Hitachi SEM S-4700 User manual

Brand: Hitachi

Model: SEM S-4700

Type: User manual

SEM Hitachi S-4700 user manual

English Version by Eric, VDEC, Mita Lab, 2015/01/27

Please, leave this manual here. You can find an electronic version in the TakedaCR Wiki:

http://takeda-cr.t.u-tokyo.ac.jp (accessible only from inside Utokyo)

1. Warnings and recommendations

Be sure to read the following remarks:

1.1. This equipment belongs to VAN Partners. Let's handle it with much care,

1.2. Before exchanging the sample, always check that the stage is in its initial position:

X = Y = 12.5mm, Z = 12mm, Tilt = 0˚, θ = 0˚

1.3. This is a simplified manual. It is recommended to read and study the original manual.

2. Terms

2.1. RP = Rotary Pump,

2.2. IP = Ion Pump,

2.3. DP = oil Diffusion Pump,

2.4. S.C. = Specimen Chamber = main chamber,

2.5. S.E.C. = Specimen Exchange Chamber = Load lock chamber.

3. Regular State

Always ON. RP and DP maintain vacuum in the main chamber and IP maintain vacuum in the column.

4. Points to check before starting

If there is an abnormality, contact the person in charge.

On the front panel (below the S.C.), check from left to right:

4.1. EVAC POWER

4.1.1. Switch is ON,

4.1.2. DP/TMP, WATER and AIR PRES switched ON (green lamps ON)

4.2. OBJ. APT. → position HEAT

4.3. ION PUMP VACUUM

4.3.1. Lamps IP1, IP2, and IP3 lighted ON,

4.3.2. Check the IPs vacuum values by rotating the knob. The following should be satisfied:

IP1<2e-7Pa, IP2<2e-6Pa, IP3<7e-5Pa. Fill out the log with the values.

4.4. CHAMBER VACUUM → S.C and S.E.C vacuum are HIGH (green lamps)

4.5. VALVE → GUN switch in position CLOSE. If not, set it to CLOSE

4.6. CHAMBER → switch on S.E.C. (should be protected with a tape)

4.7. If you want to use the cold trap, check that there is more than 1.3L of liquid nitrogen in the Dewar Vessel. If

this is not the case, fetch some nitrogen in CR2.

5. Preparation

5.1. Turn PC on

5.1.1. DISPLAY switch ON (under the PC desk, behind the door),

5.1.2. Windows 95 will startup.

5.1.3. Press CTRL+ALT+DEL.

5.1.4. Launch PC-SEM.exe. There is no password, just click OK,

5.1.5. When the soft start, a dialog showing the X and Y values of the stage appears. Check the real values of X

and Y, enter those values in the box and then click OK,

5.2. Filling liquid nitrogen

If you want to use the cold trap, fill it with 1.3L of liquid nitrogen.

5.3. Set the sample

5.3.1. Select a suitable sample holder,

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5.3.2. Fix tightly the sample on the sample holder with the double-sided conductive tape (don't use too much

tape). If the sample drops into the chamber, the chamber will have to be disassembled,

5.3.3. Fix the height of the sample with the lock screw. The highest part of the sample should not exceed the

level gauge by 0.5mm or it could damage the lens inside the main chamber.

5.3.4. Check that the stage is in its initial position, that is: X=Y=12.5mm, Z=12mm, Tilt=0˚, θ=0˚. If it is not the

case, display the "Stage Control" window and click "Go To Home". Otherwise, set the initial position by

rotating manually the knob.

5.3.5. Check that MV-1 is closed (C side). This is the valve between S.C and S.E.C.

5.3.6. CHAMBER → Press AIR button

5.3.7. Wait for atmospheric pressure and pull the door open by grabbing the door itself, not the rod.

5.3.8. Push a little the rod and screw the specimen holder onto the tip of the rod.

5.3.9. Pull the rod back into the locked position and close the door.

5.3.10. Press the EVAC button to evacuate the exchange chamber.

5.3.11. Wait until the SEC vacuum reads "high" on the front panel.

5.3.12. Turn the handle counterclockwise (O direction) to open MV-1.

5.3.13. While observing inside S.C., push the rod slowly to insert the holder into the stage. If it does not fit

smoothly there is a chance that the stage is not at the initial position. Don't force unreasonably. If it was not

in the initial position, pull out the rod slowly into the locked position, close MV-1 and set the stage in the

initial position.

5.3.14. Turn the rod counterclockwise, and when the screw is completely out, pull out the rod to the locked

position.

5.3.15. Close MV-1.

5.4. Set the sample size

5.4.1. Menu “Operate” → Stage control → press SET button.

5.4.2. Set the sample size (1, 2, 3, 4 inches).

6. Apply high voltage

6.1. On the front panel: VALVE → set GUN switch to AUTO

6.2. Only if "Please Flush!!" flashing display appears, perform the following flashing procedure:

6.2.1. Menu “Setup” → "Column Setup" → set HV: Flushing Intensity to 2 → Close.

6.2.2. Menu “Setup” → "HV Control" → "Flashing" → "Execute".

6.3. In the "HV Control" window, set the acceleration voltage Vacc and the emission current Ie. Higher Vacc leads

to better resolution but more charging. Example: 10kV and 10mA.

6.4. In the "HV Control" window click ON.

6.5. The dialog box to set the sample size appears. Check it and click OK.

7. Adjust the electronic beam

Read the manual for more details.

7.1. Beam Alignment

7.1.1. Select "Alignment" from "Operate"

7.1.2. Click "Beam Align". A circular shape appears on the screen.

7.1.3. Rotate the "STIGMA/ALIGNMENT" knob on the operation panel in order to bring the circular shape in

the center of the screen.

7.1.4. Click "OFF"

7.2. Aperture alignment

7.2.1. Adjust the focus on a particular point on the sample.

7.2.2. Increase the mag up to 5k or 10k and adjust the focus.

7.2.3. Click "Aperture Alignment" in the "Alignment" window. The image will move periodically.

7.2.4. Rotate the "STIGMA/ALIGNMENT" knob on the operation panel in order to make the displacement as

small as possible.

7.2.5. Click "OFF"

7.3. Stigma Alignment X, Y

7.3.1. Click "Stigma Alignment X" in the "Alignment" window. The image will move periodically.

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7.3.2. Rotate the "STIGMA/ALIGNMENT" knob on the operation panel in order to make the displacement as

small as possible.

7.3.3. Click "Stigma Alignment Y" and repeat the same operation.

7.3.4. Click "OFF"

7.4. Low Mag Position

7.4.1. In the mode "High Mag", set the lower magnification, and set a landmark on the sample in the center of

the screen.

7.4.2. Change to "Low Mag" mode. Rotate the "STIGMA/ALIGNMENT" knob on the operation panel in order to

set again the landmark in the center of the screen.

7.4.3. Click "OFF" in the "Alignment" window.

7.4.4. Close the "Alignment" window.

8. Observation

Only the basic operations are mentioned. For other useful functions such as recording stage coordinates or rotating

the image, refer to the manual.

8.1. Select a suitable scan speed. The "Fast" mode is suitable to look for a specific location on the sample, the

"Slow" mode is used to observe or take pictures of the sample with a better image quality. It is advantageous to

refine the focus or stigmatism in the "Reduced Area" mode. Change the mode according to your needs, with the

icons located at the top left of the "Scanning Image" window.

8.2. Look for the place you want to observe by moving the stage with the track ball.

8.3. Rotate the "Tilt" knob to incline the sample. The range is from -5˚ to 45˚.

8.4. Rotate the "θ" knob to rotate the sample. It can rotate by 360˚.

8.5. The magnification can be adjusted with the knob on the operation panel. The switching between "High Mag"

and "Low Mag" is done on the magnification window on the screen.

8.6. The Focus is adjusted with the knob on the operation panel. "Coarse" is for coarse adjustment and "Fine" is

for fine adjustment.

8.7. The Stigmatism is adjusted with the knob on the operation panel. Rotate the knob to have the sharpest

image. Adjust X first, then Y and repeat to get the sharpest image.

8.8. Repeat alternatively Focus and Stigmatism adjustment to get the sharpest image.

8.9. Always set the "Beam Monitor" in the center of the screen to ON. When it turns red, click "Adjust".

8.10. Before taking a picture (digital, not Polaroid), set the picture parameters:

8.10.1. Menu bar > Setup > Image

8.10.2. The parameters to set are for example the number of superposition in case of Fast Mode picture or the

resolution in case of Slow Mode picture.

8.11. The picture brightness is different in Fast and Slow modes. Try to see. After changing mode, adjust the

brightness and contrast with the knob on the operation panel.

8.12. Click on the camera icon at the lower right of the screen to take the picture.

8.13. Click on the floppy disk icon to save the picture. The pictures can be managed with the Image Manager.

8.14. The data can be copied using the secured USB memory card.

9. Take out the sample

9.1. High voltage OFF: click OFF button at the top right side of the "HV Control" window.

9.2. Set the stage to the initial position

Move back the stage to its initial position: X=Y=12.5mm, Z=12mm, Tilt=0˚, θ=0˚. For X and Y, click "Go To Home"

in the "Stage Control" window. For the rest, use the knob.

9.3. Take out the sample

9.3.1. Open MV-1

9.3.2. While observing inside the S.C., insert the rod and screw it into the sample holder. Rotate clockwise.

After screwing the rod, the gap between the rod ant the S.E.C should be about one finger width.

9.3.3. Take out the rod slowly to the locked position.

9.3.4. Close MV-1.

9.3.5. Check that the gas exhaust switch is set to S.E.C.

9.3.6. Check once again that MV-1 is closed (C side) and then press AIR button.

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9.3.7. Wait for atmospheric pressure and pull the door open by grabbing the door itself, not the rod.

9.3.8. Push a little the rod and unscrew the specimen holder from the tip of the rod.

9.3.9. Pull the rod back into the locked position and close the door.

9.3.10. Press the EVAC button to evacuate the exchange chamber.

10. End of use

10.1. On the front panel: VALVE → set GUN switch to CLOSE

10.2. Shut down the computer.

10.2.1. S-4700 software menu bar: File → Exit → OK.

10.2.2. Windows 95 start menu: " Windows

の終了

10.2.3. Select "

コンピュータの電源を切れる状態

" and click "

はい

10.2.4. When the power is off, turn off the DISPLAY switch (O side).

10.3. Fill out the paper log and the iPod log.

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Hitachi SEM S-4700 User manual

Hitachi SEM S-4700 User manual

Hitachi SEM S-4700 User manual

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