Wentworth Technology Pegasus S200 Operating instructions

Brand: Wentworth Technology

Model: Pegasus S200

Type: Operating instructions

Wentworth

Laboratories

Pegasus Probe

Installation and Operation

Issue 2.0, December 2003

The Leader in ProbeAbility ™

Wentworth

Laboratories

This document is copyrighted by Wentworth Laboratories Limited. No part of this

manual may be reproduced or transmitted in any form, by any means (electronic,

photocopying, recording, or otherwise) without the prior written permission of

Wentworth Laboratories Limited.

Trademarks

Any trademarks, registered trademarks, or trade names mentioned in this manual that are

not he property of Wentworth Laboratories Limited are acknowledged to be the property

of their respective holders.

Disclaimer

Wentworth Laboratories Limited makes no representations or warranties regarding the

contents of this document. We reserve the right to revise this document, or make

changes to the specifications of the products described within, at any time without

notice and without obligation to notify any person for such revision or change.

Contact Information

If you have any questions or comments about the Pegasus Probe or any other

Wentworth product, please direct your inquiry to your local sales representative or one

of the Wentworth offices:

Wentworth Laboratories, Inc

101 Commerce Drive

Brookfield, CT 06804

Tel: 203 775 9311

Fax: 203 775 4398

Wentworth Laboratories, Ltd

1 Gosforth Close

Sandy, Bedfordshire SG19 1RB

ENGLAND

Tel: +44 (0) 1767 681 221

Fax: +44 (0) 1767 691 951

Wentworth Laboratories, Inc.

1102 Walsh Avenue

Santa Clara, CA 95050

Tel: 408 919 1875

Fax: 408 919 6684

Wentworth Japan Co., Ltd

1-8-15 Nakagawa, Tsuzuki-ku

Yokohama 224

JAPAN

Tel: +81 (0) 45 912 8520

Fax: +81 (0) 45912 8524

Wentworth Laboratories, Inc.

3913 Todd Lane, Suite 505

Austin, TX 78744

Tel: 512 440 0792

Fax: 512 440 0530

Web site http://www.wentworthlabs.com

PEGASUS Operating and Service Manual

Wentworth

Laboratories

1 PEGASUS PROBE - DESCRIPTION

The Pegasus Probe was designed for use as a single probe with integrated edge sensor.

There are eight mounting positions that can be used for a combination of Pegasus Probes

and Inkers.

The first Pegasus Probe of any combination is the fixed probe. The position of this probe

will be set prior to shipment, such that the nominal position of the needle will be coincident

with the chuck centre when the prober is first initialised. Whilst it is possible to adjust the

position of this probe, it should not be necessary. Where a device has more than one pad, or

if multi-die probing, subsequent Pegasus Probes should be of the adjustable type. (See

photo below).

Fixed Pegasus Probe

Adjustable Pegasus Probe

Fig.1 Typical Probing Arrangement Using 1 fixed and 1 adjustable Pegasus Probes

PEGASUS Operating and Service Manual

Wentworth

Laboratories

Radial, tangential and height adjustment of the Adjustable Pegasus Probe is easily

achieved using the thumbwheels.

To achieve optimum probe contact with the device, the amount of probe force required to

break the edge sense contact can be adjusted.

Replacement of the probe needle is quick and easily achieved without the requirement for

adhesives or any special tools.

The probe needle is isolated from the edge sense circuit and the probing equipment. The

Pegasus Probe can be provided with either a 45° or a 60° mounting position for the probe

needle. (This must be specified when ordering)

PEGASUS Operating and Service Manual

Wentworth

Laboratories

2 SPECIFICATION

Fixed Pegasus Probe

Adjustment

Radial – 12mm coarse

Tangential - +/- 3mm

Height – 6mm

Probe Needle Size – 0.5mm diameter ( 0.020”)

Probe Force – from 3g upwards

Probe Management – Sprung loaded retention of the probe needle

Optional 45° or 60° probe to substrate orientation.

Adjustable Pegasus Probe

Adjustment

Radial – 12mm coarse

+/- 5mm fine

Tangential - +/- 5mm

Height – 10mm

Probe Needle Size – 0.5mm diameter ( 0.020”)

Probe Force – from 3g upwards

Probe Management – Sprung loaded retention of the probe needle

Optional 45° or 60° probe to substrate orientation.

Electrical Isolation

The Pegasus Probe is capable of withstanding 3kV when mounted in its normal operating

position of 4.5mm from the substrate.

PEGASUS Operating and Service Manual

Wentworth

Laboratories

3 INSTALLATION

The Fixed Pegasus Probe can be installed in any of 4 locations. It is attached using the two

mounting screws shown in Figure 2. These screws also provide the means of achieving the

coarse radial adjustment. Vertical adjustment can be achieved by releasing the locking

screw and turning the vertical thumbwheel.

Note. The position of the fixed probe will have been set prior to shipment.

Vertical Thumbwheel

Locking Screw Mounting Screws

Fig 2. Mounting the fixed Pegasus Probe

3.1 Fixed Probe Setting Procedure

Initialise the prober, then enter the Diagnose menu. Use the function key “Centre” to move

the stage to its centre position.

Mount the fixed probe in the desired location on the platform. Place a needle in the needle

holder. Looking down through a microscope, move the Pegasus Probe until the needle

point is over the central hole of the vacuum chuck. Lock the mounting screws.

PEGASUS Operating and Service Manual

Wentworth

Laboratories

3.2 Fixed Pegasus Probe Height Adjustment

Ensure the Pegasus Probe connector is plugged in to number one edge sensor socket at the

rear of the prober, and a needle has been placed in the needle holder

Run the Probe Height facility on the prober to set the Gross and Fine heights.

Should it be required, the platform can be raised and lowered using the Platform adjusting

micrometer at the rear of the prober.

Platform Height Adjustment

Fig.3 Platform height adjustment

The best electrical isolation is achieved when the probe holder is 4.5mm from the

substrate.

Probe Holder

Chuck Plate

4.5mm

Figure 4. Optimum Working Distance Setting

PEGASUS Operating and Service Manual

Wentworth

Laboratories

3.3 Setting the Adjustable Pegasus Probe

If a device has more than one pad, or if multi-die probing is required, the Adjustable

Pegasus Probe can be used in addition to the Fixed Pegasus Probe.

Mount the Adjustable Pegasus Probe/s in the desired remaining positions and insert the

needles.

Using the vertical thumbwheel ensure that the Adjustable Pegasus Probe/s are above the

Fixed Pegasus Probe. Insert the connectors into the edge sensor sockets at the rear of the

prober.

Run the probe height routine and raise the chuck until it comes into contact with the Fixed

Pegasus Probe. Using the vertical thumbwheel, lower each Adjustable Pegasus Probe until

an X appears on the screen indicating that the edge sensor has opened. Remove the

Adjustable Pegasus Probe connectors from the edge sensor sockets, leaving only the Fixed

Pegasus Probe connector in an edge sensor socket.

Only the X relating to the Fixed Pegasus Probe should now be displayed on the screen.

Accept this probe height.

Vertical Thumbwheel

Tangential Thumbwheel

Radial Thumbwheel

Fig 5.Adjustable Pegasus Probe

Using the Tangential and Radial Thumbwheels adjust the lateral position of the needle

until it is aligned with the required device or pad.

PEGASUS Operating and Service Manual

Wentworth

Laboratories

3.4 Cable Managment

Cable management is important to the performance of the Pegasus Probe. The cable

from the tester should be attached directly to the connector provided on the side of the

Pegasus Probe body and anchored to the side of the body as shown. Connecting the

tester cable directly to the needle can influence the performance of the Pegasus Probe,

which may be detrimental to the quality of probe mark.

Ensure cable between connector an

robe holde

is loose

Tester cable anchored to body

Fig 6. Tester Cable Management

PEGASUS Operating and Service Manual

Wentworth

Laboratories

Fig 7. Cable Management Clamps

Cable clamps are provided on the underside of both sides of the platform to guide the

tester and edge sense cables to the rear of the prober. (Fig.7/8)

Fig 8. Connectors

Edges Sensor Ports

Inker Ports

PEGASUS Operating and Service Manual

Wentworth

Laboratories

4 ADJUSTMENT & OPERATION

Sprung Loaded Needle Clamp

Fig 9. Probe Needle Holder

The probe needle is inserted into the probe holder by pulling the sprung loaded clamp

back towards the Pegasus Probe body (Fig. 9) and inserting the needle through the

exposed hole from the underside. This operation can be performed with the Pegasus

Probe in-situ. The “Change Probe Card” function should be utilised on the S200 Prober,

this will move the chuck to a safe position and provide more access to change the

needle.

PEGASUS Operating and Service Manual

Wentworth

Laboratories

4.1 Probe Contact Adjustment

Several parameters can be adjusted within the S200 and Pegasus Probe configuration to

obtain the desired probe mark/ throughput conditions. These are listed below:

• Probe Contact Force

• S200 Contact Enhancement Parameter

• S200 Damping Enhancement Parameter

Probe

mark size

Contact Force

Overtravel

S200 Contact Enhancement

S200 Damping Enhancement

Probe mark size

Through pu

PEGASUS Operating and Service Manual

Wentworth

Laboratories

4.1.1 Contact Force Adjustment

Contact Force Adjustment

Screw

Figure 10.

The contact force adjustment screw is on the left hand side of the probe holder housing.

By rotating this screw either clockwise or counter clockwise will increase or decrease the

contact force. The direction required can be obtained by stepping 1 or 2 devices after

adjustment and observing the size of the probe mark through the microscope.

The contact force will be set at the factory to 4.5g.

4.1.2 Contact and Damping Enhancement Parameters

These parameters can be set through the S200 Setup menu. (See S200 Manual)

Wentworth Technology Pegasus S200 Operating instructions

Brand: Wentworth Technology

Model: Pegasus S200

Type: Operating instructions

Download PDF

report

Wentworth Technology Pegasus S200 Operating instructions

Wentworth Technology Pegasus S200 Operating instructions

Other documents