VAT 02112-AE24 is a rectangular gate valve with double acting pneumatic actuator, mechanically locked in closed position. The valve is suitable for vacuum applications and has a leak rate of <1.10-9 mbar l/s. The valve can be used in a wide range of applications, including:
- Semiconductor manufacturing
- Vacuum coating
- Vacuum furnaces
- Aerospace
- Research and development
The benefits of using VAT gate valve 02112-AE24 include:
- High vacuum performance
- Long service life
- Reliable operation
- Easy maintenance
VAT 02112-AE24 is a rectangular gate valve with double acting pneumatic actuator, mechanically locked in closed position. The valve is suitable for vacuum applications and has a leak rate of <1.10-9 mbar l/s. The valve can be used in a wide range of applications, including:
- Semiconductor manufacturing
- Vacuum coating
- Vacuum furnaces
- Aerospace
- Research and development
The benefits of using VAT gate valve 02112-AE24 include:
- High vacuum performance
- Long service life
- Reliable operation
- Easy maintenance
Installation, Operating & Maintenance Instructions
Series 021
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel +41 81 771 61 61 Fax +41 81 771 48 30 [email protected] www.vatvalve.com
205440EL
2008-01-16
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Rectangular Gate Valve
MONOVAT classic
With double acting pneumatic actuator,
mechanically locked in closed position
This manual is valid for the valve ordering number(s):
VAT Series 021
SIZES 01..10 and 12
Types A, B and C
The fabrication number is indicated on each product as per the label below
(or similar):
made in Switzerland
Fabrication No.:
patented
. .
00 . . . – . . . . – . . . . / . . . .
A – . . . . . .
Fabrication number
Explanation of symbols:
Read declaration carefully before you start any other
action!
Keep body parts and objects away from the valve
opening!
Attention!
Hot surfaces; do not touch!
Product is in conformity with EC guidelines,
if applicable!
Loaded springs and/or air cushions are potential
hazards!
Disconnect electrical power and compressed air lines.
Do not touch parts under voltage!
Wear gloves!
Read these «Installation, Operating & Maintenance Instructions» and the enclosed «General
Safety Instructions» carefully before you start any other action!
Installation, Operating & Maintenance Instructions
Series 021
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel +41 81 771 61 61 Fax +41 81 771 48 30 [email protected] www.vatvalve.com
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2008-01-16
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Imprint:
Manufacturer
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Website
www.vatvalve.com
Phone
+41 81 771 61 61
Fax
+41 81 771 48 30
Publisher
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Editor
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Print
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Copyright
© VAT Vakuumventile AG 2008
No part of these Instructions may be reproduced in any way (photocopies, microfilms or any
other reproduction processes) nor may it be manipulated with electronic systems, duplicated or
distributed without written permission from VAT. Offenders are liable to pay damages.
The original VAT firmware and updated state of the art versions of the VAT firmware are
intended for use with VAT products. The VAT firmware contains a limited, time unlimited user
license. The VAT firmware may not be used for purposes other than those intended nor is it
permitted to make copies of the VAT firmware. In particular, it is strictly forbidden to give copies
of the VAT firmware to other people.
The use of trade names, brand names, trademarks, etc. in these Instructions does not entitle
third parties to consider these names to be unprotected and to use them freely. This is in
accordance with the meaning of the laws and acts covering brand names and trademarks.
Installation, Operating & Maintenance Instructions
Series 021
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel +41 81 771 61 61 Fax +41 81 771 48 30 [email protected] www.vatvalve.com
205440EL
2008-01-16
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Contents:
1 Use of product ........................................................................................................................................................... 4
1.1 Description ......................................................................................................................................................... 4
1.2 Technical data .................................................................................................................................................... 4
2 Installation ................................................................................................................................................................. 6
2.1 Unpacking .......................................................................................................................................................... 6
2.2 Installation into the system ................................................................................................................................. 6
2.3 Connections ....................................................................................................................................................... 6
2.3.1 Compressed air connection ...................................................................................................................... 6
2.3.2 Electrical connection ................................................................................................................................ 6
3 Operation .................................................................................................................................................................. 7
3.1 Normal operation ................................................................................................................................................ 7
3.2 Operation under increased temperature ............................................................................................................. 7
3.3 Behavior in case of compressed air pressure drop ............................................................................................ 7
3.4 Behavior in case of power failure ....................................................................................................................... 7
3.5 Emergency operation at power failure ................................................................................................................ 7
4 Trouble shooting ....................................................................................................................................................... 8
5 Maintenance & repairs .............................................................................................................................................. 8
5.1 Gate exchange ................................................................................................................................................... 9
5.2 Actuator maintenance ...................................................................................................................................... 14
5.2.1 Dismounting of the actuator ................................................................................................................... 14
5.2.2 Cleaning ................................................................................................................................................. 14
5.2.3 Reassembly ........................................................................................................................................... 14
5.2.4 Function test ........................................................................................................................................... 15
5.2.5 Final maintenance steps ........................................................................................................................ 15
5.3 Replacing position indicator .............................................................................................................................. 16
5.4 Adjustment of Actuator ..................................................................................................................................... 16
5.5 Lubrication of Valve .......................................................................................................................................... 16
6 Drawings ................................................................................................................................................................. 17
6.1 Actuator and gate assembly ............................................................................................................................. 17
7 Spare parts ............................................................................................................................................................. 19
7.1 Actuator service kits, pressure differential tab upgrade kit ............................................................................... 19
7.2 Spare gates and gate service kits .................................................................................................................... 19
7.3 Bonnet seals, o-ring at SEMI interface ............................................................................................................. 23
7.4 Solenoid ........................................................................................................................................................... 24
8 Warranty ................................................................................................................................................................. 24
Installation, Operating & Maintenance Instructions
Series 021
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel +41 81 771 61 61 Fax +41 81 771 48 30 [email protected] www.vatvalve.com
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1 Use of product
Use product for vacuum applications under the conditions indicated in chapter «Technical data» only. Other applications
are only allowed with the written permission of VAT.
1.1 Description
Flange see dimensional drawing
Actuator pneumatic, double acting, with position indicator,
mechanically locked in closed position
Feedthroughs welded metal bellows *)
1.2 Technical data
LEAK RATES (at room temperature 25°C, under clean environmental conditions)
Sealing surface
FKM seals
FFKM seals
Metal seals
Metallic blank
(milled / ball polished)
Body <1.10-9 mbar l s-1
Seat <1.10-9 mbar l s-1
Body <1.10-8 mbar l s-1
Seat <1.10-7 mbar l s-1
Body <5.10-10 mbar l s-1
(for stainless steel only)
Alu, hard anodized
Body <1.10-5 mbar l s-1
Seat <1.10-4 mbar l s-1
Body <1.10-5 mbar l s-1
Seat <1.10-4 mbar l s-1
Measuring conditions:
Body: 30s, He-Conc. 20%
Seat: 15s, He-Conc. 30%
Automatic leak rate inspection
dp = 1bar
Alu, Ni plated
Body <1.10-9 mbar l s-1
Seat <1.10-9 mbar l s-1
Body <1.10-8 mbar l s-1
Seat <1.10-7 mbar l s-1
PRESSURE RANGES (at room temperature 25°C, under clean environmental conditions)
- Metallic blank or Ni plated 1 . 10-9 mbar to 1.2 bar (abs)
- Alu hard anodized 1 . 10-6 mbar to 1.2 bar (abs)
- Metal seal 5 . 10-10 mbar to 1.2 bar (abs)
Differential pressure on the gate 1.2 bar *) in either direction
Differential pressure at opening 30 mbar *) in either direction
CYCLE LIFE between maintenance
(unheated, under clean vacuum conditions, operated with standard actuation speed and standard compression)
- actuator (pneumatic and mechanical parts) 2 million *)
- bellows (AM 350) 2 million *)
- bellows (INCONEL 625) 1 million
- gate seal FKM 2 million *)
- gate seal FFKM 1 million *)
Operating TEMPERATURES
- valve body aluminum <150°C; recommended <120°C
- valve body stainless steel <200°C
- pneumatic actuator <150°C
- position indicator <80°C *)
- solenoid <50°C
Temperature difference between seat and gate 40°C
Heating and cooling rate 40°C h-1
Installation, Operating & Maintenance Instructions
Series 021
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel +41 81 771 61 61 Fax +41 81 771 48 30 [email protected] www.vatvalve.com
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MATERIAL
- valve body, gate aluminum 3.2315, AA6082, AlMgSi1
- valve body, gate stainless steel 1.4435, AISI 316L
- pressure differential tabs 1.4435, VITON®, PEEK (Polyetheretherketon)
- stoppers PEEK (Polyetheretherketon)
- bellows end pieces 1.4435, AISI 316L
- bellows AISI 633 (AM 350) *), INCONEL 625
- gate and bonnet seal FKM (VITON®) *)
MOUNTING POSITIONS any *)
ELECTRICAL CONNECTION
Position indicator 3A / 50VDC *); contact rating
COMPRESSED AIR SUPPLY
Compressed air pressure 4 - 7 bar / 55 - 95 psig (overpressure) *)
Compressed air connections internal threads M5 *)
ACTUATION TIME (using standard orifice) <1s *) in either direction
Recommended LOCKING PRESSURES for sizes 01..10 and 12 **)
VITON® 1.0 - 1.2 bar
Chemraz® 513, 630, 656 1.0 - 1.2 bar
Chemraz® E38 0.7 - 0.8 bar
Kalrez® 8085 1.0 - 1.2 bar
Kalrez® 8575, 9100 0.7 - 0.8 bar
Perlast® G67P 0.7 - 0.8 bar
Ultic Armor® 1.0 - 1.2 bar
**) In order to maximize the life time of the gate, locking pressure should be set as low as possible, but not so low to produce an
unacceptable leak rate in the closed position. Due to length of the sealing line (size of gate), tolerances of sealing lip, accuracy of
the measurement and the requested leak rate the locking pressure settings might deviate slightly from the recommended
pressure range.
*) Standard specification. Specifications for optional features are provided on the dimensional drawing of the product.
Further technical data according to VAT catalog or product data sheet no. 207385 (or the corresponding data sheet valid
for the specific valve) and the dimensional drawings.
Installation, Operating & Maintenance Instructions
Series 021
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel +41 81 771 61 61 Fax +41 81 771 48 30 [email protected] www.vatvalve.com
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2 Installation
2.1 Unpacking
Leave the blue foil on the seat openings as long as possible in order to protect the seat from dust and particles. The valve
and seals must not be cleaned before installation. The valve is assembled in VAT in a clean environment and sealed in a
plastic bag.
2.2 Installation into the system
The dimensions and tolerances specified on the dimensional drawing must be met under all operating conditions.
Attach the valve to a clean system only. The screws on the flanges have to be tightened uniformly in crosswise order.
Connect compressed air and electrical power only if
insert is installed into the vacuum system
moving parts cannot be touched
Do not touch electrical parts under voltage.
2.3 Connections
2.3.1 Compressed air connection
Compressed air pressure: 4-7 bar / 55-95psig (overpressure) *); use only clean, dry or slightly oiled air
Compressed air connections: internal threads M5 *)
- without solenoid connections „open“ and „closed“
- with solenoid connection „P“ for air supply, „R“ for exhaust
2.3.2 Electrical connection
Sockets for position indicator and solenoid are supplied with the valve. Verify that control voltage matches voltage indicated
on the solenoid.
Position indicator: 3 A / 50 VDC; contact rating
Solenoid for impulse
actuation
Standard position
indicator *)
Position indicator
„open/close“ (Opt.)
Position indicator
1xLo / 2xLg
Position indicator
1xLo / 2xLg (Opt.)
3
MV
power
close
open
1
2
3
1
2
MV = coil of solenoid
Min. pulse duration:
50 ms
6
5
4
3
2
1
3
1
2
4
6
5
Lo
Lg
43 2 1
5
6
78
9101112131415
3
1
7
4
2
8
13
15
11
Lo1
Lg1
Lg2
12
4
12
4
12
4
9
Lg2
Lg1
Lo
6
5
4
3
2
1
6
5
4
3
2
1
Lo = position indicator „open” Lg = position indicator „close“ Voltage max. 50 V DC
Installation, Operating & Maintenance Instructions
Series 021
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel +41 81 771 61 61 Fax +41 81 771 48 30 [email protected] www.vatvalve.com
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3 Operation
Products without differential pressure tabs are specifically designed for operation under equal pressure on either side.
Application of differential pressure through such products may cause damage to the product and serious injury of people.
3.1 Normal operation
A. Operation in clean vacuum environment (e.g. load lock applications):
If the valve is used in clean vacuum environment standard configuration with FKM seals (nanoVAT, VITON or similar) are
recommended. Always check the locking pressure if a gate change is performed and in particular if seal material is
changed. Recommended locking pressures are listed in chapter 1.2.
B. Operation in harsh process environments (e.g. transfer/process modules):
Optimum cost of ownership with lowest particle shed rates requires that the MONOVAT vulcanized seal material avoid
excessive stress when the mechanism is locked. Therefore, locking pressure should be set as low as possible, but not so
low to produce an unacceptable leak rate in the closed position. This is true for any operational conditions and in particular
in harsh process environments with increased temperatures where process gases attack the elastomeric compounds.
Please refer to chapter 1.2 where the compound specific locking pressures are listed. In chapter 5 the locking pressure
settings are described.
3.2 Operation under increased temperature
See chapter 1.2 or product data sheet no. 207385.
3.3 Behavior in case of compressed air pressure drop
Valve closed: valve remains closed (mechanically locked).
Valve open: valve position is undefined.
valve remains open if non return valve is installed (pneumatically locked).
3.4 Behavior in case of power failure
Valve supplied with pneumatic connection (ordering code 021 . . - . . 24): Valve position depends on applied solenoid
valves (SV). VAT recommends operating all transfer valves with impulse actuated SV.
Valve supplied with impulse solenoid (ordering code 021 . . - . . 44):
Valve closed: valve remains closed (mechanically locked).
Valve open: valve remains open.
A started movement will be completed.
3.5 Emergency operation at power failure
In case of power failure, valve can be actuated if compressed air is available.
To actuate valve in case of power failure:
- Press push-button: valve opens
- Pull push-button: valve closes
Installation, Operating & Maintenance Instructions
Series 021
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel +41 81 771 61 61 Fax +41 81 771 48 30 [email protected] www.vatvalve.com
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4 Trouble shooting
Failure
Check
Action
Valve does not close / open
Power available?
Compressed air available?
Solenoid defective?
Check voltage
Check air pressure
Check solenoid (manual emergency
operation).
Leak at gate
Dirty?
Gate seal damaged?
Seal compression weak?
Clean valve seat and gate.
Replace gate if damaged.
Check air pressure and actuator adjustment
Leak at body
Flanges leak tight?
Leak at bellows?
Clean or replace flange O-ring.
Replace bellows.
If you need any further information, please contact one of our service centers. You can find the addresses on our website:
http://www.vat.ch
5 Maintenance & repairs
Under clean operating conditions, the valve does not require any maintenance during the specified cycle life.
Contamination from the process may influence the function and requires more frequent maintenance.
Before carrying out any maintenance or repairs, please contact VAT. It has to be individually decided whether the
maintenance/repair can be performed by the customer or has to be carried out by VAT. The fabrication number on the
valve
made in Switzerland
Fabrication No.:
patented
. .
. . . . . – . . . . – . . . . / . . . .
A – . . . . . .
Fabrication number
has always to be specified.
All supplies (e. g. compressed air, electrical power) must be disconnected for removal/installation of the valve from/into the
system and for maintenance work.
Even with disconnected supply, loaded springs and/or air cushions in cylinders can be potential hazards.
Keep fingers and objects away from the valve opening!
Products returned to VAT must be free of harmful substances such as e.g. toxical, caustic or microbiological ones. If
products are radioactively contaminated, fill in the VAT form «Contamination and Radiation Report» and send it with the
product. The form is available at VAT. The maximum values indicated in the form must not be exceeded.
Installation, Operating & Maintenance Instructions
Series 021
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel +41 81 771 61 61 Fax +41 81 771 48 30 [email protected] www.vatvalve.com
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Preventive maintenance actions include replacing gate, bellows, and piston seals. Also, the pneumatic parts are
relubricated, and the seat is cleaned. Other parts are checked and replaced if necessary. For repair or case of emergency,
VAT recommends keeping at least the following spare parts on site:
1 MONOVAT gate
2 bellows assembly
1 complete gate/actuator assembly (minimizes MTTR)
5.1 Gate exchange
Recommended tools
A pneumatic air supply with adjustable pressure regulator and dial gauge
capable of displaying 0-1.5bar (0-22PSI) with an accuracy of +/- 50mbar
(approx. 1psi).
Torque wrench with Allen insert 4mm
Allen key 4mm
Angle
Underlay 3mm
1.
For A- and B-type valves:
- open valve
- disconnect the actuator from power and compressed air supplies
- loosen the bonnet fixation screws
- take out the actuator/gate assembly from the valve housing
For C-type valves (pictures):
- open valve
- gate exchange can be performed without dismounting the valve
2.
Loosen gate fastening screws (about 2 turns)
3.
Note:
If a cone of the gate fastening gets stuck, proceed as follows:
- The back cone can be loosened by gently tapping on the fastening
screw
- The front cone can be loosened by carefully moving the gate back
and forth
In case of any difficulties please consult your local VAT service centre.
Installation, Operating & Maintenance Instructions
Series 021
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel +41 81 771 61 61 Fax +41 81 771 48 30 [email protected] www.vatvalve.com
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4.
Withdraw gate carefully in upward direction
5.
Place gate carefully from top onto the two bellows end pieces
6.
Slightly tighten fastening screws
Note:
Make sure that gate is placed correctly; no gap should exist between
gate and bellows
7.
For C-type valves only:
Close valve slowly with minimal compressed air pressure
Installation, Operating & Maintenance Instructions
Series 021
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel +41 81 771 61 61 Fax +41 81 771 48 30 [email protected] www.vatvalve.com
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8.
Tighten gate fastening screws uniformly.
Make sure that bellows feedthroughs are not twisted.
Note:
If bellows feedthroughs are twisted, their lifetime may be drastically
reduced.
9.
Make sure that gate is perpendicular to the body/bonnet.
For C-type valves:
Check with feeler gage if there is clearance between tabs and gate. Any
clearance >0.05mm is acceptable. If the clearance is >0.95mm, check if
there is clearance between gate and valve body.
Note:
If readjustment is necessary, untighten both fastening screws at the
gate again and position the gate precisely by slightly pressing on it.
10.
Tighten fastening screws by means of a torque wrench to 5Nm (Newton
meter); approx. 3.7 lbf ft (pound force foot).
A- and B-type valves:
- reinstall the actuator/gate assembly.
- tighten the bonnet fixation screws uniformly in crosswise order.
- close the valve.
Installation, Operating & Maintenance Instructions
Series 021
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel +41 81 771 61 61 Fax +41 81 771 48 30 [email protected] www.vatvalve.com
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11.
By applying a 3mm underlay, check whether the gate is in parallel with
the body seat surface. A gap of approx. 3mm ±0.15mm (see marking)
must remain between gate and body.
Perform measurements at the two outer differential pressure tabs.
Parallelism is ok if the two measurements do not vary more than
0.2mm.
Remark:
This check and the following steps are not feasible for A-type valves.In
case of any difficulties please consult your local VAT service centre.
12.
If the gap is not within 3mm ±0.15mm or the two measurements at the
outer pressure differential tabs differ more than 0.2mm, readjustment is
necessary.
To do so, untighten the actuator fastening screws by about ¼ turn on
the side where the readjustment must be carried out.
13.
Turn screw clockwise to narrow the gap.
Turn screw counter-clockwise to widen the gap.
Note:
Turning screw by 30° results in 0.125 mm change of compression.
14.
When position is correct, retighten actuator fastening screws with a
torque of 3.4Nm (2.5 ftf lb).
Installation, Operating & Maintenance Instructions
Series 021
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel +41 81 771 61 61 Fax +41 81 771 48 30 [email protected] www.vatvalve.com
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Check locking pressure; recommended if seal material is being changed
15.
Open valve
Reduce compressed air pressure to <0.5bar (7.3psi).
Close valve by slowly increasing compressed air pressure.
Valve is closed when position indicator notifies „closed“.
Proper locking should be reached with a compressed air pressure
as specified in chapter 1.2. If this is not the case, the locking
pressure must be readjusted by repeating the steps 12-14.
Attention: Readjustment must be identical on both sides to maintain the
parallelism between gate and body.
Note:
Turn screw clockwise to increase the locking pressure
Turn screw counter-clockwise to reduce the locking pressure
Installation, Operating & Maintenance Instructions
Series 021
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel +41 81 771 61 61 Fax +41 81 771 48 30 [email protected] www.vatvalve.com
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5.2 Actuator maintenance
The following chapters describe in detail the work to be performed for the actuator maintenance including bellows
replacement, piston o-rings as well as static o-rings exchanges. To perform this work actuator service kit p/n 214684 is
recommended. “Pos.” mentioned in the text below are illustrated in chapter 6.1.
Note:
Cleaning and reassembling processes must be executed with gloves. Change contaminated gloves immediately.
Execute all maintenance work under clean conditions.
Do not contaminate the vacuum side of the bellows with any lubricant.
5.2.1 Dismounting of the actuator
Remove both cover sheets Pos. 15 (2x).
Fix the actuator in vice.
Remove the gate by removing the two screws Pos. 44.
Note: If a cone of the gate fastening gets stuck, proceed as follows:
- The back cone can be loosened by gently tapping on the fastening screw.
- The front cone can be loosened by carefully moving the gate back and forth.
Remove c-clips (Pos. 53) holding the bolts (Pos. 11) connected to the bellows feedthroughs (Pos. 2) and push the
bolts through. Remove the two discs (Pos. 23) on each side.
Remove the eight screws (Pos. 40) fixing the bonnet to the actuator body and take away the bonnet.
Withdraw the bellows feedthroughs. The centre bush (Pos. 17) will be removed at the same time. Make sure that
two o-rings (Pos. 30) of each centre bush are removed as well.
Remove piston assembly by removing the nut (Pos. 55) at the gear rack together with the actuator/lug (Pos. 22) of
the position indicator and push the piston rod (Pos. 13) upwards out of the cylinder.
Check piston o-ring (Pos. 32): If abrasion occurred (“black dust” on the piston and rod), remove the o-ring.
5.2.2 Cleaning
Remove the old remaining grease on the pneumatic parts (cylinder, piston, rod).
Clean all parts operating under vacuum with alcohol:
o Remove the o-ring in the bonnet and clean bonnet and o-ring (do not use screw driver to remove o-ring
to prevent damage on the o-ring seal surface).
o Clean the centre bushes.
5.2.3 Reassembly
Replace piston O-ring (Pos. 32) and shaft seal (Pos. 33). Lubricate the o-rings with VAT high temperature grease
(N-6951-401).
Replace static O-rings (Pos. 31 and 36) if damaged.
If static O-ring Pos. 35 is damaged:
A: Remove screw Pos. 45 (1x) and piston Pos. 14 from shaft Pos. 13
B: Replace static O-ring Pos. 35
C. Reassemble piston Pos. 14 on shaft Pos. 13
D: Secure screw Pos. 45 (1x) with Loctite 270 and fasten screw in shaft Pos. 13
Lubricate the pneumatics with VAT high temperature pneumatic grease (N-6951-401):
o Cylinder
o Rod and piston
o Piston feedthroughs (fill the reservoir/groove of the stripper ring (Pos. 33)
Reassemble the piston into the cylinder and through the gear rack. Move the piston the whole way down and
relubricate (N-6951-401) the upper part of the cylinder.
Fasten the nut to the gear rack together with the lug (Pos. 22).
Lubricate the rods of the bellows feedthroughs (N-6951-401) and the feedthroughs in the actuator housings.
Installation, Operating & Maintenance Instructions
Series 021
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Insert new bellows assembly. Keep the upper part of the bellows protected by the foils until fully inserted. Hold the
bellows only at the protected area.
Relubricate the bolts with Rocol.
Fixation of the bellows feedthroughs:
o Leading the bolts through: lever, disk, rod, disk, lever
o Clip the c-clips on both sides
Make sure that you wear new and clean gloves for the next steps.
Insert new o-rings over the bellows feedthroughs and move it carefully into the actuator housing. Make sure that
the o-rings are clean from particles.
Insert the centre bushes over the bellows feedthroughs. To make sure that the o-ring is heading the sealing
surface of the bush correctly twist the bush carefully in both directions. Remove bush to verify if o-ring is at centre.
If so, put in the bush again.
Insert the upper o-rings onto the centre bush. Make sure that the o-rings are clean from particles.
Do not lubricate the bonnet groove. Treat the bonnet o-ring (Pos. 72) with vacuum grease (N-6951-01). Assemble
the o-ring to the bonnet groove. Make sure that the o-ring is clean from particles.
Check if the o-ring (Pos. 31) is still on the actuator housing (occasionally this o-ring is removed during the
disassembly and cleaning process).
Reassemble the bonnet and fix it with the eight screws (Pos. 40). Tighten the screws uniformly in cross-wise
order (3.4 Nm). Make sure that the bonnet is mounted according to the drawings (check position of location pins
relating to the D-Sub connector).
Perform leak check (bellows, o-ring with the centre bush and bonnet o-ring).
Prepare the screws (Pos. 44) and the cone by lubricating with vacuum grease (N-6951-01).
Reassemble the gate as described in chapter 5.1.
5.2.4 Function test
Connect the valve to the compressed air supply and perform 5-10 cycles.
Check position indicator signal (open/close).
Visually check the movement of the bellows and the gear rack.
Open valve and disconnect the compressed air supply. The bellows should move freely (push by hand if
necessary to initiate the movement) to the “neutral” position.
Check locking pressure as described in chapter 5.1.
5.2.5 Final maintenance steps
Reassemble the cover sheets (Pos. 15).
Protect the valve from any impacts (mechanically, dust, etc.).
Installation, Operating & Maintenance Instructions
Series 021
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel +41 81 771 61 61 Fax +41 81 771 48 30 [email protected] www.vatvalve.com
205440EL
2008-01-16
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5.3 Replacing position indicator
1. Vent chambers and open gate.
2. Disconnect valve from compressed air and electrical supply.
3. Remove cover sheets Pos. 15 (2x) with screws Pos. 47 (4x per sheet).
4. Unfasten screw Pos. 77 (4x) and screw Pos. 70 (2x) on the clamp.
5. Pull mounting bar downwards out of its slot in the actuator house.
6. Pull out insert Pos. 5 (to the connector side) and remove position
indicator.
7. Reassemble in reverse direction.
The switch point can be readjusted by loosening the screws of the switch and
moving the switch in the slotted holes of the mounting bar. The switch point
should be set 1 to 1.5 mm prior to the end positions.
5.4 Adjustment of Actuator
The compression of the gate seal is adjusted and tested at our factory and must normally not be readjusted. Adjustment is
necessary after every maintenance work. Verification of adjustment, readjustment of parallelism and checking the locking
pressure is described in chapter 5.1.
Locking pressure settings:
In order to maximize the life time of the gate, locking pressure should be set as low as possible, but not so low to
produce an unacceptable leak rate in the closed position.
In general, locking pressure depends on the size of the sealing and the used elastomeric compound. For standard
VAT sizes and VITON® bonded gates locking pressure of 1.0 – 1.2 bar is recommended.
Specific locking pressures are listed in the product data sheet or in chapter 1.2.
5.5 Lubrication of Valve
Gaskets in the vacuum area are not lubricated. Small amounts of suitable high vacuum grease (VAT high performance
vacuum grease) may be used to lubricate O-rings or gate seal.
Lubricate pneumatic cylinder and piston seals with VAT high temperature pneumatic grease. Other lubricants may not
meet our cycle life specification.
Lubricate gears, racks, and lashes in the actuator with Rocol or equivalent.
Lubricate screws outside the vacuum with Molykote 321 R or equivalent. Screws supplied by VAT are lubricated.
Pneumatic cylinder and actuator parts must be relubricated after the specified cycle life (see chapter «Technical data»).
The shaft of new bellows assembly is lubricated at the factory.
Installation, Operating & Maintenance Instructions
Series 021
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel +41 81 771 61 61 Fax +41 81 771 48 30 [email protected] www.vatvalve.com
205440EL
2008-01-16
17/24
6 Drawings
6.1 Actuator and gate assembly
Installation, Operating & Maintenance Instructions
Series 021
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel +41 81 771 61 61 Fax +41 81 771 48 30 [email protected] www.vatvalve.com
205440EL
2008-01-16
18/24
Installation, Operating & Maintenance Instructions
Series 021
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel +41 81 771 61 61 Fax +41 81 771 48 30 [email protected] www.vatvalve.com
205440EL
2008-01-16
19/24
7 Spare parts
Please specify the fabrication number of the valve (see yellow label on valve) when ordering spare parts. This is
to ensure that the appropriate spare parts are supplied.
7.1 Actuator service kits, pressure differential tab upgrade kit
Description
Size 01-04, 09
Size 05-08, 10, 12
Actuator service kit (feedthroughs and pneumatics), incl. grease
214685
214684
Spare bellows assembly
215619
208198 / 205011
Feedthroughs kit (pair of bellows, o-rings, safety clips) w/o grease
-
253941
Upgrade kit pressure differential tabs (PEEK tabs with vented screws)
-
307509
VAT high temperature pneumatic grease (for piston), 12g
N-6951-403
VAT high performance vacuum grease, 10g
N-6951-011
7.2 Spare gates and gate service kits
Size
Opening
Al gate
VITON seal
Surface
treatment
Speciality
12
50x336
94027-R1
bead blasted
standard
50x336
303001
bead blasted
particle optimized design
50x336
95842-R1
hard anodized
50x336
97154-R1
Ni-plated
50x336
215455
achromatic anodized
50x336
301062
ematal coated
10
46x236
77006-R1
bead blasted
standard
46x236
87125-R1
bead blasted
for gate heating
46x236
82510-01
hard anodized
46x236
91145-R1
hard anodized
for gate heating
46x236
94143-R1
hard anodized
only A-side with surface treatment
46x236
92796-R1
Ni-plated
46x236
101379-R1
achromatic anodized
09
32x222
76168-R1
bead blasted
standard
32x222
80499-01
hard anodized
32x222
96062-R1
Ni-plated
08
51x420
76752-R1
bead blasted
51x420
99513-R1
hard anodized
51x420
101373-R1
achromatic anodized
07
51x265
79364-R1
bead blasted
51x265
207458
hard anodized
06
51x210
77939-R1
bead blasted
05
51x160
78819-R1
bead blasted
04
25x420
85113-R1
bead blasted
01
25x160
91088-R1
bead blasted
Aluminium (Al) gates, vulcanized VITON VA8ANZ EF, S020/021, SIZES 01-10, 12
Installation, Operating & Maintenance Instructions
Series 021
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel +41 81 771 61 61 Fax +41 81 771 48 30 [email protected] www.vatvalve.com
205440EL
2008-01-16
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Size
Opening
Aluminium gate
special seals
Seal material
Surface treatment
Speciality
12
50x336
200062
FFKM - C 630
bead blasted
50x336
101367-R1
FFKM - C 630
hard anodized
50x336
205413
FFKM - C 513
bead blasted
50x336
227030
FFKM - C 513
Ni-plated
50x336
100431-R1
FFKM - C E38
bead blasted
50x336
231484
FFKM - G67P
bead blasted
50x336
303006
FFKM - G67P
bead blasted
Particle optimized
50x336
231438
FFKM - G67P
hard anodized
50x336
217542
FFKM - K 8575
bead blasted
50x336
217578
FFKM - K 8575
hard anodized
50x336
233454
FFKM - K 8085
bead blasted
50x336
245508
FFKM - K 8085
hard anodized
50x336
255750
FFKM - K 8085
Ni-plated
50x336
307612
FFKM - KLR 9100
bead blasted
50x336
327364
FFKM - KLR 9100
hard anodized
50x336
222969
FKM - Ultic Armor
bead blasted
50x336
225595
FKM - Ultic Armor
hard anodized
50x336
232071
MFQ - Fluorsilicon L677-70
hard anodized
50x336
300648
MVQ - Silicon FH7 ABS
hard anodized
50x336
318281
FKM - Nanofluor HVA7725_74
bead blasted
Particle optimized
10
46x236
245326
FFKM - C 639
bead blasted
46x236
96073-R1
FFKM - C 630
bead blasted
46x236
99424-R1
FFKM - C 630
hard anodized
46x236
97147-R1
FFKM - C 630
Ni-plated
46x236
100519-R1
FFKM - C 592
bead blasted
46x236
208855
FFKM - C 520
bead blasted
46x236
85104-R1
FFKM - C 513
bead blasted
46x236
88100-R1
FFKM - C 513
hard anodized
46x236
208063
FFKM - C 513
hard anodized
for gate heating
46x236
89375-R1
FFKM - C 513
Ni-plated
46x236
100430-R1
FFKM - C E38
bead blasted
46x236
209097
FFKM - C E38
hard anodized
46x236
310323
FFKM - C656
bead blasted
46x236
310642
FFKM - C656
hard anodized
46x236
227130
FFKM - G67P
bead blasted
46x236
212473
FFKM - K 8575
bead blasted
46x236
314896
FFKM - K 8575
hard anodized
46x236
215277
FFKM - K 8575
hard anodized
for gate heating
46x236
235060
FFKM - K 8575
Ni-plated
46x236
224440
FFKM - K 8085
bead blasted
46x236
237616
FFKM - K 8085
hard anodized
46x236
314846
FFKM - KLR 9100
bead blasted
46x236
217062
FKM - Ultic Armor
bead blasted
46x236
234876
FKM - Ultic Armor
hard anodized
46x236
91154-R1
FKM - Hifluor V8514-65
bead blasted
46x236
78510-R1
FKM - Hifluor V3819-75
bead blasted
46x236
206802
MFQ - Fluorsilicon L677-70
bead blasted
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VAT 02112-AE24 Owner's manual
- Type
- Owner's manual
- This manual is also suitable for
VAT 02112-AE24 is a rectangular gate valve with double acting pneumatic actuator, mechanically locked in closed position. The valve is suitable for vacuum applications and has a leak rate of <1.10-9 mbar l/s. The valve can be used in a wide range of applications, including:
- Semiconductor manufacturing
- Vacuum coating
- Vacuum furnaces
- Aerospace
- Research and development
The benefits of using VAT gate valve 02112-AE24 include:
- High vacuum performance
- Long service life
- Reliable operation
- Easy maintenance
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