Rev 37 Operator’s Manual OM-610-1002-1
5.5 PROCESS CONTROLLERS .......................................................................................................22
5.5.1 Furnace Temperature Controller..................................................................................................22
5.5.2 Chamber Gauge Temperature Controller.....................................................................................22
5.5.3 Vacuum Pressure Controller ........................................................................................................22
5.5.4 Vaporizer Temperature Controller...............................................................................................23
5.5.5 Alarm.............................................................................................................................................23
5.5.6 Furnace / Chamber Gauge Switch................................................................................................24
5.5.7 Vacuum Switch..............................................................................................................................24
5.5.8 Vaporizer Switch...........................................................................................................................24
5.6 FUSES..........................................................................................................................................24
5.7 SEQUENCING COMPUTER......................................................................................................25
5.8 COLD TRAP OPERATION.........................................................................................................26
5.8.1 Mechanical Chiller (option)..........................................................................................................26
5.8.2 LN
2
(option) ..................................................................................................................................26
5.9 TUMBLER (OPTION) SPEED CONTROL ................................................................................27
5.10 BASE PRESSURE ....................................................................................................................... 28
5.11 AUTOMATIC COATING CYCLE .............................................................................................29
5.11.1 Dimer Boat Construction............................................................................................................29
5.11.2 System Preparation..................................................................................................................... 30
5.11.3 Start-Up.......................................................................................................................................30
5.11.4 Computer Control Sequence.......................................................................................................30
5.11.5 End-Of-Run.................................................................................................................................31
5.12 SUCCESSIVE RUNS...................................................................................................................32
5.13 SEMI-AUTOMATIC OPERATION............................................................................................32
5.14 OPERATING CONSIDERATIONS............................................................................................33
5.14.1 Deposition Rate...........................................................................................................................33
5.14.2 Amount of Substrate....................................................................................................................33
5.14.3 Type of Substrate.........................................................................................................................33
5.14.4 Orientation of Substrate..............................................................................................................33
5.14.5 Pump Down Time........................................................................................................................ 34
5.14.6 Vacuum System Leaks.................................................................................................................34
5.14.7 Baffle........................................................................................................................................... 34
5.15 ADHESION PROMOTION (WET PROMOTION).....................................................................34
5.15.1 Making the Promotion Solution..................................................................................................35
5.15.2 Quality Check, Disposal .............................................................................................................35
5.15.3 How to Use the Promotion Solution ...........................................................................................35
SECTION 6 MAINTENANCE............................................................................................................37
6.1 PARYLENE DEPOSIT REMOVAL ...........................................................................................37
6.1.1 Applying Release Agent ................................................................................................................37
6.1.2 Parylene Coating Removal ...........................................................................................................37
6.1.3 Cold Trap Probe (Thimble)...........................................................................................................38
6.1.4 Vacuum Integrity...........................................................................................................................38
6.1.5 Vacuum Pump...............................................................................................................................38
6.1.6 Vacuum Gauge Port......................................................................................................................39
6.1.7 Vaporizer.......................................................................................................................................39
6.2 LONG TERM INSPECTIONS AND MAINTENANCE .............................................................39
6.2.1 Pyrolysis Tube............................................................................................................................... 39
6.2.2 O-Rings, Vacuum System Seals.....................................................................................................39
6.2.3 Vacuum Hose ................................................................................................................................40
6.2.4 Rotary Feed-Thru Maintenance....................................................................................................40