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MiniVac Controller User Manual/ 87-900-049-01 (H)
Notices
© Agilent Technologies, Inc. 2012
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reproduced in any form or by any
means (including electronic storage
and retrieval or translation into a
foreign language) without prior
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Agilent Technologies, Inc. as governed
by United States and international
copyright laws.
Manual Part Number
Publication Number: 87-900-049-01 (H)
Edition
Edition 01/2012
Printed in ITALY
Agilent Technologies Italia S.p.A.
Vacuum Products Division
Via F.lli Varian, 54
10040 Leinì (TO)
ITALY
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subject to being changed, without
notice, in future editions. Further, to
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applicable law, Agilent disclaims all
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with regard to this manual and any
information contained herein,
including but not limited to the
implied warranties of merchantability
and fitness for a particular purpose.
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or for incidental or consequential
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document that conflict with these
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described in this document are
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If software is for use in the
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Software is delivered and licensed as
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greater than Restricted Rights as
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receive no greater than Limited Rights
as defined in FAR 52.227-14 (June
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registered trademarks of Microsoft
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Safety Notices
A CAUTION notice denotes a hazard.
It calls attention to an operating
procedure, practice, or the like that, if
not correctly performed or adhered to,
could result in damage to the product
or loss of important data. Do not
proceed beyond a CAUTION notice
until the indicated conditions are fully
understood and met.
A WARNING notice denotes a
hazard. It calls attention to an
operating procedure, practice, or the
like that, if not correctly performed
or adhered to, could result in
personal injury or death. Do not
proceed beyond a WARNING notice
until the
indicated conditions are
fully understood and met.
WARNING
CAUTION
MiniVac Controller
MiniVac Controller User Manual / 87-900-049-01 (H) 3/70
MiniVac Controller
MiniVac Controller
4/70 MiniVac Controller User Manual / 87-900-049-01 (H)
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Contents
6/70 MiniVac Controller User Manual / 87-900-049-01 (H)
3
Mode d’emploi 29
Indications Generales 30
Preparation pour l'installation 31
Installation 32
Utilisation 33
Procedures d'utilisation 36
Entretien 37
Mise au rebut 38
4
Instructions for Use 39
General Information 40
Storage 41
Preparation for Installation 41
Installation 42
Use 43
Use Procedure 46
Maintenance 47
Disposal 48
5
Technical Information 49
Minivac Description 50
Controller Outline 56
Installation 56
Operation 61
Contents
8/70 MiniVac Controller User Manual / 87-900-049-01 (H)
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MiniVac Controller User Manual
39/70
4
Instructions for Use
General Information 40
Storage 41
Preparation for Installation 41
Installation 42
Use 43
Controller Controls, Indicators and Connectors 43
Use Procedure 46
Interlock 46
Start-Up of the Pump 46
Controller Start-up 46
Starting the Pump 47
Pump Shutdown 47
Maintenance 47
Disposal 48
Original Instructions
4
Instructions for Use
General Information
40/70 MiniVac Controller User Manual / 87-900-049-01 (H)
General Information
This equipment is destined for use by professionals. The user should
read this instruction manual and any other additional information
supplied by Agilent before operating the equipment. Agilent will not
be held responsible for any events occurring due to non-compliance,
even partial, with these instructions, improper use by untrained
persons, non-authorised interference with the equipment or any
action contrary to that provided for by specific national standards.
The MiniVac is a high voltage and low power feeder used to feed the
ionic pumps.
The following paragraphs contain all the information necessary to
guarantee the safety of the operator when using the equipment.
Detailed information is supplied in the section "Technical
Information".
This manual uses the following standard protocol:
CAUTION!
The caution messages are displayed before procedures which, if not followed,
could cause damage to the equipment.
WARNING!
The warning messages are for attracting the attention of the operator to a
particular procedure or practice which, if not followed correctly, could lead
to serious injury.
NOTE
The notes contain important information taken from the text.
Instructions for Use
Storage
4
MiniVac Controller User Manual / 87-900-049-01 (H) 41/70
Storage
When transporting and storing the MiniVacs, the following
environmental requirements should be satisfied:
temperature: from -20 °C to + 70 °C
relative humidity: 0 – 95 % (without condensation)
Preparation for Installation
The controller is supplied in a special protective packing. If this
shows signs of damage which may have occurred during transport,
contact your local sales office. When unpacking, ensure that the
module is not dropped or subjected to any form of impact. Do not
dispose of the packing materials in an unauthorised manner. The
material is 100 % recyclable and complies with EEC Directive 85/399.
Figure 1 Controller Packing
4
Instructions for Use
Installation
42/70 MiniVac Controller User Manual / 87-900-049-01 (H)
Each controller is factory set for a specific power supply:
Model 929-0190 KINGS type High voltage connector
(120 Vac, 50 – 60 Hz)
Model 929-0191 FISCHER type High voltage connector
(120 Vac, 50 – 60 Hz)
Model 929-0290 FISCHER type High voltage connector
(220 Vac, 50 – 60 Hz)
Model 929-0291 KINGS type High voltage connector
(220 Vac, 50 – 60 Hz)
Installation
WARNING!
The controller is equipped with a 3-wire power cord and plug
(internationally approved) for user's safety. Use this power cord and plug in
conjunction with a properly grounded power socket to avoid electrical shock.
High voltage developed in the controller can cause severe injury or death.
Before servicing the unit, disconnect the input power cable.
NOTE
The controller must be installed inside a rack module, but it must be positioned
so that free air can flow through the holes. Do not install or use the controller in
an environment exposed to atmospheric agents (rain, snow, ice), dust,
aggressive gases, or in explosive environments or those with a high fire risk.
Instructions for Use
Use
4
MiniVac Controller User Manual / 87-900-049-01 (H) 43/70
During operation, the following environmental conditions must be
respected:
temperature: from 0 °C to +45 °C
relative humidity: 0 – 95 % (without condensation)
To connect the controller to the pump use the specific cable supplied
with the controller.
See the section "Technical Information" for detailed information
about the above mentioned and the other connections, and about the
options installation.
Use
This paragraph describes the fundamental operating procedures.
Detailed information and operating procedures that involve optional
connections or options are supplied in the paragraph "USE" of the
section "Technical Information".
Make all vacuum manifold and electrical connections and refer to the
pump instruction manual prior to operating the controller.
Controller Controls, Indicators and Connectors
The following paragraph illustrates either the front and rear panel
with its interconnections.
More details are contained in the appendix "Technical Information".
4
Instructions for Use
Use
44/70 MiniVac Controller User Manual / 87-900-049-01 (H)
Figure 2 Controller Front Panel
1 High Load LED, comes on when the current absorbed by the pump
reaches 12 mA
2 Output selected polarity LED
3
Output voltage scale (KV)
4 Main ON/OFF switch
5 Voltage/current LED scale
6 H.V. LED ON
7 Output connector of the sSignal proportional to the current
1 V= 1 mA log
8 Current scale (mA)
Mini Vac
1
2
3
4
5
6
7
8
Instructions for Use
Use
4
MiniVac Controller User Manual / 87-900-049-01 (H) 45/70
Figure 3 Controller Rear Panel
1 Input module for the controller power supply. It includes the protection
fuse, the voltage changer, the power supply plug, and the EMC filter (not
included into the plug/voltage switch assembly).
2 High voltage output connector for the pump (KINGS or FISCHER type)
power supply.
3 Input/output signal connector for fittings
4 Controller cable Interlock.
5 Plug Interlock.
NOTE
The unit is provided with a Line Voltage selector. Refer to the "INSTALLATION"
paragraph of "TECHNICAL INFORMATION" section for details about the Line
Voltage selection operation.
1
2
3
4
5
4
Instructions for Use
Use Procedure
46/70 MiniVac Controller User Manual / 87-900-049-01 (H)
Use Procedure
Interlock
The Interlock is a safety device designed by Agilent to protect the
operator against serious injury caused by the high voltage present on
the pump power connector.
The controller is intended to be used with a HV cable furnished with
Interlock.
If the customer does not wish to use the HV cable with interlock for
particular application requirements, the interlock cable of the
controller (4) is available.
Start-Up of the Pump
To start the pump:
1. Connect the pump to the controller using the specific HV cable.
2. Connect the Interlock of the HV cable to the plug (5); if the HV
cable is without the interlock cable, connect the interlock cable of
the controller (4) to the plug (5).
3. Switch on the controller.
Controller Start-up
To start-up the controller, turn the main switch to ON, after plugging
the power cable into a suitable power source.
Instructions for Use
Maintenance
4
MiniVac Controller User Manual / 87-900-049-01 (H) 47/70
Starting the Pump
The pump is activated only if the controller is powered on and the
pump itself is connected to the output connector. For further
information refer to the “Technical Information” section.
Pump Shutdown
To shutdown the pump, turn the main switch placed on the front
panel to OFF.
Maintenance
The MiniVac series controllers do not require any maintenance
interventions. Any intervention must be performed by authorised
personnel only.
When a fault has occurred it is possible to use the Agilent repair
service or the “Agilent advance exchange service”, that allows to
obtain a regenerated controller replacing the faulty one.
WARNING!
Before carrying out any work on the controller, disconnect it from the supply.
NOTE
Pins 3 and 7 on the loopback plug provided with the unit are short circuited
(Remote ON/OFF). This loopback plug must be fitted to power on the HV unless
a Remote/Interlock contact is connected.
4
Instructions for Use
Disposal
48/70 MiniVac Controller User Manual / 87-900-049-01 (H)
NOTE
The unit is factory set with a negative output polarity. Refer to the section
“Output Polarity Selection” for instructions on how to change the output polarity.
If a pump is to be scrapped, it must be disposed of in accordance
with the specific national standards.
Disposal
Meaning of the "WEEE" logo found in labels
The following symbol is applied in accordance with the EC WEEE
(Waste Electrical and Electronic Equipment) Directive.
This symbol (valid only in countries of the European Community)
indicates that the product it applies to must NOT be disposed of
together with ordinary domestic or industrial waste but must be sent
to a differentiated waste collection system.
The end user is therefore invited to contact the supplier of the device,
whether the Parent Company or a retailer, to initiate the collection
and disposal process after checking the contractual terms and
conditions of sale.
MiniVac Controller User Manual
49/70
5
Technical
Information
Minivac Description
50
Controller Spec
ifications 54
Controller Outline
56
Installation
56
Line Voltage Change Over 57
Output Polarity Selection 58
Input/Output Interconnections 59
Pump Connection 60
Operati
on 61
Pressure Determination 62
Power Failure 62
Remote Control Mode Operation 62
Maintenance
63
Troubleshooting 63
Controller Spares and Accessories 64
Controller to Vacion Pump Cables 64
Original Instructions
5
Technical Information
Minivac Description
50/70 MiniVac Controller User Manual / 87-900-049-01 (H)
Minivac Description
The MiniVac controller is a quarter rack solid state power supply
with self protection features, which generates high voltage using high
frequency switching technology.
The MiniVac ion pump controller is designed to operate any type of
ion pumps: Diode, Differential Diode, Triode and StarCell.
The MiniVac controller is a very compact and light unit capable of
powering any size of pump at different operating pressure.
Small pumps (up to 8 l/s) can be operated at any pressure up to
1 x 10
-3
mbar.
Medium pumps (20 l/s to 60 l/s) can be operated at any pressure up
to 1 x 10
-5
mbar/Torr (continuous operation).
Large pumps (120 l/s to 400 l/s) can be operated at any pressure up
to 2 x 10
-6
mbar/Torr (continuous operation).
Medium/larger ion pumps must first be started with an appropriate
control unit and pumped to a sufficiently low pressure where the
current demand is below 8 mA.
The MiniVac controller is designed to withstand continuous
operation at short circuit condition, without any damage to the ion
pump or to the controller itself.
The MiniVac controller is available in four versions, which differ in
the factory-set input voltage and in the high voltage output connector
type.
Model 929-0190 KINGS type High voltage connector
(120 Vac, 50/60 Hz)
Model 929-0191 FISCHER type High voltage connector
(120 Vac, 50/60 Hz)
Model 929-0290 FISCHER type High voltage connector
(220 Vac, 50/60 Hz)
Model 929-0291 KINGS type High voltage connector
(220 Vac, 50/60 Hz)
A voltage change over allows to select different operating voltages.
Technical Information
Minivac Description
5
MiniVac Controller User Manual / 87-900-049-01 (H) 51/70
Figure 4 MiniVac Controllers
5
Technical Information
Minivac Description
52/70 MiniVac Controller User Manual / 87-900-049-01 (H)
The MiniVac controller front panel controls are shown in the
following figure.7
Figure 5 MiniVac Front Panel Controls
1
High Load LED lights up when the pump current is higher than 12 mA.
2
Output polarity LEDs selection indicators.
3 Voltage output scale (kV).
4 Controller power ON/OFF switch.
5
Current/voltage LED's bar graph indicator.
6 H. V. ON LED.
7 Recorder output connector.
8 Pump current scale (mA).
Mini Vac
1
2
3
4
5
6
7
8
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