Varian 959D Operating instructions

OPERATIONS MANUAL

vacuum technologies

Manual No. 699909745

Revision A

September 2002

Model 959D

Dry Leak Detector

959D Leak Detector

Varian Vacuum Technologies

Model 959D

Helium Mass Spectrometer

Dry Leak Detector

Contra-Flow, MacroTorr, and TriScroll are trademarks of Varian Vacuum Technologies.

Apiezon is a registered trademark of M&I Materials Ltd.; Alconox is a registered trademark of Alconox, Inc.;

Loctite and PST are registered trademarks of Loctite Corporation.; Scotch-Brite is a trademark of 3M.

iii

959D Leak Detector

DRAFT 9/13/02

Preface

Warranty

Products manufactured by Seller are warranted against defects in materials and workmanship for twelve

(12) months from date of shipment thereof to Customer, and Seller’s liability under valid warranty

claims is limited, at the option of Seller, to repair, to replace, or refund of an equitable portion of the

purchase price of the Product. Items expendable in normal use are not covered by this warranty. All

warranty replacement or repair of parts shall be limited to equipment malfunctions which, in the sole

opinion of Seller, are due or traceable to defects in original materials or workmanship. All obligations

of Seller under this warranty shall cease in the event of abuse, accident, alteration, misuse, or neglect of

the equipment. In-warranty repaired or replaced parts are warranted only for the remaining unexpired

portion of the original warranty period applicable to the repaired or replaced parts. After expiration of

the applicable warranty period, Customer shall be charged at the then current prices for parts, labor,

and transportation.

Reasonable care must be used to avoid hazards. Seller expressly disclaims responsibility for loss or

damage caused by use of its Products other than in accordance with proper operating procedures.

Except as stated herein, Seller makes no warranty, express or implied (either in fact or by operation of

law), statutory or otherwise; and, except as stated herein, Seller shall have no liability under any war-

ranty, express or implied (either in fact or by operation of law), statutory or otherwise. Statements made

by any person, including representatives of Seller, which are inconsistent or in conflict with the terms of

this warranty shall not be binding upon Seller unless reduced to writing and approved by an officer of

Seller.

Warranty Replacement and Adjustment

All claims under warranty must be made promptly after occurrence of circumstances giving rise thereto,

and must be received within the applicable warranty period by Seller or its authorized representative.

Such claims should include the Product serial number, the date of shipment, and a full description of

the circumstances giving rise to the claim. Before any Products are returned for repair and/or adjust-

ment, written authorization from Seller or its authorized representative for the return and instructions as

to how and where these Products should be returned must be obtained. Any Product returned to Seller

for examination shall be prepaid via the means of transportation indicated as acceptable by Seller.

Seller reserves the right to reject any warranty claim not promptly reported and any warranty claim on

any item that has been altered or has been returned by non-acceptable means of transportation. When

any Product is returned for examination and inspection, or for any other reason, Customer shall be

responsible for all damage resulting from improper packing or handling, and for loss in transit, notwith-

standing any defect or non-conformity in the Product. In all cases, Seller has the sole responsibility for

determining the cause and nature of failure, and Seller’s determination with regard thereto shall be

final.

If it is found that Seller’s Product has been returned without cause and is still serviceable, Customer will

be notified and the Product returned at its expense; in addition, a charge for testing and examination

may be made on Products so returned.

959D Leak Detector

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Hazard and Safety Information

This manual uses the following standard safety protocols:

WARNING The warning messages are for attracting the attention of the

operator to a particular procedure or practice which, if not

followed correctly, could lead to serious injury.

CAUTION The caution messages are displayed before procedures, which

if not followed, could cause damage to the equipment.

NOTE The notes contain important information.

Operators and service personnel must be aware of all hazards associated with this equip-

ment. They must know how to recognize hazardous and potentially hazardous conditions,

and know how to avoid them. The consequences of unskilled, improper, or careless opera-

tion of the equipment can be serious. This product must only be operated and maintained

by trained personnel. Every operator or service person must read and thoroughly understand

operation/maintenance manuals and any additional information provided by Varian

Vacuum Technologies. All warnings and cautions should be read carefully and strictly

observed. Consult local, state, and national agencies regarding specific requirements and

regulations. Address any safety, operation, and/or maintenance questions to your nearest

Varian Vacuum Technologies office.

959D Leak Detector

DRAFT 9/13/02

v

Solvents

CAUTION The mechanical components of leak detectors are typically

cleaned with alcohol, methanol, or other solvents.

When heated, sprayed, or exposed to high-temperature

equipment, these solvents become flammable and explosive,

causing serious injury or death. Do not use these solvents near

a high-temperature source. Ventilate the working area with a

blower and work in a large, well-ventilated room.

Alcohol, methanol, or other solvents are irritants, narcotics,

depressants and/or carcinogens. Their inhalation and/or

ingestion may produce serious side effects. Prolonged or

continued contact with the skin will result in absorption

through the skin and moderate toxicity. Always ensure that

cleaning operations are carried out in large, well-ventilated

rooms, and wear eyeshields, gloves, and protective clothing.

CAUTION Do not clean any aluminum parts with Alconox

®

. Alconox is

not compatible with aluminum and will cause damage.

NOTE During reassembly, always use Loctite



PST



(te fl on- i mpr egn a ted pi pe threa d com po un d) on pi pe th rea ds.

959D Leak Detector

vi

DRAFT 9/13/02

Equipment, General

WARNING Equipment tightness is guaranteed for normal operating

conditions when the equipment leaves the factory. It is the

user’s responsibility to maintain the level of tightness

particularly when pumping dangerous products.

CAUTION The performance and operating safety of this equipment can be

guaranteed only if it is operated according to normal conditions

of use.

CAUTION Always allow at least 4 inches of clearance adjacent to the

ventilation holes at the front, back, and bottom of the

equipment enclosure.

Power and Static

WARNING Disconnect power from the 959D before performing any

maintenance procedure that requires physically disconnecting

any part of the system.

CAUTION Many components of the 959D are static-sensitive devices.

Varian Vacuum Technologies recommends that you wear a

grounding device when performing any maintenance on the

959D and especially when performing maintenance of

static-sensitive parts.

WARNING Use only the power cord that was provided with your leak

detector. The use of extension cords is not recommended and

could result in damage to the equipment and loss of warranty.

To avoi d electri c shock, connect the product power cord to a

grounded power receptacle. A protective ground connection by

way of the grounding conductor in the power cord is essential

for safe operation.

Before powering up the unit for the first time, verify that the unit

is configured to operate from the local mains supply voltage.

Opening the enclosure may expose hazardous voltages. Always

disconnect the power cord and any interface cables before

opening the enclosure. Do not touch the power inlet’s contacts

for at least 10 seconds after disconnecting the power cord.

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vii

CAUTION This equipment generates, uses, and can radiate RF energy, and

if not installed and used in accordance with the instructional

manual, may cause harmful interference to radio

communications.

When this equipment is operated in a commercial

environment, operation is subject to the following conditions:

❑ This equipment may not cause harmful interference, and

❑ This equipment must accept any interference received,

including interference (RF and ESD) that may cause

undesired operation.

This equipment may need to be reset after RF and/or ESD events

by cycling the Power Switch/Circuit Breaker on the back panel

of the unit.

Operation of this equipment in a residential area is likely to

cause harmful radio communications interference, in which

case the user will be required to correct the interference at his

own expense.

Vacuum Equipment and Cleanliness

Cleanliness is vital when servicing the leak detector or any vacuum equipment. There are

some techniques that are more important in leak detector servicing than in general vacuum

work:

CAUTION Do not use silicone oil or silicone grease.

Use powder-free butyl or polycarbonate gloves to prevent skin

oils from getting on vacuum surfaces.

Do not clean any aluminum parts with Alconox

®

. Alconox is

not compatible with aluminum and will cause damage.

NOTE Normally, it is unnecessary to use vacuum grease. However, if it

must be used, avoid silicone types, and use it sparingly.

Apiezon

®

L grease (Varian Vacuum Technologies p/n

695400004) is recommended.

959D Leak Detector

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DRAFT 9/13/02

O-ring Care

When removing, checking, or replacing O-rings, keep in mind the following:

NOTE Varian Vacuum Technologies recommends replacing all

O-rings during routine maintenance or during any maintenance

procedure requiring that O-rings be removed.

CAUTION Remove O-rings carefully with your fingers. Do not use metal

tools for this task. Follow these guidelines to prevent scratching

of any sealing surfaces:

❑ Wipe all O-rings clean with a lint-free cloth before

installation to ensure that no foreign matter is present to

impair the seal.

❑ Do not use grease or use other substances on O-rings that

will come in contact with the spectrometer tube.

❑ Do not use alcohol, methanol, or other solvents on O-rings.

To do so causes deteri orati on and reduces the O-ring’s

ability to hold a vacuum.

❑ In allowable situations, apply a small amount of Apiezon

L

grease and wipe the O-rings “shiny” dry.

NOTE Included in the Component and Spectrometer Tube Cleaning

Kit (p/n 670029096), VacuSolv is recommended for cleaning

the spectrometer tube components.

VacuSolv can also be used for fine cleaning of other parts in the

leak detector’s vacuum system, such as valves and fittings. No

rinsing steps or high-temperature drying is required following

cleaning with VacuSolv. Although appropriate precautions are

advised, VacuSolv is compatible with most materials and does

not contain toxic chemicals or CFCs (chlorofluorocarbons).

959D Leak Detector

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ix

Spectrometer Tube

CAUTION The spectrometer tube operates at a very high vacuum

produced by the high vacuum pump. Service of the

spectrometer tube requires that this vacuum be vented to the

atmosphere.

CAUTION Do not use grease or other substance on O-rings that will come

in contact with the spectrometer tube.

CAUTION If the spectrometer tube magnet comes in contact with a

magnetic surface, the magnet may lose its field strength,

causing the spectrometer tube to lose sensitivity.

WARNING Store the ion source in a cool, dry area in a tightly sealed

container. Wash hands thoroughly after handling the ion source

and especially before smoking or eating.

Pumps

WARNING To avoi d i nj ury, use proper l i fti ng techni ques when movi ng

pumps. Your system may have pumps that require two people

to move them safely.

WARNING The vacuum pumps are also compressors; incorrect operation

may be dangerous. Study the “Installation and Operation

Manual” enclosed with your pump before starting pumps.

WARNING To avoi d i nj ury, turn off the ni trogen source when the ni trogen

purge is not in use.

959D Leak Detector

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DRAFT 9/13/02

Varian Services

The following are just a few of the many services that Varian offers its customers. Please see

our catalog, or contact us to learn of other services that are available. Contact Varian

Vacuum Technologies Customer Service at 1-800-8VARIAN for details.

❑ Rebuilt spectrometer tubes are available on an exchange basis.

❑ NIST-traceable calibrated leak testing and verification services.

❑ Courses in leak detection, including in-depth operational and maintenance

instruction for the 959D.

Contacting Varian Vacuum Technologies

In the United States, you can contact Varian Vacuum Technologies Customer Service and

Tech nical Suppo rt at 1-800-8 VARIAN.

Internet users:

❑ Send email to Customer Service and Technical Support at

vpl.customer.support@varianinc.com

❑ Visit our web site at www.varianinc.com/vacuum

❑ Order on line at www.evarian.com

See the back cover of this manual for a listing of our sales and service offices.

959D Leak Detector

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xi

Contents

Preface ...............................................................................................................................................iii

Warranty ......................................................................................................................................iii

Hazard and Safety Information ....................................................................................................iv

Varian Services ............................................................................................................................ x

Contacting Varian Vacuum Technologies .................................................................................... x

Section 1. Introduction .................................................................................................................... 1-1

1.1 General Description ............................................................................................................ 1-1

1.2 Unpacking ............................................................................................................................ 1-3

1.2.1 Unpacking Instructions................................................................................................ 1-3

1.2.2 Removing the 959D from the Skid .............................................................................. 1-4

1.3 Preparation for Operation .................................................................................................... 1-5

1.4 Installation............................................................................................................................ 1-5

1.4.1 Electrical Connections................................................................................................. 1-5

1.4.2 Gas Requirements ...................................................................................................... 1-6

1.4.2.1 Helium ............................................................................................................ 1-6

1.4.2.2 Nitrogen (optional) .......................................................................................... 1-6

1.4.3 Clean Room Use of the Leak Detector ....................................................................... 1-7

1.5 Vacuum System Description................................................................................................ 1-7

1.5.1 Measurement System ................................................................................................. 1-8

1.6 Internal Valving .................................................................................................................. 1-10

1.6.1 Direct Operation of the Valves .................................................................................. 1-10

1.6.2 Automatic Valve Operation for Large Volume Leak Checks ..................................... 1-11

1.6.3 Main Electronics Assembly and Circuit Boards......................................................... 1-11

1.7 Specifications.....................................................................................................................1-13

Section 2. Operation ....................................................................................................................... 2-1

2.1 Operator Interface ............................................................................................................... 2-1

2.1.1 Primary Controls and Indicators.................................................................................. 2-2

2.1.2 Secondary Controls and Indicators............................................................................. 2-3

2.1.3 Rear Panel Components............................................................................................. 2-5

2.1.4 Connecting to the Test Port ........................................................................................ 2-6

2.2 959D Startup Procedure ......................................................................................................2-7

2.3 Changing the Audible Threshold.......................................................................................... 2-8

2.4 Running a Leak Test............................................................................................................ 2-8

2.4.1 Basic Test Procedure.................................................................................................. 2-8

2.4.2 Out-of-Range Situations............................................................................................ 2-10

2.4.3 Testing above 200 mTorr ......................................................................................... 2-10

2.5 Calibration and Tuning....................................................................................................... 2-11

2.5.1 Calibrating with a Calibrated Leak ............................................................................ 2-11

2.5.2 Use of a Capillary Type Calibrated Leak for Tuning to He........................................ 2-13

2.5.3 Tuning the Spectrometer Tube Using a Calibrated Leak for Tuning to He ............... 2-13

2.5.4 Tuning the Spectrometer Tube Using a Tuning Leak ............................................... 2-14

2.6 Nitrogen Purge Option .......................................................................................................2-16

959D Leak Detector

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DRAFT 9/13/02

2.7 Residual Background Check.............................................................................................. 2-17

2.7.1 Measuring the Background ....................................................................................... 2-17

2.7.2 Zero the Background ................................................................................................ 2-18

2.8 Shutdown and Restart Procedures.................................................................................... 2-18

2.8.1 Standby..................................................................................................................... 2-18

2.8.2 Shutdown ..................................................................................................................2-18

2.8.3 Starting After Short-term Shutdown (Standby) ......................................................... 2-19

2.8.4 Temporary Power Loss............................................................................................. 2-19

Section 3. Maintenance and Parts Replacements .......................................................................... 3-1

3.1 Safety and Maintenance ......................................................................................................3-1

3.1.1 AC Power.................................................................................................................... 3-1

3.1.2 Static Charge .............................................................................................................. 3-1

3.1.3 Ion Source................................................................................................................... 3-1

3.1.4 O-rings ........................................................................................................................ 3-2

3.1.5 Cleaning Kit................................................................................................................. 3-2

3.1.6 Maintenance Schedules.............................................................................................. 3-3

3.2 Cleaning the Test Port ......................................................................................................... 3-4

3.3 Removing the Cover ............................................................................................................ 3-5

3.4 Cleaning or Replacing the Spectrometer Tube.................................................................... 3-5

3.4.1 Removing the Ion Source ........................................................................................... 3-6

3.4.2 Examining the Ion Source......................................................................................... 3-10

3.4.3 Cleaning the Ground Slit Plate.................................................................................. 3-12

3.4.4 Installing the Ion Source ........................................................................................... 3-14

3.4.5 Cleaning the Preamplifier Cavity............................................................................... 3-17

3.4.6 Replacing the Preamplifier........................................................................................ 3-17

3.4.7 Installing the Spectrometer Tube .............................................................................. 3-18

3.5 Replacement Parts ............................................................................................................ 3-19

3.6 Accessories........................................................................................................................ 3-19

Appendix A. Introduction to Leak Detection ....................................................................................A-1

A.1 Why Leak Testing is Necessary ..........................................................................................A-1

A.2 Classes of Leak Detection...................................................................................................A-1

A.3 Terminology.........................................................................................................................A-2

A.4 Leak Detection Methods......................................................................................................A-3

A.5 Helium Mass Spectrometer Leak Detection (MSLD)...........................................................A-4

A.5.1 Principles of Mass Spectrometry ...............................................................................A-4

A.5.2 Application as a Leak Detector ..................................................................................A-4

A.5.3 The Nature of Flow in a Vacuum ...............................................................................A-4

A.5.4 Facts About Leak Rates ............................................................................................A-5

A.6 Using Helium for Leak Detection .........................................................................................A-6

A.6.1 Test Piece Evacuated ................................................................................................A-6

A.6.2 Test Piece Pressurized ..............................................................................................A-7

A.6.3 Test Piece Already Sealed ........................................................................................A-7

A.7 Mass Spectrometer Leak Detector......................................................................................A-8

Index

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xiii

List of Figures

Figure Caption Page

1-1 Model 959D Leak Detector ................................................................................................. 1-2

1-2 Rear Panel Circuit Breakers ............................................................................................... 1-6

1-3 959D Front View ................................................................................................................. 1-7

1-4 Vacuum System................................................................................................................1-10

2-1 Primary (left) and Secondary (right) Controls ..................................................................... 2-1

2-2 959D Primary Controls and Indicators ................................................................................ 2-2

2-3 Opening the Access Panel.................................................................................................. 2-3

2-4 Secondary Controls and Indicators..................................................................................... 2-4

2-5 959D Rear Panel Components ........................................................................................... 2-5

2-6 Vacuum Test Port ............................................................................................................... 2-6

2-7 Principal Test Controls........................................................................................................ 2-8

2-8 Range at Two Arcs ........................................................................................................... 2-15

2-9 N

2

Purge System .............................................................................................................. 2-16

3-1 Removing the Test Port Compression Ring and O-ring...................................................... 3-4

3-2 Front and Side Views.......................................................................................................... 3-5

3-3 Ion Source and Preamplifier Connectors ............................................................................ 3-6

3-4 Wing Nut and Clamp...........................................................................................................3-7

3-5 Extracting the Spectrometer Tube ...................................................................................... 3-7

3-6 Spectrometer Tube O-ring and Centering Ring .................................................................. 3-8

3-7 Removing Flange Cap Screws ........................................................................................... 3-8

3-8 Disengaging Flange Cap .................................................................................................... 3-9

3-9 Removing the Ion Source ................................................................................................... 3-9

3-10 Ion Source.........................................................................................................................3-10

3-11 Ion Source Cavity.............................................................................................................. 3-11

3-12 Ground Slit Plate............................................................................................................... 3-12

3-13 Cleaning the Ground Slit Plate.......................................................................................... 3-13

3-14 Ground Slit Plate Properly Inserted .................................................................................. 3-14

3-15 Replacing the Ion Source O-ring....................................................................................... 3-15

3-16 Ion Source Alignment Pin .................................................................................................3-16

3-17 Replacing the Preamplifier................................................................................................3-17

3-18 Spectrometer Tube O-ring and Centering Ring ................................................................ 3-18

A-1 Test Piece Evacuated: Tracer Probe Used to Locate Leak ................................................A-6

A-2 Test Piece Evacuated and Hooded with Helium Atmosphere to

Determine Overall Leak Rate..............................................................................................A-6

A-3 Test Piece Pressurized: Detector Probe Used to Locate Leak...........................................A-7

A-4 Test Piece Sealed with Helium and/or Other Gases...........................................................A-7

A-5 Magnetic Separation Principle ............................................................................................A-9

959D Leak Detector

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DRAFT 9/13/02

List of Tables

Table Title Page

1-1 Helium Sensitivity Ranges and MDL ................................................................................. 1-8

1-2 Valve Operating States.................................................................................................... 1-11

1-3 959D Operating Specifications ........................................................................................ 1-13

3-1 Scheduled Maintenance .................................................................................................... 3-3

3-2 As-required Maintenance................................................................................................... 3-3

3-3 959D Replacement Parts................................................................................................. 3-19

3-4 959D Accessories............................................................................................................ 3-19

A-1 Decimal Notation ...............................................................................................................A-2

1-1

959D Leak Detector

Section 1. Introduction

1.1 General Description

The Varian 959D is a portable, self-contained mass spectrometer helium leak detector.

Its basic components are:

❑ Test port that c on nec ts to th e unit u nder test or to an as sociated vacu um sy stem

❑ High vacuum pump

❑ Spectrometer tube

❑ Valve block

❑ TriScrol l™ 610 rou gh ing pu mp

❑ Leak detector electronics

❑ Operator interface

The unit provides clean and automatic leak detection utilizing a Contra-Flow™ vacuum sys-

tem design that allows testing at high test point pressures in a dry, oil-free vacuum pumping

system. The TriScroll dry roughing pump evacuates the test port to the appropriate transfer

pressure and provides ultra-clean system roughing and backing functions. A Turbo or

MacroTorr™ pump is used to achieve high vacuum in the spectrometer tube. The TriScroll

roughing pump is located on the cart below the 959D. An optional power probe accessory

allows the 959D to operate as a quick-response, high-sensitivity sniffing leak detector.

Operation is performed using primary controls located on the front of the 959D and second-

ary controls located behind a locking access door. The 959D front view is shown in

Figure 1-1. The leak detector electronics operate the spectrometer assembly, control the

high vacuum pump, control the valve block, and provide leak rate and system status infor-

mation to the operator through bar graph and LED indicators on the front panel, through

audio, or through an optional meter or chart recorder.

The 959D has nitrogen purge available. This feature eliminates a high helium background

which could interfere with testing. The use of this feature depends upon your test method

and test conditions. For example, using the helium spray test method in a poorly ventilated

area would likely require the use of the nitrogen purge. The 959D can detect leaks from as

large as 1x10

−4

atm cc/sec to as small as 2x10

−10

atm cc/sec (about 1 cc in 30 years). The

ultimate helium sensitivity is a factor of the configuration of the pumps.

959D Leak Detector

1-2

DRAFT 9/13/02

Figure 1-1 Model 959D Leak Detector

959D Leak Detector

1-3

1.2 Unpacking

The 959D is shipped in one disposable shipping carton, completely assembled and ready

for operation. The following components are shipped with the unit:

❑ Model 959D Leak Detector mounted on the Varian 2-Wheel Cart.

❑ This Operations Manual.

❑ 959D mounted on the top shelf of the cart with its power cable (120 VAC or 220

VAC as ordered) connected to a main power strip, located on the bottom shelf of the

cart.

❑ TriScrol l 610 p ump b ol ted to the bot tom shelf of t he cart, connec ted by a n NW-2 5

manifold to the 959D. The TriScroll’s power cable is connected to the main power

strip on the bottom shelf of the cart.

❑ Operation manuals for the high vacuum Turbo or MacroTorr pump and for the

TriScrol l 610.

❑ Any optional equipment purchased.

1.2.1 Unpacking Instructions

To u npack th e 959 D:

1. Inspect the container for evidence of damage in shipment. Do not discard any evidence

of rough handling.

2. Report, without delay, any damage to both the carrier and to Varian Vacuum

Tech no logies C ustom er Service at 1-800-8VARIA N.

3. Carefully remove the outer shipping container.

4. Inspect the leak detector and related items immediately for any indication of shipping

damage.

5. Carefully cut the strapping holding the leak detector on the skid.

6. Remove any loose boxes or packages and put them aside. Keep the original packing for

reuse in the event that it is necessary to return the leak detector to Varian.

7. Remove the front brace by undoing the two lag bolts.

8. Remove the plastic bag covering the leak detector.

The leak detector can now be removed from the skid.

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DRAFT 9/13/02

1.2.2 Removing the 959D from the Skid

There are two methods for removing the 959D from the skid. Both methods require two

people.

WARNING The 959D is heavy and can cause personal injury if not

handled carefully when removing it from the skid.

Method 1

1. With the assistance of a helper, carefully roll the leak detector toward the front of the

skid.

2. Lift the front end of the unit and gently lower it onto the floor.

3. Lift the rear of the unit and roll it on the front casters until it is clear of the skid.

4. Gently lower the rear end onto the floor.

Method 2

1. Using the brace removed in step 7 of Section 1.2.1 “Unpacking Instructions” as a lever,

carefully raise the front edge of the skid between 1 and 2 inches.

2. While a helper holds the leak detector against the back brace, unscrew and remove the

front two Skid-Mates by turning them counterclockwise.

3. Make sure the helper is still holding the leak detector against the back of the skid, and

then gently lower the front of the skid to the floor.

4. Carefully and slowly roll the leak detector off the skid and onto the floor.

959D Leak Detector

1-5

1.3 Preparation for Operation

NOTE Before operating the 959D Leak Detector, read and understand

the warranty and safety information in the preface of this

manual.

Be sure all packing materials have been removed from the 959D and that appropriate

power connections are available before setting up the leak detector. Remove the exhaust

plug from the TriScroll pump if it has not already been removed.

If you have purchased optional equipment for the 959D, set it up in accordance with the

operations manuals that were supplied with the equipment.

1.4 Installation

The 959D Leak Detector is delivered completely assembled as ordered. Locate the 959D

close to its power source and be sure there are at least 4 inches of clearance for proper ven-

tilation and sufficient room for the operator to safely maneuver to perform testing.

Cart-mounted leak detectors are completely mobile and can be moved quickly and conve-

niently around an entire plant or other facility on short notice. Additional ventilation

requirements for your specific application, as discussed in Section 1.4.3 “Clean Room Use

of the Leak Detector”, must also be provided at this point.

CAUTION Allow at least a 4 inches of clearance to ensure that air flows

freely around the leak detector. Do not block the exhaust fans

at the rear of the leak detector.

1.4.1 Electrical Connections

The 959D cart-mounted system operates from a single AC power source and can be config-

ured for:

❑ 115 VAC, 50/60 Hz, 20 Amps or

❑ 220 VAC, 50/60 Hz, 10 Amps

The 959D cart has a power strip equipped with a single 3-prong cable that attaches to an

appropriate power line. The TriScroll roughing pump does not have a power on-off switch;

it turns on when the leak detector is powered up from the AC input power strip located on

the cart.

WARNING Use only the power cord provided with your leak detector. The

use of extension cords is not recommended and could result in

damage to the equipment and loss of warranty.

959D Leak Detector

1-6

DRAFT 9/13/02

As shown in Figure 1-2, two circuit breakers are located on the rear panel:

❑ 3Amp breaker for the leak detector main POWER

❑ 1.5 Amp breaker for the ELECTRONICS

Figure 1-2 Rear Panel Circuit Breakers

Before making power connections, verify the following:

❑ The MAIN POWER switch (secondary controls behind the access door) on the leak

detector is OFF (down).

❑ The power switch on the AC input power strip located at the bottom of the cart is

OFF.

❑ An appropriately grounded receptacle is available.

Plug the AC power cable into the receptacle.

1.4.2 Gas Requirements

1.4.2.1 Helium

For testing products or leak checking with the 959D, use welding grade helium in a stan-

dard cylinder with a pressure regulating valve.

1.4.2.2 Nitrogen (optional)

Use 99.9% pure N

2

for the purge operation as described in Section 2.6 “Nitrogen Purge

Option” on page 2-16.

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Varian 959D Operating instructions

Varian 959D Operating instructions

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