Newport IDL280-Z20 Vertical Stage User manual

Brand
Newport
Model
IDL280-Z20 Vertical Stage
Type
User manual
Industrial
Vertical Stage
IDL280-Z20
USER’S MANUAL
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EDH0390En1021 — 09/18 ii
IDL280-Z20 Industrial Vertical Stage
Warranty
Newport Corporation warrants this product to be free from defects in
material and workmanship for a period of 1 year from the date of
shipment. If found to be defective during the warranty period, the product
will either be repaired or replaced at Newport’s discretion.
To exercise this warranty, write or call your local Newport representative,
or contact Newport headquarters in Irvine, California. You will be given
prompt assistance and return instructions. Send the instrument,
transportation prepaid, to the indicated service facility. Repairs will be
made and the instrument returned, transportation prepaid. Repaired
products are warranted for the balance of the original warranty period, or
at least 90 days.
Limitation of Warranty
This warranty does not apply to defects resulting from modification or
misuse of any product or part.
This warranty is in lieu of all other warranties, expressed or implied,
including any implied warranty of merchantability or fitness for a
particular use. Newport Corporation shall not be liable for any indirect,
special, or consequential damages.
by Newport Corporation, Irvine, CA. All rights reserved.
Original instructions.
No part of this document may be reproduced or copied without the prior
written approval of Newport Corporation. This document is provided for
information only, and product specifications are subject to change without
notice. Any change will be reflected in future publishings.
CAUTION
Warranty does not apply to damages resulting from:
• Incorrect usage:
– Load on the stage greater than maximum specified load.
– Carriage speed higher than specified speed.
–Improper grounding.
¬ Connectors must be properly secured.
¬ When the load on the stage represents an electrical risk, it must
be connected to ground.
– Excessive or improper cantilever loads.
• Modification of the stage or any part thereof.
CAUTION
Please return equipment in
the original (or equivalent)
packing.
You will be responsible for
damage incurred from
inadequate packaging if the
original packaging is not
used.
© 2018
iii EDH0390En1021 — 09/18
IDL280-Z20 Industrial Vertical Stage
Table of Contents
Warranty .................................................................................................................ii
Declaration of Incorporation ................................................................................v
Definitions and Symbols.......................................................................................vi
Warnings ...............................................................................................................vii
Caution .................................................................................................................viii
1.0 — Introduction.................................................................................1
2.0 — Description ...................................................................................2
2.1 Design Details ............................................................................................2
3.0 — Characteristics............................................................................3
3.1 Definitions..................................................................................................3
3.2 Mechanical Specifications .......................................................................4
3.3 Load Specification Definitions.................................................................4
3.4 Load Characteristics and Stiffness .........................................................4
3.5 Stage Weight ..............................................................................................4
4.0 — Drive and Motor.........................................................................5
4.1 Drive ...........................................................................................................5
4.2 Sensor Position..........................................................................................5
4.3 Feedback Signal Position .........................................................................6
4.4 Pinouts........................................................................................................6
5.0 — Connection to Newport Controllers................................7
5.1 Warnings on Controllers ..........................................................................7
5.2 Connection.................................................................................................8
5.3 MMCABLE-3 Cable.....................................................................................8
6.0 — Connection to Non-Newport Electronics ....................10
6.1 Connections.............................................................................................10
7.0 — Dimensions.................................................................................11
8.0 — Stage Installation.....................................................................12
8.1 Unpacking ................................................................................................12
EDH0390En1021 — 09/18 iv
IDL280-Z20 Industrial Vertical Stage
9.0 — Maintenance ..............................................................................13
9.1 Maintenance ............................................................................................13
9.2 Repair .......................................................................................................13
9.3 Calibration ...............................................................................................13
Service Form .........................................................................................................15
v EDH0390En1021 — 09/18
IDL280-Z20 Industrial Vertical Stage
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Declaration of Incorporation
EDH0390En1021 — 09/18 vi
IDL280-Z20 Industrial Vertical Stage
Definitions and Symbols
The following terms and symbols are used in this documentation and also
appear on the product where safety-related issues occur.
General Warning or Caution
The exclamation symbol may appear in warning and caution tables in this
document. This symbol designates an area where personal injury or
damage to the equipment is possible.
The following are definitions of the Warnings, Cautions and Notes that may
be used in this manual to call attention to important information regarding
personal safety, safety and preservation of the equipment, or important
tips.
WAR NI N G
Warning indicates a potentially dangerous situation which can result in
bodily harm or death.
CAUTION
Caution indicates a potentially hazardous situation which can result in
damage to product or equipment.
NOTE
Note indicates additional information that must be considered by the
user or operator.
E
Warnings and Cautions
ATTENTION
This stage is a Class A device. In a residential environment, this device
can cause electromagnetic interference. In this case, suitable measures
must be taken by the user.
vii EDH0390En1021 — 09/18
IDL280-Z20 Industrial Vertical Stage
Warnings
W
ARNING
The motion of objects of all types carries potential risks for operators.
Ensure the protection of operators by prohibiting access to the dangerous
area and by informing the personnel of the potential risks involved.
WAR NI N G
Do not use this stage when its motor is emitting smoke or is unusually
hot to the touch or is emitting any unusual odor or noise or is in any
other abnormal state.
Stop using the stage immediately, switch off the motor power and then
disconnect the electronics power supply.
After checking that smoke is no longer being emitted contact your
Newport service facility and request repairs. Never attempt to repair the
stage yourself as this can be dangerous.
WAR NI N G
Make sure that this stage is not exposed to moisture and that liquid does
not get into the stage.
Nevertheless, if any liquid has entered the stage, switch off the motor
power and then disconnect the electronics from power supply.
Contact your Newport service facility and request repairs.
WAR NI N G
Do not insert or drop objects into this stage, this may cause an electric
shock, or lock the drive.
Do not use this stage if any foreign objects have entered the stage.
Switch off the motor power and then disconnect the electronics power
supply.
Contact your Newport service facility for repairs.
WAR NI N G
Do not place this stage in unstable locations such as on a wobbly table or
sloping surface, where it may fall or tip over and cause injury.
If this stage has been dropped or the case has been damaged, switch off
the motor power and then disconnect the electronics power supply.
Contact your Newport service facility and request repairs.
WAR NI N G
Do not attempt to modify this stage; this may cause an electric shock or
downgrade its performance.
WAR NI N G
Do not exceed the usable depth indicated on the mounting holes (see
section “Dimensions”). Longer screws can damage the mechanics or
cause a short-circuit.
EDH0390En1021 — 09/18 viii
IDL280-Z20 Industrial Vertical Stage
Caution
C
AUTION
Do not place this stage in a hostile environment such as X-Rays, hard
UV,… or in any vacuum environment.
CAUTION
Do not place this stage in a location affected by dust, oil fumes, steam or
high humidity. This may cause an electric shock.
CAUTION
Do not leave this stage in places subject to extremely high temperatures
or low temperatures. This may cause an electric shock.
• Operating temperature: +10 to +35 °C
• Storage temperature: -10 to +40 °C (in its original packaging)
CAUTION
Do not move this stage if its motor power is on.
Make sure that the cable to the electronics is disconnected before
moving the stage. Failure to do so may damage the cable and cause an
electrical shock.
CAUTION
Be careful that the stage is not bumped when it is being carried. This
may cause it to malfunction.
CAUTION
When handling this stage, always unplug the equipment from the power
source for safety.
CAUTION
When the carriage is in its end-of-run position, it is strongly recommended
not to go beyond this point as this may damage the stage mechanism.
CAUTION
Contact your Newport service facility to request cleaning and
specification control every year.
1 EDH0390En1021 — 09/18
IDL280-Z20 Industrial Vertical Stage
Industrial Vertical Stage
IDL280-Z20
1.0 —Introduction
This manual provides operating instructions for the IDL280-Z20 stage that
you have purchased.
IDL280-Z20 vertical stage.
RECOMMENDATION
We recommend you read carefully the chapter 6.0: “Connection to
Newport Controllers” before using the IDL280-Z20 stage.
EDH0390En1021 — 09/18 2
IDL280-Z20 Industrial Vertical Stage
2.0 —Description
For industrial applications that require a high load capacity vertical axis to
c
arry the work, the IDL280-Z20 is the ideal stage. Based on a customer-
proven and modular wedge design, the IDL280-Z20 provides fine MIM,
smooth motion for fine positioning and stiff construction for use with high
dynamic performance XY systems.
The IDL280-Z20 is matched to the IDL280 stages, requiring only a few
m
inutes to bolt the IDL280-Z20 securely onto the IDL280-LM carriage. The
IDL280-Z20 is compatible with the XPS controller.
Contact Newport for other travels or sizes.
2.1 Design Details
Base Material Anodized Aluminum
Bearings Double row recirculating ball bearings
Drive Mechanism Precision ball screw 2 mm pitch
Reducer Belt gear 1÷4 + Wedge 1÷2
Feedback Screw mounted rotary encoder 5000 cts/rev, index pulse
Limit switches Optical
Origin Optical, at center of travel, including mechanical zero signal
Cable MMCABLE-3 standard 3-meter cable
3 EDH0390En1021 — 09/18
IDL280-Z20 Industrial Vertical Stage
3.0 —Characteristics
3.1 Definitions
Specifications of our products are established in reference to ISO 230
standard part II “Determination of accuracy and repeatability of
positioning numerically controlled axes”.
T
his standard gives the definition of position uncertainty which depends
on the 3 following parameters:
Absolute Accuracy
Difference between ideal position and real position.
Accuracy
Difference between ideal position and real position after the compensation
of linear errors.
Linear errors include: cosine errors, inaccuracy of screw or linear scale
pitch, angular deviation at the measuring point (Abbe error) and thermal
expansion effects. All Newport motion electronics can compensate for
linear errors.
The relation between absolute accuracy and on-axis accuracy is as follows:
Absolute Accuracy = Accuracy + Correction Factor
x Travel
Repeatability
Ability of a system to achieve a commanded position over many attempts.
Reversal Value (Hysteresis)
Difference between actual position values obtained for a given target
position when approached from opposite directions.
Minimum Incremental Motion (MIM or Sensitivity)
The smallest increment of motion a device is capable of delivering
consistently and reliably.
Resolution
The smallest increment that a motion device can theoretically move
and/or detect. Resolution is not achievable, whereas MIM, is the real
output of a motion system.
Yaw, Pitch
Rotation of carriage around the Z axis (Yaw) or Y axis (Pitch), when it
moves.
The testing of accuracy, repeatability, and reversal error are made
systematically with test equipment in controlled environment (20
±1
°C).
A linear cycle with 21 data points on the travel and 4 cycles in each
direction gives a total of 168 points.
Guaranteed and Typical Specifications
Guaranteed maximum performance values are verified per Newport's A167
metrology test procedure. For more information, please consult the
metrology tutorial section in the Newport catalog or at www.newport.com
EDH0390En1021 — 09/18 4
IDL280-Z20 Industrial Vertical Stage
3.2 Mechanical Specifications
CAUTION
To reach specifications stated, stages must be fixed on a plane surface
with a flatness of 5 µm.
3.3 Load Specification Definitions
Normal Load Capacity (Cz)
Maximum load a stage can move while maintaining specifications.
This value is given with speed and acceleration specified for each stage,
and with a load perpendicular to bearings.
3.4 Load Characteristics and Stiffness
3.5 Stage Weight
The stage weight indicated into the below table is the one of the stage
without any cable.
Travel Range 20 mm
Minimum Incremental Motion 0.1 µm
Uni-directional Repeatability, Guaranteed ±0.1 µm
Bi-directional Repeatability, Guaranteed ±0.6 µm
Accuracy, Guaranteed ±2 µm (over full travel)
Encoder Resolution 50 nm
Max. Speed 5 mm/s
Roll, Guaranteed ±50 µrad
Pitch, Guaranteed ±50 µrad
G
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Cz, Normal center load capacity on bearings 500 N
kax, Compliance in roll 10 µrad/Nm
kay, Compliance in pitch 10 µrad/Nm
Z
Y
C
z
k
α
x
X
k
α
y
Weight [lb (kg)]
IDL280-Z20 32 (14.5)
3-meter MMCABLE-3 Cable 1.54 (0.7)
5 EDH0390En1021 — 09/18
IDL280-Z20 Industrial Vertical Stage
4.0 —Drive and Motor
4.1 Drive
The IDL280-Z20 stage is equipped with a DC-motor and a 5000 cts/rev.
s
crew mounted rotary encoder.
DC-Motor Characteristics
Command Signals
In the above drawings, + Motor signal is referred to – Motor signal.
➀
When the stage moves in + Direction, the + Motor voltage is higher than
– Motor voltage.
➁
When the stage moves in – Direction, the + Motor voltage is lower than
– Motor voltage.
4.2 Sensor Position
End-of-Run and Mechanical Zero are 5 V open collector type.
The Index Pulse provides a repeatable Home Position at ±1 step.
CAUTION
“End-of-Run” and “Mechanical Zero” are active signals and should not
be connected to any other source.
Resolution Speed Nominal Max RMS Max. Peak Resistance Inductance Tachometer
(µm) (mm/s) Voltage (V) Current (A) Current (A) (Ω) (mH) Const. (V/krpm)
IDL280-Z20 0.05 5 48 2.0 4 1.16 0.33 –
Direction +
+V
+ Motor
– Motor
–V
M
OTION Direction +
M
OTIONDirection –
– EOR Limit
Mechanical
Zero
Stage Travel Range
Index Pulse
Index Pulse
+ EOR Limit
Home Position (Origin)
at Center of Travel Range
Direction – MOTION Direction +
EDH0390En1021 — 09/18 6
IDL280-Z20 Industrial Vertical Stage
4.3 Feedback Signal Position
The incremental sensor consists of an optical scale and an encoder head.
When the carriage moves, the encoder head generates square signals in
quadrature and sends to pins #19, #20, #23 and #24 of the SUB-D25
connector.
“Encoder” and “Index Pulse” are “differential pair” (type RS-422) type
output signals. Using these signals permits a high immunity to noise.
Emission circuits generally used by Newport are 26LS31 or MC3487.
Reception circuits to use are 26LS32 or MC3486.
4.4 Pinouts
The pinout diagram for the IDL280-Z20 stage SUB-D25M connector is shown
below.
Direction +
0
1
Encoder
Phase A
0
1
E
ncoder
P
hase A
1234
0
1
Encoder
Phase B
0
1
Encoder
Phase B
Direction – MOTION Direction +
SUD-D25 OR SUB-D15
Encoder Phase A 19 13
Encoder Phase A 23 6
Encoder Phase B 20 14
Encoder Phase B 24 7
Index Pulse Phase I 15 15
Index Pulse Phase I 25 8
21 12
22 5
N
EWPORT
S
TAGE
U
SER
C
ONNECTOR PIN #
O
utput Signals
Encoders
& Sensors
Power Supply
+5 V 5%
150 mA max.
0 V
}
14 Shield Ground
15 Index Pulse I
16 0 V
17 + End-of-Run
18 – End-of-Run
19 Encoder Phase A
20 Encoder Phase B
21 +5 V
22 0 V
23 Encoder Phase /A
24 Encoder Phase /B
25 Index Pulse /I
1 N.C.
2 N.C.
3 N.C.
4 N.C.
5 + Motor
6 + Motor
7 – Motor
8 – Motor
9 N.C.
10 N.C.
11 N.C.
12 N.C.
13 Mechanical Zero
13
25
14
1
7 EDH0390En1021 — 09/18
IDL280-Z20 Industrial Vertical Stage
5.0 —Connection to Newport Controllers
5.1 Warnings on Controllers
Controllers are intended for use by qualified personnel who recognize
shock hazards and are familiar with safety precautions required to avoid
p
ossible injury. Read the controller user’s manual carefully before
operating the instrument and pay attention to all written warnings and
cautions.
WAR NI N G
Disconnect the power plug under the following circumstances:
• If the power cord or any attached cables are frayed or damaged in
any way.
• If the power plug is damaged in any way.
• If the unit is exposed to rain, excessive moisture, or liquids are spilled
on the unit.
• If the unit has been dropped or the case is damaged.
• If you suspect service or repair is required.
• Whenever you clean the electronics unit.
CAUTION
To protect the unit from damage, be sure to:
• Keep all air vents free of dirt and dust.
• Keep all liquids away from the unit.
• Do not expose the unit to excessive moisture (85% humidity).
• Read this manual before using the unit for the first time.
WAR NI N G
All attachment plug receptacles in the vicinity of this unit are to be of
the grounding type and properly polarized.
Contact your electrician to check your receptacles.
WAR NI N G
This product is equipped with a 3-wire grounding type plug.
Any interruption of the grounding connection can create an electric
shock hazard.
If you are unable to insert the plug into your wall plug receptacle,
contact your electrician to perform the necessary alterations to ensure
that the green (green-yellow) wire is attached to earth ground.
WAR NI N G
This product operates with voltages that can be lethal.
Pushing objects of any kind into cabinet slots or holes, or spilling any
liquid on the product, may touch hazardous voltage points or short out
parts.
EDH0390En1021 — 09/18 8
IDL280-Z20 Industrial Vertical Stage
5.2 Connection
There is a label on every stage indicating its part and serial numbers.
W
ARNING
Always turn the controller's power OFF before connecting to a stage.
5.3 MMCABLE-3 Cable
A 3-meter MMCABLE-3 cable is supplied with each IDL280-Z20 stage.
WARNING
This cable is shielded correctly. For a correct operation, make sure to
lock connectors (ground continuity provided by the cable).
For applications where the standard 3-meter cable (MMCABLE-3) included
with your rotation stage is not adequate, Newport offers longer length
cables designed to ensure the integrity of your positioning application.
These cables are specially shielded and terminated with Newport’s
standard SUB-D25 connectors. They are available in 5-m (MMCABLE-5), 7-m
(MMCABLE-7) or 10-m (MMCABLE-10) lengths.
C
ABLE
C
ONNECTOR
STAGE
LOCKING
KNOBS
BENDING
STATIC CABLE: ≥1.97 (50)
CABLE IN MOTION: ≥4.72 (120)
2.60 (66)
DISCONNECTED
ø
.39
(
10.6)
S
UB-D25 CONNECTOR SHOWN
DIMENSIONS IN INCHES (AND MILLIMETERS)
CONNECTED
TO THE CAP
CONNECTED
TO THE CAP
SUB-D25M
C
ONNECTOR
9
11
1
2
3
4
5
6
7
8
14
16
13
19
23
20
24
15
25
17
18
21
22
SUB-D25F
C
ONNECTOR
9
11
1
2
3
4
5
6
7
8
14
16
13
19
23
20
24
15
25
17
18
21
22
(0.5 MM
2
) RED
(
0.5 MM
2
)
BLACK
(0.34 MM
2
) WHITE
(0.34 MM
2
) BRAWN
(0.34 MM
2
) GREEN
(
0.34 MM
2
)
YELLOW
(0.34 MM
2
) WHITE
(0.34 MM
2
) BRAWN
(0.34 MM
2
) GREEN
(
0.34 MM
2
)
YELLOW
(0.14 MM
2
) WHITE
(
0.14 MM
2
)
GREEN
(0.14 MM
2
) BLUE
(0.14 MM
2
) GREY
(0.14 MM
2
) BRAWN
(0.14 MM
2
) NATURAL
(0.14 MM
2
) RED
(0.14 MM
2
) BLACK
(0.14 MM
2
) YELLOW
(0.14 MM
2
) PURPLE
(0.14 MM
2
) ORANGE
(0.14 MM
2
) WHITE/BLACK
(AWG20) RED
(
AWG20) BLACK
(AWG22) WHITE
(AWG22) BRAWN
(AWG22) GREEN
(
AWG22) YELLOW
(AWG22) WHITE
(AWG22) BRAWN
(AWG22) GREEN
(
AWG22) YELLOW
(AWG26) WHITE
(
AWG26) GREEN
(AWG26) BLUE
(AWG26) GREY
(AWG26) BRAWN
(AWG26) NATURAL
(AWG26) RED
(AWG26) BLACK
(AWG26) YELLOW
(AWG26) PURPLE
(AWG26) ORANGE
(AWG26) WHITE/BLACK
9 EDH0390En1021 — 09/18
IDL280-Z20 Industrial Vertical Stage
W
ARNING
Keep the motor cables at a safe distance from other electrical cables in
your environment to avoid potential cross talk.
For cable lengths in excess of 3 meters, we recommend the MMCABLE-REG
to ensure a high quality, regulated 5 V supply to the stages.
This regulator is available as an option. Please note that for best efficiency,
this regulator should be attached to the stage to re-adjust the 5 V coming
from the controller through the long cable.
2.1
(54)
2.4 (62)
25-PIN SUB-D
MALE
25-PIN SUB-D
FEMALE
DIMENSIONS IN INCHES
(AND MILLIMETERS)
EDH0390En1021 — 09/18 10
IDL280-Z20 Industrial Vertical Stage
6.0 —Connection to Non-Newport Electronics
6.1 Connections
WARNING
N
ewport is not responsible for malfunction or damage of IDL280-Z20
stages when used with non-Newport controllers.
WARNING
Newport guarantees
“”compliance of IDL280-Z20 stages only if used
with Newport cables and controllers.
It is the customer’s responsibility to modify the cable and take care of
sensor signal connections, when using the stage with non-Newport
controllers.
End-of-Runs and Mechanical Zero are open collector type with a 5.6 V
protective Zener diode.
I
i
n
max.: 16 mA
V max.: 5.25 V
NEWPORT
STAGE
5
.6 V
11 EDH0390En1021 — 09/18
IDL280-Z20 Industrial Vertical Stage
7.0 —Dimensions
11.18 (284)
10.43 (265)
5.0
±.39
(127
±10
)
12.20
(310)
.
83
(
21)
SQR
3.94
(100)
SQR
1.97
(50)
SQR
5.91
(150)
.59 (15)
6 HOLES M6 THD
ON ø9.84 (250)
2 x 4 HOLES
FOR M6 SCREW
3.68 (93.5) SPACING
6 HOLES M5 THD
ON ø6.85 (174)
13 HOLES M6 THD
EDH0390En1021 — 09/18 12
IDL280-Z20 Industrial Vertical Stage
8.0 —Stage Installation
8.1 Unpacking
The IDL280-Z20 stage is delivered in packaging that is designed for safe
t
ransport. Attached to the top plate of the stage are handles for safe
removal from packaging. It is recommended to carefully lift and move the
stage from packaging using these handles.
NOTE
An Allen key is supplied for CHc M6 screws.
2
HANDLES
4
CHC M6
x .
39 (10) SCREWS
A
ND WASHERS
CAUTION
Remove handles
before using.
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Newport IDL280-Z20 Vertical Stage User manual

Brand
Newport
Model
IDL280-Z20 Vertical Stage
Type
User manual
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