new value to the flashing digit.The “Enter” key will advance the flashing through the digits, saving the

new value after the last digit has been set.

3-3

NOTE

________

If the yellow LED is left flashing in the Program mode unattended for

more than 5 seconds, the default will automatically return the annuncia-

tor to the Run mode.

A changed value will not be saved unless it has been “Entered” through

all of its digits.The “Option Select” key can be used to “escape” from sav-

ing a changed value prior to “Enter”ing the last digit.

After the value has been saved, the whole setting will flash. Press “Enter” to re-program the value, or

“Option Select” to advance to the next parameter.The senTorr will exit the Program mode if no keys

are pressed for about 8 seconds.

To disable a set point, set its mantissa to “0.0”.

IG Setpt (All Models with Set Point option)

The ion gauge set point can be set to energize when the ion gauge pressure drops below the IG Setpt

threshold setting. It will de-energize when the ion gauge pressure goes above the IG Setpt hysteresis

setting (refer to Para. 3-3, Set Point Hysteresis).The IG Setpt pressure will flash in the IG display. Use

the up and down arrow keys and the “Enter” key to set the digit values and advance through the digits.

TC1 Setpt (All models with Set Point option)

The TC1 set point can be set to energize when TC1 reads less than the TC1 Setpt threshold setting.

It will de-energize when the TC1 pressure goes above the TC1 Setpt hysteresis setting (refer to Para.

3-3, Set Point Hysteresis).The TC1 Setpt pressure wll be displayed in the TC1 readout.

Page is loading ...

Varian sentorr User manual

Brand: Varian

Model: sentorr

Category: Measuring, testing & control

Type: User manual

Download PDF

report

Varian sentorr User manual

Varian sentorr User manual

Related papers

Other documents