Brooks GF1xx User manual

Brand: Brooks

Model: GF1xx

Type: User manual

Installation and Operation Manual

X-DPT-EtherCAT-GF1XX-MFC-eng

Part Number: 541B219AAG

April, 2017

Supplemental Manual for

Brooks

EtherCAT

Mass Flow Controllers

and Meters

GF Series

Installation and Operation Manual

X-DPT-EtherCAT-GF1XX-MFC-eng

Part Number: 541B219AAG

April, 2017

Brooks EtherCAT MFCs

Installation and Operation Manual

X-DPT-EtherCAT-GF1XX-MFC-eng

Part Number: 541B219AAG

April, 2017

iii

Brooks EtherCAT MFCs

Dear Customer,

We recommend that you read this manual in its entirety as this will enable efficient and proper use of the

EtherCAT® thermal mass flow controllers and meters. Should you require any additional information concerning

the EtherCAT thermal mass flow controllers and meters, please feel free to contact your local Brooks Sales and

Service Office; see back cover for contact information, or visit us on the web at www.BrooksInstrument.com. We

appreciate this opportunity to service your fluid measurement and control requirements, and trust that we will be

able to provide you with further assistance in the future.

Yours sincerely,

Brooks Instrument

Installation and Operation Manual

X-DPT-EtherCAT-GF1XX-MFC-eng

Part Number: 541B219AAG

April, 2017

Brooks EtherCAT MFCs

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Installation and Operation Manual

X-DPT-EtherCAT-GF1XX-MFC-eng

Part Number: 541B219AAG

April, 2017

Brooks EtherCAT MFCs

Contents

1. General Information ................................................................................................................................ 9

1.1. Introduction ................................................................................................................................ 9

1.2. Definition of Terms .................................................................................................................. 10

1.3. Numbers .................................................................................................................................. 10

2. Quick Start .............................................................................................................................................. 11

2.1. Master Hardware ..................................................................................................................... 11

2.2. Physical Interfaces .................................................................................................................. 12

2.2.1. Power Supply .......................................................................................................... 12

2.2.2. LEDs ........................................................................................................................ 13

2.2.3. Exceptions Display Codes and Reporting ............................................................... 15

3. Slave Configuration ............................................................................................................................... 17

3.1. Introduction .............................................................................................................................. 17

3.2. Process Data Object (PDO) Mapping ..................................................................................... 18

3.2.1. RxPDO Mapping ...................................................................................................... 18

3.2.2. TxPDO Mapping ...................................................................................................... 19

3.3. Communication Specific Data ................................................................................................. 21

3.4. Manufacturer Specific Data ..................................................................................................... 22

3.4.1. Manufacturer Specific Inputs ................................................................................... 23

3.4.2. Manufacturer Specific Configuration Data............................................................... 23

3.5. SDP Device Type Specific Data .............................................................................................. 24

3.5.1. Input Data ................................................................................................................ 24

3.5.2. Output Data ............................................................................................................. 25

3.5.3. Configuration Data ................................................................................................... 26

3.5.4. Information Data ...................................................................................................... 27

3.6. Semi Device Profile Area ......................................................................................................... 29

3.7. Value Range Setting ................................................................................................................ 30

3.7.1. Exception Handling Data ......................................................................................... 30

3.8. Manufacturer Specific Device Data ......................................................................................... 32

3.9. SDP and CDP Device Specific Inputs ..................................................................................... 33

3.10. SDP and CDP Device Specific Information Data .................................................................. 33

3.11. SDP and CDP Command Objects ......................................................................................... 35

4. Exceptions Implementation .................................................................................................................. 41

Installation and Operation Manual

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Part Number: 541B219AAG

April, 2017

Brooks EtherCAT MFCs

4.1. Error and Warning Condition Descriptions .............................................................................. 44

4.1.1. Non-Volatile Memory Failures (Display Codes 1,2,3) ............................................. 45

4.1.2. Network Interface Failure (Display Code 4) ............................................................ 45

4.1.3. Selected Calibration Invalid (Display Code 5) ......................................................... 45

4.1.4. Identity Information Mismatch (Display Code 6) ..................................................... 45

4.1.5. Hardware Incompatibility (Display Code 7) ............................................................. 46

4.1.6. Flow Sensor Failure & Error (Display Code 10 and 110) ........................................ 46

4.1.7. Flow Sensor Cooling Recovery (Display Code 111) ............................................... 46

4.1.8. Excessive Drift (Display Code 112) ......................................................................... 46

4.1.9. Process Flow Out of Range (Display Codes 115 and 116) ..................................... 46

4.1.10. Pressure Sensor Error (Display Code 120) ........................................................... 47

4.1.11. Process Pressure Out of Range (Display Codes 125 and 126) ............................ 47

4.1.12. Temperature Sensor Failure & Error (Display Code 130 and 10) ......................... 47

4.1.13. Temperature Out of Range (Display Codes 135 and 136) .................................... 48

4.1.14. Excessive Leak-By (Display Code 142) ................................................................ 48

4.1.15. Control Deviation Out of Limits (Display Code 145) .............................................. 48

4.1.16. Temperature Stability (Display Code 230) ............................................................ 49

4.1.17. Mounting Orientation Alert (Display Code 251) ..................................................... 49

4.1.18. Voltage Input Out of Limits (Display Code 260) .................................................... 49

4.1.19. Totalizer Overflow Alert (Display Code 270) ......................................................... 49

4.1.20. Warm-up (Display Code 299) ................................................................................ 49

4.1.21. Device ID Switch Changed Alert (No Display Code) ............................................. 50

5. Appendix ................................................................................................................................................ 51

5.1. Ramping Feature ..................................................................................................................... 51

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Brooks EtherCAT MFCs

Tables

Table 1-1 – Definition of Terms ................................................................................................................... 10

Table 2-1 – RUN Indicator States ................................................................................................................ 14

Table 2-2 – ERROR Indicator States .......................................................................................................... 14

Table 2-3 – Display Code Summary ............................................................................................................ 15

Table 3-1 – Object Dictionary Structure ...................................................................................................... 17

Table 3-2 – Default RxPDO (MFC/EMFC Profiles) ..................................................................................... 19

Table 3-3 – Default RxPDO (MFM/EMFM Profiles) .................................................................................... 19

Table 3-4 – Default TxPDO (EMFC Profile) ................................................................................................ 19

Table 3-5 – Default TxPDO (MFC Profile) ................................................................................................... 20

Table 3-6 – Default TxPDO (MFM Profile) .................................................................................................. 20

Table 3-7 – Default TxPDO (EMFM Profile) ................................................................................................ 20

Table 3-8 – Communication Specific Data .................................................................................................. 21

Table 3-9 – Manufacturer Specific Inputs .................................................................................................... 23

Table 3-10 – Manufacturer Specific Configuration Data ............................................................................. 23

Table 3-11 – Input Data ............................................................................................................................... 24

Table 3-12 – Output Data ............................................................................................................................ 25

Table 3-13 – Configuration Data ................................................................................................................ 26

Table 3-14 – Information Data .................................................................................................................... 27

Table 3-15 – Semi Device Profile ................................................................................................................ 29

Table 3-16 – Value Range Setting .............................................................................................................. 30

Table 3-17 – Manufacturer Specific Device Data ........................................................................................ 32

Table 3-18 – SDP and CDP Device Specific Inputs .................................................................................... 33

Table 3-19 – SDP and CDP Device Specific Information Data ................................................................... 33

Table 3-20 – SDP and CDP Command Objects ......................................................................................... 35

Table 4-1 – Objects for reporting and controlling exceptions ...................................................................... 42

Table 4-2 – Device Errors ............................................................................................................................ 43

Table 4-3 – Manufacturer Errors ................................................................................................................. 43

Table 4-4 – Manufacturer Warnings ............................................................................................................ 44

Table 4-5 – User Specified Flow Limits ....................................................................................................... 46

Table 4-6 – User Specified Pressure Limits ................................................................................................ 47

Table 4-7 – Control Deviation Out of Limits ................................................................................................ 48

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Brooks EtherCAT MFCs

Figures

Figure 2-1 – Top View of GF EtherCAT Device .......................................................................................... 12

Figure 2-2 – M8 Power Connector Location ................................................................................................ 13

Figure 2-3 – M8 Power Connector Drawing ................................................................................................ 13

Figure 5-1 – Ramping Feature .................................................................................................................... 52

Installation and Operation Manual

X-DPT-EtherCAT-GF1XX-MFC-eng

Part Number: 541B219AAG

April, 2017

Section 1 – General Information

Brooks EtherCAT MFCs

1. General Information

1.1. Introduction

EtherCAT is an Ethernet based communication system and is known for its

high cycle time and cost efficient cabling and master application solutions.

Brooks Instrument now introduces the EtherCAT® interface on its GF Series

platform.

This manual is a supplement to the Brooks GF Series installation and

operation manual. It is assumed that the owner of this EtherCAT mass flow

controller or meter is thoroughly familiar with the theory and operation of this

device. If not, it is recommended that the owner read the installation and

operation manual first before continuing with this supplement.

This manual assumes basic knowledge and understanding of EtherCAT (its

topology and its method of logically accessing the data or parameters

contained within the device). This manual is not intended to be a

replacement to the EtherCAT specifications. It is recommended but not

required for the purposes of this manual, that the user obtains a copy of the

EtherCAT specifications (www.ethercat.org).

This manual does not make any assumptions about any particular

manufacturer of equipment or custom software used by the user to

communicate with the Brooks device, but assumes the user has thorough

understanding of such equipment and any configuration software. Application

Notes and FAQ’s are available at the Brooks Instrument web site

(www.BrooksInstrument.com).

Section 1 - General Information Installation and Operation Manual

X-DPT-EtherCAT-GF1XX-MFC-eng

Part Number: 541B219AAG

April, 2017

Brooks EtherCAT MFCs

1.2. Definition of Terms

Table 1-1 – Definition of Terms

Abbreviation

Description

CDP

Common Device Profile

CoE

CAN Application Protocol over EtherCAT

ESC

EtherCAT Slave Controller

ESI

EtherCAT Slave Information (EtherCAT Device Description)

ETG

EtherCAT Technology Group

MFC/MFM

Mass Flow Controller/Mass Flow Meter

Object Dictionary

PDO

Process Data Object

PreOp

Pre-Operational

Read Only

Readable and Writable

RXPDO

Receive PDO

SDP

Specific Device Profile

Sub-Index

TXPDO

Transmit PDO

Write Only

1.3. Numbers

Numeric values used throughout this manual will be clearly denoted as to the

base numeric system it represents. All hexadecimal numbers (base 16) will

be prefixed with a 0x, like 0xA4. All binary numbers (base 2) will be suffixed

with a b, like 1001b. All other numbers not annotated this way will be

assumed decimal (base 10).

Installation and Operation Manual

X-DPT-EtherCAT-GF1XX-MFC-eng

Part Number: 541B219AAG

April, 2017

Section 2 - Quick Start

Brooks EtherCAT MFCs

2. Quick Start

This section assumes the owner of the device has a fully operational and

trouble-free communications network with appropriate power supplies. This

section also assumes that an EtherCAT master application is connected to

the network capable of PDO and mailbox data communication. Both types of

data communication modes are supported by the Brooks GF EtherCAT

device.

Brooks® GF Series Mass Flow Controllers and Meters conform to the

ETG.5003 Semiconductor Device Profile specification. This specification

consists of two parts:

Part 1: Common Device Profile

The Common Device Profile (CDP) specifies requirements applicable to all

devices described in the Specific Device Profiles. Furthermore, it describes

features and functionalities which shall be further defined in the Specific

Device Profiles.

Part 2xxx: Specific Device Profiles

The Specific Device Profile (SDP) is based on Part 1 (CDP) and defines the

data structure of the specific devices. The Brooks GF1XX Series

implementation of the Semi EtherCAT SDP conforms to ETG.5003.202x.

For a complete specification of a device used in the semiconductor

manufacturing industry a SDP shall be read complementary with the CDP.

Users may obtain a copy of the EtherCAT specifications at

(www.ethercat.org).

2.1. Master Hardware

Various companies provide EtherCAT master applications, e.g. TwinCAT

from Beckhoff, or offer EtherCAT master stacks to develop a master

application, e.g. Acontis. A PC can be used to run most EtherCAT master

applications but needs dedicated Ethernet hardware to support the high cycle

times and kernel mode operation of the master application, see

(www.beckhoff.com).

Installation and Operation Manual

X-DPT-EtherCAT-GF1XX-MFC-eng

Part Number: 541B219AAG

April, 2017

Section 2 - Quick Start

Brooks EtherCAT MFCs

2.2. Physical Interfaces

The available physical interfaces on the EtherCAT device are listed below.

Refer to the GF100 Series Installation and Operation Manual for more

details.

 Integrated LCD display

 Display push button- cycle through information and rotate display

 Zero push button- easily re-zero the device

 Micro-USB Diagnostic Port

 Twin RJ45 external top mounted communication connections

 5-pin M8 threaded male connector for power located on upper inlet side

2.2.1. Power Supply

Power needs to be supplied via the standard male M8 5-pin connector. The

M8 connector is located on the upper inlet side of the device. Refer to

Figures 2-2 and 2-3 below.

Figure 2-1 – Top View of GF EtherCAT Device

Installation and Operation Manual

X-DPT-EtherCAT-GF1XX-MFC-eng

Part Number: 541B219AAG

April, 2017

Section 2 - Quick Start

Brooks EtherCAT MFCs

Figure 2-2 – M8 Power Connector Location

Figure 2-3 – M8 Power Connector Drawing

Pin 1: +24V

Pin 3: Power Common

2.2.2. LEDs

The POWER LED indicates that the device is supplied sufficiently with

power.

The IN and OUT port LEDs indicate whether the respective removable port is

connected.

The RUN indicator shows the status of the EtherCAT State Machine. Refer to

Table 2-1 below for indicator states and descriptions.

Installation and Operation Manual

X-DPT-EtherCAT-GF1XX-MFC-eng

Part Number: 541B219AAG

April, 2017

Section 2 - Quick Start

Brooks EtherCAT MFCs

Table 2-1 – RUN Indicator States

Indicator States

Slave State

Description

Off

INITIALIZATION

The device is in state INIT

Blinking

PRE-OPERATIONAL

The device is in state PRE-OPERATIONAL

Single Flash

SAFE-OPERATIONAL

The device is in state SAFE-OPERATIONAL

OPERATIONAL

The device is in state OPERATIONAL

Flickering

BOOTSTRAP

The device is in state BOOTSTRAP. Firmware download

operation in progress

The ERROR indicator shows errors such as watchdog timeouts and

unsolicited state changes due to local errors (ex. input error). If, at a given

time several errors are present, the error that occurred first shall be

indicated. Refer to Table 2-2 below for error states and descriptions.

Table 2-2 – ERROR Indicator States

ERR State

Error Name

Description

Example

Application controller

failure

A critical communication or

application controller error

has occurred

Application controller is not

responding any more (PDI

Watchdog Timeout detected by

ESC)

Double Flash

Process Data

Watchdog Timeout/

EtherCAT Watchdog

Timeout

An application watchdog

timeout has occurred.

Sync Manager Watchdog

timeout

Single Flash

Local Error

Slave device application has

changed the EtherCAT state

autonomously, due to local

error (see ETG.1000 part 6

EtherCAT State Machine).

Error Indicator bit is set to 1

in AL Status register.

Device changes its EtherCAT

state from Op to SafeOpError

due to a synchronization error.

Blinking

Invalid Configuration

General Configuration Error

State change commanded by

master is impossible due to

invalid hardware configuration

(pin sharing violation detected by

ESC)

Installation and Operation Manual

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Part Number: 541B219AAG

April, 2017

Section 2 - Quick Start

Brooks EtherCAT MFCs

Flickering

Booting Error

Booting Error was detected.

INIT state reached, but Error

Indicator bit is set to 1 in AL

Status register

Checksum error in Application

controller flash memory.

Off

No error

The EtherCAT

communication of the device

is in working condition

2.2.3. Exceptions Display Codes and Reporting

Whenever there is an active Error or Warning reported via the EtherCAT

interface, that condition is also indicated on the display with the severity and

the Display Code as defined in Table 2-3. When more than one condition

exists, then the most severe condition will be displayed. The display will

show the following information in the specified sequence:

1. Normal selected information for 3 seconds;

2. Severity (“FAIL”, “ERR”, or “ALrT”) for 1 second;

3. Display Code for 1 second.

The display of any Error or Warning can be disabled individually via

EtherCAT object 0x400B and via the diagnostic port. See Table 2-3.

For more detailed information on individual conditions, see Section 4 on

Exceptions Implementation.

Table 2-3 – Display Code Summary

Display

Code

Condition Detected

Reported As

Severity

Exception Type

Non-Volatile Failure

0x40000000

Failure

Manufacturer Error

Non-Volatile Corrupt

0x20000000

Failure

Manufacturer Error

Non-Volatile Write Failure

0x10000000

Failure

Manufacturer Error

Network Interface Failure

0x08000000

Failure

Manufacturer Error

Selected Calibration Invalid

0x04000000

Failure

Manufacturer Error

Identity Information Mismatch

0x02000000

Failure

Manufacturer Error

Hardware Incompatibility

0x00000800

Failure

Manufacturer Error

Sensor Failure

0x80000000

Failure

Manufacturer Error

110

Flow Sensor Error

0x00800000

Error

Manufacturer Error

111

Flow Sensor Cooling

Recovery

0x00080000

Error

Manufacturer Error

112

Excessive Flow Sensor Drift

0x00040000

Error

Manufacturer Error

115

Process Flow Out of Range

0x00000001

Error

Manufacturer Error

Installation and Operation Manual

X-DPT-EtherCAT-GF1XX-MFC-eng

Part Number: 541B219AAG

April, 2017

Section 2 - Quick Start

Brooks EtherCAT MFCs

High

116

Process Flow Out of Range

Low

0x00000002

Error

Manufacturer Error

120

Pressure Sensor Error

0x00400000

Error

Manufacturer Error

125

Process Pressure Out of

Range High

0x00000004

Error

Device Error

126

Process Pressure Out of

Range Low

0x00000008

Error

Device Error

130

Temperature Sensor Error

0x00200000

Error

Manufacturer Error

135

Temperature Out of Range

High

0x00000001

Error

Device Error

136

Temperature Out of Range

Low

0x00000002

Error

Device Error

142

Excessive Leak-By

0x00020000

Error

Manufacturer Error

145

Process Control Deviation

0x00000004

Error

Manufacturer Error

230

Temperature Stability

0x00400000

Alert

Manufacturer Warning

251

Mounting Orientation

0x00200000

Alert

Manufacturer Warning

260

Input Voltage Out of Range

0x00100000

Alert

Manufacturer Warning

270

Totalizer Overflow

0x00080000

Alert

Manufacturer Warning

299

Warm Up

0x00800000

Alert

Manufacturer Warning

None

Device ID Switch Changed

0x00040000

Alert

Manufacturer Warning

Installation and Operation Manual

X-DPT-EtherCAT-GF1XX-MFC-eng

Part Number: 541B219AAG

April, 2017

Section 3 - Slave Configuration

Brooks EtherCAT MFCs

3. Slave Configuration

3.1. Introduction

Based on the information provided by the EtherCAT Slave Information file

(ESI, device description in XML format) and/or the EEPROM, master

applications are able to configure the EtherCAT network. For the EtherCAT

network configuration of the GF Series devices, ESI files are provided on the

Brooks website or contact Brooks Technical Support for more info.

The following table outlines the structure of the object dictionary and is

divided into index areas as defined by ETG.5003. Not all index areas have

objects defined within them, as demonstrated in the sections to follow.

Table 3-1 – Object Dictionary Structure

Index

Object

0x0000…0x0FFF

Data Type Area

0x1000…0x1FFF

Communication Specific Data

0x2000…0x5FFF

Manufacturer Specific Data incl. Customer Requested Data

0x2000 – 0x200B

Manufacturer Specific Inputs

0x200C – 0x200F

Customer Requested Inputs

0x3000 – 0x300B

Manufacturer Specific Outputs

0x300C – 0x300F

Customer Requested Outputs

0x4000 – 0x400B

Manufacturer Specific Configuration Data

0x400C – 0x400F

Customer Requested Configuration Data

0x5000 – 0x500B

Manufacturer Specific Information Data

0x500C – 0x500F

Customer Requested Information Data

0x6000…0xAFFF

(SDP) Device Type Specific Data

0x600x

Input Data of the Modules

0x700x

Output Data of the Modules

0x800x

Configuration Data of the Modules

0x900x

Information Data Modules

0xA00x

Diagnosis Data of the Modules

0xF0xx

Semiconductor Device Profile Area

0xF300

Value Range Setting

0xF38x…0xF3Ax

Exception Handling Data

0xF5xx

Manufacturer Specific Device Data incl. Customer Requested Data

0xF6xx

SDP and CDP Device Specific Inputs

0xF7xx

SDP and CDP Device Specific Outputs

0xF8xx

SDP and CDP Device Specific Configuration Data

0xF9xx

SDP and CDP Device Specific Information Data

Installation and Operation Manual

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Part Number: 541B219AAG

April, 2017

Section 3 – Slave Information

Brooks EtherCAT MFCs

0xFAxx

SDP and CDP Device Specific Diagnosis Data

0xFBxx

SDP and CDP Command Objects

3.2. Process Data Object (PDO) Mapping

Process Data Object Mapping defines the data that is exchanged between

the Master and the device using high speed data exchange. RxPDO

Mapping defines the data that is sent from the Master to the device and

TxPDO Mapping defines the data that is sent from the device to the Master.

Note that the Master normally refers to RxPDO as Outputs and the TxPDO

as Inputs.

During network configuration, the user must configure the data to be

exchanged. The Brooks GF1xx Series devices provide a default and a

flexible PDO Mapping object for each of the RxPDO and the TxPDO. The

user may select either the default or the flexible PDO Mapping, or both by

using the PDO Assignment objects 0x1C12 and 0x1C13.

Each flexible PDO Mapping may be configured with up to 10 objects.

Objects assigned to a PDO Mapping must have the appropriate PDO access

permission (see the Access column in the object definition tables). Mapping

an object requires the user to specify the object’s index, sub index, and size

in bits in the PDO Mapping object. Objects with a data type that is not a

multiple of 8 bits may require that a “pad” object be included so that the next

object starts on an 8-bit boundary. An example of a data type that is not a

multiple of 8 bits is the bool data type (1 bit). A pad object has an object

number of 0x0000:00 with a non-zero bit size. The pad object counts as one

of the 10 objects that can be configured. It is best practice to group objects

that are not a multiple of 8 bits so that only 1 pad is required.

PDO mappings are sent from the Master to the device while the device is in

PREOP state. If the PDO mappings are not properly configured, the device

will return an error when requested to transition to the SAFEOP state. The

Error LED will flash RED and the resulting device state will be ERRPREOP.

3.2.1. RxPDO Mapping

The Brooks GF1xx Series device supports one preconfigured, default

RxPDO at 0x1600 and one user configurable RxPDO at 0x1601.

The default RxPDO for each device profile are defined in the tables below:

Installation and Operation Manual

X-DPT-EtherCAT-GF1XX-MFC-eng

Part Number: 541B219AAG

April, 2017

Section 3 - Slave Configuration

Brooks EtherCAT MFCs

Table 3-2 – Default RxPDO (MFC/EMFC Profiles)

PDO Index

PDO Sub Index

PDO Entry

Index

PDO Entry Sub

Index

Bit Length

Name

0x1600

0x01

0x7003

0x01

Flow SP [REAL]

0x02

0x7009

0x01

Actuator Control

0x03

0x7009

0x02

Actuator

Position SP

[REAL]

See Note below.

0x04

0x7008

0x01

Ramp Time

Table 3-3 – Default RxPDO (MFM/EMFM Profiles)

PDO Index

PDO Sub Index

PDO Entry

Index

PDO Entry Sub

Index

Bit Length

Name

Note: The Actuator Position SP functionality is not supported in GF1XX devices. However, the space must be

included in this RxPDO to maintain compatibility with the ETG.5003.202x profile definition. Any value placed in

this position is ignored. If the user wishes to eliminate this space, the Flexible RxPDO can be used.

The following limitations apply to the flexible RxPDO (0x1601):

 Any PDO entry from the dynamic or the default PDO may

only exist once. Setpoint (which can either be real or

integer) can only be declared once. If an entry is

declared more than once, or any other PDO definition

fault exists (bad gap, invalid entry, etc.), the device will

not exit pre-op.

 All objects assigned to active RxPDO will be Read-Only

when accessed via COE Mailbox.

3.2.2. TxPDO Mapping

The Brooks GF1xx Series device supports one preconfigured, default TxPDO

at 0x1A00 and one user configurable TxPDO at 0x1A01.

The default TxPDO for each device profile are defined in the tables below:

Table 3-4 – Default TxPDO (EMFC Profile)

PDO Index

PDO Sub Index

PDO Entry

Index

PDO Entry Sub

Index

Bit Length

Name

Installation and Operation Manual

X-DPT-EtherCAT-GF1XX-MFC-eng

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April, 2017

Section 3 – Slave Information

Brooks EtherCAT MFCs

0x1Ann

0x01

0xF380

0x00

Active Exception

Status

0x02

0x6000

0x01

Flow Reading

[REAL]

0x03

0x6001

0x01

Pressure

Reading [REAL]

0x04

0x6002

0x01

Temperature

Reading [REAL]

0x05

0x6009

0x02

Position Read

back [REAL]

See Note below.

0x06

0x6009

0x01

Position Set

point [REAL]

Table 3-5 – Default TxPDO (MFC Profile)

PDO Index

PDO Sub Index

PDO Entry

Index

PDO Entry Sub

Index

Bit Length

Name

0x1Ann

0x01

0xF380

0x00

Active Exception

Status

0x02

0x6000

0x01

Flow Reading

[REAL]

0x03

0x6009

0x01

Position Set

point [REAL]

Table 3-6 – Default TxPDO (MFM Profile)

PDO Index

PDO Sub Index

PDO Entry

Index

PDO Entry Sub

Index

Bit Length

Name

0x1Ann

0x01

0xF380

0x00

Active Exception

Status

0x02

0x6000

0x01

Flow Reading

[REAL]

Table 3-7 – Default TxPDO (EMFM Profile)

PDO Index

PDO Sub Index

PDO Entry

Index

PDO Entry Sub

Index

Bit Length

Name

0x1Ann

0x01

0xF380

0x00

Active Exception

Status

0x02

0x6000

0x01

Flow Reading

[REAL]

0x03

0x6001

0x01

Pressure

Reading [REAL]

0x04

0x6002

0x01

Temperature

Reading [REAL]

Note: Position Read back [REAL] functionality is not supported in GF1XX devices. However, the space must be

included in this TxPDO to maintain compatibility with the ETG.5003.202x profile definition. The value of this

object is always returns as 0.0. If the user wishes to eliminate this space, the Flexible TxPDO can be used.

The following limitations apply to the flexible TxPDO (0x1A01):

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Brooks GF1xx User manual

Brand: Brooks

Model: GF1xx

Type: User manual

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Brooks GF1xx User manual

Brooks GF1xx User manual

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