BRONKHORST LIQUI-FLOW / μ-FLOW User manual

Brand: BRONKHORST

Model: LIQUI-FLOW / μ-FLOW

Type: User manual

Instruction Manual

µ-FLOW & LIQUI-FLOW series

Thermal Mass Flow Meters/Controllers for liquids

Doc. no.: 9.17.161B Date: 11-08-2022

µ-FLOW L01(V12)

LIQUI-FLOW L13(V12), L23(V12)

LIQUI-FLOW L13I, L23I

ATTENTION

Please read this document carefully before installing and operating the product.

Not following the guidelines could result in personal injury and/or damage to the equipment.

______________________________________ Bronkhorst ® ______________________________________

________________________________________________________________________________________________

9.17.161 µ-FLOW & LIQUI-FLOW Instruction Manual L01, L13(I), L23(I), L13V12, L23V12

Page 2 of 50

without the prior written permission of the publisher.

Disclaimer

This document has been reviewed and is believed to be accurate. Bronkhorst High-Tech B.V. does not assume liability

for errors, inaccuracies or absence of information. The material in this document merely serves information and illustration

purposes; no rights can be derived from its contents.

Bronkhorst High-Tech B.V. reserves the right to modify or improve its products and documentation without informing

anyone. As such, the information contained in this document is subject to change without notice. Device specifications

and the contents of the package may deviate from what is stated in this document.

Symbols in this document

Receipt of equipment

Check the outside packaging box for damage incurred during shipment. If the box is damaged, the local carrier must be

notified at once regarding his liability. At the same time a report should be submitted to your Bronkhorst representative.

Carefully remove the equipment from the box. Verify that the contents of the package was not damaged during shipment.

Should the equipment be damaged, the local carrier must be notified at once regarding his liability. At the same time a

report should be submitted to your Bronkhorst representative.

Refer to Removal and return instructions about return shipment procedures.

Equipment storage

• The equipment should be stored in its original package in a climate controlled storage location.

• Care should be taken not to subject the equipment to excessive temperatures or humidity.

• See technical specifications for information about required storage conditions.

Important information. Disregarding this information could increase the risk of damage to the

equipment, or the risk of personal injuries.

Helpful information. This information will facilitate the use of the instrument and/or contribute to its

optimal performance.

Additional information available on the internet or from your Bronkhorst representative.

• Check the packing list to ensure that you received all of the items included in the scope of delivery

• Do not discard spare or replacement parts with the packaging material

______________________________________ Bronkhorst ® ______________________________________

________________________________________________________________________________________________

9.17.161 µ-FLOW & LIQUI-FLOW Instruction Manual L01, L13(I), L23(I), L13V12, L23V12

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Warranty

Bronkhorst® products are warranted against defects in material and workmanship for a period of three years from the

date of shipment, provided they are used in accordance with the ordering specifications and not subject to abuse or

physical damage. Products that do not operate properly during this period may be repaired or replaced at no charge.

Repairs are normally warranted for one year or the balance of the original warranty, whichever is the longer.

The warranty includes all initial and latent defects, random failures, and indeterminable internal causes. It excludes failures

and damage caused by the customer, such as contamination, improper electrical hook-up, physical shock etc.

Re-conditioning of products primarily returned for warranty service that is partly or wholly judged non-warranty may be

charged for.

Bronkhorst High-Tech B.V. or affiliated company prepays outgoing freight charges when any part of the service is

performed under warranty, unless otherwise agreed upon beforehand. The costs of unstamped returns are added to the

repair invoice. Import and/or export charges as well as costs of foreign shipping methods and/or carriers are paid by the

customer.

Any liability is explicitly excluded for any secondary damage, caused by the instrument’s failure or the malfunction of

any component. All wear parts, like seals for example, are also excluded from the warranty.

All devices are provided with a seal mark upon delivery. In case of a broken seal any warranty claims are void. The

opening of the instruments is only permitted by certified service personnel authorized by the Customer Service

Department (CSD) of Bronkhorst High-Tech B.V.

The products of other manufacturers are warranted for a period of one year unless otherwise mentioned.

General safety precautions

This product is intended for use by qualified personnel who recognize shock hazards and are familiar with the safety

precautions required to avoid possible injury. Read the operating information carefully before using the product.

Before operating, make sure the line cord is connected to a properly grounded power receptacle. Inspect the connecting

cables for cracks or breaks before each use.

The equipment and accessories must be used in accordance with their specifications and operating instructions, otherwise

the safety of the equipment may be impaired.

Opening the equipment is not allowed. There are no user serviceable parts inside. In case of a defect please return the

equipment to Bronkhorst High-Tech B.V.

To maintain protection from electric shock and fire, replacement components must be obtained from Bronkhorst. Standard

fuses, with applicable national safety approvals, may be used if the rating and type are the same. Other components that

are not safety related may be obtained from other suppliers, as long as they are equivalent to the original component.

Selected parts should be obtained only through Bronkhorst, to maintain accuracy and functionality of the product. If you

are unsure about the relevance of a replacement component, contact your Bronkhorst representative for information.

See also section 9 (Guarantee) of the Conditions of sales:

www.bronkhorst.com/int/about/conditions-of-sales

______________________________________ Bronkhorst ® ______________________________________

________________________________________________________________________________________________

9.17.161 µ-FLOW & LIQUI-FLOW Instruction Manual L01, L13(I), L23(I), L13V12, L23V12

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Contents

1. Introduction ........................................................................................................................................ 7

1.1. Scope of this manual ........................................................................................................................ 7

1.2. Intended use ..................................................................................................................................... 7

1.3. Products descriptions ....................................................................................................................... 8

1.4. Product overview .............................................................................................................................. 8

1.5. Calibration......................................................................................................................................... 9

1.6. Maintenance ..................................................................................................................................... 9

1.7. Documentation ................................................................................................................................. 9

2. Product specifications .................................................................................................................... 11

2.1. Pressure rating ............................................................................................................................... 11

2.2. Model key ....................................................................................................................................... 11

2.3. Sealing material compatibility ......................................................................................................... 13

2.4. Customised I/O options .................................................................................................................. 13

3. Installation ........................................................................................................................................ 15

3.1. Mounting ......................................................................................................................................... 15

3.1.1. Orientation ................................................................................................................................ 15

3.1.2. Location in the fluid system ...................................................................................................... 15

3.1.3. Piping requirements .................................................................................................................. 15

3.1.4. Fluid connections ...................................................................................................................... 16

3.1.5. Mechanical isolation.................................................................................................................. 16

3.2. Electrical connection ....................................................................................................................... 16

3.3. Fieldbus connection ........................................................................................................................ 17

3.3.1. FLOW-BUS ............................................................................................................................... 17

3.3.2. Modbus ..................................................................................................................................... 17

3.3.3. Other fieldbuses ........................................................................................................................ 18

4. Operation .......................................................................................................................................... 19

4.1. Powering up .................................................................................................................................... 19

4.2. First use .......................................................................................................................................... 19

4.3. Preventing slug flow ....................................................................................................................... 19

4.4. Rapid gas decompression / explosive decompression .................................................................. 19

4.5. Mass flow measurement and control .............................................................................................. 20

4.6. After use ......................................................................................................................................... 20

4.7. Powering down ............................................................................................................................... 20

4.8. Valve safe state .............................................................................................................................. 20

4.9. Temperature considerations ........................................................................................................... 20

4.9.1. Preventing condensation .......................................................................................................... 21

4.9.2. Cleaning temperature ............................................................................................................... 21

______________________________________ Bronkhorst ® ______________________________________

________________________________________________________________________________________________

9.17.161 µ-FLOW & LIQUI-FLOW Instruction Manual L01, L13(I), L23(I), L13V12, L23V12

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4.10. Communication interface ................................................................................................................ 21

4.10.1. Analog operation ....................................................................................................................... 22

4.10.2. Digital operation ........................................................................................................................ 22

4.10.2.1. RS-232 communication ........................................................................................................ 22

4.10.2.2. Fieldbus operation ................................................................................................................ 23

4.11. Hardware interface ......................................................................................................................... 23

4.11.1. LED indications ......................................................................................................................... 23

4.11.1.1. Interface status ..................................................................................................................... 24

4.11.1.2. DeviceNet™ indications ....................................................................................................... 24

4.11.2. Multifunctional switch ................................................................................................................ 25

4.11.2.1. Normal operating functions .................................................................................................. 25

4.11.2.2. Power-up functions ............................................................................................................... 26

4.11.2.3. Control mode - readout/change ............................................................................................ 26

4.11.2.4. Network settings - readout/change ....................................................................................... 27

4.11.3. Rotary switches ......................................................................................................................... 28

4.12. Adjusting zero point ........................................................................................................................ 29

4.12.1. Manually, using multifunctional switch ...................................................................................... 29

4.12.2. Digitally ..................................................................................................................................... 30

4.13. FlowDDE......................................................................................................................................... 30

4.13.1. Software (DDE applications) ..................................................................................................... 31

5. Digital parameters ........................................................................................................................... 32

5.1. General ........................................................................................................................................... 32

5.2. Special parameters ......................................................................................................................... 33

5.2.1. Default control mode ................................................................................................................. 34

5.3. Measurement and control ............................................................................................................... 34

5.3.1. Advanced measurement and control ........................................................................................ 35

5.4. Device Identification ....................................................................................................................... 36

5.5. Alarms ............................................................................................................................................. 37

5.6. Counter ........................................................................................................................................... 39

5.7. Network configuration ..................................................................................................................... 41

5.8. Fluid set .......................................................................................................................................... 42

5.8.1. Advanced fluid set parameters ................................................................................................. 44

5.9. Master/slave configuration (FLOW-BUS) ....................................................................................... 45

6. Troubleshooting and service .......................................................................................................... 46

6.1. Errors and warnings ....................................................................................................................... 46

6.2. Restoring factory settings ............................................................................................................... 46

6.3. Common issues .............................................................................................................................. 46

6.4. Service ............................................................................................................................................ 48

______________________________________ Bronkhorst ® ______________________________________

________________________________________________________________________________________________

9.17.161 µ-FLOW & LIQUI-FLOW Instruction Manual L01, L13(I), L23(I), L13V12, L23V12

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7. Returns ............................................................................................................................................. 50

7.1. Removal and return instructions ..................................................................................................... 50

7.2. Disposal (end of lifetime) ................................................................................................................ 50

______________________________________ Bronkhorst ® ______________________________________

________________________________________________________________________________________________

9.17.161 µ-FLOW & LIQUI-FLOW Instruction Manual L01, L13(I), L23(I), L13V12, L23V12

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1. Introduction

1.1. Scope of this manual

This manual covers the Bronkhorst® instrument model series µ-FLOW and LIQUI-FLOW mass flow meters/controllers

for liquid. It contains general product information, installation and operating instructions and troubleshooting tips.

µ-FLOW L01(V12);

IP40 enclosure

LIQUI-FLOW L13(V12), L23(V12);

IP40 enclosure

LIQUI-FLOW L13I, L23I;

IP65 enclosure

1.2. Intended use

The µ-FLOW L01 and LIQUI-FLOW L13(I), L23(I), L13V12, L23V12 is designed to accurately measure and/or control

liquid flow rates in a fluid system using the media and operating conditions (e.g. temperature, pressure) that were

specified at ordering time.

The liquid(s) in the pressurized system in which the instrument is mounted should preferably be clean and dry. The

equipment is suited for general purpose indoor (dry) applications, like laboratories and machine enclosures.

µ-FLOW and LIQUI-FLOW instruments are suitable for use at temperatures conditions between 5 and +50 °C and a

relative humidity of 10 to 90% RH, unless specified otherwise.

• The L01, L13, L23, L13V12 and L23V12 instruments have an ingress protection of IP40 implying that the

electronics housing and electrical connection do not offer any protection against moist environments.

• The L13I and L23I are equipped with an IP65-enclosure, so electronics housing and electrical connection are

protected against moist and dusty environments.

To avoid personal injury and/or damage to the equipment only trained and qualified personnel shall perform the

installation of the instruments.

The instruments contain electronic components which are sensitive to electronic discharges (ESD). Contact with

electronically charged persons or objects could possibly endanger these components or even result in their failure.

The wetted materials incorporated in the µ-FLOW and LIQUI-FLOW are compatible with media and

conditions (e.g. pressure, temperature) as specified at ordering time. If you are planning to use the

product (including any third party components supplied by Bronkhorst, such as pumps or valves) with

other media and/or other conditions, always check the wetted materials (including seals) for

compatibility. See the technical specifications of the product and consult third party documentation (if

applicable) to check the incorporated materials.

Responsibility for the use of the equipment with regard to suitability, intended use, cleaning and

corrosion resistance of the applied materials against the processed media lies solely with the end user.

Where appropriate, this document recommends or prescribes safety measures to be taken with

respect to media usage or working with the described equipment under the specified conditions. The

end user is responsible for taking the necessary safety precautions and proper use of appropriate

(personal) protective equipment, even if such is not explicitly recommended or required in this

document.

The end user is considered to be familiar with the necessary safety precautions, and to comply with the

appropriate protective measures as described in the Material Safety Data Sheets of the media to be

used in the system (if applicable).

______________________________________ Bronkhorst ® ______________________________________

________________________________________________________________________________________________

9.17.161 µ-FLOW & LIQUI-FLOW Instruction Manual L01, L13(I), L23(I), L13V12, L23V12

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1.3. Products descriptions

The µ-FLOW and LIQUI-FLOW instruments are measurement devices for thermal mass flow and control of liquids.

They are equipped with a digital electronic multi-bus pc-board and consist of a micro-controller with peripheral circuitry

for measuring, controlling and communication. The flow signal is measured, digitized and processed by means of the

internal software (firmware). The measured and processed values can be output through the analog interface or through

the digital communication line (RS232 or optional fieldbus interface).

For controllers the setting for the actuator is calculated by the firmware. The setpoint can be given through the analog

interface or through the digital communication line.

These digital instruments offer great flexibility thanks to the "multi-bus" concept, whereby the instruments can be

equipped with an optional fieldbus interface (CANopen, DeviceNet™, EtherCAT®, Ethernet/IP, FLOW-BUS, Modbus

(RTU/ASCII/TCP), POWERLINK, PROFIBUS DP, and PROFINET.

Numerous input/output options can be installed through the programmable 9-pin D-sub or 8DIN connector (see

Customized I/O). In addition to the various analog signal options and the standard RS232 communication, there are

such options as RS485 communication, digital frequency/pulse output, alarm output/reset, valve purge/close and analog

valve output.

The micro switches and LED’s on top of the instrument can also be used for manual operation of some options.

Control valves can either be integrally or separately mounted. The standard control valves on Bronkhorst® mass flow

controllers are suited for max. 100 bar pressure ratings. These valves are normally closed and available up to Kv-values

of 2.37 * 10-3. Normally open valves can also be supplied.

1.4. Product overview

Optional connector for fieldbus

Inlet connection

LED status indicator and push button

9-pin D-sub connector

Outlet connection

Optional connector for fieldbus

Inlet connection

LED status indicator and push button

9-pin D-sub connector

Outlet connection

Bronkhorst High-Tech B.V. cannot be held liable for any damage resulting from improper or unsafe

use, use for other than the intended purpose or use with other media and/or under other conditions

than specified on the purchase order.

See also section Sealing material compatibility.

______________________________________ Bronkhorst ® ______________________________________

________________________________________________________________________________________________

9.17.161 µ-FLOW & LIQUI-FLOW Instruction Manual L01, L13(I), L23(I), L13V12, L23V12

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Optional connector for fieldbus

Inlet connection

8DIN connector

LED status indicator and push button

Outlet connection

1.5. Calibration

The µ-FLOW and LIQUI-FLOW are factory calibrated. Periodical inspection, recalibration or verification of the accuracy

may be subject to individual requirements of the end user.

Bronkhorst certifies that the instrument meets the rated accuracy. Calibration has been performed using measurement

standards traceable to the Dutch Metrology Institute (VSL).

1.6. Maintenance

The µ-FLOW and LIQUI-FLOW needs no regular maintenance if operated properly, with clean media, compatible with

the wetted materials, avoiding pressure and thermal shocks and vibrations. Units may be purged with a clean, dry and

inert gas.

In case of severe contamination, cleaning the inside of the device may be required. After cleaning, recalibration of the

instrument is recommended.

1.7. Documentation

The µ-FLOW and LIQUI-FLOW come with all necessary documentation for basic operation and maintenance. Some parts

of this manual refer to other documents, most of which can be downloaded from the Bronkhorst website. Calibration

certificates, test certificates and material certificates are included in the scope of delivery or can be provided on request.

Type

Document name

Document no.;

IP40 enclosure

Document no.;

IP65 enclosure

Brochure

µ-FLOW and LIQUI-FLOW brochure

9.60.021 9.60.021

Manuals

Instruction manual µ-FLOW and LIQUI-FLOW (this document)

9.17.161 9.17.161

Quick Start Guide µ-FLOW and LIQUI-FLOW

n/a n/a

Hook-up diagram Analog/RS232

9.16.119 9.16.126

Depending on the ordering details, fittings and/or connectors on your instrument might differ from the

images above.

Inexpertly servicing instruments can lead to serious personal injury and/or damage to the instrument or

the system it is used in. Servicing must therefore be performed by trained and qualified personnel.

Contact your Bronkhorst representative for information about cleaning and calibration. Bronkhorst has

a trained staff available.

The documentation listed in the following table is available on the µ-FLOW and LIQUI-FLOW product

pages under www.bronkhorst.com/products

______________________________________ Bronkhorst ® ______________________________________

________________________________________________________________________________________________

9.17.161 µ-FLOW & LIQUI-FLOW Instruction Manual L01, L13(I), L23(I), L13V12, L23V12

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Technical

documentation

Hook-up diagram CANopen

9.16.217 9.16.216

Hook-up diagram DeviceNet™

9.16.122 9.16.129

Hook-up diagram EtherCAT®

9.16.124 9.16.253

Hook-up diagram EtherNet/IP

9.16.215 9.16.253

Hook-up diagram FLOW-BUS

9.16.120 9.16.127

Hook-up diagram Modbus ASCII / RTU

9.16.123 9.16.130

Hook-up diagram Modbus TCP

9.16.234 9.16.253

Hook-up diagram POWERLINK

9.16.236 9.16.253

Hook-up diagram PROFIBUS DP

9.16.121 9.16.128

Hook-up diagram PROFINET

9.16.147 9.16.253

Hook-up diagram custom bus & I/O configurations

9.16.118 9.16.125

Dimensional drawings model specific

Model specific Model specific

Type

Document name

Document no.

General documentation

EU Declaration of Conformaty

9.06.021

Communication interfaces

manuals

Manual CANopen interface

9.17.131

Manual DeviceNet™ interface

9.17.026

Manual EtherCAT® interface

9.17.063

Manual EtherNet/IP interface

9.17.132

Manual FLOW-BUS interface

9.17.024

Manual Modbus interface ASCII / RTU / TCP

9.17.035

Manual POWERLINK interface

9.17.142

Manual PROFIBUS DP interface

9.17.025

Manual PROFINET interface

9.17.095

Manual RS232 interface

9.17.027

The documentation listed in the following table is available on the µ-FLOW and LIQUI-FLOW product

pages under www.bronkhorst.com/products

______________________________________ Bronkhorst ® ______________________________________

________________________________________________________________________________________________

9.17.161 µ-FLOW & LIQUI-FLOW Instruction Manual L01, L13(I), L23(I), L13V12, L23V12

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2. Product specifications

Before installing the µ-FLOW and LIQUI-FLOW, check that the functional and technical properties of the product match

your requirements. If you have a question about the product or if you find the product does not meet the specifications

as ordered, do not hesitate to contact your Bronkhorst representative. See section Service for contact information.

The serial number label shows some essential technical specifications of the product as ordered (note that the image

does not necessarily reflect the actual specifications of your instrument):

• Serial number

• Type number

• Flow rate

• Medium

• Pressure

• Operating temperature

• Optional: valve type (N.C. - Normally Closed / N.O. - Normally Open)

The model key on contains more detailed information about the technical properties of the product as ordered.

Where applicable, follow the directions on any additional labels in order to ensure a safe working environment and to

comply with the regulations applicable to the product and its operating environment.

2.1. Pressure rating

2.2. Model key

The model key on the serial number label contains information about the technical properties of the instrument as ordered.

The specific properties can be retrieved with the diagrams below.

Avoid condensation on the sensor tube. Liquids entering the instrument with a lower temperature than

the dew point, may harm the instrument's functionality.

Bronkhorst® instruments are pressure tested to at least 1.5 times the specified operating

pressure and outboard leak tested to at least 2 * 10-9 mbar l/s Helium.

• The test pressure is specified on the device with a red label; if this label is missing or if the test

pressure is insufficient, the device must not be used and should be returned to the factory.

• Before installation, make sure that the pressure rating is within the limits of the normal process

conditions and that the tested pressure is in accordance with the safety factor of your application.

• Disassembling the device and/or replacing parts will invalidate the test pressure and leak test

specification.

______________________________________ Bronkhorst ® ______________________________________

________________________________________________________________________________________________

9.17.161 µ-FLOW & LIQUI-FLOW Instruction Manual L01, L13(I), L23(I), L13V12, L23V12

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NNA A A A N A

Code

Inlet Outlet

0 0

1 1

Code Controller mode

Controller enabled, analog setpoint

Controller enabled, digital setpoint

-- - -

2 2

Supply voltage

+ 15...24 Vdc

Adapters

None

1/8" OD compression type

1/4" OD compression type

LNNVNN

3 3 6 mm OD compression type

8 8 1/4" Face seal male

9 9 Other

Code Integrated comm. mode (pin 1/6)

RS232 – ProPar

RS485 – FLOW-BUS

CRS485 – Modbus RTU

DRS485 – Modbus ASCII

AAA

Range Par

1 V

3 A

Configurable input/output (pin 5)

0...10 Vdc output, controller

4...20 mA output, controller

Digital output, min/max alarm

0 I Digital output, high/low switch via remote parameter

9 B Digital pulse output, batch counter

8 C Digital input, controller mode valve purge

2 R Digital input, reset alarm

Type

* Default: Modbus RTU, optional Modbus ASCII

Supported options, see also pin 5 options table

1 R Digital input, reset counterI

5 S Digital output, enabled by setpoint (for shut-off)

4 A Digital output, counter limit reachedC

Code Configuration

V12 Mass Flow Controller (MFC) NC

-Mass Flow Meter (MFM)

3 C Digital input, controller mode valve closeI

1 P 4...20 mA input, external pressure sensorH

0 0 0 Disabled, 0 Vdc (default)

0Controller disabled (meter only)

2 V 3.8...20.8 mA output, (TEIP11/Badger) controllerB

Code Sensor Code

20D 5...392 mg/h L01

50S 15...713 mg/h L01

60S 26...995 mg/h L01

A A 3 mm OD compression type

B B 1/8" Face seal male

C C 1/16" OD compression type

Code Analog output

0...5 Vdc

0...10 Vdc

F0...20 mA

sourcing

G4...20 mA

sourcing

Analog setpoint

0...5 Vdc

0...10 Vdc

0...20 mA

sinking

4...20 mA

sinking

V21 Mass Flow Controller (MFC) NO

MMetal (L01)

Code Sealing material

KKalrez/FFKM 6375

Code Field bus

ANone, I/O

BNone, I/O

Valve type

Normally Closed

Normally Opened

IEtherNet/IP I/O

KCANopen I/O

Normally Closed

LCANopen I/O

MModbus I/O*

Normally Opened

Normally Closed

NModbus I/O* Normally Opened

DDeviceNet I/O Normally Closed

EDeviceNet I/O Normally Opened

CPowerlink I/O Normally Closed

JEtherNet/IP I/O Normally Opened

OPowerlink I/O

PPROFIBUS I/O

Normally Opened

Normally Closed

SFLOW-BUS I/O

UEtherCAT I/O

Normally Opened

VPROFINET I/O

WPROFINET I/O

Normally Closed

Normally Opened

XModbus/TCP I/O Normally Closed

QPROFIBUS I/O Normally Opened

RFLOW-BUS I/O Normally Closed

YModbus-TCP I/O Normally Opened

TEtherCAT I/O Normally Closed

L01 µ-FLOW meter/controller, ≤2g/h

L13 LIQUI-FLOW meter/controller, ≤100g/h

L23 LIQUI-FLOW meter/controller, ≤1000g/h

Code Instrument type

70S 0.35...1.148 g/h L01

80S 0.56...2 g/h L01

10S 5...50 g/h Lx3

30S 50...500 g/h Lx3

70S 500...1000 g/h Lx3

ZOther

______________________________________ Bronkhorst ® ______________________________________

________________________________________________________________________________________________

9.17.161 µ-FLOW & LIQUI-FLOW Instruction Manual L01, L13(I), L23(I), L13V12, L23V12

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2.3. Sealing material compatibility

µ-FLOW and LIQUI-FLOW instruments are fitted from factory with internal seals compatible with the liquid type(s) as

specified at ordering time. Before using other media, always check their compatibility with the applied sealing materials.

Check the model key on the serial number label to see which sealing materials have been incorporated in your specific

instrument. When in doubt, do not hesitate to contact your Bronkhorst representative for more information.

2.4. Customised I/O options

Code

Decription

000

Disabled, M8/A2 is pulled down to 0Vdc (default selection)

A1V

0…10Vdc sourcing output, controller

Analog signal for pump or external valve steering (control signal only)

When the controller output is used for pump or external valve steering (mass flow meters only), make

sure to set parameter Valve maximum to 0.3 [A]. For mass flow controllers, the controller output is

limited to a value below 10Vdc, due to the maximum valve current restriction.

B1V

4…20mAsourcing output, controller

Analog signal for pump or external valve steering (control signal only).

When the controller output is used for pump or external valve steering (mass flow meters only), make

sure to set parameter Valve maximum to 0.3 [A]. For mass flow controllers, the controller output is

limited to a value below 20mA, due to the maximum valve current restriction.

B2V

3.8…20.8mA sourcing output, controller

Analog signal for Badger Meter valve with TEIP11 signal converter (control signal only).

C3A

Digital output, min/max alarm

During a min/max alarm, M8/A2 is pulled down to 0Vdc.

C4A

Digital output, counter alarm

During a counter alarm, M8/A2 is pulled down to 0Vdc.

C5S

Digital output, enabled by setpoint (for shut-off control)

M8/A2 is pulled down to 0Vdc at a controller setpoint, e.g. for shut-off valve activation.

For factory selected analog control:

If parameter Control mode is set for analog control by factory, the minimum setpoint at which the

device (shut-off valve) connected to M8/A2 is activated is 1.9%. This prevents possible noise on the

analog input activating the device accidentally.

For factory selected digital control:

If parameter Control mode is set for digital control by factory, the setpoint threshold for activating the

device connected to M8/A2 is any value > 0.

Note: If the instrument is forced into Valve Safe State, the digital output is not affected, so a (n/c)

shutoff valve connected to M8/A2 will not close when the (n/c) controller is in Valve Safe State’

Make sure to use 24Vdc power supply corresponding to the shut-off valve specifications.

C0I

Digital output, high/low switch via remote parameter (e.g. for shut-off valve control)

M8/A2 is pulled down to 0Vdc when writing value 1 to parameter IO switch status, this is undone by

writing value 0.

Adevice connected to M8/A2 (e.g. a shut-off valve) can be activated/de-activated by writing parameter

IO switch status.

Note: If the instrument is forced into Valve Safe State, the digital output is also affected, so a (n/c)

shutoff valve connected to M8/A2 will be closed when the (n/c) controller is in ‘Valve Safe State’.

Make sure to use 24Vdc power supply corresponding to the shut-off valve specifications.

D9E

Digital frequency output, measure

Measurement value is translated to a frequency within given frequency range.

• Always make sure that the used process gases or mixtures thereof are compatible with the sealing

materials the instrument is equipped with.

• Do not exceed the specified maximum operating pressure and temperature. Using the instrument

outside the specified operating limits might lead to serious damage and dangerous situations.

______________________________________ Bronkhorst ® ______________________________________

________________________________________________________________________________________________

9.17.161 µ-FLOW & LIQUI-FLOW Instruction Manual L01, L13(I), L23(I), L13V12, L23V12

Page 14 of 50

The default frequency range to represent 0…100% flow is 0…10000 Hz. Any other frequency range

must be specified on order.

F9B

Digital pulse output, batch counter

M8/A2 is pulled down to 0Vdc when a given batch size is reached (during a given pulse length).

By default, a pulse is given at each 1x the Counter unit batch value, with a pulse length of 1 second.

For instance, when Counter unit is set to 'ln', a pulse is given each time 1 ln has passed through the

instrument. An alternative pulse length must be specified on order.

Provide a pull-up resistor of 5…10kOhm to create 15…24Vdc at M8/A2 (according to the applicable

hook-up diagram).

I3C

Digital input, controller mode valve close

Valve closes when M8/A2 is connected to 0Vdc.

This option switches between the default Control mode and mode ‘Valve Close’ (value 3). When the

default Control mode is digital, the default value is 0 (bus/RS-232), when the default Control mode is

analog, the default value is 1 (Analog input).

I8C

Digital input, controller mode valve purge

Valve is fully opened when M8/A2 is connected to 0Vdc.

This option switches between the default Control mode and mode ‘Valve Fully Open’ (value 8). When

the default Control mode is digital, the default value is 0 (bus/RS-232), when the default Control mode

is analog, the default value is 1 (Analog input).

I1R

Digital input, reset counter

The counter resets when M8/A2 is connected to 0Vdc.

I2R

Digital input, reset alarm

The alarm resets when M8/A2 is connected to 0Vdc.

______________________________________ Bronkhorst ® ______________________________________

________________________________________________________________________________________________

9.17.161 µ-FLOW & LIQUI-FLOW Instruction Manual L01, L13(I), L23(I), L13V12, L23V12

Page 15 of 50

3. Installation

3.1. Mounting

For optimal performance, install the µ-FLOW and LIQUI-FLOW in a position free of vibration and away from heat

sources. The bottom of the instrument body is fitted with mounting holes; use these mounting holes to fixate the

instrument to a firm, rigid base or heavy, vibration free mass, such as a wall, a heavy rig or another stable construction.

Contact your local Bronkhorst representative for more information.

3.1.1. Orientation

Preferably, mount µ-FLOW and LIQUI-FLOW in an upright position.

3.1.2. Location in the fluid system

In liquid applications, the presence of gas bubbles in the liquid can cause measurement errors. If there is a risk of

expansion of dissolved gas in the metered liquid, the instrument should be mounted in a pipe segment where gas

bubbles cannot accumulate. The image below shows the preferable mounting locations.

• The best location is a horizontal pipe segment or a segment where the fluid direction is upward

• Gas might accumulate in a horizontal segment if it is followed by a downward segment. Do NOT

mount the instrument in a location like this

• Mounting in a downward pipe segment with an open end is strongly dissuaded, especially if the

pipe diameter is 1/2" or more. Gravity might cause the segment to drain; depending on the system

dimensions and the viscosity of the metered fluid, this effect might be stronger or weaker

• If the instrument is part of a closed fluid system, mounting the instrument in a downward pipe

segment is not preferable, but may be considered if other mounting locations are more

problematic.

3.1.3. Piping requirements

• Always use the mounting holes to fixate the instrument. Consult the dimensional drawing for the

exact locations and size of the mounting holes.

• Also make sure that the instrument is not suspended by the piping and take adequate measures to

isolate the instrument from vibrations in the piping.

• To minimize the risk of gas entrapment by cavitation, the preferred location to install a control

valve is downstream from the instrument, for a pump the preferred location is upstream.

• Avoid installation in close proximity of mechanical vibration and/or heat sources.

• Use the equipment in an environment with a stable ambient pressure and temperature.

• For reliable performance, make sure the fluid stream is uncontaminated. If necessary, use an inlet

filter to ensure a moisture, oil and particle free stream. Select a filter with a surface area and pore

size that minimize the pressure drop.

• If back flow could occur, the use of a check valve is also recommended.

______________________________________ Bronkhorst ® ______________________________________

________________________________________________________________________________________________

9.17.161 µ-FLOW & LIQUI-FLOW Instruction Manual L01, L13(I), L23(I), L13V12, L23V12

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3.1.4. Fluid connections

• Install the µ-FLOW and LIQUI-FLOW meter/controller in the process line, in accordance with the direction of the

FLOW arrow (see picture below) on the base of the instrument.

• For leak tight installation, follow the guidelines of the supplier of the fittings.

Bronkhorst® µ-FLOW and LIQUI-FLOW meters/controllers can be fitted with different fitting types (e.g. compression) or

special fitting types on request.

3.1.5. Mechanical isolation

3.2. Electrical connection

• Electrical connections must be made according to the applicable hook-up diagrams, using suitable cables with respect

to required supply current, voltage loss, cable and gland diameters and operating conditions.

• When using self-assembled cables, follow the guidelines provided by the connectors' manufacturer.

• For use in fieldbus systems, follow the instructions of the cable supplier for the specific fieldbus system.

• Make sure that the power supply is suitable for the power ratings as indicated on the serial number label (see model

key), and that double or reinforced insulation is used for the power supply.

• If a surge protection device is used, make sure its specifications match the power consumption of the application.

• Before powering up, make sure all required cabling is properly connected.

• Before each use, inspect cabling and connectors for damage.

µ-FLOW and LIQUI-FLOW instruments are powered with +15…+24 Vdc or +24 Vdc, depending on configuration or the

fieldbus system (if applicable).

• Check the fluid system for leaks before applying full operating pressure, especially when using

hazardous media (e.g. toxic or flammable).

• After using the µ-FLOW and LIQUI-FLOW for the first time with low temperature media, re-tighten

the fluid connectors in order to prevent leakage.

• Mechanical vibration may travel through piping or a mounting frame.

• Isolate instruments mechanically by mounting them on individual, rigid, stiff bases. Preferably,

mount multiple instruments parallel to each other, and use flexible piping if required.

To prevent damage as a result of reversed polarity, the use of a 2A fuse in the direct +Us line is

recommended.

Always isolate the electrical power before connecting or disconnecting equipment.

The device described in this document contains electronic components that are susceptible to

electrostatic discharge. In order to prevent damage, proper handling procedures must be followed

during installation, (dis)connecting and removing the electronics.

The device carries the CE-mark and is compliant with the concerning EMC requirements. However,

EMC requirements can only be met using appropriate cables and connector/gland assemblies.

Bronkhorst recommends the use of their standard cables. These cables have the right connectors and

loose ends (if any) are marked to help prevent wrong connection. When using other cables, cable wire

diameters must be sufficient to carry the supply current, and voltage loss must be kept as low as possible.

When in doubt, contact your Bronkhorst representative.

______________________________________ Bronkhorst ® ______________________________________

________________________________________________________________________________________________

9.17.161 µ-FLOW & LIQUI-FLOW Instruction Manual L01, L13(I), L23(I), L13V12, L23V12

Page 17 of 50

3.3. Fieldbus connection

If the instrument is provided with a dedicated fieldbus interface, it can be operated digitally in a fieldbus system, using

RS485 communication. In FLOW-BUS, Modbus, CANopen and DeviceNet™ systems, the fieldbus connector can also

be used to power the instrument. In other fieldbus systems, the instrument is always powered through the 9-pin D-sub

connector on the side or 8DIN power connector on top of the instrument.

The operation via analog interface, RS232 interface and an optional fieldbus can be performed at the same time. A

special parameter called “control mode” indicates which connection is controlling the instrument: analog or digital (via

fieldbus or RS232). Even when using more interfaces at the same time, the reading can be done simultaneously. When

changing a parameter value, the last value send by an interface will become valid.

3.3.1. FLOW-BUS

FLOW-BUS is a Bronkhorst® designed fieldbus, based on RS485 technology, for digital communication between

devices, offering the possibility of host-control by a Windows computer.

Characteristics:

• Baud rate 187,500 (default) or 400,000 Baud

• +15…24 Vdc supply voltage

• Easy installation and communication with other Bronkhorst® devices

• Automatic node search and bus optimisation (gap fixing)

• RS232 communication (ProPar) with Windows computer (local host)

• Connection of up to 120 instruments on a single bus

• Maximum bus cable length: 600 m

3.3.2. Modbus

Modbus is a 3-wire, RS485-based fieldbus communication system for parameter value exchange. In this system each

instrument/device is equipped with a micro-controller for its own dedicated task. The instrument behaves as a slave,

which means all communication (instructions and readout) is initiated by a master device on the Modbus system.

Characteristics:

• Baud rate selectable between 9,600 and 256,000 Baud (default: 19,200 Baud)

• +15…24 Vdc supply voltage

• Connection of up to 247 instruments on a single bus

• Supports RTU and ASCII protocols

When connecting the product to other devices, be sure that the integrity of the shielding is not affected;

always use shielded cabling for signals and communication and do not use unshielded wire

terminals.

Never power the instrument simultaneously from two different power sources (e.g. fieldbus and

Plug-in Power Supply). Doing so will damage the printed circuit board irreparably.

Always check the total power consumption of your instruments before connecting them to a fieldbus

system. Do not exceed the maximum power of the power supply unit.

If you need assistance with setting up a bus configuration, contact your Bronkhorst representative for

information.

Consult Instruction manual FLOW-BUS interface (document no. 9.17.024) for more information about

setting up a FLOW-BUS network.

______________________________________ Bronkhorst ® ______________________________________

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9.17.161 µ-FLOW & LIQUI-FLOW Instruction Manual L01, L13(I), L23(I), L13V12, L23V12

Page 18 of 50

3.3.3. Other fieldbuses

For other fieldbuses consult the concerning fieldbus manual.

Consult Instruction manual Modbus interface (document no. 9.17.035) for more information about

setting up a Modbus network.

______________________________________ Bronkhorst ® ______________________________________

________________________________________________________________________________________________

9.17.161 µ-FLOW & LIQUI-FLOW Instruction Manual L01, L13(I), L23(I), L13V12, L23V12

Page 19 of 50

4. Operation

After correct installation and taking all necessary safety precautions, the µ-FLOW and LIQUI-FLOW can be used to

measure and/or control flow.

4.1. Powering up

When powering up, the instrument needs a couple of seconds to start up the electronics and perform a self-test. After

successful initialization, the green LED will glow continuously to indicate that the instrument is ready to use.

4.2. First use

4.3. Preventing slug flow

4.4. Rapid gas decompression / explosive decompression

To maintain control of the fluid system and ensure a safe situation, it is recommended to turn on power

before applying fluid pressure and to switch off power only after the fluid system is depressurized

When applying pressure, avoid pressure shocks and bring the fluid system gradually up to the level of

the specified operating conditions; open the fluid supply gently.

For best performance, allow the device to warm up and stabilize for at least 30 minutes before starting

measurement and/or control. This may be done with or without media flow.

• Despite the fact that everything necessary has been done to ensure the cleanliness of the product

upon delivery, the presence of some remaining contaminants cannot be ruled out completely.

• In order to prevent undesired reactions, purging the instrument for a minimum of 30 minutes with a

dry, inert gas (like Nitrogen or Argon) is recommended before first use. In systems for use with

corrosive or reactive media, this is even absolutely necessary.

• During the manufacturing process, the instrument has been tested with water. Purging prior to first

use is also recommended to remove any remaining water droplets.

The very first time the instrument is used, adjusting the zero point is recommended. See Adjusting zero

point for background information and instructions.

Reliable measurement results can only be obtained if the fluid flows through the instrument in a single

state, for µ-FLOW and LIQUI-FLOW should it be liquid. The following measures can help prevent so

called 'slug flow' (two-phase flow):

Before starting measurement and control: remove (dissolved) gas from the system, by flushing the

instrument and all fluid lines with the process fluid at a high flow rate

During measurement and control:

• avoid external heating or cooling (can cause gas bubbles in liquid).

• avoid extreme pressure fluctuations (can cause cavitation in liquid).

For instruments used above 10 bar (g):

Bronkhorst recommends a maximum decompression rate of 70 bar/min, according to NACE TM0297.

Exceeding this rate can have negative influence on the lifetime of the sealing materials.

______________________________________ Bronkhorst ® ______________________________________

________________________________________________________________________________________________

9.17.161 µ-FLOW & LIQUI-FLOW Instruction Manual L01, L13(I), L23(I), L13V12, L23V12

Page 20 of 50

4.5. Mass flow measurement and control

When powering up, the instrument needs a couple of seconds to

start up the electronics. As soon as the start-up sequence has

finished (green LED glows continuously), the instrument is ready to

measure mass flows, however, optimal accuracy is only reached

after warming up (see Powering up and powering down).

After powering up, the control valve closes (normally open) or stays

closed (normally closed). The valve stays closed until the instrument

receives a setpoint from the active setpoint source. The internal PID

controller then immediately opens the control valve, until the

measured flow rate matches the setpoint. It maintains the resulting

flow rate until another setpoint is given.

4.6. After use

4.7. Powering down

4.8. Valve safe state

The µ-FLOW and LIQUI-FLOW can operate an external control valve, using the analog actuator output signal.

When a controlling instrument is not powered or cannot communicate with the fieldbus network (if applicable), all

electrical valves operated by the instrument (whether integrated or external) automatically return to their default state.

The default state is closed for 'normally closed' valves (n/c) and fully open for 'normally open' valves (n/o). Taking into

account the typical process conditions under which the instrument is used (such as the processed media and ambient

conditions; see also Intended use), the default state is generally considered safe.

Check the serial number label or the technical specifications to see which valve type is used on your instrument (if

applicable).

4.9. Temperature considerations

Although the µ-FLOW and LIQUI-FLOW have excellent temperature stability, the best accuracy is achieved when

temperature gradients within and across the instrument are prevented. Observe the following attention points:

• Keep the media temperature as close as possible to the ambient temperature, and above the dew point of the

ambient air.

• Do not allow the media temperature to drop more than 10 °C below the ambient temperature or take measures to

prevent condensation.

• Always keep the media temperature above the freezing point.

• To prevent simultaneous heating and cooling of different parts of the instrument, make sure the ambient

temperature is as stable and evenly distributed across the environment as possible.

• Prevent temperature shocks; heating or cooling should amount to no more than 1 °C per second.

• Depending on the properties of the process medium and the (expected) time until the next use, it

is advisable to flush the fluid system with a suitable (cleaning) fluid after use.

• If the equipment has been used to process corrosive, reactive or hazardous media (e.g. toxic or

flammable), cleaning the fluid system is even absolutely necessary before it is exposed to air.

• If the instrument is not used for an extended period, the fluid system should be dry after use and

after cleaning. If not, it should be purged with a dry, inert gas for a recommended minimum period

of 30 minutes.

• Prior to powering down the µ-FLOW and LIQUI-FLOW, the fluid system should be depressurized.

• When depressurizing, prevent sudden pressure changes, by shutting off the fluid supply gradually.

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BRONKHORST LIQUI-FLOW / μ-FLOW User manual

BRONKHORST LIQUI-FLOW / μ-FLOW User manual

BRONKHORST LIQUI-FLOW / μ-FLOW User manual

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