VAT 61234-KEGX Owner's manual

Installation, Operating &

Maintenance Instructions

605429EC Edition 2018-02-09

Butterfly Pressure Control Valve

with EtherCAT interface

Series 612

DN 25-50 mm (I.D. 1” - 2")

This manual is valid for the following product ordering numbers:

Configured with firmware: 600P.1G.27.00

Sample picture

Series

612

2/110

Edition 2018-02-09 605429EC

Imprint

Manufacturer

VAT Vakuumventile AG, CH-9469 Haag, Switzerland

Website:

Phone:

Fax:

Email:

www.vatvalve.com

+41 81 771 61 61

+41 81 771 48 30

[email protected]

Publisher

VAT Vakuumventile AG, CH-9469 Haag, Switzerland

Editor

VAT Vakuumventile AG, CH-9469 Haag, Switzerland

Print

VAT Vakuumventile AG, CH

-

9469 Haag,

Switzerland

Copyright

©

VAT Vakuumventile AG

2018

No part of these instructions may be reproduced in any way (photocopies,

microfilms or any other reproduction processes) nor may it be manipulated with

electronic systems, duplicated or distributed without written permission from VAT.

Offenders are liable to pay damages.

The original VAT firmware and updated state of the art versions of the VAT

firmware are intended for use with VAT products. The VAT firmware contains a

limited, time unlimited user license. The VAT firmware may not be used for

purposes other than those intended nor is it permitted to make copies of the VAT

firmware. In particular, it is strictly forbidden to give copies of the VAT firmware to

other people.

The use of trade names, brand names, trademarks, etc. in these Instructions

does not entitle third parties to consider these names to be unprotected and to

use them freely. This is in accordance with the meaning of the laws and acts

covering brand names and trademarks.

Series 612

605429EC Edition 2018-02-09 3/

110

Contents

1

Description of product ........................................................................ 5

1.1

Identification of product ................................................................................................... 5

1.2

Use of product ................................................................................................................. 5

1.3

Used abbreviations .......................................................................................................... 5

1.4

Related documents.......................................................................................................... 5

1.5

Important information....................................................................................................... 5

1.6

Technical data ................................................................................................................. 6

1.6.1

Control and actuating unit ................................................................................. 6

1.6.2

Valve unit .......................................................................................................... 8

2

Safety ................................................................................................... 9

2.1

Compulsory reading material ........................................................................................... 9

2.2

Danger levels .................................................................................................................. 9

2.3

Personnel qualifications ................................................................................................. 10

2.4

Safety labels .................................................................................................................. 10

3

Design and Function ......................................................................... 11

3.1

Design ........................................................................................................................... 11

3.2

Function ......................................................................................................................... 11

3.2.1

Pressure control system overview and function .............................................. 12

3.2.2

Principle of a pressure control system ............................................................ 13

4

Installation ......................................................................................... 14

4.1

Unpacking ..................................................................................................................... 14

4.2

Installation into the system ............................................................................................ 15

4.2.1

Installation space condition ............................................................................. 16

4.2.2

Connection overview ....................................................................................... 16

4.2.3

Installation procedure ...................................................................................... 17

4.3

Tightening torque .......................................................................................................... 18

4.3.1

Mounting with ISO-KF flanges ........................................................................ 18

4.4

Admissible forces .......................................................................................................... 19

4.4.1

Admissible forces at controller ........................................................................ 20

4.4.2

Requirements to sensor connection ................................................................ 21

4.5

Electrical connection...................................................................................................... 21

4.5.1

Ground connection .......................................................................................... 22

4.5.2

Sensor supply concepts .................................................................................. 23

4.5.3

Power and sensor connection (+24 VDC sensors) ......................................... 24

4.5.4

Power and sensor connection (±15 VDC sensors) without opt. SPS module . 26

4.5.5

Power and sensor connection (±15 VDC sensors) with optional SPS module 28

4.5.6

EtherCAT interface connection ....................................................................... 29

4.5.7

LOGIC I/O ....................................................................................................... 30

4.5.8

Service port connection................................................................................... 31

4.6

Initial operation .............................................................................................................. 32

4.6.1

Setup procedure ............................................................................................. 32

4.6.2

EtherCAT configuration ................................................................................... 33

4.6.3

Valve configuration ......................................................................................... 39

4.6.4

Sensor configuration ....................................................................................... 40

4.6.5

ZERO .............................................................................................................. 42

4.6.6

LEARN (adaptive) ........................................................................................... 43

4.6.7

Pressure control configuration ........................................................................ 45

4.7

Tuning of control performance ....................................................................................... 46

4.7.1

Tuning of control performance with adaptive pressure controller .................... 47

4.7.2

Tuning of control performance with fixed PI pressure controller ..................... 52

4.7.3

Tuning of control performance with soft pump pressure controller .................. 55

4.8

EtherCAT interface commands ..................................................................................... 57

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4.9

EtherCAT interface (Process data – cyclic communication) .......................................... 57

4.9.1

OUTPUT Buffer (Master PLC) ......................................................................... 58

4.9.2

INPUT Buffer (Master PLC) ............................................................................. 61

4.10

EtherCAT interface (Parameter data – acyclic communication) .................................... 66

4.10.1

EtherCAT Object dictionary ............................................................................. 66

4.11

Communication and timing between Master (PLC) and Slave (VAT-Valve) .................. 72

5

Operation ........................................................................................... 73

5.1

Normal operation ........................................................................................................... 73

5.1.1

Local operation ................................................................................................ 74

5.1.2

Remote operation ............................................................................................ 75

5.2

Close valve .................................................................................................................... 76

5.3

Open valve..................................................................................................................... 76

5.4

Position control .............................................................................................................. 76

5.5

Pressure control ............................................................................................................. 77

5.5.1

Pressure control operation with 2 sensors ...................................................... 78

5.6

Display information ........................................................................................................ 79

5.6.1

Power up ......................................................................................................... 79

5.6.2

Operation ........................................................................................................ 80

5.6.3

Fatal error ........................................................................................................ 80

5.6.4

EtherCAT LEDs ............................................................................................... 80

5.6.5

Safety mode .................................................................................................... 82

5.6.6

Service indication ............................................................................................ 82

5.7

Operation during power up ............................................................................................ 82

5.8

Behavior in case of power failure ................................................................................... 83

5.9

Operation under increased temperature ........................................................................ 83

6

Trouble shooting .............................................................................. 84

6.1

Additional EtherCAT warning ......................................................................................... 86

7

Maintenance ...................................................................................... 87

7.1

Maintenance intervals .................................................................................................... 87

7.2

Maintenance procedures ............................................................................................... 88

7.2.1

Replacement of shaft feedthrough seals and valve cleaning .......................... 89

7.2.2

Replacement of Option board ......................................................................... 93

7.2.3

Retrofit / replacement procedure ..................................................................... 95

8

Repairs .............................................................................................. 99

9

Dismounting and Storage .............................................................. 100

9.1

Dismounting ................................................................................................................. 100

9.2

Storage ........................................................................................................................ 101

10

Packaging and Transport ............................................................... 102

10.1

Packaging .................................................................................................................... 102

10.2

Transport ..................................................................................................................... 103

11

Disposal ........................................................................................... 104

12

Spare parts ...................................................................................... 105

12.1

Drawing ....................................................................................................................... 106

12.1.1

ISO-KF valve unit - aluminum blank, without heating .................................... 107

12.1.2

ISO-KF valve unit – stainless steel, without heating ...................................... 107

12.1.3

Control and actuating unit ............................................................................. 108

12.1.4

Accessories ................................................................................................... 108

13

Appendix ......................................................................................... 109

Series 612 DESCRIPTION OF PRODUCT

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110

1 Description of product

1.1 Identification of product

The fabrication number and order number are fixed on the product directly or by means of an

identification plate.



Fabrication number

Order number

1.2 Use of product

This product is a Butterfly control valve for downstream pressure control in vacuum systems.

Use product for clean and dry vacuum applications only. Other applications are only allowed with the

written permission of VAT.

1.3 Used abbreviations

Abbreviation Description

CPA Control Performance Analyzer

PFO Power Failure Option

SFS Sensor Full Scale

SPS Sensor Power Supply

ADC Analog-to-digital converter

1.4 Related documents

•

Product Data Sheet

•

Dimensional Drawing

•

IOMI Heating device (if valve with heater)

1.5 Important information

This symbol points to a very important statement that requires particular attention.

Example

:

Refer to chapter: «Technical data» for detailed information.

made in Switzerland

Fabrication No.:

000

.

. -

.

. -

.

. /

.

A

-

.

DESCRIPTION OF PRODUCT Series

612

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1.6 Technical data

1.6.1 Control and actuating unit

Description

Power input

1)

(α) +24 VDC (±10%) @ 0.5 V pk-pk

max. [connector: POWER]

[

612

. .

-

. .

A

.

-

. . . . /

612

. .

-

. .

G

.

-

. . . . ]

[612 . . - . . C . - . . . . / 612 . . - . . H . - . . . . ]

38 W max. (operation of valve with max. load) without PFO

4)

38 W plus 10 W for PFO

4)

Sensor power supply

2)

(β)

[612 . . - . . A . - . . . . / 612 . . - . . C . - . . . . ]

Input

Output

+24 VDC / 1500 mA max.

±15 VDC (±5%) / 1000 mA max.

[connector: POWER]

[connector: SENSOR]

Sensor power supply

2)

(β)

[612 . . - . . G . - . . . . / 612 . . - . . H . - . . . . ]

Input

Output

+ 24 VDC resp. ± 15 VDC

same as input but:

2.0 A max. at ± 15 VDC

1.5 A max. at + 24 VDC

[connector: POWER]

[connector: SENSOR]

1)

Internal overcurrent protection by a PTC device.

2)

Refer to chapter «Sensor supply concepts» for details.

4)

PFO = Power Failure Option. Refer to chapter «Behavior in case of power failure» for details

Calculation of complete power consumption:

P

tot

= α + β

whereas

β depends on sensor supply concept and sensor power consumption.

Series 612 DESCRIPTION OF PRODUCT

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Control and actuating unit (continuation)

Sensor input

Signal input

ADC resolution

Sampling time

0-10 VDC / Ri>100 kΩ

0.23 mV

10 ms

[connector: SENSOR]

Digital outputs

3)

Input voltage

Input current

70 VDC or 70 V peak max.

0.1 ADC or 0.1 A peak max.

PFO

4)

battery pack

[612 . . - . . C . - . . . . / 612 . . - . . H . - . . . . ]

Charging time

Durability

2 minutes max.

up to 10 years @ 25°C ambient;

refer to «Durability of power fail battery» for details

Ambient temperature 0 °C to +50 °C max. (<35 °C recommended)

Pressure control accuracy 5 mV or 0.1% of setpoint, whichever is greater

Position resolution / position control

capability 20000

Actuating time closing 0.3 s typ.

opening 0.3 s typ.

Utilizable valve torque 2.5 Nm

3)

Refer to chapter «Schematics» for details.

4)

PFO = Power Failure Option. Refer to chapter «Behavior in case of power failure» for details

DESCRIPTION OF PRODUCT Series

612

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1.6.2 Valve unit

Description

Pressure range at 20°C

- Aluminum (612 . . - . A. . - . . . . ) 1 × 10E-8 mbar to 1.2 bar (abs)

- Aluminum hard anodized (612 . . - . H. . - . . . . ) 1 × 10E-6 mbar to 1.2 bar (abs)

- Stainless steel (612 . . - . E. . - . . . . ) 1 × 10E-8 mbar to 1.2 bar (abs)

Leak rate to outside at 20°C

- Aluminum (612 . . - . A. . - . . . . ) 1 × 10E-9 mbar l/s

- Aluminum hard anodized (612 . . - . H. . - . . . . ) 1 × 10E-5 mbar l/s

- Stainless steel (612 . . - . E. . - . . . . ) 1 × 10E-9 mbar l/s

Cycles until first service

2’000’000 (unheated and under clean conditions)

Admissible operating temperature

+10°C to +150°C

while temperature of valve body and valve plate should be

kept on about same level

Mounting position Any

Control unit for ISO-KF version needs support when

mounted on horizontal piping and control unit does not

hang.

Wetted materials

- Body, plate (612 . . - . A. . - . . . . ) Aluminum 3.2315 (AA6082)

- Body, plate (612 . . - . H. . - . . . . ) Aluminum 3.2315 (AA6082) hard anodized

- Body, plate (612 . . - . E. . - . . . . ) Stainless steel 316L (1.4404 or 1.4435 )

- Shaft Stainless steel 316L (1.4404 or 1.4435 )

- Plate screws Stainless steel 316L (A4)

- Shaft seal Viton

®

(standard). Other materials available on request.

Seal materials are declared on dimensional drawing of

specific valve ordering number.

- Slide bearing for shaft iglidur

®

X

Valve size DN 25

1" DN 40

1½" DN 50

2"

Max. differential pressure on plate 1000 mbar 1000 mbar 1000 mbar

Min. controllable conductance (C

min

)

[N2 molecular flow] 0.15 l/s 0.25 l/s 0.3 l/s

Conductance in open position

[N2 molecular flow] 22 l/s 80 l/s 150 l/s

Dimensions Refer to dimensional drawing of specific valve ordering

number (available on request)

Series 612 SAFETY

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2 Safety

2.1 Compulsory reading material

Read this chapter prior to performing any work with or on the product. It contains important information

that is significant for your own personal safety. This chapter must have been read and understood by

all persons who perform any kind of work with or on the product during any stage of its serviceable

life.

NOTICE

Lack of knowledge

Failing to read this manual may result in property damage.

Firstly, read manual.

These Installation, Operating & Maintenance Instructions are an integral part of a

comprehensive documentation belonging to a complete technical system. They must

be stored together with the other documentation and accessible for anybody who is

authorized to work with the system at any time.

2.2 Danger levels

DANGER

High risk

Indicates a hazardous situation which, if not avoided, will result in death or serious

injury.

WARNING

Medium risk

Indicates a hazardous situation which, if not avoided, could result in death or serious

injury.

CAUTION

Low risk

Indicates a hazardous situation which, if not avoided, may result in minor or moderate

injury.

NOTICE

Command

Indicates a hazardous situation which, if not avoided, may result in property damage.

SAFETY Series

612

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2.3 Personnel qualifications

WARNING

Unqualified personnel

Inappropriate handling may cause serious injury or property damage.

Only qualified personnel are allowed to carry out the described work.

2.4 Safety labels

Label Part No. Location on valve

T-9001-156 On protective foil covering of

valve opening

Series 612 DESIGN AND FUNCTION

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3 Design and Function

3.1 Design

1 Integrated controller 4 Double seal

2 Coupling 5 Plate

3 Bearing 6 Valve body

3.2 Function

The valve plate (5) acts as a throttling element and varies the conductance of the valve opening.

The integrated controller (1) calculates the required plate position to achieve the setpoint pressure.

See also principle drawing on chapter: «Connection Overview».

Actuation is performed by a stepper motor. An encoder monitors the position. This principle ensures

very fast and accurate process pressure control even in demanding contaminating processes.

Double seal of

rotary feedthrough

1

2

4

5

6

3

DESIGN AND FUNCTION Series

612

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3.2.1 Pressure control system overview and function

Vacuum pressures are always absolute pressures unless explicitly specified as pressure differences.

Example: Downstream control

1 Valve

2 Process chamber

3 Gas inlet

4 Pressure sensor(s)

5 Sensor cable

6 Controller and actuator

7 Cable to remote control unit

8 Cable to power supply

9 HV Pump

S

eff

Q / p

S

eff

effective pump speed (ls

-1

)

Q Gas flow (mbar)

p Pressure (mbar)

or units used in USA

S

eff

= 12.7 • Q / p

S

eff

effective pump speed (ls

-1

)

Q Gas flow (sccm)

p Pressure (mTorr)

M

3

4

5

7

8

2

1

9

Q

pV

Seff

6

Series 612 DESIGN AND FUNCTION

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3.2.1.1 Way of operation

The controller compares the actual pressure in the process chamber given by the pressure sensor

with the preset pressure. The controller uses the difference between actual and set pressure to

calculate the correct position of the control valve. The controller drives the control valve into the

correct position and the actual pressure again equals the set pressure.

This control operation is performed continuously. Pressure changes in the process chamber due to

leaks, desorption, and gas flow, reaction products, variations in pumping speed etc. are always

corrected at once.

3.2.1.2 Pressure control

In a vacuum system which is pumped and into which gas is admitted at the same time, the pressure

can be controlled in two ways:

1. Downstream control (standard):

The pressure is controlled by changing the conductance of a control valve between pump and

process chamber. This changes the effective pumping speed at the process chamber. Pressure

and gas flow can be independently controlled over a wide range.

2. Upstream control:

The pressure is controlled by changing the gas flow into the process chamber, while the pumping

speed remains constant.

3.2.1.3 Adaptive controller (standard)

A controller adapting itself to changes in pressure, gas flow and pumping speed without any manual

adjustments. This allows for a completely automatic operation of the system.

3.2.2 Principle of a pressure control system

1. Host computer sends

pressure set point

2. Controller reads actual

pressure from sensor

3. Optimizing module sends

new PID parameters

4. Actuator sets new valve

position

Host computer

(Example)

1.

4.

3.

2.

INSTALLATION Series

612

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Edition 2018-02-09 605429EC

4 Installation

WARNING

Unqualified personnel

Inappropriate handling may cause serious injury or property damage.

Only qualified personnel are allowed to carry out the described work.

4.1 Unpacking

NOTICE

Physical overstraining at controller

Inappropriate handling with the valve may cause in damage of controller.

Do not place the valve on the controller.

NOTICE

Physical overstraining at pedestal

Inappropriate handling with the valve may cause in damage of pedestal.

Lift valve at valve body out of transport case.

•

Make sure that the supplied products are in accordance with your order.

•

Inspect the quality of the supplied products visually. If it does not meet your

requirements, please contact VAT immediately.

•

Store the original packaging material. It may be useful if products must be returned

to VAT.

1. Open the transport case and remove inside packing material as far as necessary.

2. Lift the valve carefully and place it on a clean place.

Do not remove protective foils from valve opening

Series 612 INSTALLATION

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4.2 Installation into the system

WARNING

Valve opening

Risk of serious injury.

Human body parts must be kept out of the valve opening and away

from moving parts.

Do not connect the controller to power before the valve is installed complete into the

system.

NOTICE

Sealing surfaces

Sealing surfaces of valve and vacuum system could be damage in case of incorrect

handling.

Only qualified personal are allowed to install the valve into the vacuum system.

NOTICE

Wrong connection

Wrong connection may result in damage of controller or power supply.

Connect all cables exactly as shown in the following descriptions and schematics.

NOTICE

Burned connector pins (spark)

Connector pins or electronic parts could damage, if plugged and unplugged under

power.

Do not plug or unplug connectors under power.

NOTICE

Contamination

Gate and other parts of the valve must be protected from contamination.

Always wear clean room gloves when handling the valve.

Mount valve to a clean system only.

INSTALLATION Series

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Edition 2018-02-09 605429EC

4.2.1 Installation space condition

Install the valve with integrated controller with space for dismantling and air circulation

as shown in figure below.

4.2.2 Connection overview

System:

1 Valve with controller and actuator

2 Process chamber

3 Gas inlet

4 Pressure sensor(s)

5 Sensor cable

6 Cable to remote control unit

7 Cable to power supply

8 HV Pump

70 mm

M

3

4

5

6

7

2

1

8

Series 612 INSTALLATION

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Controller:

4.2.3 Installation procedure

All numbers in brackets refer to chapter: «Connection overview».

1. Remove protective covers from body flanges.

2. Install [1] valve into the vacuum system.

•

Do not tighten the flange screws stronger than indicated under chapter «Tightening

torque».

•

Do not admit higher forces to the valve than indicated under chapter «Admissible

forces».

•

Make sure that enough space is kept free to do preventive maintenance work. The

required space is indicated on the dimensional drawing.

•

Control unit of valves with ISO-KF (612 . . – K . . .) needs support when mounted

on horizontal piping and control unit does not hang.

3. Install the ground connection cable at controller. Refer to chapter «Electrical connection».

4. Install sensor(s) [4] according to the recommendations of the sensor manufacturer and directives

given under chapter «Requirements to sensor connection».

5. Connect sensor cable [5] to sensor(s) and then to valve (connector: SENSOR). Refer to chapter

«Electrical connection» for correct wiring.

6. Connect valve with cable [7] to remote control unit (connector: INTERFACE). Refer to chapter

«EtherCAT connection» for correct wiring.

7. Connect power supply cable [8] to valve (connector: POWER). Refer to chapter «Electrical

connection» for correct wiring.

To provide power to the valve motor pins 4 and 8 must be bridged, otherwise motor

interlock is active and the valve enters the safety mode and is not operative. Refer

also to chapter «Safety mode».

INSTALLATION Series

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Edition 2018-02-09 605429EC

8. This valve may optionally be equipped with a heating device. Connect VAT heating device according

to manual of respective heating device.

9. Perform chapter «Setup procedure» to prepare valve for operation.

Without performing the setup procedure the valve will not be able to do pressure

Control.

4.3 Tightening torque

4.3.1 Mounting with ISO-KF flanges

Tightening torques for ISO-KF flange connections depend on the type of seal which is used. Follow

recommendations of seal manufacturer.

Series 612 INSTALLATION

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4.4 Admissible forces

NOTICE

Force at valve body

Forces from the weight of other components can lead to deformation of the valve body

and to malfunction of the valve.

Do not higher force the valve body as specified.

The following forces are admissible.

Valve size Axial tensile or

compressive force «F

A

» Bending moment

«M»

mm inch

N lb. Nm Lbf.

25 1 70 16 3 3.2

40 1½ 100 22 6 4.5

50 2 150 34 11 8

M F

A

INSTALLATION Series

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4.4.1 Admissible forces at controller

NOTICE

Force at pedestal

In case higher force is applied, the pedestal could be permanently damaged.

– Do not pushing, shocking load, or stressing the valve controller

– Do not deposit anything at valve controller

The admissible force at valve controller in regards to the pedestal (c) shown in table

below.

Admissible force

«F»

Overview

F = Force

a = middle of aluminium part of controller (b / 2)

400 N

a a

F

bc

a a

F

bc

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