Agilent Technologies 4072A Advanced Pre-Installation Manual

sA

Preinstallation Guide

Agilent 4072A/B Advanced Parametric Tester

Agilent 4073A/B Ultra Advanced Parametric Tester

Edition 4

Agilent Part Number: 5989-5631EN

March 2007

2

Agilent 4072/4073 Preinstallation Guide, Edition 4

Notice

The information contained in this document is subject to change without notice. Agilent Technologies makes no

warranty of any kind with regard to this material, including, but not limited to, the implied warranties of

merchantability and fitness for a particular purpose. Agilent Technologies shall not be liable for errors contained

herein or for incidental or consequential damages in connection with the furnishing, performance, or use of this

material.

Warranty

A copy of the specific warranty terms applicable to your Agilent Technologies product and replacement parts can

be obtained from your local sales and service office.

Audience

This manual is intended for customers who purchase the Agilent 4072A/B or 4073A/B. Agilent customer engineers

(CE) may also refer to this manual during site preparation consultation.

Printing History

The printing date and publication number indicate the current edition. The printing date changes when a new

edition is printed. (Minor corrections and updates, which are incorporated at reprint, do not require a date change.)

The publication number is updated when extensive technical changes are incorporated.

Edition 1 March 2003

Edition 2 January 2004

Edition 3 August 2006

Edition 4 March 2007

Contents

3

Agilent 4072/4073 Preinstallation Guide, Edition 4

1. General Information

Agilent 4072/4073 Tester Configuration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7

Installation Overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8

2. Site Preparation

Installation Site Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12

Space requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12

Other requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13

Air conditioning . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13

Floor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13

Table . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13

Lighting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14

Software media storage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14

Telephone . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14

Network service. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14

Label for emergency off switch. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14

Lock for disconnect device . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14

Example of 4072/4073 tester layout . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15

Electrical Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23

Power configurations and requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23

Grounding . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24

Power line transients . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24

Power consumption of 4072/4073 system instruments. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24

Main power cable . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26

Additional power outlets . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27

Environmental Considerations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28

Temperature and humidity . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28

Floor vibration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29

Air cleanliness . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29

Air flow . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29

Upgrade to 4072A/4073A. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30

Upgrading from 4071A to 4072A . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30

Upgrading from 4071A to 4073A . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30

Upgrading from 4072A to 4073A . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30

Upgrade to 4072B/4073B . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31

Upgrading from 4071A . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31

Upgrading from 4072A . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31

Safety Precautions. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32

Earthquake. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32

Fire . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 34

Chemicals . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 34

Emergency Off (EMO) System. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 35

Block diagram and operation of emergency off circuit. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 36

I/O specifications. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 39

Example design of external emergency lamp . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 39

Site Preparation Checklist. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 40

3. Wafer Probers and Connection with Testhead

4

Contents

Agilent 4072/4073 Preinstallation Guide, Edition 4

Wafer Probers . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 44

Mounting testhead on wafer prober . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 44

Mounting mechanism . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 44

Wafer prober sense switch . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 45

Placing testhead beside manual wafer prober. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 50

Connecting with Testhead . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 51

Probe card for direct docking . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 51

Personality board . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 52

Wiring for personality board. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 53

Extension cable fixture . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 54

Wiring for extension cable fixture . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 54

Pin board configuration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 55

4. Receiving

Package. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 59

Shipping Damage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 60

Checking Contents . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 61

Unpacking System Cabinet . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 62

Unpacking Testhead . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 64

Unpacking Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 65

Moving Cabinet, Testhead and Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 66

Moving testhead . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 68

Moving cabinet and accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 70

A. Confirming the System Power Safety

Connecting Site Power Line. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 73

Component Location for PDU and Checking EMO. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 76

Confirming PDU and EMO Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 78

5

Agilent 4072/4073 Preinstallation Guide, Edition 4

1 General Information

6 Chapter 1

Agilent 4072/4073 Preinstallation Guide, Edition 4

General Information

This manual contains Agilent 4072A/B advanced parametric tester and Agilent 4073A/B ultra advanced parametric

tester preinstallation information and is the primary reference document to assist you in installation planning and

site preparation.

This manual consists of the following chapters.

Chapter 1 , “General Information.” briefly describes the Agilent 4072/4073 tester configuration, explains several

important preinstallation considerations, and provides a brief start-to-finish system installation overview.

Chapter 2 , “Site Preparation.” describes system layout instructions, explains power and environmental

considerations, and describes important safety precautions.

Chapter 3 , “Wafer Probers and Connection with Testhead.” outlines wafer prober requirements and considerations.

Chapter 4 , “Receiving.” describes receiving information, including how to check for damage and uncrating and

moving your tester to its final location.

Chapter 1 7

Agilent 4072/4073 Preinstallation Guide, Edition 4

General Information

Agilent 4072/4073 Tester Configuration

Figure 1-1 shows the Agilent 4072/4073 tester.

Figure 1-1 4072/4073 tester overview

The 4072/4073 tester consists of the following:

System cabinet The standard system cabinet contains the 4072/4073 tester system instruments

(Agilent E4980A/4284A precision LCR meter, Agilent 3458A multimeter, Agilent 81110A/

8114A pulse generator, and Agilent E4411B spectrum analyzer) and is 1.6 m (5.3 ft.) high.

The standard cabinet has an emergency off (EMO) unit.

Testhead To test devices on a wafer, the testhead can be mounted on an automatic wafer prober, or can

be placed next to a manual wafer prober. You can also test packaged devices by mounting

them on a test fixture that attaches to the testhead.

System controller The 4072/4073 tester requires an HP workstation c8000 (or HP Visualize C3750) to control

the system instruments. The c8000 system controller has rack system style, and is rack

mounted in the cabinet as default. It can be also separated from the cabinet optionally.

Flat panel display The flat-panel display is available as monitor for the controller. The flat-panel display can be

mounted, with the stand, at the side of the system cabinet.

system cabinet

flat panel display

testhead

wafer prober

8 Chapter 1

Agilent 4072/4073 Preinstallation Guide, Edition 4

General Information

Installation Overview

This section provides a brief start-to-finish system installation overview.

NOTE If the steps described in this document are not completed prior to the system installation date, the

Agilent customer engineer (CE) may not be able to install the tester.

The checklist in Chapter 2 , “Site Preparation.” is available.

NOTE Special codes and regulations covering the installation of the test system may apply in your area. It

is the customer’s responsibility to ensure that all local laws, regulations, and codes for buildings,

machinery, and electrical distribution systems are complied with before the system arrives.

NOTE The customer should appoint a principal operator or system manager. This person will be

responsible for operating the 4072/4073 tester, performing operator maintenance when necessary,

and scheduling periodic maintenance. The principal operator’s initial responsibilities are to

establish and monitor site preparation schedules, and to order system supplies. The principal

operator must be present for the system installation.

Chapter 1 9

Agilent 4072/4073 Preinstallation Guide, Edition 4

General Information

Installation Overview

Figure 1-2 Flowchart for preinstallation

START

preparing installation location

preparing for electrical equipment

confirming environmental

considerations

confirming safety precautions

preparing the requirement to connect

testhead to wafer prober

unpacking

moving to installation location

installation by Agilent CE

END

site preparation

confirming plan for site verification

checking the contents

site

verification

deciding receive day and install day

chapter 2

chapter 4

chapter 3

assigning system administrator

delivery day

installation

1 month

before delivery

customer

customer or

Agilent CE

customer and

Agilent CE

2 weeks

before delivery

moving to

installation location

10 Chapter 1

Agilent 4072/4073 Preinstallation Guide, Edition 4

General Information

Installation Overview

11

Agilent 4072/4073 Preinstallation Guide, Edition 4

2 Site Preparation

12 Chapter 2

Agilent 4072/4073 Preinstallation Guide, Edition 4

Site Preparation

Installation Site Requirements

This chapter describes the following:

• Space requirements

• Other requirements

Space requirements

The amount of floor space required for your Agilent 4072/4073 tester can be quickly and accurately determined by

using the System Component Template and blank grid sheets provided in “Example of 4072/4073 tester layout”.

The template and grid sheets are scaled so that each square on the grid sheet represents 20 cm × 20 cm = 400 cm

2

(approximately 0.43 ft

2

) of floor space.

From the system component template sheet of Figure 2-3, simply cut out the components included with your

system, then place the cutouts on the grid sheet of Figure 2-6 to determine the best layout for your 4072/4073 tester.

Keep the following points in mind when selecting the system location and performing the final site layout.

• Provide adequate space for the wafer prober. Position the wafer prober 1 meter (3.3 ft.) or less from the tester so

the signal cables can be connected from the system cabinet to the testhead. Table 2-1 shows the cable lengths

from the bottom of the system cabinet.

• Provide at least 0.6 meter (24 in) of clearance at the front and rear of the system cabinet to allow space for

servicing. Agilent Technologies recommends 1 meter (39 in) of space for servicing.

• Make sure there is adequate workspace around the system so that operating personnel can move freely, without

affecting system operation.

• To ensure adequate clearance for the system, check all doors, elevators, and passageways that the tester will use

on the way to the installation site. See Figure 2-1 for the dimensions of the system cabinet.

• If the system controller is to be rack mounted in the system cabinet, the distance between the system cabinet

and the display/keyboard/mouse must be 50 cm (20 in) or less. If you want to locate them farther than it,

prepare extension cables for video and USB. At this point, the USB extension cables must be in “Repeater

type”, not “HUB type”.

Table 2-1 Cable lengths from system cabinet bottom

Cable Length from system cabinet bottom

Testhead power supply cable 3 m (9.8 ft.)

Air duct 3 m (9.8 ft.)

Test lead for CMU (Agilent E4980A, Agilent 4284A) 2.4 m (7.9 ft.)

Test leads for DVM (Agilent 3458A) 3.1 m (10.2 ft.)

Test leads for PGU (Agilent 81110A, Agilent 8114A) 2.4 m (7.9 ft.)

Test leads for Spectrum Analyzer (Agilent E4411B) 2.4 m (7.9 ft.)

Chapter 2 13

Agilent 4072/4073 Preinstallation Guide, Edition 4

Site Preparation

Installation Site Requirements

Figure 2-1 System cabinet dimensions

Other requirements

The site requires the following environment.

Air conditioning

To satisfy the temperature and air cleanliness requirements outlined in the “Environmental Considerations” on

page 28, air conditioning is recommended. The power consumed by a standard 4072/4073 tester, including the

system controller and peripherals, is about 1300 watts•hour (4.7 × 10

6

J). Also, consider the heat dissipated by

other instruments in the room, lighting, and operating personnel. A good rule for calculating the required BUT’s of

your air conditioning system is to assume 3500 BUT’s (3.6 × 10

6

J) for every 1000 watts•hour. Be sure to consider

room size also.

Floor

Requirements for the site floor are as follows.

• Verify the load capacity of the floor at the installation site and all floors on the way to the site. All floors must

have a minimum load capacity of 21 kg/cm

2

(300 lbs/in

2

).

• Make sure that tile, concrete, or other industrial floors are adequate for the system site. Use a special wiring

arrangement, or provide conduits or some type of protection for exposed power and signal cables.

• Use an antistatic rubber mat.

Table

Plan for a table to be placed next to the prober, to hold the testhead during servicing. The table must be able to bear

the weight of the testhead (approximately 75 kg)

Top

View

Front View Side View

906 mm

513 mm

600 mm

120 degrees

max.

120 degrees

max.

1600 mm

600 mm

906 mm

14 Chapter 2

Agilent 4072/4073 Preinstallation Guide, Edition 4

Site Preparation

Installation Site Requirements

Lighting

Provide sufficient lighting for optimum visibility of lighted indicators, the display, and the keyboard of the system

controller. Arrange lighting so that reflected light does not make it difficult to read displayed characters. Also, the

system, and especially the software media, must not be exposed to direct sunlight.

Software media storage

Purchase a fireproof cabinet or locker for storing important items, such as documents and software media

Software media such as CD-ROM should be stored in an environment similar to that of the 4072/4073 tester.

Extreme temperature or humidity changes, which may alter the size of a disk, must be avoided. Do not place the

software media in or near magnetic fields.

Telephone

Install a telephone with an extra-long receiver cord, to allow the operator easy access to any part of the system

while on the phone.

Network service

If the system controller is to be connected with a network, a network service and LAN cable are necessary. Choose

a long LAN cable that can connect with the system controller. Also, prepare the IP address and hostname before the

tester installation.

Label for emergency off switch

Install the 4072/4073 tester to enable easy access to the main breaker or switch and adhere conspicuous labels so

that the operator will be able to cut the main power quickly in an emergency.

Lock for disconnect device

Prepare a lock for the main switch, required for lockout during maintenance of the system. Determine the lock’s

suitability by considering the hole in the disconnect device. Figure 2-2 shows the dimensions of the lock.

Figure 2-2 Dimensions of lock

A

B

C

A

35 mm

40 mm

B

19 mm

21 mm

C

5 mm

6 mm

Chapter 2 15

Agilent 4072/4073 Preinstallation Guide, Edition 4

Site Preparation

Installation Site Requirements

Example of 4072/4073 tester layout

Figure 2-3 provides a system component template sheet to make it easy for you to arrange your system and decide

upon the best layout. Simply cut out, from the template sheet, the system components furnished with your Agilent

4072/4073 tester, and arrange them on the blank grid sheet provided in Figure 2-6

. One square represents 20 cm by

20 cm (approximately 0.43 ft

2

).

Figure 2-4 and Figure 2-5 show examples of a 4072/4073 tester layout.

Figure 2-7 and Figure 2-8 show layout examples for Tokyo Electron P8 and Accretech A-PM-90A wafer probers,

respectively.

Figure 2-9 and Figure 2-10 show layout examples for Tokyo Electron P12 and Accretech UF300 wafer probers,

respectively.

Figure 2-3 System component template sheet

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V\VWHP

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16 Chapter 2

Agilent 4072/4073 Preinstallation Guide, Edition 4

Site Preparation

Installation Site Requirements

Figure 2-4 Example of 4072/4073 tester layout

906 mm

513 mm

600 mm

Testhead

640 mm

Wafer Prober

Table

Keyboard

Table

System

Cabinet

19" Color

Display

Switch Board

Chapter 2 17

Agilent 4072/4073 Preinstallation Guide, Edition 4

Site Preparation

Installation Site Requirements

Figure 2-5 Testhead layout

642 mm

890 mm - 1010 mm

( The hight is from floor to DUT )

testhead

DUT

17" flat panel

display

Rear view

switch board

testhead

table

keyboard

table

17" flat panel

display

system

cabinet

system

cabinet

600 mm

18 Chapter 2

Agilent 4072/4073 Preinstallation Guide, Edition 4

Site Preparation

Installation Site Requirements

Figure 2-6 Grid sheet

Chapter 2 19

Agilent 4072/4073 Preinstallation Guide, Edition 4

Site Preparation

Installation Site Requirements

Figure 2-7 Layout example for Tokyo Electron P-8

20 Chapter 2

Agilent 4072/4073 Preinstallation Guide, Edition 4

Site Preparation

Installation Site Requirements

Figure 2-8 Layout example for Accretech A-PM-90A

2400 mm

4400 mm

Grid: 200 mm

air duct

test leads (DVM)

TH PS cables

testhead

wafer prober

ACCRETECH A-PM-90A

test leads (PG)

3600 mm

2400 mm

Grid: 200 mm

TH PS cables

test leads (PG)test leads (DVM)

air duct

testhead

wafer prober

ACCRETECH A-PM-90A

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Agilent Technologies 4072A Advanced Pre-Installation Manual

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