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Easy To Use
High Performance
Gas Mass Flow
Controller with
Digital Display
n
On-board display and local set point
control eliminates need for
external electronics
n
Switch-selectable remote
set point interfaces easily with
PLC or workstation
n
Patented straight sensor tube with
access ports permits easy cleaning
and reduces maintenance down-time
n
Platinum sensor eliminates zero-drift
and ensures long-term repeatability
n
Electro -magnetic control valve
provides accurate response to set
point changes
n
Primary standard calibration
ensures starting point accuracy
and NIST traceability
n
CE Approved
Features
Description
810-S Series Mass-Trak
810-S Series Mass-Trak
®
810-S Series Mass-Trak
®
810-S Series Mass-Trak
The information contained herein is subject to change without notice.
ierra Instruments' Model 810-S Mass-Trak™ offers
ierra Instruments' Model 810-S Mass-Trak™ offers
a unique combination of convenience and
exceptional performance. Available in any range
from 0 to 10 sccm to 0 to 100 slpm, the Model 810-S with
its 316 stainless steel flow body is suitable for any clean
gas, including corrosives.
Mass-Trak's on-board display and local set point
potentiometer allows for adjustment of the command
signal from the face of the instrument enclosure and
eliminates the need for external readout/set point
electronics. The instrument also offers a switch-selectable
remote set point capability from either a 4–20 mA or
0–5 VDC command signal, which can be easily interfaced
with a process control system or workstation.
The instrument’s built-in, electromagnetic, servo-control
valve offers both a purge mode and a valve-close command
from an external contact, an accurate response to set point
changes and a .25% repeatability specification.
Designed to combine all the convenience of Sierra’s
Mass-Trak line with the durability of stainless steel, the
810-S is an excellent choice for a broad range of analytical,
process and OEM applications.
S
ISO
REGISTERED
9001
5 Harris Court, Bldg. L
Monterey, CA 93940
831-373-0200
800-866-0200
FAX: 831-373-4402
www.sierrainstruments.com
All dimensions are in inches with mm in parentheses. Certified drawings are available on request.
Model 810-S-L Side View
L
Model 810-S-L Outlet View
1.2
(30.4)
1.55
(39.3)
.98
(24.8)
5.2
(132.0)
4.7
(119.3)
Model 810-S-L Bottom View
.750
(19.0)
2.750
(69.8)
.12
(3.04)
.13
(3.3)
4.180
(106.1)
(B)6-32
(A)M4
B
A
A
B
Model 810-S-M Side View
L
Model 810-S-M Outlet View
1.2
(30.4)
1.97
(50)
1.45
(36.8)
5.67
(144)
4.93
(125.2)
Model 810-S-M Bottom View
B
(B)8-32
2.00
(50.8)
1.23
(31.2)
5.125
(130.1)
.23
(5.84)
1.00
(23.4)
(A)M6
B
A
A
Dimensional Specifications
LOW FLOW BODY
Compression VCO VCR
Compression VCO VCR
1/8 1/4 3/8 1/4 3/8 1/4 1/2
1/8 1/4 3/8 1/4 3/8 1/4 1/2
Dimension L (in)
6.02 6.18 6.28 5.78 6.18 6.08 6.08
MEDIUM FLOW BODY
Compression VCO VCR
Compression VCO VCR
1/4 3/8 1/2 1/4 3/8 1/4 1/2
1/4 3/8 1/2 1/4 3/8 1/4 1/2
Dimension L (in)
7.17 7.27 7.47 6.67 7.12 6.97 7.57
All dimensions are in inches with mm in parentheses. Certified drawings are available on request.
Low Flow Body
Low Flow Body
Medium Flow Body
Medium Flow Body
Operating Specifications
Gases
All clean gases; specify when ordering.
Mass Flow Rates
0 to 10 sccm to 0 to 100 slpm; flow ranges specified are for an equivalent
flow of nitrogen at 760 mm Hg and 21°C (70°F); other ranges in other
units are available (e.g., scfh or nm
3
/h)
Gas Pressure
500 psig (34 barg) maximum
Differential Pressure Requirement
Low-flow body: 5 to 100 psi (0.3 to 6.8) standard
30 psi optimum; lower or higher are available, consult factory
Medium flow body: 15-100 psi standard; 30 psi optimum;
lower or higher are available, consult factory
Gas & Ambient Temperature
32 to 122°F (0 to 50°C)
Leak Integrity
5 X 10
-9
atm cc/sec of helium maximum
(Not recommended for use as a positive shut-off valve)
Power Requirements
24 VDC ±10%, 340 mA, regulated. Ripple should not exceed
100mV peak-to peak
Control Range
Calibrated for 5–100% of full scale flow. Automatic shut-off at
2% (override available)
Output Signal
Linear 0–5 VDC, 2000 ohms minimum load resistance
Linear 4–20 mA, 1000 ohms maximum loop resistance
Command Signal
Local
. . . . . . . . . . . . .
Potentiometer
Remote
. . . . . . . . . . .
Switch selectable 0–5 VDC or 4–20 mA
Controls
Local set point potentiometer
Zero potentiometer
Valve is closed when power is off
Valve is closed when power is off
Display
3.5 digit LCD
Physical Specifications
Wetted Material
Wetted Material
316 stainless steel; 430F stainless steel; Viton
®
“O”-rings and valve seat
standard. Other elastomers are available. See following page or consult
factory.
Performance Specifications
Accuracy
± 1.5% of full scale including linearity over 60° to 80°F (15° to 25°C)
and ± 30 psig from calibration pressure
If the meter is mounted with a vertical (up or down) flow path
the following accuracy de-rating applies:
Notes: (1) Do not exceed 150 psig.
(2) Difference between inlet pressure and calibrated pressure. Do not exceed ± 10 psig.
Repeatability
± .25% of full scale
Temperature Coefficient
0.08% of full scale per °F (0.15% of full scale per °C), or better
Pressure Coefficient
0.01% of full scale per psi (0.15% of full scale per bar), or better
Response Time
800 ms time constant; six seconds (typical) to within
± 2% of final value over 25 to 100% of full scale
OPERATING PRESSURE
Inlet Pressure
Deviation
2
50 psig 100 psig 150 psig
1
± 1 psig ± 1.5% of ± 1.5% of ± 1.5% of
full scale full scale full scale
± 5 psig ± 3.8% of ± 4.5% of ± 5.3% of
full scale full scale full scale
± 10 psig ± 6% of ± 7.5% of ± 9% of
® Nylon, Viton, Neoprene, Kalrez, and Teflon are registered trademarks of DuPont.
Ordering the Model 810
PARENT NUMBER
810 -S
Mass Flow Controller
FLOW BODY
L
Low Flow (0-10 SCCM to 0-15 SLPM)
M
Medium Flow (0-15 to 0-100 SLPM)
DISPLAY
NR
No Readout
DR
3.5 Digit LCD Flow Rate Display
INLET/OUTLET FITTINGS
1
1/8-inch Compression
7
Not Used
2
1/4-inch Compression
8
1/4-inch VCR
3
3/8-inch Compression
9
1/2-inch VCR
4
1/2-inch Compression
10
6 mm Compression
5
1/4-inch VCO
11
10 mm Compression
6
1/2-inch VCO
12
12 mm Compression
FLOW BODY ELASTOMERS
OV1
Viton (Low, Medium Flow)
ON1
Neoprene (Low, Medium Flow)
OK1
Kalrez (Low Flow)
OK2
Kalrez (Medium Flow)
VALVE SEAT
SV1
Viton (Standard)
SN1
Neoprene or Equivalent
SK1
Kalrez or Equivalent
ST1
PFA Teflon or Equivalent
OUTPUT SIGNAL
V1
0-5 VDC, Linear
V4
4-20 mA, Linear
COMMAND SIGNAL
S1
0-5 VDC
S4
4-20 mA
OPTIONS
HP
High Pressure Calibration (Above 100 PSIG)
MP
Medium Pressure Calibration (40-100 PSIG)
LF
Low Flow Calibration (0–20 sccm or below)
GAS, FLOW RATE
810-S
810-S A 3M 10/03
CONNECTORS AND CABLES (
Consult Factory
)
ACCESSORIES (
Consult Factory
)
SIERRA INSTRUMENTS USA 5 Harris Court, Building L • Monterey, California • (800) 866-0200 • (831) 373-0200 • Fax (831) 373-4402 • www.sierrainstruments.com
SIERRA INSTRUMENTS b.v. Bijlmansweid 2 • 1934 RE Egmond a/d Hoef • The Netherlands • +31 (0) 72 5071400 • Fax +31 (0) 72 5071401
SIERRA INSTRUMENTS ASIA 100 Jiangnan Dadao, Zhong Guang Building, Suite 2303 • Guangzhou, P.R. China 510240 • 8620 3435 4870 • Fax 8620 3435 4872
100 Jiangnan Dadao, Zhong Guang Building, Suite 2303 • Guangzhou, P.R. China 510240 • 8620 3435 4870 • Fax 8620 3435 4872
10S 10/03
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