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  3. COBRA BC 0200 F

Busch COBRA BC 0200 F Installation And Maintenance Instructions Manual

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Installationand
MaintenanceInstructions
ScrewVacuumPumps
COBRABC0200F
BuschManufacturingKorea,Ltd.
189-51,Soicheon-ro,Majang-myun
Icheon-si,Gyunggi-do,467-813
RepublicofKorea
0870767417/ 190605 /Originalinstructions/Subjecttochangewithoutnotice
Tableofcontents
Preface ............................... 2
COBRABC0200F
.................................. 3
Productdescription ......................... 5
Use ................................ 5
Operatingprinciple ........................ 5
Oilcircuit ............................. 6
Cooling.............................. 6
Nitrogensystem ......................... 6
Optionalfunctions/Useofavailableaccessories ......... 6
On/Offswitch .......................... 6
Versions ............................. 6
Safety ................................ 6
Intendeduse ........................... 6
Safetyinformation ........................ 6
Noiseemission .......................... 7
Maintenanceclearance ...................... 7
Electricalsafety .......................... 7
TypesofElectricalWork .................... 7
Type1............................ 7
Type2............................ 7
Type3............................ 7
Type4............................ 7
LockOut/TagOutprocedure(Type1ofelectricalwork) ... 7
SafetyLockoutprocedure ................... 7
Emergencyoffcircuitdescription................ 7
Safetyinterlockdescription................... 8
Positionofthepumpgravitycenter ............... 8
Installationofthevacuumpumpinaseismiczone ........ 8
Informationoverthelubricants ................. 8
Oil ............................... 8
Decommissioningprocedure ................... 8
Applianceafterwarehousing ................... 9
Lockout/Tagoutforhydraulicsandpneumatics ...... 9
LockOut/TagOutprocedure(Type1ofelectricalwork) ... 9
LockOut/TagOutprocedure ................. 10
SafetyLockoutprocedure .................... 10
Transport ............................. 10
Transportinpackedstate .................... 10
Transportinunpackedstate ................... 10
Storage .............................. 10
Temporarystorage ....................... 10
Removalofthepump ...................... 10
Preservation........................... 10
Start-upofthevacuumpumpafterstorage: ......... 10
Installationandstart-up ...................... 11
Necessaryinstallationinstructions ................ 11
Installationsiteandinstallation ................ 11
Inletconnection ....................... 11
Dischargeconnection..................... 12
Coolingwaterconnection .................. 12
Nitrogenconnection ..................... 12
Electricalconnection/Checks ................. 12
Powerwiringconnections .................. 12
Powerconnectoronvacuumpumpfrontside ....... 12
Installation ........................... 12
Mounting........................... 12
Electricalconnection ..................... 12
Equipmentconnections(withoptions) ............ 13
Connectionofthelines/pipes ................ 13
Oilfilling ........................... 13
Checkingthedirectcooling.................. 14
Checkingthenitrogensupply(dilutiongas).......... 14
Checkingthenitrogensupply(sealinggas) .......... 14
Savingtheoperatingparameters ............... 14
Recommendationsonoperation................. 14
Application .......................... 14
Switchingthevacuumpumpon/off ............. 15
Firststart-upofthesystem................. 15
Switchingthesystemoff .................. 15
Maintenance ........................... 15
Maintenanceprogram...................... 16
Weekly:............................ 16
Monthly: ........................... 16
Yearly: ............................ 16
Every16000hoursofoperation,atthelatestafter4years: . 16
LockOut/TagOutprocedure ................ 16
SafetyLockoutprocedure................... 16
Checkingtheoil......................... 16
Checkingtheoillevel ..................... 16
Refillingoil .......................... 16
Checkingthecolouroftheoil ................ 17
Oilchange ........................... 17
Drainingusedoil ...................... 17
Fillinginnewoil ....................... 17
Checkingthecoolingwater ................... 17
Checkingthecoolingwaterflow ............... 17
Checkingthenitrogen...................... 17
Checkingthenitrogenflow.................. 17
Checkingthecurrentconsumption ............... 17
Checkingthesoundabsorber(accessory) ............ 17
Checkingtheleak-protectionnon-returnvalve(accessory) ... 18
Overhaul ............................. 18
Removalfromservice ....................... 18
Temporaryremovalfromservice ................ 18
Recommissioning ........................ 18
Dismantlinganddisposal .................... 18
Oiltype/quantity ......................... 19
Oiltype............................ 19
Oilquantity.......................... 19
Technicaldata ........................... 20
EU-DeclarationofConformity ................... 21
Preface BC0200F
Page 2 0870767417(En)
Preface
CongratulationsonyourpurchaseoftheBuschvacuumpump.With
watchfulobservationofthefield’srequirements,innovationandsteady
developmentBuschdeliversmodernvacuumandpressuresolutions
worldwide.
Theseoperatinginstructionscontaininformationfor:
–productdescription,
–safety,transport,
–storage,
–installationandcommissioning
–maintenance,
–overhauland
–troubleshootingofthevacuumpump.
Forthepurposeoftheseinstructions,“handling”thevacuumpump
meansthetransport,storage,installation,commissioning,influenceon
operatingconditions,maintenance,troubleshootingandoverhaulof
thevacuumpump.
Priortohandlingthevacuumpumptheseoperatinginstructionsshall
bereadandunderstood.Ifanythingremainstobeclarifiedplease
contactyourBuschrepresentative. Keeptheseoperatinginstructions
and,ifapplicable,otherpertinentoperatinginstructionsavailableon
site.
BC0200F
0870767417(En) Page 3
IN
OUT
EC
PRV
NC
CWC
EB CAO
RC
CP
CPC
ES
MB
COBRABC0200F
IN Inletconnection
OUTDischargeconnection
EC Electricalconnection
PRVNitrogenpressurereducer
NC Nitrogenconnections
CWCCoolingwaterconnections
EB Liftingbracket
OFPOilfillerplug
OSGOilsightglass
PS Dischargepressureswitch
CAOExtractingventilator
CPCPLCconnection
ESEmergencystopbutton(EMO)
MBOn/Offswitch/Maincircuitbreaker
RCLCD
DGFDilutiongasflowmeter
DGR1Nitrogendilutionvalve
DGR2Nitrogendilutionvalve
VFDVariablefrequencydrive
PSAPressuretransmitter
TSTemperaturesensorPT100
CWRCoolingwaterregulatingvalve
CWMCoolingwaterflowmeter
DPSDCpowersupplier
RL Relay
BC0200F
Page 4 0870767417(En)
MB CPC
DPS
DGF DGR2
DGR1 PSA
TS CWR CWM
VFD
Productdescription
Use
TheCOBRABCvacuumpumpsaredesignedforuseinthefieldof
microelectronicsandsimilarindustries.
Theycanbeusedtosuckgasesandgasmixtures.
WARNING
Whenusingtoxic,inflammableand/orexplosivegases,makesure
thatthesystemcorrespondsindesigntoapplicablelocalandna-
tionalsafetyregulationsandthatallapplicablesafetymeasuresare
followed.
Allproduct-specificsafetyregulationsmustbeobserved.
Solidparticlesmustnotgetintothevacuumpump.Proceduralerrors
canresultinthepumpsuckinginacertainquantityofliquid.Ifthe
pumphassuckedinliquid,ashortdryingtimeisnecessaryattheend
oftheprocedure.
Theallowedmaximuminletgastemperaturedependsontheinletpres-
sureandthetypeofgas:thelowertheinletpressure(Pa),thehigher
thedrawngastemperature(TGas)canbe.
Thefollowingindicativevaluesforaircanbeconsidered:
–Pa>50mbar,TGas<80°C
–Pa<50mbar,TGas<200°C
Thevacuumpumpisintendedforuseinapotentiallynon-explosive
environment.
Asfarastemperatureisconcerned,thevacuumpumpissuitablefor
evacuationofa300literstank.Thevacuumpumpisnotsuitablefor
continuousdutyatapressuremoreorequalthan150(hPa)mbar.
Caution,theoperatingcycleof150(hPa)mbarmustnotexceedmore
than5min.
Forotherapplications,contactyourBuschrepresentative.
-Maximuminletpressure:1bar(abs).
-Withpumprunningatfullspeed,donotexposetoinletpressure
>300(hPa)mbar.
Thevacuumpumpistightdowntoultimatepressure.
Operatingprinciple
TheCOBRABC0200FvacuumpumpsareCOBRANWscrewvacuum
pumpswithcoolingwaterandnitrogencircuits.
TheCOBRANWscrewvacuumpumpsoperateaccordingtotheprin-
cipleofscrewpumps.Twoparallelscrews(5)rotateinoppositedirec-
tionsinthepumpbody.Enteringgasesaretrappedbetweentheflights
Productdescription BC0200F
Page 5 0870767417(En)
DP
PSA OSG
Cooling water inlet
Nitrogen inlet
Cooling water outlet
CWR
NRV
TS
MOT
TSA
CWM
DGF
DGR 2
DGR 1
VFD
Process gas inlet
Process gas outlet
1 2 3
5
6
44
1 Inlet
2 Discharge
3 Oil
4 Coolingwater
5 Screwrotors
6 Temperatureswitch(motor)
CWRCoolingwaterregulatingvalve
DGR1Regulatingvalve,dilutiongas
DGR2Regulatingvalve,dilutiongas
DGFNitrogenflowmeter,dilutiongas
NRVNitrogenregulatingvalve
OSGOillevelindicator
CWMCoolingwaterflowmeter
PSAPressuretransmitter
TSATemperaturesensorPT100
MOTMotor
TSTemperatureswitch(motor)
VFDVariablefrequencydrive
ofthescrewsandthepumpbody.Thegasesareconveyedbytherota-
tionofthescrewstotheexhaust,wheretheyaredischarged.
TheCOBRANWscrewvacuumpumpsaredrivenbywater-cooled
motors.
Oilcircuit
Sincethecompleteoperatingprincipleworkswithoutcontact,nooil
circuitisneededintheworkarea.
Cooling
Thevacuumpumpiscooledby
–acoolingwatercircuit(4)inthecylinderandmotor.Thiscooling
watercircuitisusedtocoolthemotorofthepump,thefrequency
inverterandalsothebodyoftheNWpump.
NOTE:TheCOBRABCvacuumpumpsarealwaysdeliveredwithoutoil
andwithoutcoolingwater.Operationwithoutthesecoolantscanresult
indamagetothevacuumpump.
Nitrogensystem
Thenitrogensystemperformsthreemainfunctions
–nitrogenisusedasdilutiongas.Itisinjectedinsidethecylinderon
twodifferentplaces.Nitrogenflowinjectedinthemiddleholeis
presetat2l/minandcanbeadjustedwithvalveDGR1,depen-
dingontheapplication.Whenflowistoolowawarningthenan
alarmsignalisgeneratedbyflowmeterDGFtothePLC.Statusof
thepumpdependsonthealarmfunctionsetbyuser(factoryset-
ting:None,pumpcontinuesrunningwithanalarm).Dilutionim-
provesthescrewsfunctioning,especiallywhensuckingcorrosive
gases.
–nitrogenisusedassealinggas.Thenitrogenisinjectedbetween
thetransmissionandtheprocessgastoachievegoodcloseness.
–nitrogenisusedaspurgegas.Thepurgeeliminatestracesofgases
remaininginthevacuumpump.Thevacuumpumppurgecycleis
programmedinthecontrolandstarts,eitherafteraSTOPopera-
tionorafteranalarmfunction.
Foracorrectpurgeexecution,theshut-offvalveattheinletflange
mustbeclosed.Thepurgecyclelastsabout30min.(Program-
mabletimeinthebasicparameters).
Optionalfunctions/Useofavailable
accessories
Aheatingjacketattachedtotheexhaustheatstheexhaustuptotheli-
mitof130°Cinordertoeliminateanycondensate.
Ahandlecanbeattachedtotheeyeboltscrewinordertofacilitatethe
handleofthevacuumpump(option)
Apressurereceivermountedattheexhaust,controlstheoverpressure
attheexhaust.Ifoverpressureisabove0,2bar,pressureswitchgivesa
warningsignal.Ifoverpressureisabove0,3baranalarmisgenerated.
Statusofthepumpdependsonthealarmfunctionsetbyuser(factory
setting:None,pumpcontinuesrunningwithanalarm).
Atemperaturesensormountedonthecylinder,measuresthetempera-
tureinsidethecylinder.
Asilencerorsoundabsorber(optional)attheexhaustreducesthe
noiseofthepumpandcollectsanycondensate.
Aleak-protectionnon-returnvalve(optional)attheexhausttrapsthe
condensateinthepumpwhenthepumpisswitchedoff.
TheLCDcontrollerprocessesthedataofthesensors(seechapter
“Communicationwiththeequipment”)asfollows:
–dischargepressure
–temperatureinthecylinderandattheexhaust
–current
–nitrogenflowrate(dilution,sealing)
–coolingwaterflowrate
–speed
–frequency
–power
ThedataprocesswiththeC.M.S.(CentralMonitoringSystem)(acces-
sory)hasthesamefunctionastheLCDcontroller(seeoperatingins-
tructionsofCentralMonitoringSystem).
On/Offswitch
Thevacuumpumpisdeliveredwithon/offswitch.
Versions
Furthervacuumpumpdescriptionsstatethenominaldisplacementand
thedesignlevel.
Example:BC0200F
BC=standardversion
0200=165m3/h(80Hz)
F=Design
Safety
Intendeduse
DEFINITION:Toruleoutanymisunderstanding,theterm“handling”
ofthevacuumpumpcoverstransport,storage,installationandopera-
tionofthepumpaswellaseffectsonoperatingstatesandtroublesho-
otingonthevacuumpump.
Thevacuumpumpisintendedforindustrialuse.Itmayonlybeopera-
tedbyqualifiedpersonnel.
Thedifferentapplicationpossibilitiesandlimitvaluesforoperationdes-
cribedin“Productdescription”and“Installationrequirements”must
beobservedbythemanufacturerofthesystemintowhichthevacuum
pumpistobeintegratedandbyusers.
Theneedforpersonalsafetyregulationsdependsinprincipleonthe
typeofuse.Theoperatormustprovidetheuserswiththenecessary
meansandmustinformhispersonnelaboutthedangersemanating
fromtheprocessedproduct.
Theoperatorofthevacuumpumpmustobservethesafetyregulations
andmusttrainandinstructhispersonnelaccordingly.
Localregulationsregardingthemotorsandelectriccontrolelements
mustbeobservedwheninstallingthepumpinpotentiallyexplosive
environments.
Themaintenanceinstructionsmustbefollowedandobserved.
Theseinstallationandmaintenanceinstructionsmustbereadandun-
derstoodbeforethevacuumpumpisused.Ifyouhaveanydoubts,
contactyourBuschrepresentative.
Safetyinformation
Thevacuumpumpisdesignedandmanufacturedincompliancewith
thelatesttechnicalstandardsandsafetyregulations.Neverthelessan
elementofresidualriskremains.
Varioussafetyinstructionsaretobefoundinthishandbookandonthe
pump.Theseinstructionsmustbefollowed.Youcanrecognisethese
instructionsbythesignalwordsDANGER,WARNINGandCAUTION,
whicharedefinedasfollows:
DANGER
Disregardofthissafetyinstructionwillalwaysresultindeath,se-
riousinjuriesorseveredamage.
WARNING
Disregardofthissafetyinstructionmayresultindeath,seriousin-
juriesorseveredamage.
CAUTION
Disregardofthissafetyinstructionmayresultinminorormoderate
injuriesordamage.
Safety BC0200F
Page 6 0870767417(En)
Noiseemission
Refertothetable“Technicaldata”forthepermissiblenoiselevelin
freefieldconditionsaccordingtoENISO2151.
CAUTION
Theintensityofthenoiseofthevacuumpumpishigherwithina
certainareaofthepump.
Riskofhearingdamage.
Usersmustwearearprotectionwhenspendingalongerperiodof
timeinthevicinityofanon-insulatedvacuumpump.
Maintenanceclearance
Beforeanymaintenanceaction,ensureamaintenanceclearance
aroundthepumpofmin.610[mm].
Electricalsafety
TypesofElectricalWork
ThefollowingarethefourtypesofelectricalworkdefinedbytheSEMI
S2,latestversion,guideline:
Type1
Equipmentisfullydeenergized.
Type2
Equipmentisenergized.Energizedcircuitsarecoveredorinsulated.
NOTE :Type2workincludestaskswheretheenergizedcircuitsareor
canbemeasuredbyplacingprobesthroughsuitableopeningsinthe
coversorinsulators.
Type3
Equipmentisenergized.Energizedcircuitsareexposedandinadvertent
contactwithuninsulatedenergizedpartsispossible.Potentialexposu-
resarenogreaterthan30voltsrms,42.4voltspeak,60voltsdcor
240volt-ampindrylocations.
Type4
Equipmentisenergized.Energizedcircuitsareexposedandinadvertent
contactwithuninsulatedenergizedpartsispossible.Potentialexposu-
resaregreaterthan30voltsrms,42.4voltspeak,60voltsdc,or240
volt-ampindrylocations.Potentialexposurestoradio-frequencycur-
rents,whetherinducedorviacontact,exceedthelimitsinTableA5-1
ofAppendix5(SEMIS2guideline).
LockOut/TagOutprocedure(Type1of
electricalwork)
lStopthepumpwiththeremotecontrolorwiththestopbutton
(pressonSTOPbuttonduring10s)
lPressonemergencystopbutton
lSwitchoffthemaincircuitbreaker
lSwitchoffthecustomer’spowersupply
lSwitchoffthewaterandnitrogenquickconnections(inletfirst,
thenoutlet)
lPutthelabelorwarningboard“Maintenanceprocessing”onor
nexttothepump
SafetyLockoutprocedure
lTakeoffthelabelorwarningboard“Maintenanceprocessing”
lCheckthecoolingliquidandoillevelsaccordingtothechapters
“Checkingtheoillevel”and“Checkingthecoolingliquidlevel”
lSwitchonthemaincircuitbreaker
lReleasetheemergencystopbutton
lSwitchonthewaterandnitrogenquickconnections(outletfirst,
theninlet)
lStartthepumpwiththeremotecontrol(pressonSTARTbutton)
Emergencyoffcircuitdescription
lTheEmergencyoffcircuitmaybeopenedbypressingon
emergencystopbutton,orthethermalprotectionB1.Ifoneofthe
twoelementsshow,thenthepumpwillimmediatelystop.ThePLC
willremainenergizedtosavethepumpstatus.
lIftheemergencystopbuttonwaspressed,checkthestartupof
thepumpthenreleasethisbuttontorestartthepump.Presson
Startbuttonontheremotecontrol,thepumpwillrestart.
lIfok,checkthewiringsystemfromtheterminalboxmotortothe
KDP1contactor.Ifok,calltheBUSCHSemiconserviceteamin
chargeofthemaintenanceofthepumps.
BC0200F Safety
0870767417(En) Page 7
Oil filling
CAUTION
Hot surface! Do not touch!
Safety advice on vacuum pump BC 0200 F
lSwitchonthemaindisconnectswitch,thenreleasetheemergency
stopbutton.RestartthepumpbypressingonStartbuttononthe
remotecontrol.Ifthepumpdoesnotstart,pressonemergency
stopbutton,switchoffandpadlockthemaindisconnectswitch,
switchoffthecustomer’spowersupplyandputthelabel
“maintenanceprocessing”.CalltheBUSCHSemiconserviceteam
inchargeofthemaintenanceofthepumps.
lIftheexternalthermalprotectionB1isengaged,checkthatthe
waterflowshows2l/minontheflowmeter.Ifnot,setthewater
flowat1,5l/minaccordingtotheinstruction(seechapter
“Checkingthecoolingliquidflow”).Checkthewiringsystemof
thethermalprotectionbyopeningthesideface(Type3of
electricalwork).Waitafewhoursforthecoolingoftheprotection,
thenpressonStartbuttontorestartthepump.
Safetyinterlockdescription
Interlockevent Sensor Response
Emergency
Stop EMOS/W EMOButtonPushedduringpump
running H
Motor
overcurrent Frequency
inverter Inverterdefaultandremove
powertomotor s
Motorovertem-
perature
(t°>150°C)
Thermo
switchB1
(klixon)
Contactorsopenandremove
powertomotor s
Discharge
overpressure Pressure
sensorB4 Dependsonalarmfunctionsetin
thePLCforoverpressure
Setatfactory:Generalstopie.the
contactorsopenandremove
powertomotor
S
Motor
overcurrent Frequency
inverter Dependsonalarmfunctionsetin
thePLCforovercurrent
Setatfactory:GeneralStopie.the
contactorsopenandremove
powertomotor
S
Cylinder
overtemperature Temperature
sensorB5 Dependsonalarmfunctionsetin
thePLCforcylindertemperature
Setatfactory:GeneralStopie.the
contactorsopenandremove
powertomotor
S
Coolingwater
flowlow Water
flowmeterB2 Dependsonalarmfunctionsetin
thePLCforwaterflow
Setatfactory:GeneralStopie.the
contactorsopenandremove
powertomotor
S
Nitrogenflow
toolow Nitrogen
flowmeterB3 Dependsonalarmfunctionsetin
thePLCfornitrogenflow
Setatfactory:Noneie.thepump
continuesrunningwithalarm
S
H=Hardware,S=Software
Positionofthepumpgravitycenter
lThegravitycenteroftheBC0200Fpumpisdeterminedaccording
tothedrawing
Installationofthevacuumpumpina
seismiczone
lConveythepumptoitsfinallocationwithapallettruckbefore
removingitfromitssupport
lUnscrewthefixingscrewsofthepumponthetransportpalletand
removethemachinefromitssupportwithanappropriatelifting
systembyusingtheliftingbracketsmadeforthispurpose
lCheckthatthewheelsnolongertouchtheground
CAUTION
ThevacuumpumpisfixedtothegroundwithfourM10screws,one
screwperbracket.Thefixingscrewmuststanda1200Ntensible
force(perbracket).
Thefinalusermustadaptthetypeofscrewsdependingonthe
groundmaterial.
Informationoverthelubricants
Oil
BuschYLC250Bn°.-art.0831131400(0.5lofBuschYLC250B)
Quantity:BC0200F:0,12l
Replacement:After16'000h(seeMaintenancechapter,page15)
Decommissioningprocedure
Whentheproductarrivesattheendofthelifetime,itisnecessaryto
proceedtothedecontaminationofthevacuumpump
Safety BC0200F
Page 8 0870767417(En)
ELECTRICAL
POW ER
Main
switch S1 Frequency
inverter DP Motor
Klixon
B1
ELECTRICAL PRINCIPLE OF OPERATION
Emergency
stop
Main
Circuit
Breaker
Q1
Wheel
Adjusting nut
Lifting bracket
Dimensions :
L1 : 264 [mm]
L2 : 132 [mm]
L3 : 497 [mm]
h : 97.7 [mm]
W : 130 kg
Center of gravity posiƟon
CG : Center of gravity
W : Weight of vacuum pump
WARNING
Anydisassemblyofthevacuumpumpshouldonlybecarriedoutby
stafftrainedforthispurpose.Beforedisassembly,theuseroftheva-
cuumpumpshouldcompleteaformor“Declarationaboutabsence
ofdanger”whichindicatesanydangersandcorrespondingactions.
Withoutthisformdulycompletedandsignedbyalegallyrespon-
sibleperson,thepumpshouldnotbedisassembled.
lProceedtodisassemblyofthevacuumpump.Pleasemakesureto
wearapersonalprotectiveequipment(PPE)priortoany
interventiononthevacuumpump.Someresiduemayremain
inside.
lProceedtodecommissioningofthedifferentpartsaccordingtothe
currentlocalandnationallaws
Applianceafterwarehousing
Priortoreoperateavacuumpumpwhichremainedoutsidethebuiding
foracertainperiodoftime,makesuretoletitstandatambienttempe-
ratureinaroomforawholeday.
Lockout/Tagoutforhydraulicsandpneumatics
uHydraulics:coolingwater
uPneumatics:nitrogen
LockOut/TagOutprocedure(Type1of
electricalwork)
lStopthepumpwiththeremotecontrol(pressonSTOPbutton
during10s)
lPressonemergencystopbutton
lSwitchoffthemainbreaker
lSwitchoffthecustomer’spowersupply
lSwitchoffthewaterandnitrogenquickconnections(inletfirst,
thenoutlet)
lPutthelabelorwarningboard“Maintenanceprocessing”onor
nexttothepump
Theenduserisresponsibleforprovidingenergyisolationcapabilities
onthewaterandnitrogen
BC0200F Safety
0870767417(En) Page 9
䣗䢢䣴䣣䣰䣩䣧
䣒䢢䣴䣣䣶䣧䣦
䣋䢢䣴䣣䣶䣧䣦
䣋䣯䣣䣺
䣋䣥䣷
䣈
䣇䣮䣧䣥䣶䣴䣫䣥䣣䣮
䣵䣥䣪䣧䣯䣣䣶䣫䣥䣵
䣖䣻䣲䣧
䣐䣱
䣒
䣑䣲䣧䣴䣣䣶䣫䣰䣩䢢䣨䣴䣧䣳䣷䣧䣰䣥䣻䢢䣯䣣䣺䢰
䢴䢷䢳
䣔䣗䣐
䣒䣱䣹䣧䣴
䣒䣋䣆
䣇䣆䣊䣅䣷䣵䣶䢰䣐䣹䣭䣗䣕䣄䣒䣴䣱䣩䣎䣅䣆䢢䢴䣎䣅䣆䢢䢳
䣖䣱䣱䣮䢢䣋䣰䣶䣧䣴䣨䣣䣥䣧
N2 REG.
C.W. OUTL ET
C.W . IN LET
N© ü IN LET
䢶䢲䢷
䢴䢸䢶
䢵䢺䢴
䢶䢵䢹
䣋䣰䣶䣧䣴䣴䣷䣲䣶䣧䣴䢢䣯䣣䣫䣰
䢴䢵
䣔䣧䣯䣱䣶䣧䢢䣥䣱䣰䣶䣴䣱䣮
䢪䣯䣱䣸䣧䣣䣤䣮䣧䢫 䣅䣱䣰䣶䣴䣱䣮䢢䣤䣱䣺
䢪䣯䣱䣸䣧䣣䣤䣮䣧䢫
䣇䣯䣧䣴䣩䣧䣰䣥䣻䢢䣵䣶䣱䣲
䢴䢳䢰䢷
䣋䣰䣮䣧䣶
䣆䣐䢢䢷䢲䢢䣋䣕䣑䢯䣍䣈
䣋䣐
䢸䢵 䢳䢺䢺
䣇䣺䣪䣣䣷䣵䣶
䢢䣆䣐䢢䢶䢲䢢䣋䣕䣑䢯䣍䣈
䣑䣗䣖
䣒䣴䣧䣵䣵䣷䣴䣧䢢䣴䣧䣩䣷䣮䣣䣶䣱䣴
䣒䣱䣹䣧䣴䢢䣥䣱䣰䣰䣧䣥䣶䣱䣴
䣒䣴䣧䣵䣵䣷䣴䣧䢢䣩䣣䣷䣩䣧
䣐䣫䣶䣴䣱䣩䣧䣰䢢䣫䣰䣮䣧䣶
䣅䣱䣱䣮䣫䣰䣩䢢䣹䣣䣶䣧䣴䢢䣱䣷䣶䣮䣧䣶
䣅䣱䣱䣮䣫䣰䣩䢢䣹䣣䣶䣧䣴䢢䣫䣰䣮䣧䣶
䢪䢴䢳䢰䢷䢫
䢺䢲䢸
䢵䢲䢶
䢳䢷䢴
䣘䣧䣰䣶䣫䣮䣣䣶䣫䣰䣩䢢䣦䣷䣥䣶
䢪䢷䢲䢰䢺䢫
䢶䢷
䢵䢻䢴䢰䢷
䢪䢻䢲䢵䢫
䢹䢺䢶䢰䢷
䢪䢵䢴䢴䢫
䢵䢲䢳䢰䢸
LockOut/TagOutprocedure
lStopthepumpwiththeremotecontrol(pressonSTOPbutton
during10s)
lPressonemergencystopbutton
lSwitchoffthemainbreaker
lSwitchoffthecustomer’spowersupply
lSwitchoffthewaterandnitrogenquickconnections(inletfirst,
thenoutlet)
lPutthelabelorwarningboard“Maintenanceprocessing”onor
nexttothepump
SafetyLockoutprocedure
lTakeoffthelabelorwarningboard“Maintenanceprocessing”
lChecktheoillevelaccordingtothechapters“Checkingtheoil
level”
lSwitchonthemainbreaker
lReleasetheemergencystopbutton
lSwitchonthewaterandnitrogenquickconnections(outletfirst,
theninlet)
lStartthepumpwiththeremotecontrol(pressonSTARTbutton)
Transport
TheCOBRABCvacuumpumpsaretestedandcheckedinourfactory
beforecarefulpacking.Checkthepackagingfortransportdamage
whenthegoodsarrive.Thepumpcanwithstandtemperatures
between-25°Cand+55°Cduringtransport.
Transportinpackedstate
Packedonapallet,thevacuumpumpcanbemovedwithahand
forklifttruck.
Transportinunpackedstate
CAUTION
Donotwork,walkorstandundersuspendedloads.
CAUTION
Pleasecheckouttheweightofthevacuumpumpbeforeliftingitup
(see"TechnicalData").
Useadequateliftinggearforthis.
NOTE:Thesuspensioneyesarelocatedataboutthecentre-of-gravity
ofthevacuumpump.Ifthevacuumpumpisequippedwithaccessories
thatcouldinfluencethecentre-of-gravity,thismustbetakenintoac-
countwhenliftingandabeltmustadditionallybeattachedtoa
specificpoint.
lFastenthehoisttothesuspensioneyeonthecylinder
lUseahoistthatisequippedwithahookandsafetylock
lLiftthevacuumpump
CAUTION
Thevacuumpumpmaynotbeliftedanymorewhenithasbeenfil-
ledwithoil.
Movingofthevacuumpumpissimpleusingthefourwheelsplaced
underthevacuumpumpframe.
Makesurebeforeeverytransportthattheoilhasbeendrainedoutof
thevacuumpump.
Thepackagingmaterialmustbedisposedofinaccordancewithlocal
andnationalregulations.
Thishandbookiscontainedinthedeliverypackage.
Storage
Temporarystorage
lMakesurethattheintakeandexhaustflangesareclosed(puton
theprotectivecapsincludedinthedeliverypackageofthevacuum
pump)
lStorethevacuumpump
–ifpossible,thevacuumpumpshouldbestoredinitsoriginal
packaging,
–indoors,
–dry,
–inadust-freeand
–vibration-freeroom
Removalofthepump
Beforestartingavacuumpumpthathasbeenstoredoutsidethebuil-
dingforawhile,thevacuumpumpmustbemovedtoaroomwith
ambienttemperature,whereitshouldrestforaday.
Preservation
Ifthevacuumpumpwillbeexposedtounfavourableambientcondi-
tions(forexample,aggressiveenvironment,frequenttemperature
changes),beginimmediatelywithpreservationworkonthevacuum
pump.
Inthecaseoffavourableambientconditions,performpreservation
workonthevacuumpumpifastorageperiodofmorethanthree
monthsisplanned.
lMakesurethatallopeningsarehermeticallysealed;useadhesive
tapetofastenlooseparts(sealrings,flatseals,etc.).
NOTE:VCIistheabbreviationfor“volatilecorrosioninhibitor”.The
VCImoleculeisanorganiccorrosioninhibitorinthevapourphase.
Integratedinvariouscarrierssuchasfilm,cardboard,paper,foam,li-
quidandpowder,itprotectsthepartsagainstcorrosionasaresultof
itsactioninthevapourphase.However,VCIpackagingcanattacksyn-
theticsurfacesandsurfacesofotherelastomers.Ifindoubt,please
contactyournearestdistributor.VCIpackagingprovidesseveralyears
ofprotectionagainstcorrosion,evenundertheharshestofconditions:
overseasshipment,extendedstoragebeforeuse.
lWrapthevacuumpumpinaVCIfilm
lStorethevacuumpump
–ifpossible,thevacuumpumpshouldbestoredinitsoriginal
packaging,
–indoors,
–dry,
–inadust-freeand
–vibration-freeroom
Start-upofthevacuumpumpafterstorage:
lMakesurethatallprotectiveelements,stoppersoradhesivetapes
attachedbeforepreservationhavebeenremoved
lSwitchonthevacuumpumpinthesequencedescribedinthe
chapter“Installationandstart-up”
Transport BC0200F
Page 10 0870767417(En)
Installationandstart-up
Necessaryinstallationinstructions
CAUTION
Ifthenecessaryinstallationinstructionsarenotfollowedandparti-
cularlyinthecaseofinadequatecooling:
Riskofdamagetoandtotaldestructionofthevacuumpumpandits
components!
Riskofpersonalinjury!
Thenecessaryinstallationinstructionsmustbefollowed.
lMakesurethattheintegrationofthevacuumpumpinitsnew
environmentcomplieswiththesafetyregulationsaccordingtothe
MachineryDirective2006/42/EC(regardingtheresponsibilityof
themanufacturerofthesysteminwhichthevacuumpumpistobe
integrated,seeinformationintheDeclarationofConformity).
WARNING
Localregulationsregardingthemotorsandelectriccontrolele-
mentsmustbeobservedwheninstallingthepumpinpotentially
explosiveenvironments.Makesurebeforestart-upthatallsafety
measureshavebeenfollowed.
Installationsiteandinstallation
lMakesurethattheenvironmentofthevacuumpumpisnot
potentiallyexplosive
lMakesurethatthefollowingambientconditionsarefulfilled:
–Ambienttemperature:10...40°C(50...104°F)
–Ambientpressure:atmosphere
–Humidityrange:20to95%
–Altitude:upto1000m
CAUTION
Incaseofhighambienttemperature,extracttheairbetweenthe
machinepanelandpumpscasingsbyconnectingonventilatingex-
tractor(CAO)tothecasingventofmin.30m3/h.
Donotconnecttheventilatingextractorwithanyprocessgas
discharge.
lMakesurethatthecoolingwaterfulfillsthefollowing
requirements:
–Temperature:10-20°C
–Waterpressure:2-5bar(relative)
–Approximateflowrate:2l/minforthestandardversion
–Waterhardness:<5°dGH
NOTE: 1°(germandegree=1°dGH)=1,78°(frenchdegree)=1,25e
(englishdegree)=17,9mg/kgCaCO3(americanhardness)
lMakesurethatthecoolingwaterisneutralandclean
lMakesurethatthecoolingwateroutletisunpressurised
lMakesurethatthenitrogenfulfillsthefollowingrequirements:
–Overpressure:1,5bar
–Approximateflowrate:0-50l/min
lMakesurethattheambientconditionscorrespondtothe
protectionclassofthemotor(accordingtonameplate)
lMakesurethatthevacuumpumpisplacedonorfastenedtoa
horizontalsurface
lMakesurethatthevacuumpumpislevel
NOTE:Thelevellingofthepumpisfacilitatedbytheadjustmentstroke
(~15mm)ofthefourmachinefoots.
lMakesurethatthefourrollersdonottouchtheground
NOTE:Inordertoensurethefixationofthepumptotheground,itis
possibletouseagainthefouryellowbracketsthatwereremovedat
thereceptionofthemachine.
lMakesurethatthevacuumpumpisatleast1mawayfromany
walltoensuregoodcooling
lMakesurethatthevacuumpumpiseasilyaccessibleandthatthe
selectedinstallationsitefulfillstherequirementsforassembly/
dismantling
lMakesurethatnotemperature-sensitiveparts(forexample,of
plastic,wood,cardboard,paper,electronicparts)comeinto
contactwiththehotsurfacesofthevacuumpump
lMakesurethattheinstallationsiteorassemblyareaisventilatedin
suchawaythatadequatecoolingofthevacuumpumpisensured
CAUTION
Thesurfacetemperatureofthevacuumpumpcanexceed50°C
whenthevacuumpumpisinoperation.
Dangerofburns!
lMakesurethatno-onecantouchthevacuumpumpaccidentally.
Ifnecessary,attachsafeguard
lMakesurethattheoilsightglasses(OSG)areeasilyaccessible
Ifoilchangesaretobemadeonsite:
uMakesurethattheoildrainandoilfillerareeasilyaccessible
Inletconnection
lMakesurethattheprotectionthatwasattachedtoprevent
penetrationofparticlesduringtransporthasbeenremovedbefore
thevacuumpumpisconnectedtothevacuumline
CAUTION
Donotputhandsintotheinletaperture.
Riskofbodydamage!
CAUTION
Theintakeofliquidsorsolidparticlescanleadtothedestructionof
thevacuumpump.
Ifthesuckedgascontainsdustsorsolidforeignbodies:
uMakesurethatafilterorprotectivegratingisinstalledatthe
extractionpoint
lMakesurethatthenominaldiameteroftheintakelineisatleast
equaltothediameteroftheintakeflangeofthevacuumpumpto
preventadropintheperformanceofthevacuumpumpinthecase
ofasmallercross-section
lMakesurethatthevacuumpumpisconnectedwithleakprooflines
CAUTION
Whentheintakelineshavebeenconnected,makesurethatthe
systemdoesnotleak.Leakagesofdangeroussubstancesmustbe
prevented!
lMakesurethattheintakelinesareequippedwithashut-offdevice
upstreamoftheintakeflangesothattheflowofsuckedgascan
bestopped
lMakesurethattheintakelinesdonotexerciseanyforceonthe
intakeflange.Mountbellowsifnecessary
BC0200F Installationandstart-up
0870767417(En) Page 11
lTheinletflangehasthefollowingdimension:
–DN50ISOKF
Inthecaseoflongintakelinesthelinecross-sectionshouldbelarger
thantheintakeflangetopreventadropintheperformanceoftheva-
cuumpump.Ifyouhaveanydoubts,contactyourBuschrepresenta-
tive.
Dischargeconnection
CAUTION
Donotputhandsintotheoutletaperture.
Riskofbodydamage!
Thefollowinginstructionsforconnectiontothedischargeonlyapplyif
thesuckedgasisdischargedbythevacuumpumpintoasuitableenvi-
ronment.
lMakesurethattheprotectionthatwasattachedtoprevent
penetrationofparticlesduringtransporthasbeenremovedbefore
thevacuumpumpisconnectedtothevacuumline
lMakesurethatthenominaldiameteroftheexhaustlineisatleast
equaltothediameteroftheexhaustflangeofthevacuumpump
topreventadropintheperformanceofthevacuumpumpinthe
caseofasmallercross-section
lMakesurethatthevacuumpumpisconnectedwithleakprooflines
CAUTION
Whenthedischargelineshavebeenconnected,makesurethatthe
systemdoesnotleak.Leakagesofdangeroussubstancesmustbe
prevented!
lMakesurethatthedischargelineismountedinsuchawaythat
condensatecannotpenetrateintothepump(siphontrap,gradient)
lMakesurethatnoshut-offdevicesaremountedinthedischarge
line
lMakesurethatthedischargelinesdonotexerciseanyforceonthe
dischargeflange.Mountbellowsifnecessary
lThedischargeflangehasthefollowingdimension:
–DN40ISOKF
Inthecaseoflongdischargelinesthelinecross-sectionshouldbelar-
gerthanthedischargeflangetopreventadropintheperformanceof
thevacuumpump.Ifyouhaveanydoubts,contactyourBuschrepre-
sentative.
Coolingwaterconnection
Thecoolingwaterisgenerallyconnectedwithahose.
Thecoolingwateroutletmustbeunpressurised.
Connectiondiameter:3/8NPT
Nitrogenconnection
Thenitrogenisconnectedwithapipe(leakproofagainstoxygen).
Connectiondiameter:1/4NPT
Electricalconnection/Checks
lMakesurethattheregulationsoftheElectromagnetic
CompatibilityDirective2014/30/EUaswellasstandardENnorms,
safetydirectivesandespeciallylocalandnationalregulationsare
observed(thisistheresponsibilityofthemanufacturerofthe
systemintowhichthevacuumpumpisintegratedaccordingtothe
DeclarationofConformity)
lMakesurethatthemainspowersupplycorrespondstothedataon
thenameplateofthemotor
lMakesurethatanoverloadcut-outaccordingtoEN60204-1is
providedforthemotor
lMakesurethatthedriveofthevacuumpumpisnotdisturbedby
anyelectricorelectromagneticinterferences.Ifyouhaveany
doubts,contactyourBuschrepresentative
Powerwiringconnections
Powerwiringconnection
A PhaseL1
B PhaseL2
C PhaseL3
D Ground
Powerconnectoronvacuumpumpfrontside
Installation
Mounting
lMakesurethatthe“Necessaryinstallationinstructions”are
followed
lFastenorinstallthepumpatitsfinalinstallationsite
Electricalconnection
WARNING
Riskofelectrocution,riskofdamage.
Electricalinstallationmustbeperformedbyasuitablyqualified
electricianwhoknowsandfollowsthefollowingregulations:
-IEC364orCENELECHD384orDINVDE0100,
-IECReport664orDINVDE0110,
-VBG4orcorrespondingnationalregulationsonaccident
prevention
CAUTION
Thecircuitdiagramsdescribedbelowconformtothestandard.
Othercircuitdiagramsmightbeused.Thisdependsontheparticu-
larorderandthemarket.
Riskofdamagetothemotor!
Checktheconnectionofthemotorinsidetheterminalboxaccor-
dingtothecircuitdiagram.
MotorofscrewpumpCOBRABC0200Fisconnectedatfactory.
lConnectsupplycableonthefemaleconnection(EC)ofthe
vacuumpump
Installationandstart-up BC0200F
Page 12 0870767417(En)
CAUTION
Thetransformervoltage(intheelectricalbox)mustbeinaccor-
dancewiththesupplyvoltageofthemachine.
CAUTION
Ifthevacuumpumpisoperatedwithamotorthatturnsinthe
wrongdirection,itcanbedestroyed,evenifthisisthecaseforonly
ashortmoment.
Makesurethatthevacuumpumpisconnectedcorrectlybefore
switchingiton.
lDeterminerotationsenseofthemotorbyusingameasuretoolor
byplacingarubberplateontheinlet.
lPresstheon/offswitchbriefly
lMakesurethatthevacuumpumpsucks
Ifthedirectionofrotationhastobechanged:
uExchangetwoofthethreefeederleads
Equipmentconnections(withoptions)
TheinformationconcerningtheuseoftheBuschPLCandtheBusch
LCDcanbefoundintheOperationandMaintenanceInstructions
(Art-No.0870758077).
Connectionofthelines/pipes
lConnecttheintakelines
lConnectthedischargelines
lMakesurethatallcaps,safeguardsandsimilarcoversaremounted
lMakesurethattheinletandoutletforthecoolingairarenot
coveredorclosedandthattheflowofcoolingairisnotimpairedin
anyway
Oilfilling
TheCOBRABC0200Fvacuumpumpsarealwaysdeliveredwithout
oil(seethechapter“Oiltypes”forinformationontherecommended
oils).
lPreparethequantityofoilspecifiedinthetable“Oilquantity”
Oilfilling BC0200F Oiltype
Oilcapacity[Liter] 0,12 BuschYLC250B,
Art.No.0831131400
NOTE:Thequantityofoilspecifiedintheinstallationhandbookisof
informativenatureonly.Checktheoillevelwiththehelpoftheoil
sightglass(OSG)onthevacuumpump.
CAUTION
Beforeyouchangethetypeofoil,makesurethatthenewtypeis
compatiblewiththeoldtype.Ifnecessary,flushthevacuumpump.
lUnscrewtheoilfillercap(OFP)
lFillinoil
lMakesurethattheoillevelliesbetweentheMINandMAX
markingsontheoilsightglass
lMakesurethatthesealoftheoilfillercapisnotdamaged.Replace
itifnecessary
lScrewontheoilfillercaphermeticallytight
NOTE:Itiseasiertoswitchonthevacuumpumpwithcoldoilwhen
theintakelineisnotclosedorwhentheintakeflangeisnotcoveredby
arubberplate.
lStartthevacuumpump
Iftheintakelineisequippedwithashut-offdevice:
uClosetheshut-offdevice
Iftheintakelineisnotequippedwithashut-offdevice:
uPlacearubberplateontheintakeflange
lLetthevacuumpumprunforafewminutes
lStopthevacuumpumpandwaitafewminutes
lMakesurethattheoillevelstillliesbetweentheMINandMAX
markingsontheoilsightglass
IftheoillevelisbelowtheMINmarking:
uFillinmoreoil
Iftheintakelineisequippedwithashut-offdevice:
uOpentheshut-offdevice
BC0200F Installationandstart-up
0870767417(En) Page 13
1 LCDserialwiring(RJ45),LCD1
2 LCDserialwiring(RJ45),LCD2
3 PCserialwiring(9poles)(option)
4 USBconnection
5 CustomerNetwork,CommunicationmodbusRTURS232
6 EthernetNetworkconnection(BuschMonitoringSystem)
(option)
7 Interfaceconnection(50poles)(option)
8 PIDInterface(9poles)(option)
OFP OSG
OFP Oil fill plug
OSG Oil sight glass
Iftheintakelineisnotequippedwithashut-offdevice:
uRemovetherubberplatefromtheintakeflangeandconnect
theintakelinetotheintakeflange
CAUTION
Thevacuumpumpmaynotbeliftedanymorewhenithasbeen
filledwithoil.
lMakesurebeforeeverytransportthattheoilhasbeendrainedout
ofthevacuumpump.
CAUTION
Thevacuumpumpmustremaininahorizontalpositionwhenithas
beenfilledwithoil.
Checkingthedirectcooling
TheflowofthecoolingwaterischeckedbytheflowmeterCWM.The
flowmetermustbeconnectedinsuchawaythatswitching-onleadsto
awarningatbelow2,0l/min,whentheflowdropsbelow1,5l/min,
thevacuumpumpmustbestopped.
Checkingthenitrogensupply(dilutiongas)
TheflowofthenitrogenischeckedbytheflowmeterDGF.Theflow-
metermustbeconnectedinsuchawaythatswitching-onleadstoan
alarm.Thealarmlimitcanbeadjusteddependingthetypeofprocess.
Checkingthenitrogensupply(sealinggas)
TheflowofthenitrogenischeckedbytheflowmeterDGF2.Theflow-
metermustbeconnectedinsuchawaythatswitching-onleadstoan
alarm.Thealarmlimitcanbeadjusteddependingthetypeofprocess.
Savingtheoperatingparameters
Assoonasthevacuumpumpisworkingundernormalconditionsafter
beingswitchedon:
lMeasuretheworkingcurrentofthemotorandsaveitasreference
valueforallfuturemaintenanceandrepairwork
Recommendationsonoperation
Application
WARNING
Thevacuumpumpisdesignedforuseundertheconditionsspeci-
fiedhere.
Iftheseconditionsarenotmet,thereisariskofdamagetoortotal
destructionofthevacuumpumpanditscomponents!
Thevacuumpumpmayonlybeswitchedonunderthespecified
conditions.
TheCOBRABCvacuumpumpsaredesignedforuseinthefieldofmi-
croelectronicsandsimilarindustries.
Theycanbeusedtosuckgasesandgasmixtures.
WARNING
Whenusingtoxic,inflammableand/orexplosivegases,makesure
thatthesystemcorrespondsindesigntoapplicablelocalandna-
tionalsafetyregulationsandthatallapplicablesafetymeasuresare
followed.
Allproduct-specificsafetyregulationsmustbeobserved.
Solidparticlesmustnotgetintothevacuumpump.Proceduralerrors
canresultinthepumpsuckinginacertainquantityofliquid.Ifthe
pumphassuckedinliquid,ashortdryingtimeisnecessaryattheend
oftheprocedure.
Theallowedmaximuminletgastemperaturedependsontheinletpres-
sureandthetypeofgas:thelowertheinletpressure(Pa),thehigher
thedrawngastemperature(TGas)canbe.
Thefollowingindicativevaluesforaircanbeconsidered:
–Pa>50mbar,TGas<80°C
–Pa<50mbar,TGas<200°C
Thevacuumpumpisintendedforuseinapotentiallynon-explosive
environment.
Asfarastemperatureisconcerned,thevacuumpumpissuitablefor
evacuationofa300literstank.Thevacuumpumpisnotsuitablefor
continuousdutyatapressuremoreorequalthan150(hPa)mbar.
Caution,theoperatingcycleof150(hPa)mbarmustnotexceedmore
than5min.
Forotherapplications,contactyourBuschrepresentative.
-Maximuminletpressure:1bar(abs).
-Withpumprunningatfullspeed,donotexposetoinletpressure
>300(hPa)mbar.
Thevacuumpumpistightdowntoultimatepressure.
CAUTION
Thesurfacetemperatureofthevacuumpumpcanexceed50°C
whenthevacuumpumpisinoperation.
Dangerofburns!
Thevacuumpumpmaynotbetouchedwhenitisinoperation.If
touchingthepumpisunavoidable,waituntilthesurfacetempera-
turehascooleddownorwearprotectivegloves.
CAUTION
Theintensityofthenoiseofthevacuumpumpishigherwithina
certainareaofthepump.
Riskofhearingdamage.
Usersmustwearearprotectionwhenspendingalongerperiodof
timeinthevicinityofanon-insulatedvacuumpump.
CAUTION
TheCOBRABC0200Fvacuumpumpsarealwaysdeliveredwithout
oilandwithoutcoolingwater.
Operationwithoutoilwillresultindamagetothevacuumpump!
Thevacuumpumpmustremaininahorizontalpositionwhenithas
beenfilledwithoil.
CAUTION
Thecoolingwaterflow,whichischeckedbytheflowmeterCWM,
mustbeatleast2l/min.
lMakesurethatallcaps,safeguardsandsimilarcoversaremounted
lMakesurethatthesafeguardsareswitchedon
lMakesurethattheinletandoutletforthecoolingairarenot
coveredorclosedandthattheflowofcoolingairisnotimpairedin
anyway
lMakesurethatthesystemdoesnotleak.Leakagesofdangerous
substancesmustbeprevented
lMakesurethatthe“Necessaryinstallationinstructions”are
followedandespeciallythatadequatecoolingisensured
Thefollowingmustbenotedwhenthepumpisshutdownforalonger
periodoftime:
Installationandstart-up BC0200F
Page 14 0870767417(En)
CAUTION
Ifthereisariskoffrost,allthecoolingwatermustbedrainedout
ofthevacuumpumpifthepumpisshutdownforalongerperiod
oftime!
–Drainthecoolingwater
uPullofftheconnectionsfortheinletandoutletofthecooling
water
uDrainthecoolingwatercompletely
uIfnecessary,drainthecoolingwaterwiththehelpofcompres-
sedairtopreventanyriskoffrostorcorrosion
Switchingthevacuumpumpon/off
Firststart-upofthesystem
lMakesurethatthe“Necessaryinstallationinstructions”are
followed
Ifthesystemisequippedwithasolenoidgatevalveinthecoolingwa-
tercircuit:
uOpenthesolenoidgatevalve
lMakesurethatthecoolingwaterflowissetcorrectly
–Thecoolingwaterflowisfactoryseton2l/minandcanbeadjus-
tedattheregulatingcockCWR.Thiswatercircuitisusedtocool
themotoroftheNWpumpandalsothebodyofthepump.
lMakesurethatthenitrogenflowissetcorrectly
–dilutiongas,injectedinthecylinderispresetat2Nl/minandcan
beadjustedwithvalvesDGR1andDGR2.
–sealinggas,injectedintotheintermediatechamberinthecylinder
ofthepump,betweenthedriveandtheprocessgas.
lSwitchonthevacuumpump
lMakesurethatthesystemdoesnotleak
Ifthesystemisequippedwithasolenoidgatevalveattheintake:
uOpenthesolenoidgatevalve
Switchingthesystemoff
lFlushthevacuumpumpwithnitrogenattheendoftheprocess
(thedurationofflushingcanbeprogrammed)
Ifthesystemisequippedwithasolenoidgatevalveattheintake:
uClosethesolenoidgatevalve
lSwitchoffthevacuumpump
lShutoffthenitrogensupply
lShutoffthecoolingwatersupply
Ifthesystemisequippedwithasolenoidgatevalveinthecoolingwa-
tercircuit:
uClosethesolenoidgatevalve
lMakesurethatthesystemiscurrentless
Maintenance
DANGER
Incasethevacuumpumphasconveyedgasesthathavebeen
contaminatedwithforeignmaterialsthataredangeroustohealth,
theoilandcondensateswillalsobecontaminated.
Theseforeignmaterialscaninfiltratethepores,recessesandother
internalspacesofthevacuumpump.
Dangertohealthwhenthevacuumpumpisdismantled.
Dangertoenvironment.
Alwayswearprotectiveclothingwhencarryingoutmaintenance
work.
Beforeanymaintenancework,theinletandoutletpipingaswellas
thevacuumpumpitselfmustbeflushedwithnitrogen.
CAUTION
Onlyauthorisedpersonnelmaycarryoutdismantlingworkonthe
vacuumpump.Beforeworkbegins,theoperatorofthevacuum
pumpmustfillinaformora“DeclarationRegardingContamination
ofEquipmentandComponents”thatprovidesinformationonpos-
sibledangersandappropriatemeasures.
Ifthisformhasnotbeenfilledincompletelyandsigned,the
vacuumpumpmaynotbedismantled.
CAUTION
Beforemaintenanceworkisstarted,asafetyareaofatleast610
[mm]aroundthemachinemustbesetup.
CAUTION
Thesurfacetemperatureofthevacuumpumpcanexceed50°C
whenthevacuumpumpisinoperation.
Dangerofburns!
Beforestartingmaintenancework,makesurethatthevacuumpump
hasbeenswitchedoffandthatitcannotbeswitchedonagainacciden-
tally.Followtheshutdownprocedureinthesection“LockOut/Tag
Outprocedure”:
–stopthepumpwiththeremotecontrol(pressonSTOPbutton
during10s)
–pressonemergencystopbutton
–switchoffthemainbreaker
–switchoffthecustomer’spowersupply
–switchoffthewaterandnitrogenquickconnections(inletfirst,
thenoutlet)
–putthelabelorwarningboard“Maintenanceprocessing”onor
nexttothepump
CAUTION
Theoiltemperaturecanreachavalueof90°C!
Dangerofburns!
lMakesurethattheoilcircuitandthecoolantcircuithavebeen
emptiedbeforemovingthevacuumpump
lMakesurethattherearenocleaningtoolsinthepumpanymore
accordingtolocalandnationalregulations
Beforepullingoffthedifferentconnections,makesurethattheintake
andexhaustlinesofthevacuumpumpcorrespondtoatmospheric
pressure
BC0200F Maintenance
0870767417(En) Page 15
Whenthemaintenanceworkhasbeenfinished,followtheprocedure
“SafetyLockoutprocedure”:
–takeoffthelabelorwarningboard“Maintenanceprocessing”
–checktheoillevelaccordingtothechapter“Checkingtheoil
level”
–switchonthemainbreaker
–releasetheemergencystopbutton
–switchonthewaterandnitrogenquickconnections(outletfirst,
theninlet)
–makesurethatthe“Necessaryinstallationinstructions”are
followed
–startthepumpwiththeremotecontrol(pressonSTARTbutton)
Maintenanceprogram
NOTE:Themaintenanceintervalsdependontheoperatingconditions.
Thefollowingintervalsarebasicvalues,whichcanbeshortenedor
lengtheneddependingonoperatingconditions.Inespeciallydifficult
operatingconditionssuchas,forexample,averydustyenvironment
themaintenanceintervalsmustbeshortenedconsiderably.
Weekly:
lChecktheoillevelandthecolouroftheoil(see“Checkingthe
oil”)
lCheckthecoolingwaterflow(see“Checkingthecoolingwater”)
lCheckthenitrogenflow(see“Checkingthenitrogen”)
lInspectthevacuumpumpforoilleaks-ifthereareleaks,repair
thevacuumpump(Busch)
lInspectthevacuumpumpforleaksofcoolingwater-ifthereare
leaks,repairthevacuumpump(Busch)
Monthly:
Inthecaseofoperationinadustyenvironment:
uMakesurethattheoperatingroomiscleanandfreeofdust;
cleanifnecessary
lMakesurethatthevacuumpumphasbeenswitchedoffandthat
itcannotbeswitchedonagainaccidentally
lChecktheelectricalconnections
lCarryoutavisualinspectionofthevacuumpump
Yearly:
lMakesurethatthevacuumpumphasbeenswitchedoffandthat
itcannotbeswitchedonagainaccidentally
Iftheintakeisequippedwithasieve:
uCheckthesieveattheintakeandcleanifnecessary
lCheckthemeasuringandsafetyequipmentforworkingorder
Ifthedischargeisequippedwithasoundabsorber:
uCleanthesoundabsorber
Ifthedischargeisequippedwithaleak-protectionnon-returnvalve:
uCleantheleak-protectionnon-returnvalve
Ifthecoolingwaterlineisequippedwithafilter:
uCheckthefilterandcleanorreplaceifnecessary
lCheckthesealsandreplaceifnecessary
lChecktheintakeanddischargelinesandcleanorreplaceif
necessary
Every16000hoursofoperation,atthelatest
after4years:
lDraintheoil(see“Drainingtheoil”)
lAmaininspectionofthevacuumpump(Busch)
LockOut/TagOutprocedure
lStopthepumpwiththeremotecontrol(pressonSTOPbutton
during10s)
lPressonemergencystopbutton
lSwitchoffthemainbreaker
lSwitchoffthecustomer’spowersupply
lSwitchoffthewaterandnitrogenquickconnections(inletfirst,
thenoutlet)
lPutthelabelorwarningboard“Maintenanceprocessing”onor
nexttothepump
SafetyLockoutprocedure
lTakeoffthelabelorwarningboard“Maintenanceprocessing”
lChecktheoillevelaccordingtothechapter“Checkingtheoil
level”
lSwitchonthemainbreaker
lReleasetheemergencystopbutton
lSwitchonthewaterandnitrogenquickconnections(outletfirst,
theninlet)
lMakesurethatthe“Necessaryinstallationinstructions”are
followed
lStartthepumpwiththeremotecontrol(pressonSTARTbutton)
Checkingtheoil
Checkingtheoillevel
lMakesurethatthevacuumpumphasbeenswitchedoffandthat
itcannotbeswitchedonagainaccidentally
lIndicationoftheoillevelontheoilsightglass
IftheoilleveldoesnotreachtheMINmarking:
uTopupwithoil(see“Refillingoil”)
IftheoillevelexceedstheMAXmarking:
uCheckthecondensatedrain
lDraintheoil(see“Drainingtheoil”)
Refillingoil
NOTE:Oildoesnotnormallyhavetoberefilledoutsidetherecom-
mendedoilchangeintervals.Adropintheoillevelindicatesafault
(see“Troubleshooting”).
CAUTION
Onlyfillinoilthroughtheoilfilleropening.
CAUTION
Dangerofburnswhentheoilfillercapisopen.
Dangerofinjurieswhentheoilfillercapisnotscrewedonproperly.
Onlyunscrewtheoilfillercapwhenthevacuumpumphasbeen
switchedoff.
Thevacuumpumpmayonlybeswitchedonwhentheoilfillercap
isproperlyclosedandtight.
lMakesurethatthevacuumpumphasbeenswitchedoffandthat
itcannotbeswitchedonagainaccidentally
lUnscrewtheoilfillercap(OFP)
lFillinoiluptothemiddleoftheoilsightglass
lMakesurethattheoillevelliesbetweentheMINandMAX
markingsontheoilsightglass
Maintenance BC0200F
Page 16 0870767417(En)
lMakesurethatthesealofthefillercapisnotdamagedandthat
theysitproperly.Replaceitifnecessary
lScrewonthefillercapagain
Checkingthecolouroftheoil
NOTE:Theoilmustbeclearandtransparent.Apermanentmilkyco-
lourisanindicationforcontaminationbyforeignbodies.Adarkcolour
isanindicationforoilthathasbeenchemicallyalteredorcontaminated
byforeignbodies.
WARNING
Darkcoloredoilmayindicateahazardouspumpconditionwhich
couldcausepersonalinjury.
Ifdarkoilsimilartotheexampleshownisobserved,youhaveto
contacttheBuschCustomerServicewithoutdelay.
Oilchange
DANGER
Ifthevacuumpumphaspumpedgasesthatwerecontaminated
withforeignbodiesthatarehazardoustohealth,theoilisalso
contaminatedwiththeseforeignbodies.
Thereisahealthhazardwhenchangingcontaminatedoil.
Thereisalsoadangertotheenvironment.
Wearprotectiveclothingwhenreplacingcontaminatedoil.
Contaminatedoilmustbetreatedspeciallyandmustbedisposed
ofaccordingtoapplicableregulations.
Drainingusedoil
NOTE:Afterswitchingoffthevacuumpumpatnormaloperatingtem-
peraturewaitnomorethan20minutesbeforetheoilisdrained.
lMakesurethatthevacuumpumpisswitchedoffandcannot
accidentallybeswitchedonagain
lMakesurethatthevacuumpumpisventedtoatmospheric
pressure
lPutadraintrayunderneaththeoildrainplug
lUnscrewtheoildrainplug
lDraintheoil
Whentheoilflowhasstopped:
uRefittheoildrainplug
lSwitchonthevacuumpumpforafewseconds
lMakesurethatthevacuumpumpisswitchedoffandcannot
accidentallybeswitchedonagain
lRemovetheoildrainplugagainanddrainanyremainingoil
lCarefullyunscrewandremovethemagneticplug
lCheckthatnometalswarfstickstothemagnetofthemagnetic
plug,cleanifnecessary
lMakesurethatthesealingwasherofthemagneticplugisnot
damaged,replaceitifnecessary
lRefitthemagneticplugandtightenup
lMakesurethatthesealingwasheronthedrainplugisundamaged
andcorrectlypositioned,replaceitifnecessary
lRefittheoildrainplugandtightenup
Disposeoftheusedoilaccordingtoapplicableregulations
CAUTION
Becauseofwearandtearoftheseal,itisrecommendedtoreplace
thedrainplugwhenevertheoilischanged.
Fillinginnewoil
lPreparethequantityofoilneeded(see“Oiltype/quantity”)
WARNING
Theuseofchemicallycontaminatedorpollutedoilcanleadtoha-
zardouspumpconditionswhichcouldcausepersonalinjury.
NOTE:Thequantityofoilspecifiedintheinstallationhandbookisof
informativenatureonly.Checktheoillevelwiththehelpoftheoil
sightglassonthevacuumpump.
lMakesurethatthedrainplughasbeenfittedproperlyandthat
theydonotleak
CAUTION
Onlyfillinoilthroughtheoilfilleropening.
lUnscrewtheoilfillercap(OFP)
lFillinoiluptothemiddleoftheoilsightglass
lMakesurethattheoillevelliesbetweentheMINandMAX
markingsontheoilsightglass
lMakesurethatthesealofthefillercapisnotdamagedandthatit
sitproperly.Replaceitifnecessary
lScrewonthefillercapagain
Checkingthecoolingwater
Checkingthecoolingwaterflow
lCheckthecoolingwaterflowregularly
Iftheflowdrops,checkforleaks
uMakesurethatthespecificationsofthecoolingwaterarefol-
lowed
Checkingthenitrogen
Checkingthenitrogenflow
lCheckthenitrogenflowregularly
Iftheflowdrops,checkforleaks
uMakesurethatthespecificationsofthenitrogenarefollowed
Checkingthecurrentconsumption
lCheckthecurrentintensityofthemotor
Anincreasedintensityisanindicationforafault(see“Troubleshoo-
ting”)
Checkingthesoundabsorber
(accessory)
lMakesurethatthecondensatedoesnotcollectattheexhaustof
thevacuumpump
lDrainthecondensateatthedrainopeningandcollectitina
container
BC0200F Maintenance
0870767417(En) Page 17
lDisposeofthecondensateaccordingtoapplicableenvironmental
protectionregulations
lCheckthesoundabsorberregularlyandcleanitifnecessary
Checkingtheleak-protection
non-returnvalve(accessory)
lChecktheleak-protectionnon-returnvalveregularlyandcleanitif
necessary
CAUTION
Wearprotectiveclothingwhencarryingoutmaintenanceworkon
thesoundabsorberandleak-protectionnon-returnvalve.
Therecouldstillberesiduesofcontamination.
Overhaul
CAUTION
Inappropiatemaintenanceworkonthevacuumpumpcandamage
thepump.
Dangerofexplosion!
Ifrequirementsarenotmet,thevacuumpumpmaynotbeswitched
on!
Shouldworkexceedthedismantlingworkdescribedinthishandbo-
ok,itmayonlybecarriedoutbyauthorisedpersons.
DANGER
Ifthevacuumpumphaspumpedgasesthatwerecontaminated
withforeignbodiesthatarehazardoustohealth,theoiland
condensatearealsocontaminatedwiththeseforeignbodies.
Theseforeignbodiescanpenetrateintopores,openingsandother
internalpartsofthevacuumpump.
Thereisahealthhazardwhendismantlingthevacuumpump.
Thereisalsoadangertotheenvironment.
Priortoshipping,thevacuumpumpmustimperativelybedeconta-
minatedandthedegreeofcontaminationmustbedocumentedina
declarationofdecontamination("DeclarationofDecontamination"),
Oiltype/quantity
Oiltype
lMakesurethattheoiltypecorrespondstospecification:
–BuschYLC250B,Art.No.0831131400(0,5l @1kg)
WARNING
Theuseofchemicallycontaminatedorpollutedoilcanleadtohazardouspumpconditionswhichcouldcausepersonalinjury.
Oilquantity
Thequantityofoilspecifiedinthefollowingtableisofinformativenatureonly.Checktheoillevelwiththehelpoftheoilsightglassonthevacuum
pump.
Quantity[Liter] Quantity[Liter]
BC0200F 0,12
BC0200F Oiltype/quantity
0870767417(En) Page 19
Technicaldata
Technicaldata BC0200F
Nominalsuctioncapacity m3/h 165
Ultimatepressure hPa(mbar)/mTorr 0,01/7,5
Nominalmotorrating kW 2,9
Powerconsumptionatultimate
pressure kW 1,6
Nominalmotorspeed min-1 4570
Noiselevel(ENISO2151) dB(A) <60
Ambienttemperature °C(°F) 10-40(32-104)
Maximalcounterpressure Discharge bar 0,2
Coolingwaterrequirement l/min min.2.0
Coolingwaterpressure bar/ DP2...5
Coolingwatertemperature °C 10-25
Nitrogenrequirement approx. l/min 0-50
Nitrogenoverpressure bar 1,5
Weight approx. kg 130
Technicaldata BC0200F
Page 20 0870767417(En)
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