Aerotech PRO165LM-0200 Owner's manual

Brand: Aerotech

Model: PRO165LM-0200

Type: Owner's manual

Revision: 1.08.00

PRO165LM Hardware Manual

Global Technical Support

Go to www.aerotech.com/global-technical-support for information and support about your Aerotech products. The website

provides downloadable resources (such as up-to-date software, product manuals, and Help files), training schedules, and

PC-to-PC remote technical support. You can also complete Product Return (RMA) forms and get information about repairs

and spare or replacement parts. For immediate help, contact a service office or your sales representative. Have your

customer order number available before you call or include it in your email.

United States (World Headquarters)

Phone: +1-412-967-6440

Fax: +1-412-967-6870

Email: service@aerotech.com

101 Zeta Drive

Pittsburgh, PA 15238-2811

www.aerotech.com

United Kingdom Japan

Phone: +44 (0)1256 855055

Fax: +44 (0)1256 855649

Email: service@aerotech.co.uk

Phone: +81 (0)50 5830 6814

Fax: +81 (0)43 306 3773

Email: service@aerotechkk.co.jp

Germany China

Phone: +49 (0)911 967 9370

Fax: +49 (0)911 967 93720

Email: service@aerotechgmbh.de

Phone: +86 (21) 3319 7715

Email: service@aerotech.com

France Taiwan

Phone: +33 2 37 21 87 65

Email: service@aerotech.co.uk

Phone: +886 (0)2 8751 6690

Email: service@aerotech.tw

This manual contains proprietary information and may not be reproduced, disclosed, or used in whole or in part without the

express written permission of Aerotech, Inc. Product names mentioned herein are used for identification purposes only and

may be trademarks of their respective companies.

PRO165LM Hardware Manual Table of Contents

Table of Contents

PRO165LM Hardware Manual 1

Table of Contents 3

List of Figures 4

List of Tables 5

Safety Procedures and Warnings 7

EC Declaration of Incorporation 9

Chapter 1: Overview 11

1.1. Environmental Specifications 13

1.2. Accuracy and Temperature Effects 13

1.3. Basic Specifications 14

1.4. Vacuum Operation 16

Chapter 2: Mechanical Specifications and Installation 17

2.1. Unpacking and Handling the Stage 17

2.2. Dimensions 20

2.3. Securing the Stage to the Mounting Surface 23

2.4. Attaching the Payload to the Stage 24

2.4.1. Speed Capability 26

Chapter 3: Electrical Specifications and Installation 27

3.1. Motor and Feedback Connectors 28

3.2. Motor and Feedback Wiring 34

3.3. Motor and Feedback Specifications 36

3.4. Limits, Marker, and Machine Direction 38

3.5. Motor and Feedback Phasing 39

Chapter 4: Maintenance 41

4.1. Service and Inspection Schedule 41

4.2. Cleaning and Lubrication 42

4.3. Troubleshooting 47

Appendix A: Warranty and Field Service 49

Appendix B: Technical Changes 51

Index 53

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Table of Contents PRO165LM Hardware Manual

List of Figures

Figure 2-1: Shipping Brackets Used on Single Axis Stages or Upper Axes of XY Systems 18

Figure 2-2: PRO165LM Series Stage with Lifting Features 19

Figure 2-3: PRO165LM Dimensions 20

Figure 2-4: PRO165LM Accessory Tabletop Dimensions (-TT3, -TT6 Options) 21

Figure 2-5: Dimensions for Stages without a Cable Management System (-CMS0 Option) 22

Figure 2-6: Cantilevered Load Capability of PRO165LM Series Stages 25

Figure 2-7: Stage Orientations 25

Figure 3-1: Ground Connection Points for the -CMS0 Option 28

Figure 3-2: Motor and Feedback Wiring 34

Figure 3-3: Motor and Feedback Wiring for a Typical Vertical or Rotary Axis Stage 35

Figure 3-4: Machine Direction 38

Figure 3-5: Hall Phasing 39

Figure 3-6: Analog Encoder Phasing Reference Diagram (-E1 Incremental Encoder) 40

Figure 3-7: Encoder Phasing Reference Diagram (-E2 Incremental Encoder) 40

Figure 4-1: Endplate Cover Removal (Step 2) 44

Figure 4-2: Hardcover Screw Removal (Step 3) 45

Figure 4-3: Hardcover Removal (Step 3) 46

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PRO165LM Hardware Manual Table of Contents

List of Tables

Table 1-1: Model Numbers and Ordering Options 11

Table 1-2: Environmental Specifications 13

Table 1-3: PRO165LM Series Specifications (-0100 to -0300) 14

Table 1-4: PRO165LM Series Specifications (-0400 to -1000) 15

Table 2-1: Stage Mounting Surface Flatness Requirement 23

Table 2-2: Stage to Mounting Surface Hardware 23

Table 3-1: Linear Motor Connector Wiring 29

Table 3-2: Linear Motor Limit and Encoder Connector Wiring (-E1 and -E2 Incremental Encoder

Options) 30

Table 3-3: Linear Motor Limit and Encoder Connector Wiring (-E3 Absolute Encoder Option) 31

Table 3-4: General Motor Connector Wiring (for Z or T Axes) 32

Table 3-5: General Feedback Connector Wiring (for Z or T axes) 33

Table 3-6: Feedback Specifications 36

Table 3-7: PRO165LMLinear Motor Specifications (BLMC-142-A) 37

Table 3-8: Encoder Specifications 37

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Table of Contents PRO165LM Hardware Manual

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PRO165LM Hardware Manual Safety

Safety Procedures and Warnings

Read this manual in its entirety before installing, operating, or servicing this product. If you do not understand

the information contained herein, contact an Aerotech representative before proceeding. Strictly adhere to

the statements given in this section and other handling, use, and operational information given throughout

the manual to avoid injury to you and damage to the equipment.

The following statements apply wherever the Warning or Danger symbol appears within this manual. Failure

to observe these precautions could result in serious injury to those individuals performing the procedures

and/or damage to the equipment.

N O T E : Aerotech continually improves its product offerings; listed options may be superseded at any

time. All drawings and illustrations are for reference only and were complete and accurate as of this

manual’s release. Refer to www.aerotech.com for the most up-to-date information.

D A N G E R : This product contains potentially lethal voltages. To reduce the possibility of

electrical shock, bodily injury, or death the following precautions must be followed.

Access to the PRO165LM and component parts must be restricted while connected to a

power source.

Do not connect or disconnect any electrical components or connecting cables while

connected to a power source.

Disconnect electrical power before servicing equipment.

All components must be properly grounded in accordance with local electrical safety

requirements.

Operator safeguarding requirements must be addressed during final integration of the

product.

W A R N I N G : To minimize the possibility of electrical shock, bodily injury or death the

following precautions must be followed.

Moving parts can cause crushing or shearing injuries. Access to all stage and motor parts

must be restricted while connected to a power source.

Cables can pose a tripping hazard. Securely mount and position all system cables to

avoid potential hazards.

Do not expose this product to environments or conditions outside of the listed

specifications. Exceeding environmental or operating specifications can cause damage to

the equipment.

The PRO165LM stage must be mounted securely. Improper mounting can result in injury

and damage to the equipment.

Use care when moving the PRO165LM stage. Lifting or transporting the PRO165LM stage

improperly can result in injury or damage to the PRO165LM.

This product is intended for light industrial manufacturing or laboratory use. Use of this

product for unintended applications can result in injury and damage to the equipment.

If the product is used in a manner not specified by the manufacturer, the protection

provided by the product can be impaired and result in damage, shock, injury, or death.

The stage forcer temperature may exceed 75°C.

Operators must be trained before operating this equipment.

10.

All service and maintenance must be performed by qualified personnel.

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Safety PRO165LM Hardware Manual

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PRO165LM Hardware Manual Declaration of Conformity

EC Declaration of Incorporation

Manufacturer:

Aerotech, Inc.

101 Zeta Drive

Pittsburgh, PA 15238-2811

USA

herewith declares that the product:

PRO165LM Linear Stage

is intended to be incorporated into machinery to constitute machinery covered by the Directive

2006/42/EC as amended;

and that the following harmonized European standards have been applied:

EN ISO 12100:2010

Safety of machinery - Basic concepts, general principles for design

EN 60204-1:2010

Safety of machinery - Electrical equipment of machines - Part 1:General requirements

and further more declares that

it is not allowed to put the equipment into service until the machinery into which

it is to be incorporated or of which it is to be a component has been found and

declared to be in conformity with the provisions of the Directive 2006/42/EC and

with national implementing legislation, i.e., as a whole, including the equipment

referred to in this Declaration.

This is to certify that the aforementioned product is in accordance with the applicable requirements of the

following Directive(s):

2011/65/EU RoHS2 Directive

Authorized Representative:

Simon Smith, European Director

Address:

Aerotech Ltd

The Old Brick Kiln

Ramsdell, Tadley

Hampshire RG26 5PR

Name

/ Alex Weibel

Position

Engineer Verifying Compliance

Location

Pittsburgh, PA

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Declaration of Conformity PRO165LM Hardware Manual

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PRO165LM Hardware Manual Overview

Chapter 1: Overview

The specifications in this manual pertain to the second generation of PRO LM stages. Second generation

stages can be distinguished from their first generation counterparts by the second generation's curved

hardcover. Contact Aerotech if you need a first generation manual.

Table 1-1: Model Numbers and Ordering Options

PRO165LM Linear Motor Stage

Travel (Required)

-0100 100 mm travel stage

-0150 150 mm travel stage

-0200 200 mm travel stage

-0250 250 mm travel stage

-0300 300 mm travel stage

-0400 400 mm travel stage

-0500 500 mm travel stage

-0600 600 mm travel stage

-0800 800 mm travel stage

-1000 1000 mm travel stage

Mounting Orientation (Required)

Normal mounting orientation

-MT1 Side mounted or vertical orientation

-MT2 Inverted mounting orientation

Tabletop (Required)

-TT1 Tabletop with metric dimension mounting

-TT2 Tabletop with English dimension mounting

-TT3 Accessory tabletop with mounting pattern for select rotary stages

-TT4 Tabletop with metric dimension mounting and wiper brushes

-TT5 Tabletop with English dimension mounting and wiper brushes

-TT6 Accessory tabletop with mounting for select rotary stages and wipers

NOTE:-TT1 option required for lower axis of XY

Feedback (Required)

-E1 Incremental linear encoder; 1 Vpp

-E2 Incremental linear encoder; 0.1 μm digital TTL output

-E3 Absolute linear encoder; EnDat 2.2

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Overview PRO165LM Hardware Manual

PRO165LM Linear Motor Stage (continued)

Cable Management (Required)

-CMS0 No external CMS, motor/feedback connector bracket on carriage

-CMS1 External CMS for single axis

-CMS2 External CMS for lower-axis of two-axis PRO XY assembly

-CMS3 External CMS for lower-axis of two-axis (XZ or XT) assembly

-CMS4 External CMS for upper-axis of two-axis PRO XY assembly

-CMS5 External CMS for upper-axis of two-axis (YZ or YT) assembly

-CMS6 External CMS for lower-axis of three-axis (XYZ or XYT) assembly

-CMS7 External CMS for lower-axis of three-axis (XZT) assembly

Lifting Hardware (Optional)

-LF Lifting hardware

NOTE:Lifting option only available on travels 400 mm and greater. Lifting should never by ordered on the upper-axis of an XY set

(only order on lower-axis)

ThermoComp™ (Optional)

-TCMP ThermoComp™ integrated temperature compensation, single or lower axis

NOTE: An A3200 controller must be used with the -TCMP option

Metrology (Required)

-PL0 No Metrology performance plots

-PL1 Metrology, uncalibrated with performance plots

-PL2 Metrology, calibrated with performance plots

Accessories (to be ordered as a separate line item)

ALIGN-NPA Non-precision XY assembly

ALIGN-NPAZ Non-precision XZ or YZ assembly

ALIGN-PA10 XY assembly; 10 arc sec orthogonality. Alignment to within 7 µm orthogonality for short

travel stages.

ALIGN-PA10Z XZ or YZ assembly with L-bracket; 10 arc sec orthogonality. Alignment to within 10 µm

orthogonality for short travel stages.

ALIGN-PA5 XY assembly; 5 arc sec orthogonality. Alignment to within 3 µm orthogonality for short

travel stages.

ALIGN-PA5Z XZ or YZ assembly with L-bracket; 5 arc sec orthogonality. Alignment to within 5 µm

orthogonality for short travel stages.

12 Chapter 1 www.aerotech.com

PRO165LM Hardware Manual Overview

1.1. Environmental Specifications

W A R N I N G : Do not expose this product to environments or conditions outside of the listed

specifications. Exceeding environmental or operating specifications can cause damage to the

equipment.

Table 1-2: Environmental Specifications

Ambient

Temperature

Operating: 10° to 35° C (50° to 95° F)

The optimal operating temperature is 20° C ±2° C (68° F ±4° F). If at any time the

operating temperature deviates from 20° C degradation in performance could occur.

Storage: 0° to 40° C (32° to 104° F) in original shipping packaging

Humidity Operating: 20% to 60% RH

Storage: 10% to 70% RH, non-condensing in original packaging. The stage should be

packaged with desiccant if it is to be stored for an extended time.

Altitude Operating: 0 m to 2,000 m (0 ft to 6,562 ft) above sea level

Contact Aerotech if your specific application involves use above 2,000 m or below sea

level.

Vibration Use the system in a low vibration environment. Excessive floor or acoustical vibration

can affect system performance. Contact Aerotech for information regarding your

specific application.

Protection

Rating

The PRO165LM stages have limited protection against dust, but not water. This

equates to an ingress protection rating of IP50.

Use Indoor use only

1.2. Accuracy and Temperature Effects

The accuracy specification of PRO165LM series stages is measured 25 mm above the table with the stage

in an unloaded condition. The stage is assumed to be fully supported by a mounting surface meeting or

exceeding the specification in Section 2.3.

The accuracy specifications listed in Section 1.3. assume a 20°C operating environment. If the temperature

of the stage differs from 20°C, the encoder scale in the stage will expand or contract at the rate of 3.25 ppm

per °C.

The ThermoComp™ option is a hardware and software solution that uses the functionality of the A3200

controller to mitigate the effects of changing temperature by detecting and compensating for thermal

changes. ThermoComp™ is effective at compensating for both self-heating and environmental temperature

changes.

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Overview PRO165LM Hardware Manual

1.3. Basic Specifications

N O T E : Aerotech continually improves its product offerings; listed options may be superseded at any

time. All drawings and illustrations are for reference only and were complete and accurate as of this

manual’s release. Refer to www.aerotech.com for the most up-to-date information.

Table 1-3: PRO165LM Series Specifications (-0100 to -0300)

PRO165LM -0100 -0150 -0200 -0250 -0300

Travel 100 mm 150 mm 200 mm 250 mm 300 mm

Accuracy

(1)

Standard ±4 μm ±6 μm ±8 μm ±9 μm ±10 μm

Calibrated ±1 μm ±1 μm ±1.5 μm ±1.5 μm ±1.5 μm

Resolution (Minimum

Incremental Motion)

5 nm (-E1 Encoder),

10 nm (-E3 Encoder)

Bidirectional Repeatability

(1)

±0.4 μm ±0.4 μm ±0.5 μm ±0.5 μm ±0.5 μm

Horizontal Straightness

(1)

±2.5 μm ±3 μm ±4 μm ±5 μm ±6 μm

Vertical Straightness

(1)

±2.5 μm ±3 μm ±4 μm ±5 μm ±6 μm

Pitch

29 μrad

(6 arc sec)

29 μrad

(6 arc sec)

40 μrad

(8.2 arc sec)

46 μrad

(9.5 arc sec)

58 μrad

(12 arc sec)

Roll

29 μrad

(6 arc sec)

29 μrad

(6 arc sec)

40 μrad

(8.2 arc sec)

46 μrad

(9.5 arc sec)

58 μrad

(12 arc sec)

Yaw

29 μrad

(6 arc sec)

29 μrad

(6 arc sec)

40 μrad

(8.2 arc sec)

46 μrad

(9.5 arc sec)

58 μrad

(12 arc sec)

Maximum Speed

(2)

2 m/s

Maximum Acceleration

(2)

3 g

Maximum Force, Continuous 77.7 N

Load Capacity

(3)

Horizontal 45 kg

Side 45 kg

Moving Mass 2.5 kg

Stage Mass 8.2 kg 9.1 kg 9.9 kg 10.7 kg 11.6 kg

Material Anodized Aluminum

Mean Time Between Failure 20,000 Hours

1. Certified with the PL1 option.

2. Requires the selection of an appropriate amplifier with sufficient voltage and current.

3. Axis orientation for on-axis loading is listed.

4. Specifications are for single-axis systems measured 25 mm above the tabletop; performance of multi-axis system is payload and

workpoint dependent (consult the Aerotech factory for multi-axis or non-standard applications).

14 Chapter 1 www.aerotech.com

PRO165LM Hardware Manual Overview

Table 1-4: PRO165LM Series Specifications (-0400 to -1000)

PRO165LM -0400 -0500 -0600 -0800 -1000

Travel 400 mm 500 mm 600 mm 800 mm 1000 mm

Accuracy

(1)

Standard ±12 μm ±14 μm ±15.5 μm ±17 μm ±18 μm

Calibrated ±1.5 μm ±2 μm ±2 μm ±2 μm ±2 μm

Resolution (Minimum

Incremental Motion)

5 nm (-E1 Encoder),

10 nm (-E3 Encoder)

Bidirectional Repeatability

(1)

±0.5 μm ±0.5 μm ±0.5 μm ±0.5 μm ±0.5 μm

Horizontal Straightness

(1)

±8 μm ±9 μm ±10 μm ±12 μm ±14 μm

Vertical Straightness

(1)

±8 μm ±9 μm ±10 μm ±12 μm ±14 μm

Pitch

70 μrad

(14.4 arc sec)

80 μrad

(16.5 arc sec)

90 μrad

(18.6 arc sec)

100 μrad

(20.6 arc sec)

120 μrad

(24.7 arc sec)

Roll

70 μrad

(14.4 arc sec)

80 μrad

(16.5 arc sec)

90 μrad

(18.6 arc sec)

100 μrad

(20.6 arc sec)

120 μrad

(24.7 arc sec)

Yaw

70 μrad

(14.4 arc sec)

80 μrad

(16.5 arc sec)

90 μrad

(18.6 arc sec)

100 μrad

(20.6 arc sec)

120 μrad

(24.7 arc sec)

Maximum Speed

(2)

2 m/s

Maximum Acceleration

(2)

3 g

Maximum Force, Continuous 77.7 N

Load Capacity

(3)

Horizontal 45 kg

Side 45 kg

Moving Mass 2.6 kg

Stage Mass 13.3 kg 14.9 kg 16.6 kg 20.0 kg 23.3 kg

Material Anodized Aluminum

Mean Time Between Failure 20,000 Hours

1. Certified with the PL1 option.

2. Requires the selection of an appropriate amplifier with sufficient voltage and current.

3. Axis orientation for on-axis loading is listed.

4. Specifications are for single-axis systems measured 25 mm above the tabletop; performance of multi-axis system is payload and

workpoint dependent (consult the Aerotech factory for multi-axis or non-standard applications).

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Overview PRO165LM Hardware Manual

1.4. Vacuum Operation

Aerotech can specially prepare the PRO165LM for operation in vacuum environments. Aerotech offers two

vacuum preparation options; one for low vacuum (for use in atmospheric pressures to 10

-3

torr) and one for

high vacuum (preparation for environments from 10

-3

to 10

-6

torr). As part of this preparation, attention to

detail during modification, cleaning, and assembly results in products with optimal performance in vacuum

applications.

Special Guidelines

To ensure that the PRO165LM will continue to perform well in the vacuum environment, follow the guidelines

listed below (in addition to standard handling, installation, and lubrication guidelines outlined in this manual).

1. Do not remove the PRO165LM from the sealed bag until it is ready for use.

2. Always handle the PRO165LM in a clean environment and use powder-free polyethylene gloves to

prevent any contaminants from adhering to the surface of the PRO165LM.

3. During installation, use cleaned, vented, stainless steel fasteners when securing the PRO165LM.

4. Reduced air pressure eliminates significant convective heat transfer. This, coupled with the viscous

vacuum-compatible lubricants, could result in excessive motor operating temperatures. Because of

this, consider all continuous torque ratings to be 40 to 60% lower than the value specified for operation

in normal atmospheric environment. Reduce motor usage accordingly.

5. For vacuum applications, the recommended lubricant is a small quantity of Braycote® 602EF grease

or a compatible substitute of equal quality.

6. Baking vacuum components between 100 and 125 °C for 24 to 48 hours significantly reduces

outgassing at initial pump-down to vacuum pressure and evaporates water vapor that impregnates

porous surfaces on the aluminum surfaces and Teflon cables. Aerotech recommends that customers

bake out vacuum systems when first installing them in the vacuum chamber.

16 Chapter 1 www.aerotech.com

PRO165LM Hardware Manual Mechanical Specifications and Installation

Chapter 2: Mechanical Specifications and Installation

W A R N I N G : PRO165LM installation must be in accordance to instructions provided by this

manual and any accompanying documentation. Failure to follow these instructions could result

in injury or damage to the equipment.

2.1. Unpacking and Handling the Stage

D A N G E R / H E A V Y : Refer to Section 1.3. for stage mass specifications.

l Do not attempt to lift heavy loads single handed.

l Lift only by the base. Use lifting hardware if it has been provided (refer to Figure 2-2).

l Do not use the tabletop or cables as lifting points.

For multi-axis assemblies, always lift the system by the lower axis.

W A R N I N G : It is the customer's responsibility to safely and carefully lift and move the

PRO165LM.

l Secure all moving parts before lifting or moving the PRO165LM to a new location.

Unsecured moving parts could shift and cause bodily injury.

l Improper handling could adversely affect the PRO165LM’s performance. Use care when

lifting or moving the PRO165LM.

Carefully remove the PRO165LMfrom its protective shipping container. Gently set the PRO165LM on a

smooth, flat, and clean surface.

Before operating the PRO165LM, it is important to let it stabilize at room temperature for at least 12 hours.

Allowing it to stabilize to room temperature will ensure that all of the alignments, preloads, and tolerances are

the same as they were when tested at Aerotech. Use compressed nitrogen or clean, dry, oil-less air to

remove any dust or debris that has collected during shipping.

Each PRO165LM has a label listing the system part number and serial number. These numbers contain

information necessary for maintaining or updating system hardware and software. Locate this label and

record the information for later reference.

Shipping Brackets

All PRO165LM series stages are packaged with shipping brackets installed to prevent unwanted stage

motion and potential damage from occurring during shipment. The brackets are red anodized aluminum (the

only red anodized pieces Aerotech uses) that attach to the stage base on either side of the stage carriage.

The rubber pads on the shipping brackets compress slightly to gently hold the carriage in place. Two

shipping brackets are used on single axis and upper axis stages in a multi-axis stack, while four shipping

brackets are used on lower axis stages in multi-axis stacks. They must be removed from the stage for the

stage to operate. Retain the brackets for future use.

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Mechanical Specifications and Installation PRO165LM Hardware Manual

Shipping Bracket

NOTE:

[QTY. 2] Red anodized brackets on a single axis

(shown) and on the upper axis of a multi-axis stack.

[QTY. 4] Red anodized brackets on the lower axis

of a multi-axis stack.

Figure 2-1: Shipping Brackets Used on Single Axis Stages or Upper Axes of XY Systems

N O T E : After removing the lifting features or shipping brackets, retain them for future use. Do not

transport or ship the PRO165LM without the lifting features or shipping brackets attached.

18 Chapter 2 www.aerotech.com

PRO165LM Hardware Manual Mechanical Specifications and Installation

Lifting Instructions

This section applies only to stages equipped with lifting features. The lifting features should come attached

to the system and contain (QTY 4) eye bolts and (QTY 4) standoffs (see Figure 2-2). The eyebolts are

threaded into the standoffs and the standoffs are threaded into the stage base. These must be removed for

the stage to operate. Retain the lifting hardware for future use.

If the stage must be lifted in the future, reattach the shipping brackets and the lifting hardware. If the stage is

part of a multi-axis system, attach the lifting features to the lower axis.

Eyebolt [QTY. 4]

Standoff [QTY. 4]

Figure 2-2: PRO165LM Series Stage with Lifting Features

N O T E : After removing the lifting features or shipping brackets, retain them for future use. Do not

transport or ship the PRO165LM without the lifting features or shipping brackets attached.

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Mechanical Specifications and Installation PRO165LM Hardware Manual

2.2. Dimensions

NOTES

Figure 2-3: PRO165LM Dimensions

20 Chapter 2 www.aerotech.com

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Aerotech PRO165LM-0200 Owner's manual

Aerotech PRO165LM-0200 Owner's manual

Aerotech PRO165LM-0200 Owner's manual

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