Sierra 810S User manual

Brand: Sierra

Model: 810S

Type: User manual

Easy To Use

High Performance

Gas Mass Flow

Controller with

Digital Display

On-board display and local set point

control eliminates need for

external electronics

Switch-selectable remote

set point interfaces easily with

PLC or workstation

Patented straight sensor tube with

access ports permits easy cleaning

and reduces maintenance down-time

Platinum sensor eliminates zero-drift

and ensures long-term repeatability

Electro -magnetic control valve

provides accurate response to set

point changes

Primary standard calibration

ensures starting point accuracy

and NIST traceability

CE Approved

Features

Description

810-S Series Mass-Trak

The information contained herein is subject to change without notice.

ierra Instruments' Model 810-S Mass-Trak™ offers

a unique combination of convenience and

exceptional performance. Available in any range

from 0 to 10 sccm to 0 to 100 slpm, the Model 810-S with

its 316 stainless steel flow body is suitable for any clean

gas, including corrosives.

Mass-Trak's on-board display and local set point

potentiometer allows for adjustment of the command

signal from the face of the instrument enclosure and

eliminates the need for external readout/set point

electronics. The instrument also offers a switch-selectable

remote set point capability from either a 4–20 mA or

0–5 VDC command signal, which can be easily interfaced

with a process control system or workstation.

The instrument’s built-in, electromagnetic, servo-control

valve offers both a purge mode and a valve-close command

from an external contact, an accurate response to set point

changes and a .25% repeatability specification.

Designed to combine all the convenience of Sierra’s

Mass-Trak line with the durability of stainless steel, the

810-S is an excellent choice for a broad range of analytical,

process and OEM applications.

ISO

REGISTERED

9001

5 Harris Court, Bldg. L

Monterey, CA 93940

831-373-0200

800-866-0200

FAX: 831-373-4402

www.sierrainstruments.com

All dimensions are in inches with mm in parentheses. Certified drawings are available on request.

Model 810-S-L Side View

Model 810-S-L Outlet View

1.2

(30.4)

1.55

(39.3)

.98

(24.8)

5.2

(132.0)

4.7

(119.3)

Model 810-S-L Bottom View

.750

(19.0)

2.750

(69.8)

.12

(3.04)

.13

(3.3)

4.180

(106.1)

(B)6-32

(A)M4

Model 810-S-M Side View

Model 810-S-M Outlet View

1.2

(30.4)

1.97

(50)

1.45

(36.8)

5.67

(144)

4.93

(125.2)

Model 810-S-M Bottom View

(B)8-32

2.00

(50.8)

1.23

(31.2)

5.125

(130.1)

.23

(5.84)

1.00

(23.4)

(A)M6

Dimensional Specifications

LOW FLOW BODY

Compression VCO VCR

1/8 1/4 3/8 1/4 3/8 1/4 1/2

Dimension L (in)

6.02 6.18 6.28 5.78 6.18 6.08 6.08

MEDIUM FLOW BODY

Compression VCO VCR

1/4 3/8 1/2 1/4 3/8 1/4 1/2

Dimension L (in)

7.17 7.27 7.47 6.67 7.12 6.97 7.57

All dimensions are in inches with mm in parentheses. Certified drawings are available on request.

Low Flow Body

Medium Flow Body

Operating Specifications

Gases

All clean gases; specify when ordering.

Mass Flow Rates

0 to 10 sccm to 0 to 100 slpm; flow ranges specified are for an equivalent

flow of nitrogen at 760 mm Hg and 21°C (70°F); other ranges in other

units are available (e.g., scfh or nm

/h)

Gas Pressure

500 psig (34 barg) maximum

Differential Pressure Requirement

Low-flow body: 5 to 100 psi (0.3 to 6.8) standard

30 psi optimum; lower or higher are available, consult factory

Medium flow body: 15-100 psi standard; 30 psi optimum;

lower or higher are available, consult factory

Gas & Ambient Temperature

32 to 122°F (0 to 50°C)

Leak Integrity

5 X 10

-9

atm cc/sec of helium maximum

(Not recommended for use as a positive shut-off valve)

Power Requirements

24 VDC ±10%, 340 mA, regulated. Ripple should not exceed

100mV peak-to peak

Control Range

Calibrated for 5–100% of full scale flow. Automatic shut-off at

2% (override available)

Output Signal

Linear 0–5 VDC, 2000 ohms minimum load resistance

Linear 4–20 mA, 1000 ohms maximum loop resistance

Command Signal

Local

. . . . . . . . . . . . .

Potentiometer

Remote

. . . . . . . . . . .

Switch selectable 0–5 VDC or 4–20 mA

Controls

Local set point potentiometer

Zero potentiometer

Valve is closed when power is off

Display

3.5 digit LCD

Physical Specifications

Wetted Material

316 stainless steel; 430F stainless steel; Viton

“O”-rings and valve seat

standard. Other elastomers are available. See following page or consult

factory.

Performance Specifications

Accuracy

± 1.5% of full scale including linearity over 60° to 80°F (15° to 25°C)

and ± 30 psig from calibration pressure

If the meter is mounted with a vertical (up or down) flow path

the following accuracy de-rating applies:

Notes: (1) Do not exceed 150 psig.

(2) Difference between inlet pressure and calibrated pressure. Do not exceed ± 10 psig.

Repeatability

± .25% of full scale

Temperature Coefficient

0.08% of full scale per °F (0.15% of full scale per °C), or better

Pressure Coefficient

0.01% of full scale per psi (0.15% of full scale per bar), or better

Response Time

800 ms time constant; six seconds (typical) to within

± 2% of final value over 25 to 100% of full scale

OPERATING PRESSURE

Inlet Pressure

Deviation

50 psig 100 psig 150 psig

± 1 psig ± 1.5% of ± 1.5% of ± 1.5% of

full scale full scale full scale

± 5 psig ± 3.8% of ± 4.5% of ± 5.3% of

full scale full scale full scale

± 10 psig ± 6% of ± 7.5% of ± 9% of

® Nylon, Viton, Neoprene, Kalrez, and Teflon are registered trademarks of DuPont.

Ordering the Model 810

PARENT NUMBER

810 -S

Mass Flow Controller

FLOW BODY

Low Flow (0-10 SCCM to 0-15 SLPM)

Medium Flow (0-15 to 0-100 SLPM)

DISPLAY

No Readout

3.5 Digit LCD Flow Rate Display

INLET/OUTLET FITTINGS

1/8-inch Compression

Not Used

1/4-inch Compression

1/4-inch VCR

3/8-inch Compression

1/2-inch VCR

1/2-inch Compression

6 mm Compression

1/4-inch VCO

10 mm Compression

1/2-inch VCO

12 mm Compression

FLOW BODY ELASTOMERS

OV1

Viton (Low, Medium Flow)

ON1

Neoprene (Low, Medium Flow)

OK1

Kalrez (Low Flow)

OK2

Kalrez (Medium Flow)

VALVE SEAT

SV1

Viton (Standard)

SN1

Neoprene or Equivalent

SK1

Kalrez or Equivalent

ST1

PFA Teflon or Equivalent

OUTPUT SIGNAL

0-5 VDC, Linear

4-20 mA, Linear

COMMAND SIGNAL

0-5 VDC

4-20 mA

OPTIONS

High Pressure Calibration (Above 100 PSIG)

Medium Pressure Calibration (40-100 PSIG)

Low Flow Calibration (0–20 sccm or below)

GAS, FLOW RATE

810-S

810-S A 3M 10/03

CONNECTORS AND CABLES (

Consult Factory

)

ACCESSORIES (

Consult Factory

)

SIERRA INSTRUMENTS USA 5 Harris Court, Building L • Monterey, California • (800) 866-0200 • (831) 373-0200 • Fax (831) 373-4402 • www.sierrainstruments.com

SIERRA INSTRUMENTS b.v. Bijlmansweid 2 • 1934 RE Egmond a/d Hoef • The Netherlands • +31 (0) 72 5071400 • Fax +31 (0) 72 5071401

SIERRA INSTRUMENTS ASIA 100 Jiangnan Dadao, Zhong Guang Building, Suite 2303 • Guangzhou, P.R. China 510240 • 8620 3435 4870 • Fax 8620 3435 4872

100 Jiangnan Dadao, Zhong Guang Building, Suite 2303 • Guangzhou, P.R. China 510240 • 8620 3435 4870 • Fax 8620 3435 4872

10S 10/03

Sierra 810S User manual

Sierra 810S User manual

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