RELIALINE™ 170 HEATING SYSTEM
Modular Line Heating
System—Tailored to
Quickly Fit Custom
Applications while
Providing Uniform
Temperature
RELIALINE™ 170 heating system from Watlow
®
is the first
modular line heater that can be quickly delivered and easily
installed in high performance applications. The RELIALINE™
170 provides precisely controlled heat distribution and is
automatically self regulating to deliver excellent temperature
uniformity. It offers a custom thermal solution within a stock
product delivery timeframe.
Watlow’s newest heating system technology is constructed
and designed for adaptability, which is perfect for quick
prototyping. This patent-pending technology allows
Watlow to configure a product to specific dimensions
and three-dimensional installation drawings are provided
with quotes.
The heating system improves temperature uniformity by
precisely heating individual elbow, tee and VCR
®
fittings.
The temperature compensation feature allows the system to
increase wattage in cooler regions and decrease the power
in warmer zones thus improving the temperature uniformity
of the entire line. This reduces the need for complicated
control systems resulting in decreased cost of the entire
system.
The RELIALINE™ 170 is pre-formed to fit the outside
diameter of standard tubing for intimate contact with
maximum surface coverage. The internal rails of this heating
system are spring loaded to allow for a “click-on” fit and
maximum contact force for improved thermal transfer.
The new insulation system incorporates Watlow’s “double
pane” design, which uses air as an insulator ensuring
touch-safe outside surface temperatures (meets SEMI S2).
In addition the air insulation reduces potential outgassing
or contamination. Any individual RELIALINE™ 170 heater
segment within the system can be removed at any point
along the line to speed servicing thus decreasing downtime.
Applications
Gas Delivery Lines: heating process gasses for
deposition and etch equipment including:
• Boron trichloride, BCl
3
• Chlorine trifluoride, ClF
3
• Dichlorosilane, (DCS), SiH
2
Cl
2
• Tetra ethyl orthosilicate, TEOS
• Tungsten hexafluoride, WF
3
• Process gas line qualification
Heating columns
High pressure liquid chromatograph (HPLC)
Process systems
Features and Benefits
Patent-pending modular design
• Reduces lead times by replacing iterative custom
solutions
• Provides quick prototyping and delivery
• Allows for easy field installation
• Incorporates heated elbow, tee and VCR
®
fittings
Temperature compensating construction
• Adjusts for variations in heat loading
• Improves temperature uniformity throughout the assembly
by heating components and fitting segments
• Eliminates the need for complicated control systems
• Reduces cost of the entire line heating system
Compatible with wide variety of simple control systems
• Simplifies and improves system performance
• Allows use of open loop for low performance applications
•
Improves temperature reliability utilizing PID control
systems with temperature uniformity as good as ±5°C (9°F)
“Double pane” (air gap) insulation design
• Meets SEMI S2 safety requirements for outside
temperature
• Improves process yield by removing a contamination
(outgassing) source
Tough/durable construction
• Reduces risk of damage in demanding applications
“Click-on” installation design
• Provides feedback when product is properly installed
• Assures intimate contact with maximum surface coverage
Agency recognition and certifications
• SEMI S2 requirements met
• UL
®
component recognition and CE pending
• RoHS compliant
COL-REL-0708
Watlow
®
is a registered trademark of Watlow Electric Manufacturing Company.
RELIALINE
®
is a trademark of Watlow Electric Manufacturing Company.
UL
®
is a registered trademark of Underwriter’s Laboratories, Inc.
VCR
®
is a registered trademark of The Cajon Company.
®
© 2008 Watlow Electric Manufacturing Company all rights reserved.
colrel-0708.qxd:COL-FFLX-0703 7/9/08 8:18 AM Page 1
Specifications
Operating temperatures
• Temperature: 40 to 170°C (104 to 338°F)
• Temperature uniformity:
• First pass uniformity equal to iterative custom systems
• Typical uniformity
• ±20°C (36°F) running open loop
• ±10°C (18°F) with simple feedback control
• As good as ±5°C (9°F) with short zone closed
loop control
• Typical uniformity performance represented in
below graph (results vary with applications)
Heated line fittings
• Fittings: elbow, tee and VCR
®
• Connectors: finger-proof rated
Control
• Open-loop
• Variable voltage
• Percent duty cycle (on)
• Thermocouple 0.062 in. (1.6 mm)
Product dimensions (straights)
• Min. length: 2 in. (51 mm)
• Max. length: 36 in. (914 mm)
• Line diameter: 0.25 in. (6.4 mm) and 0.50 in. (13 mm)
• Outside dimension:
0
20
40
60
80
100
120
140
160
180
Voltage
Weldment Temperature (°C)
20
40
60
80 100
120 140
160
180
200
220
240
RELIALINE Red
RELIALINE Black
0.25 in. (6.4 mm)
Tubing Dia.
0.5 in. (13 mm)
Tubing Dia.
Straight
1.12 (28.4) 1.39 (35.3)
Elbow/Tee
1.88 L x 2.03 H x 1.99 W
(47.8 L x 51.6 H x 50.5 W)
2.17 L x 2.14 H x 2.01 W
(55.1 L x 54.3 H x 51 W)
VCR
®
2.42 L x 2.20 H x 2.32 W
(61.4 L x 55.8 H x 58.9 W)
2.53 L x 2.57 H x 2.71 W
(64.2 L x 65.3 H x 68.8 W)
Temperature Coverage/Product Selection
140.0
150.0
160.0
170.0
180.0
190.0
200.0
210.0
220.0
Weldment Temperature (°C)
1
2
5
4
3
8
9
10
VCR2
VCR1
15
14
12
VCR2
T/C
#1
Elbow
#5
T/C
#2
T/C
#3
T/C
#4
T/C
#9
T/C
#10
T/C
#12
T/C
#14
T/C
#15
VCR1
Elbow
#8
Watlow RELIALINE Red
Competitor A
Competitor B
Electrical
• Voltage: as required to achieve temperature per
below chart-up to 240V max.
• Amperage: dependent on line length, up to 8A
max. for steady state, 15A max. start up (in-rush)
• Consult factory for exact in-rush current for
your system
Temperature Uniformity
Duty cycle vs. temperature
0
20
40
60
80
100
120
140
160
180
200
10 20 30 40 50 60 70 80 90 100
Percent Duty Cycle
Weldment Temperature (°C)
Red Power, 240V
Red Power, 120V
Black Power, 240V
Black Power, 120V
Average Weldment Temperatures at Duty Cycle
Outside Surface
Temperature at 170°C
Line Temperature
Line Temperature
Variation at 170°C
Operating Temperature
170.01
170
169.99
169.98
169.97
169.96
169.95
169.94
Min.:
169.937
110
105
100
95
90
85
80
75
70
65
Min.:
60.33
Max.:
113.14
Max.:
170.015
To be automatically connected to the nearest North American Technical Sales Office:
1-800-WATLOW2 • www.watlow.com • info@watlow.com
International Technical Sales Offices: Australia, +61-3-9335-6449 • China, +86-21-3950-9510 • France, +33 (0) 3073-2425 •
Germany, +49 (0) 7253-9400-0 • Italy, +39 (0) 2 458-8841 • Japan, +81-3-3518-6630 • Korea, +82-2-575-9804 • Malaysia, +60-3-7980-7741 •
Mexico, +52 (442) 217-6235 • Shanghai, +86-21-3950-9504 • Singapore, +65-6777-1266 • Spain, +34 91 675 1292 • Sweden, +46 35-27-11-66 •
Taiwan, +886-7-288-5168 • United Kingdom, +44 (0) 115-964-0777
colrel-0708.qxd:COL-FFLX-0703 7/9/08 8:18 AM Page 2
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