Nor-Cal Products Intellisys SoftShut TSS-IQD User manual

Brand: Nor-Cal Products

Model: Intellisys SoftShut TSS-IQD

Type: User manual

TSS Owner’s Manual

Tel: 800-824-4166

or 530-842-4457

Fax: 530-842-9130

www.n-c.com

1967 So. Oregon

Yreka, CA 96097 USA

Nor-Cal Products, Inc.

TSS - 0P - LIT 08/11

SoftShutTM฀gate฀valve฀model฀TSS,฀TSS-IQA฀and฀TSS-IQD฀

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INTELLISYS SOFTSHUTTM GATE VALVE MODELS

TSS-OP-LIT 08/11

TABLE 2.3 – STANDARD TSS DIMENSION AND WEIGHT SPECIFICATIONS (REFER TO FIGURE 2.1)

VALVE

SIZE

NOM.

TOTAL

STANDARD

WIDTH

“A”

BONNET

LENGTH

“B”

BODY

LENGTH

“C”

BODY

WIDTH

“D”

TOTAL

L-POS.

WIDTH

“L”

TOTAL

T-POS.

HEIGHT

“T”

WEIGHT

LBS (KG)

DN-63 21/210.6 (269) 5.83 (148) 11.38 (289) 4.37 (111) 12 (306) 15.7 (398) 19 (8.6)

DN-80 3 10.7 (272) 6.30 (160) 12.56 (319) 5.04 (128) 12.1 (308) 16.3 (414) 27 (12.3)

DN-100 4 11.3 (287) 7.17 (182) 14.69 (373) 5.91 (150) 12.4 (316) 18.4 (468) 36 (16.3)

DN-160 6 12.6 (321) 10.08 (256) 19.06 (226) 8.78 (223) 14.7 (372) 21.6 (549) 61 (27.7)

DN-200 8 13.9 (352) 12.40 (315) 23.39 (284) 11.14 (283) 16.4 (415) 25.4 (645) 87 (39.5)

DN-250 10 14.9 (378) 14.41 (366) 27.14 (689) 13.11 (333) 17.3 (440) 28.0 (712) 114 (52)

2.1 - Dimension Call-outs for Standard and IQ-series TSS valves (cross-reference to Tables 2.3 and 2.4)

FLANGE

TYPE

NOM.

BONNET

THICKNESS

“E”

ACTUAL

I.D.

“F”

ISO

FLANGE

O.D.

“G”

CONFLAT

FLANGE

O.D.

“G”

FLANGE-

TO-FLANGE

THICKNESS

“H”

TOTAL

VALVE

HEIGHT

“T”

DN-63 21/22.64 (67) 2.76 (70) 5.35 (136) 4.45 (113) 2.76 (70) 5.5 (140)

DN-80 3 2.68 (68) 3.15 (80) 5.71 (145) CALL 2.54 (65) 5.5 (140)

DN-100 4 2.87 (73) 4.02 (102) 6.93 (176) 5.94 (151) 2.76 (70) 5.7 (144)

DN-160 6 3.07 (78) 6.02 (153) 8.86 (225) 7.99 (203) 3.15 (80) 6.1 (155)

DN-200 8 3.27 (83) 8.39 (213) 11.34 (288) 10.74 (273) 3.15 (80) 6.5 (165)

DN-250 10 3.54 (90) 10.28 (261) 13.78 (350) 12.0 (305) 3.94 (100) 7.1 (179)

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INTELLISYS SOFTSHUTTM GATE VALVE MODELS

TSS-OP-LIT 08/11

4.0 - Theory of Operation

The TSS-series valve is designed for downstream pressure control. As such,

it is one of four important components in a pressure control system. The other

three essential components include a host system computer, a controller mod-

ule (APC, IQA or IQD) and one or two vacuum gauges, such as a Capacitance

Diaphragm Gauge (CDG). Most manufacturers’ vacuum gauges can be used

to provide the vacuum measurement signal, provided they have a voltage out-

put proportional to pressure. Please see Appedix I for summarized connection

information. More complete signal pin-out and communications information

can be found in Nor-Cal Adaptive Pressure Controller Operating Manual, part

# APC-OP-LIT

FIGURE 4.1 – TYPICAL INSTALLATION AND CONFIGURATION OF A

TSS-SERIES CONTROL VALVE (DASHED LINES REPRESENT TSS-IQA

OR IQD INSTALLATION)

Initialization Sequence: Before typical pressure or position control can

begin, the TSS-series valve needs to complete an initialization sequence that

lasts for approximately 30-40 seconds, depending on the size and start-

ing position of the valve. The primary purpose for this operation is for the

controller to determine the fully open and closed points, as well as for certain

motor and position calibration steps to occur. When the valve controller is

first powered on, the amber FAULT light will be illuminated and the OPEN/

CLOSE LEDs will blink in an alternating fashion. To start the initialization

sequence, press OPEN-OPEN-CLOSE-CLOSE on the controller panel. Once

the initialization sequence is complete, the valve will move to the fully open

position and the green OPEN LED will illuminate.

4. TheoryofOperation

The TSS-series valve is designed for downstream pressure control. As such, it is one of four important

components in a pressure control system. The other three essential components include a host system

computer, a controller module (APC, IQA or IQD) and one or two vacuum gauges, such as a Capacitance

Diaphragm Gauge (CDG). Most manufacturers’ vacuum gauges can be used to provide the vacuum

measurement signal, provided they have a voltage output proportional to pressure. Please see Appedix I

for summarized connection information. More complete signal pin-out and communications information

can be found in Nor-Cal Adaptive Pressure Controller Operating Manual, part # APC-OP-LIT

Vacuum

Chamber

APC Controller

Vacuum gauge(s)

Host system with RS-

232, Analog/TTL or

DeviceNet

communications

Nor-Cal TSS-series valve

Pump

Figure4.1–Typicalinstallationandconfiguration ofaTSS-seriescontrolvalve

(dashedlinesrepresentTSS-IQAorIQDinstallation)

Initialization Sequence: Before typical pressure or position control can begin, the TSS-series valve

needs to complete an initialization sequence that lasts for approximately 30-40 seconds, depending on

the size and starting position of the valve. The primary purpose for this operation is for the controller to

determine the fully open and closed points, as well as for certain motor and position calibration steps to

occur. When the valve controller is first powered on, the amber FAULT light will be illuminated and the

OPEN/CLOSE LEDs will blink in an alternating fashion. To start the initialization sequence, press OPEN-

OPEN-CLOSE-CLOSE on the controller panel. Once the initialization sequence is complete, the valve

will move to the fully open position and the green OPEN LED will illuminate.

Normal Operation: After the initialization sequence is complete normal operation of the TSS control

valve is possible. There are two primary modes of operation, a) position control mode and b) pressure

control mode.

In Position control mode the valve will move to any position in its range based on a position set-point

command from the host. The valve will remain in that position until instructed to do otherwise. Position

control mode can be useful in certain cases where pre-determined amount of baffling or throttling is

necessary.

Pressure control mode, on the other hand, is used whenever control to a specific system pressure level is

desired. The host provides the set-point value and the throttle valve strives to achieve that set point as

quickly as possible. During pressure control mode, external perturbations such as flow changes and

plasma events will automatically be compensated for by the APC, IQA or IQD controller module so that

the pressure set-point is maintained.

Part # LIT-TSS-O Contact Nor-Cal Intellisys™ Customer Support

Rev 260805.doc at 800-824-4166 ext. 186 or via the web at http:/www.n-c.com

Nor-Cal

TSS-series

Valve

Normal Operation: After the initialization sequence is complete normal

operation of the TSS control valve is possible. There are two primary modes of

operation, a) position control mode and b) pressure control mode.

In Position control mode the valve will move to any position in its range based

on a position set-point command from the host. The valve will remain in that

position until instructed to do otherwise. Position control mode can be use-

ful in certain cases where pre-determined amount of baffling or throttling is

necessary.

Pressure control mode, on the other hand, is used whenever control to a spe-

cific system pressure level is desired. The host provides the set-point value and

the throttle valve strives to achieve that set point as quickly as possible. During

pressure control mode, external perturbations such as flow changes and

plasma events will automatically be compensated for by the APC, IQA or IQD

controller module so that the pressure set-point is maintained.

Tuning: All Nor-Cal controller modules contain an Adaptive Pressure Control

Algorithm that has been designed to work over a wide range of flow- and

pressure-combinations. There are therefore no “learn modes” to execute, nor

does the user have to set PID parameters. In some instances, however, vacu-

um system design may affect the closed loop pressure control time constants.

As a result, pressure control performance may at times be affected. If satisfac-

tory pressure control cannot be achieved with the Adaptive Pressure Control

Algorithm, please contact Nor-Cal Products Intellisys Customer Support.

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1010

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1111

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1212

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1313

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1414

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INTELLISYS SOFTSHUTTM GATE VALVE MODELS

TSS-OP-LIT 08/11

APPENDIX I - Summary Valve and Controller Connection Information, Conti.

Pin-Out Wiring Diagrams

Switch 1 Switch 2 Switch 3 Switch 4

IQA DIP Switches

IQA Auxiliary Connector

Pin Signal Assignment

IQA Gauge Connector

Pin Signal Assignment

IQA Analog/TTL Connector

Pin Signal Assignment

Figure A-1.2

Figure A-1.3

1515

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1616

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1717

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1818

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INTELLISYS SOFTSHUTTM GATE VALVE MODELS

TSS-OP-LIT 08/11

Throttling Gate Valves with IQA or IQD Control Module

Size

Family Flange Type Flange

Size O-ring Option

250 ISO 63 Viton (leave blank)

300 ISO 80 Perlast G74P (enter PP7)

400 ISO 100

600 ISO 160

800 ISO 200

1000 ISO 250

250 CF or CFM 450

400 CF or CFM 600

600 CF or CFM 800

800 CF or CFM 1000

1000 CF or CFM 1200

Standard Throttling Gate Valves (to be operated by a stand-alone APC-series controller)

APPENDIX III - Valve, Accessories and Cable Assembly Ordering Information

TSS- IQX1

_ _ _ _ _ _

_ _ _ _

Size

Family Flange Type Flange

Size O-ring Option2

250 ISO 63 Viton (leave blank)

300 ISO 80 Perlast G74P (enter PP7)

400 ISO 100

600 ISO 160

800 ISO 200

1000 ISO 250

250 CF or CFM 450

400 CF or CFM 600

600 CF or CFM 800

800 CF or CFM 1000

1000 CF or CFM 1200

TSS

_ _ _ _ _ _

_ _ _ _

2NOTE: Other O-ring materials are available. Call Nor-Cal Intellisys Customer Support for details

1NOTE: “X” refers to the communications mode. D = DeviceNet, A = analog, etc…

1919

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INTELLISYS SOFTSHUTTM GATE VALVE MODELS

TSS-OP-LIT 08/11

Appendix IV - Limited Warranty and Intellectual Property Coverage

Products manufactured by Nor-Cal Products, Inc. (hereinafter referred to as “Nor-Cal”) are warranted against defects in material and workmanship for a

period of twelve (12) months from the date of shipment from Nor-Cal to the buyer. Any modification to the product by the buyer or their agent voids this war-

ranty. Liability under this warranty is expressly, limited to replacement or repair (at Nor-Cal ’s option) of defective parts. Nor-Cal may at any time discharge its

warranty as to any of it products by refunding the purchase price and taking back the products. This warranty applies only to parts manufactured, and labor

provided, by Nor-Cal under valid warranty claims received by Nor-Cal within the applicable warranty period and shall be subject to the terms and conditions

hereof. Expendable items such as tubes, heaters, sources, bellows, etc., by their nature may not function for one year; if such items fail to give reasonable service

for a reasonable period of time, as determined solely by Nor-Cal, they will be repaired or replaced by Nor-Cal at its election. All warranty replacement or repair

of parts shall be limited to equipment malfunctions which, in the sole opinion of Nor-Cal, are due or traceable to defects in original materials or workmanship.

Malfunctions caused by abuse or neglect of the equipment are expressly not covered by this warranty. Nor-Cal expressly disclaims responsibility for any loss or

damage caused by the use of its products other than in accordance with proper operating and safety procedures. Reasonable care must be taken by the user to

avoid hazards. In-warranty repaired or replacement parts are warranted only for the remaining unexpired portion of the original warranty period applicable to

the parts that have been repaired or replaced. After expiration of the applicable warranty period, the buyer shall be charged at Nor-Cal’s then current prices for

parts and labor plus transportation. Except as stated herein, Nor-Cal makes no warranty, expressed or implied (either in fact or by operation of law), statutory or

otherwise: and, except as stated herein, Nor-Cal shall have no liability for special or consequential damages of any kind or from any cause arising out of the sale,

installation, or use of any of its products. Statements made by any person, including representatives of Nor-Cal, which are inconsistent or in conflict with the

terms of this warranty shall not be binding upon Nor-Cal unless reduced to writing and approved by an officer of Nor-Cal. Merchandise may be returned at the

sole discretion of Nor-Cal Products, but not more than 60 days after shipment. A fee may be charged for restocking the item. An RMA number must be obtained

from Nor-Cal before returning any merchandise.

Intellectual Property Coverage

The products described in this manual are covered under U.S. Patent numbers 5,134,349; 5,202,613; 5,321,342; and 6,612,331. Additional patents are pending.