Agilent Technologies 6106A User manual

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MiniVac Controller User Manual/ 87-900-049-01 (H)

Notices

No part of this manual may be

reproduced in any form or by any

means (including electronic storage

and retrieval or translation into a

foreign language) without prior

agreement and written consent from

Agilent Technologies, Inc. as governed

by United States and international

copyright laws.

Manual Part Number

Publication Number: 87-900-049-01 (H)

Edition

Edition 01/2012

Printed in ITALY

Agilent Technologies Italia S.p.A.

Vacuum Products Division

Via F.lli Varian, 54

10040 Leinì (TO)

ITALY

Warranty

The material contained in this

document is provided “as is,” and is

subject to being changed, without

notice, in future editions. Further, to

the maximum extent permitted by

applicable law, Agilent disclaims all

warranties, either express or implied,

with regard to this manual and any

information contained herein,

including but not limited to the

implied warranties of merchantability

and fitness for a particular purpose.

Agilent shall not be liable for errors

or for incidental or consequential

damages in connection with the

furnishing, use, or performance of

this document or of any information

contained herein. Should Agilent and

the user have a separate written

agreement with warranty terms

covering the material in this

document that conflict with these

terms, the warranty terms in the

separate agreement shall control.

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The hardware and/or software

described in this document are

furnished under a license and may be

used or copied only in accordance

with the terms of such license.

Restricted Rights Legend

If software is for use in the

performance of a U.S. Government

prime contract or subcontract,

Software is delivered and licensed as

“Commercial computer software” as

defined in DFAR 252.227-7014 (June

1995), or as a “commercial item” as

defined in FAR 2.101(a) or as

“Restricted computer software” as

defined in FAR 52.227-19 (June 1987)

or any equivalent agency regulation or

contract clause. Use, duplication or

disclosure of Software is subject to

Agilent Technologies’ standard

commercial license terms, and non-

DOD Departments and Agencies of the

U.S. Government will receive no

greater than Restricted Rights as

defined in FAR 52.227-19(c)(1-2) (June

1987). U.S. Government users will

receive no greater than Limited Rights

as defined in FAR 52.227-14 (June

1987) or DFAR 252.227-7015 (b)(2)

(November 1995), as applicable in any

technical data.

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Windows and MS Windows are U.S.

registered trademarks of Microsoft

Corporation.

Safety Notices

A CAUTION notice denotes a hazard.

It calls attention to an operating

procedure, practice, or the like that, if

not correctly performed or adhered to,

could result in damage to the product

or loss of important data. Do not

proceed beyond a CAUTION notice

until the indicated conditions are fully

understood and met.

A WARNING notice denotes a

hazard. It calls attention to an

operating procedure, practice, or the

like that, if not correctly performed

or adhered to, could result in

personal injury or death. Do not

proceed beyond a WARNING notice

until the

indicated conditions are

fully understood and met.

WARNING

CAUTION

MiniVac Controller

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MiniVac Controller

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Contents

6/70 MiniVac Controller User Manual / 87-900-049-01 (H)

3

Mode d’emploi 29

Indications Generales 30

Preparation pour l'installation 31

Installation 32

Utilisation 33

Procedures d'utilisation 36

Entretien 37

Mise au rebut 38

4

Instructions for Use 39

General Information 40

Storage 41

Preparation for Installation 41

Installation 42

Use 43

Use Procedure 46

Maintenance 47

Disposal 48

5

Technical Information 49

Minivac Description 50

Controller Outline 56

Installation 56

Operation 61

Contents

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Maintenance 63

Controller Spares and Accessories 64

Controller to Vacion Pump Cables 64

Contents

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MiniVac Controller User Manual

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4

Instructions for Use

General Information 40

Storage 41

Preparation for Installation 41

Installation 42

Use 43

Controller Controls, Indicators and Connectors 43

Use Procedure 46

Interlock 46

Start-Up of the Pump 46

Controller Start-up 46

Starting the Pump 47

Pump Shutdown 47

Maintenance 47

Disposal 48

Original Instructions

4

Instructions for Use

General Information

40/70 MiniVac Controller User Manual / 87-900-049-01 (H)

General Information

This equipment is destined for use by professionals. The user should

read this instruction manual and any other additional information

supplied by Agilent before operating the equipment. Agilent will not

be held responsible for any events occurring due to non-compliance,

even partial, with these instructions, improper use by untrained

persons, non-authorised interference with the equipment or any

action contrary to that provided for by specific national standards.

The MiniVac is a high voltage and low power feeder used to feed the

ionic pumps.

The following paragraphs contain all the information necessary to

guarantee the safety of the operator when using the equipment.

Detailed information is supplied in the section "Technical

Information".

This manual uses the following standard protocol:

CAUTION!

The caution messages are displayed before procedures which, if not followed,

could cause damage to the equipment.

WARNING!

The warning messages are for attracting the attention of the operator to a

particular procedure or practice which, if not followed correctly, could lead

to serious injury.

NOTE

The notes contain important information taken from the text.

Instructions for Use

Storage

4

MiniVac Controller User Manual / 87-900-049-01 (H) 41/70

Storage

When transporting and storing the MiniVacs, the following

environmental requirements should be satisfied:

 temperature: from -20 °C to + 70 °C

 relative humidity: 0 – 95 % (without condensation)

Preparation for Installation

The controller is supplied in a special protective packing. If this

shows signs of damage which may have occurred during transport,

contact your local sales office. When unpacking, ensure that the

module is not dropped or subjected to any form of impact. Do not

dispose of the packing materials in an unauthorised manner. The

material is 100 % recyclable and complies with EEC Directive 85/399.

Figure 1 Controller Packing

4

Instructions for Use

Installation

42/70 MiniVac Controller User Manual / 87-900-049-01 (H)

Each controller is factory set for a specific power supply:

 Model 929-0190 KINGS type High voltage connector

(120 Vac, 50 – 60 Hz)

 Model 929-0191 FISCHER type High voltage connector

(120 Vac, 50 – 60 Hz)

 Model 929-0290 FISCHER type High voltage connector

(220 Vac, 50 – 60 Hz)

 Model 929-0291 KINGS type High voltage connector

(220 Vac, 50 – 60 Hz)

Installation

WARNING!

The controller is equipped with a 3-wire power cord and plug

(internationally approved) for user's safety. Use this power cord and plug in

conjunction with a properly grounded power socket to avoid electrical shock.

High voltage developed in the controller can cause severe injury or death.

Before servicing the unit, disconnect the input power cable.

NOTE

The controller must be installed inside a rack module, but it must be positioned

so that free air can flow through the holes. Do not install or use the controller in

an environment exposed to atmospheric agents (rain, snow, ice), dust,

aggressive gases, or in explosive environments or those with a high fire risk.

Instructions for Use

Use

4

MiniVac Controller User Manual / 87-900-049-01 (H) 43/70

During operation, the following environmental conditions must be

respected:

 temperature: from 0 °C to +45 °C

 relative humidity: 0 – 95 % (without condensation)

To connect the controller to the pump use the specific cable supplied

with the controller.

See the section "Technical Information" for detailed information

about the above mentioned and the other connections, and about the

options installation.

Use

This paragraph describes the fundamental operating procedures.

Detailed information and operating procedures that involve optional

connections or options are supplied in the paragraph "USE" of the

section "Technical Information".

Make all vacuum manifold and electrical connections and refer to the

pump instruction manual prior to operating the controller.

Controller Controls, Indicators and Connectors

The following paragraph illustrates either the front and rear panel

with its interconnections.

More details are contained in the appendix "Technical Information".

4

Instructions for Use

Use

44/70 MiniVac Controller User Manual / 87-900-049-01 (H)

Figure 2 Controller Front Panel

1 High Load LED, comes on when the current absorbed by the pump

reaches 12 mA

2 Output selected polarity LED

3

Output voltage scale (KV)

4 Main ON/OFF switch

5 Voltage/current LED scale

6 H.V. LED ON

7 Output connector of the sSignal proportional to the current

1 V= 1 mA log

8 Current scale (mA)

Mini Vac

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Instructions for Use

Use

4

MiniVac Controller User Manual / 87-900-049-01 (H) 45/70

Figure 3 Controller Rear Panel

1 Input module for the controller power supply. It includes the protection

fuse, the voltage changer, the power supply plug, and the EMC filter (not

included into the plug/voltage switch assembly).

2 High voltage output connector for the pump (KINGS or FISCHER type)

power supply.

3 Input/output signal connector for fittings

4 Controller cable Interlock.

5 Plug Interlock.

NOTE

The unit is provided with a Line Voltage selector. Refer to the "INSTALLATION"

paragraph of "TECHNICAL INFORMATION" section for details about the Line

Voltage selection operation.

1

2

3

4

5

4

Instructions for Use

Use Procedure

46/70 MiniVac Controller User Manual / 87-900-049-01 (H)

Use Procedure

Interlock

The Interlock is a safety device designed by Agilent to protect the

operator against serious injury caused by the high voltage present on

the pump power connector.

The controller is intended to be used with a HV cable furnished with

Interlock.

If the customer does not wish to use the HV cable with interlock for

particular application requirements, the interlock cable of the

controller (4) is available.

Start-Up of the Pump

To start the pump:

1. Connect the pump to the controller using the specific HV cable.

2. Connect the Interlock of the HV cable to the plug (5); if the HV

cable is without the interlock cable, connect the interlock cable of

the controller (4) to the plug (5).

3. Switch on the controller.

Controller Start-up

To start-up the controller, turn the main switch to ON, after plugging

the power cable into a suitable power source.

Instructions for Use

Maintenance

4

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Starting the Pump

The pump is activated only if the controller is powered on and the

pump itself is connected to the output connector. For further

information refer to the “Technical Information” section.

Pump Shutdown

To shutdown the pump, turn the main switch placed on the front

panel to OFF.

Maintenance

The MiniVac series controllers do not require any maintenance

interventions. Any intervention must be performed by authorised

personnel only.

When a fault has occurred it is possible to use the Agilent repair

service or the “Agilent advance exchange service”, that allows to

obtain a regenerated controller replacing the faulty one.

WARNING!

Before carrying out any work on the controller, disconnect it from the supply.

NOTE

Pins 3 and 7 on the loopback plug provided with the unit are short circuited

(Remote ON/OFF). This loopback plug must be fitted to power on the HV unless

a Remote/Interlock contact is connected.

4

Instructions for Use

Disposal

48/70 MiniVac Controller User Manual / 87-900-049-01 (H)

NOTE

The unit is factory set with a negative output polarity. Refer to the section

“Output Polarity Selection” for instructions on how to change the output polarity.

If a pump is to be scrapped, it must be disposed of in accordance

with the specific national standards.

Disposal

Meaning of the "WEEE" logo found in labels

The following symbol is applied in accordance with the EC WEEE

(Waste Electrical and Electronic Equipment) Directive.

This symbol (valid only in countries of the European Community)

indicates that the product it applies to must NOT be disposed of

together with ordinary domestic or industrial waste but must be sent

to a differentiated waste collection system.

The end user is therefore invited to contact the supplier of the device,

whether the Parent Company or a retailer, to initiate the collection

and disposal process after checking the contractual terms and

conditions of sale.

MiniVac Controller User Manual

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5

Technical

Information

Minivac Description

50

Controller Spec

ifications 54

Controller Outline

56

Installation

56

Line Voltage Change Over 57

Output Polarity Selection 58

Input/Output Interconnections 59

Pump Connection 60

Operati

on 61

Pressure Determination 62

Power Failure 62

Remote Control Mode Operation 62

Maintenance

63

Troubleshooting 63

Controller Spares and Accessories 64

Controller to Vacion Pump Cables 64

Original Instructions

5

Technical Information

Minivac Description

50/70 MiniVac Controller User Manual / 87-900-049-01 (H)

Minivac Description

The MiniVac controller is a quarter rack solid state power supply

with self protection features, which generates high voltage using high

frequency switching technology.

The MiniVac ion pump controller is designed to operate any type of

ion pumps: Diode, Differential Diode, Triode and StarCell.

The MiniVac controller is a very compact and light unit capable of

powering any size of pump at different operating pressure.

Small pumps (up to 8 l/s) can be operated at any pressure up to

1 x 10

-3

mbar.

Medium pumps (20 l/s to 60 l/s) can be operated at any pressure up

to 1 x 10

-5

mbar/Torr (continuous operation).

Large pumps (120 l/s to 400 l/s) can be operated at any pressure up

to 2 x 10

-6

mbar/Torr (continuous operation).

Medium/larger ion pumps must first be started with an appropriate

control unit and pumped to a sufficiently low pressure where the

current demand is below 8 mA.

The MiniVac controller is designed to withstand continuous

operation at short circuit condition, without any damage to the ion

pump or to the controller itself.

The MiniVac controller is available in four versions, which differ in

the factory-set input voltage and in the high voltage output connector

type.

 Model 929-0190 KINGS type High voltage connector

(120 Vac, 50/60 Hz)

 Model 929-0191 FISCHER type High voltage connector

(120 Vac, 50/60 Hz)

 Model 929-0290 FISCHER type High voltage connector

(220 Vac, 50/60 Hz)

 Model 929-0291 KINGS type High voltage connector

(220 Vac, 50/60 Hz)

A voltage change over allows to select different operating voltages.

Technical Information

Minivac Description

5

MiniVac Controller User Manual / 87-900-049-01 (H) 51/70

Figure 4 MiniVac Controllers

5

Technical Information

Minivac Description

52/70 MiniVac Controller User Manual / 87-900-049-01 (H)

The MiniVac controller front panel controls are shown in the

following figure.7

Figure 5 MiniVac Front Panel Controls

1

High Load LED lights up when the pump current is higher than 12 mA.

2

Output polarity LEDs selection indicators.

3 Voltage output scale (kV).

4 Controller power ON/OFF switch.

5

Current/voltage LED's bar graph indicator.

6 H. V. ON LED.

7 Recorder output connector.

8 Pump current scale (mA).

Mini Vac

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