Renishaw Mirror mount Installation guide

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M-9904-2179
Installation guide
The RLE fibre optic laser encoder uses
interferometry to provide high resolution, high
linearity position feedback. The RLE system
comprises an RLU laser unit, one or two RLD10
detector heads and an additional optic - either
a plane mirror or retroreflector, to complete the
interferometer configuration.
Mirror selection and installation should be carried
out carefully to avoid degrading the metrological
advantages of the interferometer system.
This document details a typical alignment
procedure, which can be used with Renishaw
mirrors and mounts to ensure errors are
minimised.
The following instructions demonstrate one
method for aligning two plane mirrors to an
X-Y stage* using Renishaw mirror mounts. It
is assumed that the person performing the
procedure is familiar with the test equipment, all
mechanical adjustments of the motion stages
have been completed, the RLD10 detector
heads are fully mounted and the axes are fully
operational.
*
If a vertical axis of motion is located under the
mirrors a different method of pitch alignment may be
necessary.
Equipment:
2 x stick mirrors of required length fitted with
mount locations (3 ball pads)
2 x Renishaw mounting kits (RAM10-SX-XX)
which include: 1 x adjustable mirror mount, 1
x fixed mirror mount, 2 x mirror clamps, 10 x
M2.5 by 8 screws, 1 x Allen key (2.0 mm A/F),
1 x mount adjustment tool
Alignment target
Figure 1: system terminology
1. Install Y-axis mirror into its mount
The motion stage must provide fixing holes to
accept the mirror mounts. These should be
machined according to Figure 2 overleaf.
Attach the adjustable mirror mount (see
Figure 6) to the stage using 3 of the M2.5
screws provided. The screws should be
torqued to 0.7 Nm.
Repeat for the fixed mirror mount.
X-axis interferometer
(RLD10 detector head)
Y-axis interferometer
(RLD10 detector head)
X-axis
mirror
Y-axis
mirror
X-axis
travel
Y-axis
travel
Mirror mount installation guide
Locate the stick mirror on the two mounts so
that the ball pads on the bottom of the mirror
sit in the location features on the mounts (as
in Figures 3 and 4). Note: two ball pads are
located at the adjustable mount end and one at
the fixed mount end.
Figure 3: mirror with ball pads
Figure 4: mirror located in mounts
2. Remove Y-axis interferometer (RLD10
detector head) cosine error
Move the Y-axis (with the X-axis movement
locked) to achieve the shortest separation
between the Y-axis RLD10 and mirror.
Attach a Renishaw target sticker on the mirror
surface so that the laser beam is on the target.
Move the axis to achieve the longest
separation between the Y-axis RLD10 and
mirror.
Adjust the pitch and yaw of the beam from the
RLD10 so the laser spot does not exhibit any
translation from the target. Note: this can be
an iterative process and may require multiple
near and far field adjustments for the best
alignment.
3. Align the Y-axis mirror perpendicular to the
Y-axis travel
Remove the sticker target from the front of the
mirror.
Move the mirror to the furthest separation
and insert a metal Renishaw alignment target
under the RLD10 (Figure 5).
Visually align the mirror yaw, using the yaw
adjustment screw located on the side of the
mount (see Figure 6) so the return beam is
in line with the centre of the alignment target
aperture (mirror is perpendicular to the X-Y
plane).
Figure 2: fixing holes for mirror of total length L (L < 350 mm): all dimensions in mm
View from underside of mirror mounts: Note: L = optical aperture + 20 mm
Fixed mount
Mirror
Adjustable mount
6 holes M2.5
x 6 deep min.
Optical face
Mirrored
surface
Ball pads
Visually align the mirror pitch, using the
adjustment screw located on the side of the
adjustable mirror mount (see Figure 6) so the
return beam goes through the centre of the
alignment target aperture (mirror surface is
now perpendicular to the X-Y plane).
Remove the target.
Finely adjust the pitch and yaw of the Y mirror
(using the adjustment screws located on the
side of the mount) to maximise the signal
strength.
Figure 5: Renishaw alignment target
Figure 6: adjustable mirror mount
4. Engage the locking mechanism on the
Y-axis mirror
Place the clamps provided on top of the blocks
and half tighten with the screws provided as
shown in Figure 7. Torque screws on both
sides to 0.2 Nm ±0.05 Nm.
Check the clamping process has not altered
the mirror alignment - some re-adjustment of
mirrors may be required.
5. Align the X-axis mirror and interferometer
perpendicular to the X-axis by repeating
steps 1, 2, 3 and 4, substituting X for Y
Figure 7: mirror clamped in mount
Yaw adjustment
screw
Pitch adjustment
screw
Fixed mount
Adjustment mount
Clamps
M-9904-2179-04-A
Renishaw plc
New Mills, Wotton-under-Edge,
Gloucestershire GL12 8JR
United Kingdom
T +44 (0) 1453 524524
F +44 (0) 1453 524901
E uk@renishaw.com
www.renishaw.com
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Renishaw reserves the right to change specifications without notice
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Issued: 1014 Part no. M-9904-2179-04-A
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