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PPS-28 series

Micronix PPS-28 series Reference guide

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S e r i e s
Reference Manual
Precision Piezo Stage
(Open and Closed Loop Versions)
PPS-28
PPS-28
Piezo Positioner Stage
Reference Manual
Rev 3.04
MICRONIX USA, LLC
Tel: 949-480-0538
Fax: 949-480-0538
Email: [email protected]
http://micronixusa.com
PPS-28 Piezo Positioner Stage
Rev: 3.04
MICRONIX USA,LLC
www.micronixusa.com
1
Reference Manual
Table of Contents
1. Introduction 3
1.1 Product Description ................................................................................................................................................. 3
1.2 Recommended Controllers ...................................................................................................................................... 4
1.3 Technical Data ......................................................................................................................................................... 4
1.4 Load Characteristics ................................................................................................................................................ 4
2. Model configurations 5
2.1 PPS-28 Order Numbers ............................................................................................................................................ 5
3. Preparing to Install the PPS-28 6
3.1 Installation Preparation ........................................................................................................................................... 6
3.2 Package Contents .................................................................................................................................................... 6
4. Installing the PPS-28 7
4.1 PPS-28 Installation ................................................................................................................................................... 7
4.1.1 General Mounting ........................................................................................................................................... 7
4.1.2 X-Y Mounting ................................................................................................................................................... 8
5. Connecting the PPS-28 9
5.1 Atmospheric Environments ..................................................................................................................................... 9
5.1.1 Open Loop Installation & Wiring Diagram ....................................................................................................... 9
5.1.2 Closed Loop/Encoder Installation & Wiring Diagram ...................................................................................... 9
5.2 Vacuum Environments .......................................................................................................................................... 11
5.2.1 Handling and Preparation.............................................................................................................................. 11
5.2.2 Open loop Installation & Wiring Diagram ..................................................................................................... 11
5.2.3 Closed Loop/Encoder Installation & Wiring Diagram .................................................................................... 11
6. Dimensions 13
6.1 PPS-28 20mm with Digital Encoder. ...................................................................................................................... 13
6.2 PPS-28 20mm with Analog Encoder ...................................................................................................................... 14
7. Stacking Configurations 14
7.1 Configuration Examples (Additional configurations available upon request)....................................................... 14
8. Supplementary Information 15
8.1 Maintenance .......................................................................................................................................................... 15
8.2 Units and Conventions .......................................................................................................................................... 15
9. Appendix 16
9.1 Electrical Connection ............................................................................................................................................. 16
9.1.1 DB-9 Male Motor Connector ......................................................................................................................... 16
9.1.2 Encoder Pinout .............................................................................................................................................. 16
PPS-28 Piezo Positioner Stage
Rev: 3.04
MICRONIX USA,LLC
www.micronixusa.com
2
Reference Manual
9.2 2 Phase Piezo Motor Wiring Diagram.................................................................................................................... 16
9.3 Open Loop Vacuum Wiring Diagram ..................................................................................................................... 17
9.3.1 Straight Through 9-Pin Feed Through ........................................................................................................... 17
A.4 26BUsing the Digital Encoder Module .................................................................................................................. 18
A.4.1 36BEncoder Module Pin-out ......................................................................................................................... 18
9.4.2 Operating and Electrical Specifications ......................................................................................................... 19
9.4.3 Output Signals & Signal Termination for A quad B, Index and limits ............................................................ 19
9.4.4 Resolution ...................................................................................................................................................... 19
9.4.5 Digital Encoder Wiring Diagram .................................................................................................................... 20
9.4.6 Straight Through 25-Pin Feed Through ......................................................................................................... 20
9.5 Using an Analog Encoder ....................................................................................................................................... 21
9.5.1 Analog Encoder Overview ............................................................................................................................. 21
9.5.2 Encoder Pin-out ............................................................................................................................................. 21
9.5.3 Operating and Electrical Specifications ......................................................................................................... 21
9.5.4 Analog Output (Pins 1,2,6, and 7).................................................................................................................. 21
9.5.5 Index Window (Pins 3) ................................................................................................................................... 21
9.5.6 Resolution ...................................................................................................................................................... 22
9.5.7 Analog Encoder Wiring Diagram ................................................................................................................... 22
9.5.8 Straight Through 15-Pin Feed Through ......................................................................................................... 23
PPS-28 Piezo Positioner Stage
Rev: 3.04
MICRONIX USA,LLC
www.micronixusa.com
3
Reference Manual
1. Introduction
1.1 Product Description
The PPS-28 is a high-precision, long travel linear piezo stage. Miniature cross-roller
bearings assure high stiffness and guiding accuracy for loads up to 50N (Horizontal
orientation). It utilizes our patent-pending multi-phase piezo motor resulting in high
speed (>2mm/s) and high blocking force (>2N). The PPS-28 is available in travel
lengths of up to 102mm in open loop or with an external encoder, and an optional
linear encoder provides nanometer repeatability. Vacuum, Ultra High Vacuum
(10
-9
mbar) and/or Cryo (<4 Kelvin) compatible versions are available.
Features:
▪ Travel ranges of 26mm, 51mm, 76mm, and 102mm
▪ Load capacity up to 5kg
▪ Optional linear encoder
PPS-28 20mm Open Loop
Or Internal 10nm Encoder
(Shown in center position)
Carriage
Base
PPS-28 20mm with external 2nm encoder
(Shown in center position)
Scale Bracket
Encoder Head
Encoder Scale
Encoder Bracket
PPS-28 20mm with external Analog encoder
(Shown in center position)
PPS-28 Piezo Positioner Stage
Rev: 3.04
MICRONIX USA,LLC
www.micronixusa.com
4
Reference Manual
1.2 Recommended Controllers
The following controllers are available from MICRONIX USA:
▪ MMC-100
▪ MMC-110
1.3 Technical Data
1.4 Load Characteristics
Load Characteristics
Fx(N)
Fy(N)
Fz(N)
Mx(Nm)
My(Nm)
Mz(Nm)
PM-002
2
50
50
1
1
1
Motor
PM-002
Speed Max. (mm/sec)
2 (MMC-100), 10 (MMC-110)
Resolution Typical (nm)
<1 (open loop), 2 (digital encoder),
10 (analog encoder)
Bi-directional Repeatability (nm)
N/A (open loop), ± 50 (digital encoder),
±50 (analog encoder)
Uni-directional Repeatability (nm)
N/A (open loop), 50 (digital encoder),
50 (analog encoder
PPS-28 Piezo Positioner Stage
Rev: 3.04
MICRONIX USA,LLC
www.micronixusa.com
5
Reference Manual
2. Model configurations
2.1 PPS-28 Order Numbers
Contact MICRONIX USA for custom applications and stacking configurations.
Order No. PPS-28-
1
Piezo Motor PM-002 1
26mm Travel 1
51mm Travel 3
76mm Travel 4
102mm Travel 5
Open Loop 0
Analog (1Vpp), 10nm 2
Digital (RS-422), 1nm 3
No Limit Switch 0
Magnetic 1
Non-vacuum 0
Vacuum prepared, 10
-6
mbar 6
Vacuum prepared, 10
-9
mbar 9
PPS-28 Piezo Positioner Stage
Rev: 3.04
MICRONIX USA,LLC
www.micronixusa.com
6
Reference Manual
3. Preparing to Install the PPS-28
3.1 Installation Preparation
When mounting the stage, it is important to consider the flatness of the mounting
surface, as the stage will conform to the shape of that mounting surface. A surface
that is not flat can adversely affect the performance and structural integrity of the
stage.
The stage is calibrated and guaranteed to be within specification at 20°C ±5°C
unless otherwise specified. Be sure to use the stage under the following conditions:
▪ Mount to a clean and flat surface which is free of debris, burrs or dings
▪ An indoor atmosphere free of corrosive gasses, and condensation
▪ Temperature range of 0-40°C
▪ Relative humidity between 20-80%
▪ Locate away from water, heat, and electrical noise
3.2 Package Contents
If product is damaged or there are missing components, contact MICRONIX USA
immediately. Do not discard product packaging in case of return shipment.
Package Should Contain:
▪ PPS-28 Linear Stage
▪ Reference Manual
▪ Any other previously agreed upon components such as a controller
PPS-28 Piezo Positioner Stage
Rev: 3.04
MICRONIX USA,LLC
www.micronixusa.com
7
Reference Manual
4. Installing the PPS-28
All mounting patterns require M2.5 screws for mounting and M1.5 x 5mm dowel pins for
precision alignment. Additional brackets and screws may be needed for custom
applications.
4.1 PPS-28 Installation
4.1.1 General Mounting
For general mounting configurations, mount the base to the mounting surface.
Align carriage with clearance holes to access base mounting pattern. (Please
note, it is possible to move the carriage manually without damaging the stage)
Travel
A
B
26mm
45
40
51mm
90
50
76mm
120
80
102mm
150
80
Requires:
2x M1.5 x 5mm Dowel Pins
2x M2.5 x 5mm Socket Head Cap Screws
(optional) 2x M2 x 5mm Socket Head Cap
Screw for ear mounts
1. Align Carriage with Clearance
Hole. Install Dowel Pins and M2
Socket Head Cap Screw
2. Align carriage with
remaining clearance hole
and install second M2 Socket
Head Cap Screw
Customer Supplied
Base Plate or
Mounting Surface
Direction
of Travel
Clearance
Hole
PPS-28 Piezo Positioner Stage
Rev: 3.04
MICRONIX USA,LLC
www.micronixusa.com
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Reference Manual
4.1.2 X-Y Mounting
For additional mounting configurations see section 8. Stacking Configurations
(Please note, it is possible to move the carriage manually without damaging the
stage)
Note: For stages assembled in an XY configuration in factory do not require disassembly
for base mounting
Travel
A
B
26mm
45
37
51mm
90
82
76mm
120
112
102mm
150
142
Direction
of Travel
Requires:
4x M1.5 x 4mm Dowel Pins
4X M2.5 Button Head Screws
2x M2 x 4mm Socket Head Screws
1. Align Carriage with
remaining clearance
holes and install
second M2 Socket
Head Cap Screw
Y-Axis Stage
2. Align X-Axis Stage
Carriage with Clearance
Holes. Install Dowel Pins
and M2 Socket Head Cap
Screw
PPS-28 Piezo Positioner Stage
Rev: 3.04
MICRONIX USA,LLC
www.micronixusa.com
9
Reference Manual
5. Connecting the PPS-28
5.1 Atmospheric Environments
For controller information refer to the appropriate MMC controller manual.
5.1.1 Open Loop Installation & Wiring Diagram
Connecting the PPS-28 in an open loop configuration only requires that the D-sub
9 Pin Motor Cable be connected to a compatible controller. No other cables or
components are needed.
5.1.2 Closed Loop/Encoder Installation & Wiring Diagram
Using the PPS-28 stage with an encoder requires a closed loop compatible
controller (MMC-100 or MMC-110) that recognizes encoder feedback. Connect
the stage as shown below.
PPS-28 Piezo Positioner Stage
Rev: 3.04
MICRONIX USA,LLC
www.micronixusa.com
10
Reference Manual
5.1.2.1 Analog Encoder Wiring Diagram
5.1.2.2 Digital Encoder Wiring Diagram
For a PPS-28 with a digital encoder, connect the stage as shown below
using the supplied 15 to 9 pin cable to connect the Encoder Module to the
Controller.
PPS-28 Shown with 2nm
External Encoder
PPS-28 Piezo Positioner Stage
Rev: 3.04
MICRONIX USA,LLC
www.micronixusa.com
11
Reference Manual
5.2 Vacuum Environments
5.2.1 Handling and Preparation
When preparing the stage for vacuum environments, take the necessary
precautions (such as wearing gloves, clean room clothing, etc.) when handling
the stage as to avoid any contaminants. Maximum Bake-out temperature is 100°C.
MICRONIX USA supplies the stage with vacuum compatible connectors: 9-pin
female PEEK connectors for open loop, 15-Pin female PEEK connector for closed
loop with analog encoder, 25-pin female PEEK connector for closed loop with
digital encoder.
5.2.2 Open loop Installation & Wiring Diagram
Connecting an open loop PPS-28 in a vacuum chamber requires the use of a feed
through connector at the vacuum chamber wall. The vacuum compatible PPS-28
will be supplied with wiring for a straight through feed through not a cross over
gender changer. MICRONIX USA supplies test connectors that simulate the
vacuum feed through to allow functionality test prior to installation in a vacuum
chamber. For details regarding the pin-out and feed through specifications see
the Appendix A.3
5.2.3 Closed Loop/Encoder Installation & Wiring Diagram
Closed loop installation of the PPS-28 stage in vacuum environments requires an
intermediate feed through connector at the vacuum chamber wall that can
accommodate both the motor cable, and the encoder cable.
The vacuum compatible PPS-28 will be supplied with wiring for a straight through
feed through not a cross over gender bender. MICRONIX USA supplies test
connectors that simulate the vacuum feed through to allow functionality test prior
PPS-28 Piezo Positioner Stage
Rev: 3.04
MICRONIX USA,LLC
www.micronixusa.com
12
Reference Manual
to installation in a vacuum chamber. For details regarding the pin-out and feed
through specifications see the Appendix A.4.5, A.5.5.
5.2.3.1 Analog Encoder Wiring Diagram
PPS-28 Piezo Positioner Stage
Rev: 3.04
MICRONIX USA,LLC
www.micronixusa.com
13
Reference Manual
5.2.3.2 Digital Encoder Wiring Diagram
6. Dimensions
6.1 PPS-28 20mm with Digital Encoder.
L
Travel
A
B
C
45
26mm
37
1
40
90
51mm
82
5
50
120
76mm
112
7
80
150
102mm
142
9
80
* Grey parts for external closed loop
only
PPS-28 Piezo Positioner Stage
Rev: 3.04
MICRONIX USA,LLC
www.micronixusa.com
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Reference Manual
6.2 PPS-28 20mm with Analog Encoder
7. Stacking Configurations
7.1 Configuration Examples (Additional configurations available upon request)
L
Travel
A
B
C
45
26mm
37
1
40
90
51mm
82
5
50
120
76mm
112
7
80
150
102mm
142
9
80
Using Adapter Plate (P/N: 430517)
X-Y
PPS-28, PPS-20
PPS-28 & PR-32
PPS-28 Piezo Positioner Stage
Rev: 3.04
MICRONIX USA,LLC
www.micronixusa.com
15
Reference Manual
8. Supplementary Information
8.1 Maintenance
▪ The PPS-28 series of Linear Piezo stages utilizes a maintenance free design. Do not
modify the stage or perform any maintenance unless specifically instructed to do
so by MICRONIX USA personal. If the stage is not performing up to the original
specifications, please contact MICRONIX USA.
▪ The PPS-28 Linear Piezo stage is a precision mechanical device and should be
handled with care. Do not drop or mishandle the stage.
▪ Do not touch the bearings, as this will contaminate the lubrication and jeopardize
the longevity of the stage.
▪ Follow the Installation Preparation requirements and use proper cable
management to ensure a clean and safe operating environment.
8.2 Units and Conventions
All measurements in this document are in the metric system of units.
Metric Unit
English Unit
1 millimeter
0.0394 inches
1 micron
0.0000394 inches
1 Newton
0.2248 lbs.
1 Newton-meter
8.85 in-lbs.
PPS-28 Piezo Positioner Stage
Rev: 3.04
MICRONIX USA,LLC
www.micronixusa.com
16
Reference Manual
9. Appendix
9.1 Electrical Connection
9.1.1 DB-9 Male Motor Connector
9.1.2 Encoder Pinout
9.2 2 Phase Piezo Motor Wiring Diagram
Pin
Description
Color
1
Phase 1
Red
2
Phase 2
Yellow
3
N/C
N/C
4
Not in Use
N/C
5
Ground
Black& Green
6
+5V
N/C
7
+5V
N/C
8
Not in Use
N/C
9
Not in Use
N/C
Pin
Function
Low Cost Digital
Analog
1
A+/Cos+
Brown
Brown
2
B+/Sin+
Grey
Yellow
3
Index+
Violet
Violet
4
GND
Black & Inside shield
Black & Inside shield
5
+5V
Red
Red
6
A-/Cos-
Orange
Orange
7
B-/Sin-
White
Green
8
Index-
Blue
Blue
9
N/A
N/A
N/A
Shield
GND
Outside Shield
Outside Shield
PPS-28 Piezo Positioner Stage
Rev: 3.04
MICRONIX USA,LLC
www.micronixusa.com
17
Reference Manual
9.3 Open Loop Vacuum Wiring Diagram
9.3.1 Straight Through 9-Pin Feed Through
PPS-28 Piezo Positioner Stage
Rev: 3.04
MICRONIX USA,LLC
www.micronixusa.com
18
Reference Manual
A.4 26BUsing the Digital Encoder
Module
When using the digital external encoder
configuration, the Encoder Module
should display two green LED’s
indicating a power source and proper
encoder alignment. A Red or Yellow
Signal Level LED indicates misalignment
of the Encoder Head, if this occurs
contact MICRONIX USA. Do not adjust
the Encoder Head or scale. For more
information refer to MicroE Systems
Mercury Encoders.
A.4.1 36BEncoder Module Pin-out
*-Limits must be specified at the time of order and calibrated
at the factory.
Note: Tri-state alarm: A and B are tri-stated if the encoder
signal becomes too low for reliable operation.
Pin
Description
Pin
Description
1
*Right Limit+
9
Ground
2
Ground
10
*Left Limit+
3
*Right Limit-
11
*Left Limit-
4
Index-
12
Index+
5
B-
13
B+
6
A-
14
A+
7
+5V
15
(not used)
8
+5V
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