horiba SEC-E431X User manual

MASS FLOW CONTROLLER

MASS FLOW METER

SEC/SEF-E431X/E441X (PTFE TYPE)

Instruction Manual

CODE: I031150800

Jun, 2012

©

2007

–

2012 HORIBA STEC, Co., Ltd.

1

CONTENTS

1. INTRODUCTION

2. SPECIFICATIONS

3. PRINCIPLE OF FUNCTIONING

4. EXTERNAL DIMENSIONS

5. CONNECTOR

6. HOW TO USE

7. CONNECTIONS

8. PRECAUTIONS FOR HANDLING

9. PRODUCT WARRANTY

10. CHEMICAL CONTENT INFORMATION

(THE SIX CHINA RoHS RESTRICTED MATERIALS)

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3

4

5

6

7

8

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1. Introduction

Thank you for purchasing our mass flow controller SEC(SEF) -E400X series. Prior to using it,

please read this manual thoroughly to use it properly for a long period of time.

2. Specifications

2-1 Mass flow controller (SEC-E431X/SEC-E441X)

Type *1 SEC-E431X SEC-E441X

Standard flow rate range *2

(Full scale flow rate equivalent to N2) 50 / 100 SLM 200 SLM

Valve structure Closed when power is not supplied

Control range 5100% F.S.

Accuracy *3,*4 1.0% F.S.

Operating temperature 545

Responsibility (T98) *5 Within 1second (typical)

Linearity *3 Within 0.5% of F.S.

Repeatability *3 Within 0.5% of F.S.

Operating differential pressure *6,*7 100 300 kPa (D) 200 350 kPa (D)

Maximum operating pressure *6 350 kPa (G)

Pressure resistance *6 1000 kPa (G)

Leak integrity *8 110-9 Pa m3/sec (He) or less

Setting signal 0.25 5V DC (Input impedance 1 M or more)

Output signal 05V DC (Minimum load resistance 2k )

Power source +15V DC 5% 50mA , –15V DC 5% 200mA

Wetted material Stainless steel, Magnetic stainless steel,

Fluoro rubber, PTFE

Standard fittings 3/8inch Swagelok or equivalent

*1:This product is in conformity with RoHS directives.

*2:SLM denotes gas flow rate in l/min.

*3:Accuracy, linearity and repeatability are guaranteed for the calibration gas.

*4:Temperature for accuracy guarantee is in accordance with SEMI standard E56 1296.

*5:A time required to stay within the full scale 2% from the minimum controllable flow rate.

*6:(D) indicates differential pressure. (G) indicates gauge pressure.

*7:The operation differential pressure may differ depending on the specifications.

*8:Mechanical leak rate (SEMI standard E16 90).

3

2-2 Mass flow meter(SEF-E431X/SEF-E441X)

Type *1 SEF-E431X SEF-E441X

Standard flow rate range *2

(Full scale flow rate equivalent to N2)50 / 100 SLM 200 SLM

Accuracy *3,*4 1.0% F.S.

Operating temperature 545

Linearity *3 Within 0.5% of F.S.

Repeatability *3 Within 0.5% of F.S.

Operating differential pressure *5 Less than 300 kPa (D)

Maximum operating pressure *5 350 kPa (G)

Pressure resistance *5 1000 kPa (G)

Leak integrity *6 110-9 Pa m3/sec (He) or less

Output signal 05V DC (Minimum load resistance 2k )

Power source +15V DC 5% 50mA , –15V DC 5% 200mA

Wetted material Stainless steel, Fluoro rubber

Standard fittings 3/8inch Swagelok or equivalent

*1:This product is in conformity with RoHS directives.

*2:SLM denotes gas flow rate in l/min.

*3:Accuracy, linearity and repeatability are guaranteed for the calibration gas.

*4:Temperature for accuracy guarantee is in accordance with SEMI standard E56 1296.

*5:(D) indicates differential pressure. (G) indicates gauge pressure.

*6:Mechanical leak rate (SEMI standard E16 90).

3. Principle of Functioning

The mass flow controller consists of a flow rate sensor, control valve, control circuit, etc.

If the gas flows, there will be a temperature difference between the upstream and down stream

of the sensor section, providing an output proportional to a mass flow rate.

Comparing this output with an external setting signal, the mass flow controller automatically

adjusts the opening of the valve so that the signal will match.

Sensor

Control Valve

Flow Rate Signal Output

(0 5V DC ) Flow Rate Setting Signal

Input ( 0.25 5V DC )

Comparison Control Circuit

Bridge Circuit

Bypass

Gas

A

mplifier Circuit

Correction Circuit Power source of

Control Valve

4

4. External Dimensions SEC(SEF)-E431X/E441X

Top Connector Type

Side Connector Type

5

5. Connector

Connector type : D-Subminiature 9-pin connector(M3 fitting screw type)

Connector Pin Connections List

PIN No. Signal

1 Valve opening/closing input *1

2 Flow rate output 0 to 5 VDC

(Min. load resistance 2k )

3 +15VDC Power

4 Power COMMON *2

5 -15VDC Power

6 Setting input 0.25 to 5 VDC *1

(Input impedance 1M or more)

7 Signal COMMON *2

8 Valve test point *1,*3

9 N.C. *4

*1:N.C.(no connection) for SEF-E431X/E441X.

*2:In order to prevent COMMON voltage fluctuations due to a valve drive current, the power

COMMON terminal(Pin No.4) and signal COMMON terminal(Pin No.7) shall be

connected on the power supply side. Since they are not connected inside the MFC, be sure

to wire them separately and make them common on the power supply side.

*3:The valve test point(Pin No.8) is the terminal to monitor the voltage applied to the valve.

*4:No connection

*5:In order to prevent noise influence, use shielded cable.

6

6. How to use

1) Connect a gas line in the arrow direction given on the main body.

2) Make electrical connection in accordance with the Connector Pin Connections List. For

the DC power, use the following capacity:

+15V , 50mA and –15V , 200mA or more

3) After turning on the power, stop the gas and warm up the apparatus for about 5 minutes.

4) Start a gas supply a set voltage. Flow rate control will start according to the set voltage.

5) The set voltage to obtain a required flow rate value can be calculated by linear

conversion. Required flow rate

Set voltage = 5.000V

Full-scale flow rate

6) Forced full opening(purging) / closing of the SEC-E400X main body control valve: The

valve is fully opened by connecting the supply voltage of +15V to the No.1 pin(valve

opening / closing input) of the main body connector, and fully closed by connecting the

supply voltage of –15V.

In the normal state, open the No.1 pin(nothing connected).

Otherwise, flow rate control may fail if a certain signal is input.

7) Full closing function

The control valve of the SEC-E400X is fully closed by setting the voltage to 0(50mV or

less). Control is resumed by applying the set voltage of 200mV or more.

An input from the No.1 pin has the highest priority.

8) Valve Test Point ( Valve Voltage Monitor)

The voltage applied to the control valve of the mass flow controller is output to between

the No.8 and No.5 pins of the connectors. Note that the minus(-) side of the valve voltage

monitor has the potential of –15V with respect to the power COMMON terminal.

An output voltage range is 0V(fully closed) to +15V(fully opened).

If the No.8 pin is monitored, referencing the power COMMON terminal, the difference

between +15V and the valve applied voltage will be output in terms of negative polarity.

An output voltage range is –15V(fully closed) to 0V(fully opened).

Since this voltage differs depending on the pressure or temperature used, monitor it as

just a guideline. A monitor output is not linear to a flow rate since the control valve has

hysterisis characteristics.

The voltage does not show an absolute amount. Assume that 0 to 15V correspond to 0 to

100% of the voltage applied to the control valve.

Note: Description 4) to 8) are not applied to SEF-E431X/E441X.

Valve Test Point

8

15V

5

4 Power COMMON

Control Valve

Valve Voltage Monitor

(+)

(-)

-15V Valve

Applied Voltage

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7. Connections

If the HORIBA STEC ’s peripheral devices are not used, connect according to the figure

below.

The connections marked with are necessary only when the respective functions are

required.

A control valve driving current(max 200mA) flows to the power COMMON line.

In order to prevent a voltage drop due to wiring be sure to wire the power COMMON line

and signal COMMON line separately and connect them on the power supply side.

Note: Pins no.1,6 and 8 are N.C. for SEF-E431X/E441X.

Open

Control

Close

SET

+15V

Power COMMON

-15V

1

2

3

4

5

6

7

8

9

Signal COMMON

Valve Test Point

N. C.

OUT

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8. Precaution for Handling

1) Use the clean piping and make sure that it has no leak.

2) Supply the clean gas to the MFC, free from dust, mist, etc.

Dust and mist could cause a control failure due to deteriorated accuracy or clogging.

Use a filter of 0.1 m or less.

3) When attaching or removing the joint, fix the main body with a spanner, vice etc.

4) The internal valve of the MFC cannot provide complete shut off.

When complete shut off is required, install a shut off valve separately.

5) When the control valve in the MFC is fully open or when it’s out of control, the flow rate

of gas exceeds the indicated F.S. value.

6) A storage temperature range is 0 to 50 . Do not store beyond these limits.

7) Do not disconnect/ reconnect a cable with the power turned on. It could cause a trouble.

8) Do not apply an excessive force to the main body or cable.

9) Do not apply an excessive pressure to the main body.

10) The withstand voltage for the set input is 15V. Never apply a voltage beyond these

limits.

11) Never remove the MFC case especially while power is supplied.

12) The flow rate output of the SEC may be transitionally made within a range of the supply

voltage. Note the withstand voltage of the input device.

13) Do not turn on and off the power repeatedly in a short period. More than three seconds

should be kept before turning on the power again. Each 15v power source should be

turned on/off simultaneously. Partial power supply or signal input and

plugging/unplugging while power is supplied may cause trouble.

14) HORIBA STEC converts a flow rate value into 25 ,1013hPa(1atm) or

0,1013hPa(1atm) to calibrate.

Gas flow rate in the following states:

CCM, LM : 25 , 1013hPa(1atm)

SCCM, SLM : 0 , 1013hPa(1atm)

15) When you want to use non-calibration gas, consult us.

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9. Product Warranty

1) Warranty period

One year after shipment from HORIBA STEC. If the product has a trouble

and is returned to us within this period, we will repair it free from charge.

2) The scope of warranty is limited to the main body of the mass flow controller.

We are not responsible for the damages resulting from any trouble of the main body.

3) Warranty of the replacement parts.

90 days after replacement or the warranty period mentioned in 1), whichever is longer.

4) Exclusions from the warranty.

The following cases are excluded from the warranty :

Troubles resulting from the irresistible forces such as natural disasters, and so on.

Troubles resulting from wrong handling.

When the apparatus is used or stored in an inadequate environment.

When the apparatus is used beyond the rated specifications or remodeled.

When it is determined that the trouble is not attributable to HORIBA STEC

responsibility.

Examples :

With highly corrosive gas used, when the facility has not been fully purged or

there is a leak from the gas line.

When the MFC is contaminated or clogged by the particle, mist, etc.

HORIBA STEC will disassemble and inspect the returned apparatus to determine

whether a repair should be charged or free from charge.

5) Where to contact

Contact our dealer or HORIBA STEC.

The information herein is subject to change without prior notice.

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10. Chemical Content Information(The Six China RoHS Restricted Materials)

Name and amount of toxic/hazardous substance or element used in a product

Toxic/hazardous substance or element

Unit name

Lead

(Pb)

Mercury

(Hg)

Cadmium

(Cd)

Hexavalent

chromium

(Cr (VI))

Polybromo-

biphenyl

(PBB)

Polybromo-

diphenyl ether

(PBDE)

Printed board

Case

Machine parts

:SJ/T11363-2006

Denotes that the amount of the toxic or hazardous substance contained in all of the homogeneous

materials used in the component is below the limit on the acceptable amount stipulated in the

SJ/T11363-2006 standard.

:SJ/T SJ/T11363-2006

Denotes that the amount of the toxic or hazardous substance contained in any of the homogeneous

materials used in the component is above the limit on the acceptable amount stipulated in the

SJ/T11363-2006 standard.

Meaning of Environmental Protection Use Period Marking

标记华销电产标记环护

(产质证间 ) 这产关

项开这给环污财产带严

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